MHZ

(49) 29 26 40 12 67 (76) Misc.

MXS Series Air Slide Table

30 55 65 70 GA 16 16 16 16 51 61 109 159 KA NA 2 2 2 2 2 4 4 4 N 4 4 4 4 6 6 6 8 HA 40 40 40 50 30 70 70 70 G 16 16 16 16 21 26 39 19 H 40 40 40 50 30 35 35 35 NN 2 2 2 2 3 4 5 7 I 10 10 10 10 15 40 55 68 J 40 40 40 50 60 85 118 155 K 29 39 49 59 69 94 119 144 Z 75 75 75 85 100 150 198 248 M 76 76 76 86 101 151 199 249 ZZ 87 87 87 97 112 162 210 260 Note) Refer to "Dimensions" of MXS 16

Table of Contents

Many varieties (40 types) are available. One-touch fittings give the most efficient operation.

SMC

30 55 65 70 ZZ 107 107 107 117 132 182 230 280 M 76 76 76 86 101 151 199 249 Z 75 75 75 85 100 150 198 248 K 29 39 49 59 69 94 119 144 J 40 40 40 50 60 85 118 155 I 10 10 10 10 15 40 55 68 NN 2 2 2 2 3 4 5 7 H 40 40 40 50 30 35 35 35 G 16 16 16 16 21 26 39 19 N 4 4 4 4 6 6 6 8 HA 40 40 40 50 30 70 70 70 NA 2 2 2 2 2 4 4 4 GA 16 16 16 16 51 61 109 159 KA 125 173 223 13-/22-MXS16L-10 13-/22

TABLE OF CONTENTS

300) 200 (200) 150 (200) 100 (125) 100 35 (40) N.O.

2/3 Port Valve

Hz 50 20 11 60 17 7 50 40 18 60 35 12 50 50 21 60 45 17 Type Power Temp. High temp. water (D, E, N, P) (3) (3) (3) Inrush Holding Power Oil (Std.) Air (Std.) Water Vacuum (V, M) (Std.) AC VX21 80 60 99 120 183 60 60 60 AC DC Max. DC 60 40 40 40 40 Option Material (1) (2) Min. AC DC No.

CQS

X 45 l X 50 l X 55 l M5 X 30l X 35 l X 40 l X 45 l Model C Model C D 50 55 60 65 70 75 35 40 45 50 55 60 65 70 75 80 D 30 35 40 45 50 55 30 35 40 45 50 55 30 35 40 45 Special long bolt for through hole mounting is available as an option.

2–4

-30 -35 -40 -45 -50 -75 -100 CDQMB50-10 -15 -20 -25 -30 -35 -40 -45 -50 -75 -100 CDQMB12-5 -10 -15 -20 -25 -30 CDQMB16-5 -10 -15 -20 -25 -30 CDQMB20-5 -10 -15 -20 -25 -30 -35 -40 -45 -50 CDQMB25-5 -10 -15 -20 -25 -30 -35 -40 -45 -50 CDQMB32-5 -10 -15 -20 -25 -30 -35 -40 -45 -50 -75 -100 30 35 40 45 50 55 30 35 40 45 50 55 35 40 45 50 55 60 65 70 75 80 40 45 50 55 60 65 70 75 80 85 40 45 50

ZP

, 50) U ZP (40, 50) C ZP (40, 50) B ZP40D ZPT4-A6, A8 ZPT4-B6, B8 B01, N01 T01 ZP2-40UCL ZP2-50UCL P. 72 P. 73 Adapter Assembly Part No.

CG5-S

0.093 0.050 0.093 0.065 0.117 0.065 0.117 20 132 141 7 9 2 14 30 27.6 21 3 56.5 42 30 153 CG-E020SUS 25 8 137 7 9 2 14 30 27.6 21 3 56.5 42 30 158 146 CG-E020SUS 32 10 141 7 11 4 22 40 38.4 29 4 70.5 56 40 170 152 CG-E032SUS 40 10 159 7 11 4 22 40 38.4 29 4 70.5 56 40 188 170 CG-E032SUS 50 14 189 12 15 5 25 50 59.6 35 6 106.5 84 50 224 204 CG-E050SUS 63 14 189 12 15 5 25 50 59.6 35 6 106.5

CJ5-S

0.040 0.076 0.050 0.093 0.050 0.093 0.065 0.117 0.065 0.117 20 8 132 141 7 9 2 14 30 27.6 21 3 56.5 42 30 153 CG-E020SUS 25 8 137 7 9 2 14 30 27.6 21 3 56.5 42 30 158 146 CG-E020SUS 2032 10 141 7 11 4 22 40 38.4 29 4 70.5 56 40 170 152 CG-E032SUS 40 10 159 7 11 4 22 40 38.4 29 4 70.5 56 40 188 170 CG-E032SUS Data 50 14 189 12 15 5 25 50 59.6 35 6 106.5 84 50 224 204 CG-E050SUS 63 14 189

CJ5-S

0.040 0.076 0.050 0.093 0.050 0.093 0.065 0.117 0.065 0.117 20 8 132 141 7 9 2 14 30 27.6 21 3 56.5 42 30 153 CG-E020SUS 25 8 137 7 9 2 14 30 27.6 21 3 56.5 42 30 158 146 CG-E020SUS 2032 10 141 7 11 4 22 40 38.4 29 4 70.5 56 40 170 152 CG-E032SUS 40 10 159 7 11 4 22 40 38.4 29 4 70.5 56 40 188 170 CG-E032SUS Data 50 14 189 12 15 5 25 50 59.6 35 6 106.5 84 50 224 204 CG-E050SUS 63 14 189

CQM

-35 -40 -45 -50 CDQMB32-5 -10 -15 -20 -25 -30 -35 -40 -45 -50 -75 -100 30 35 40 45 50 55 30 35 40 45 50 55 35 40 45 50 55 60 65 70 75 80 40 45 50 55 60 65 70 75 80 85 40 45 50 55 60 65 70 75 80 85 110 135 45 50 55 60 65 70 75 80 85 90 115 140 55 60 65 70 75 80 85 90 95 120 145 M3 x 30 x 35 x 40 x 45 x 50 x 55 M3 x 30 x 35 x 40 x 45 x 50 x 55 M5 x 35 x 40 x 45 x 50 x 55 x 60 x 65 x 70 x 75

Compact Cylinder with Air Cushion

50, 63 80, 100 15, 20, 25, 30, 40, 50 20, 25, 30, 40, 50, 75, 100 30, 40, 50, 75, 100 40, 50, 75, 100 Manufacture of Intermediate Strokes Method Ordering Method Special body type Refer to "How to Order" for standard part numbers.

Micro Mechanical Valve Series VM1000

OFF 45 ON Max. 6 38 24.5 Symbol 3 port (A) 2 (A) 2 1.5 3 1.5 28 82 (110) 12 12 1 (P) R port (5 port only) 5 port (A) 2 (A) 2 12 12 1 (P) 3 (R) 3 (R) 32 16 40 R port (5 port only) 3 x 1/4 53.2 25 25 * 0.5 MPa supply 63.5 F .O.F .* 40 N T.T. 45 Foot pedal VM220-02-40A VM230-02-40A 3 x 6.5 mounting hole Symbol 2 port 54 71 (A) 2 152 12 10 159 1 (P) 177 3 port (A) 2 1/4 2(A) T.T. 12 10 1 (P)

CG5-S

83 13 25 8 137 146 7 9 2 14 30 27.6 21 3 56.5 42 30 158 CG-E020SUS 9 83 13 32 10 141 7 11 4 22 40 38.4 29 4 70.5 56 40 170 152 CG-E032SUS 11 85 15 40 10 159 7 11 4 22 40 38.4 29 4 70.5 56 40 188 170 CG-E032SUS 11 93 15 50 14 189 12 15 5 25 50 59.6 35 6 106.5 84 50 224 204 CG-E050SUS 15 109 21 63 14 189 12 15 5 25 50 59.6 35 6 106.5 84 50 224 204 CG-E050SUS 15 109 21 80 22 234 14 23 6 40 80

CLQ

Applicable bore size (mm) 20 25 32, 40 50, 63 80 100 t Applicable bore size (mm) Applicable snap ring 20 25 32, 40 50, 63 80 100 Part no.

Slider Type Ball Screw Drive/11-LEFS Series

16 20 24 0 10 20 30 40 50 0 0 2 4 6 8 10 12 14 16 0 10 20 30 40 50 60 Work load [kg] Work load [kg] Work load [kg] Work load [kg] 1000 1000 1000 1000 800 800 800 800 L6 L6 [mm] L6 [mm] L6 [mm] L6 [mm] 600 600 600 600 Z 400 400 400 400 200 200 200 200 0 0 4 8 12 16 20 24 0 0 0 0 2 4 6 8 10 12 14 16 0 10 20 30 40 50 0 10 20 30 40 50 60 Work load [kg] Work load [kg] Work load [kg] Work load

CLQ

2099 3729 5730 100 879 1079 1723 2341 4113 6239 32 40 50 63 80 100 Additional weight Unit: g 20 35 6 4 2 152 127 121 25 45 12 8 3 174 149 140 32 64 26 17 3 137 174 159 40 77 27 17 7 149 208 192 50 118 53 32 9 221 351 326 63 158 53 32 18 288 523 498 80 261 120 49 31 638 998 959 100 380 175 116 56 1009 1307 1251 Bore size (mm) Magnet Threads Nut Rod end male threads With rubber cushion Foot

CQS

Model C D 25 30 35 40 45 50 25 30 35 40 45 50 25 30 35 40 45 50 55 60 65 70 30 35 40 45 50 55 60 65 70 75 C' D' 30 35 40 45 50 55 30 35 40 45 50 55 30 35 40 45 50 55 60 65 70 75 35 40 45 50 55 60 65 70 75 80 Mounting bolt Mounting bolt CQSKB12-5D -10D -15D -20D -25D -30D CQSKB16-5D -10D -15D -20D -25D -30D CQSKB20-5D -10D -15D -20D -25D -30D -35D -40D -45D -50D CQSKB25-5D -10D -15D -20D -