VFS

For 30 type, common external pilot (on manifold side).

High Vacuum L Type Valve

Bonnet assembly/Part indication number (1) Temperature specifications Indicator Valve size 16 25 40 50 General use Without XLA16-30-1-2 XLA25-30-1-2 XLA40-30-1-2 XLA50-30-1-2 With XLA16A-30-1-2 XLA25A-30-1-2 XLA40A-30-1-2 XLA50A-30-1-2 High temperature Without XLA16-30-1H-2 XLA25-30-1H-2 XLA40-30-1H-2 XLA50-30-1H-2 With XLA16A-30-1H-2 XLA25A-30-1H-2 XLA40A-30-1H-2 XLA50A-30-1H-2 Temperature

XL-OMY0001

-1-2 XLA25-30-1-2 XLA40-30-1-2 XLA50-30-1-2 XLA16A-30-1-2 XLA25A-30-1-2 XLA40A-30-1-2 XLA50A-30-1-2 XLA16-30-1H-2 XLA25-30-1H-2 XLA40-30-1H-2 XLA50-30-1H-2 XLA16A-30-1H-2 XLA25A-30-1H-2 XLA40A-30-1H-2 XLA50A-30-1H-2 63 80 XLA63-30-1-2 XLA80-30-1-2 XLA63A-30-1-2 XLA80A-30-1-2 XLA63-30-1H-2 XLA80-30-1H-2 XLA63A-30-1H-2 XLA80A-30-1H-2 11,2 FKM:No.1349-80[ ]P8 XLA16A-30-1-2-XN1 2 M9

5 Port Air Operated Valve Series VFA3000 1

VR VH Body ported single solenoid Foot bracket VFA3122 F 02 VHS Body ported For 30 type manifold VFA3 1 0 3 02 Base mounted For 40 type manifold VFA3 1 0 4 02 Port size For 50 type manifold VFA3 1 50 W/o sub-plate (Pilot port: Rc) Nil W/o sub-plate (Pilot port: Other than Rc) Thread type for pilot port 00 For 60, 61,70, 71 manifold VFA3 1 0 6 02 02 03 1 4 3 8 Nil 00F 00N 00T Rc G NPT NPTF

70pvvna

H (Conduit terminal: T) VXA I (DIN terminal: D) VN Main port Rc A H I J K L M R B F G N S C P T D Q U E Model LVC VNA2-10A VNA2-15A VNA3-20A VNA4-25A 3 8 1 2 3 4 63 52 2.3 42 26 25 28 4.5 34 14 72.5 80.5 74.5 79.5 82.5 124 125.5 142.5 24.3 55 LVA 60.5 73 1 80 90 84 100 92 108 62 72 2.3 2.3 50 60 31 36 30 35 35 40 5.5 6.5 43 49 17.5 20 83.5 89.5 88.5 94.5 91.5 97.5 135.5 151.5 137 153 154

VNH

35 38 30 40 50 56 37 43 50.5 58.5 75 100 126 141 88 118 148 163 34 44.5 60.5 66.5 10.5 16 19.5 15.5 62 6 x 8 7 x 10 9 x 12 9 x 12 20 24 24 70 92 109 17-4-34 5 Series VNH High Pressure Coolant Valve 3.5 MPa, 7.0 MPa Precautions Be sure to read before handling.

Manifold Type: 30 (Top Ported Common EXH), Stations: 3 Stations, Passage: 1 (Type 30), Port Size: None, Thread Type: 00T (NPTF, Body Ported Types)

Manifold Type: 30 (Top Ported Common EXH), Stations: 7 Stations, Passage: 1 (Type 30), Port Size: None, Thread Type: 00T (NPTF, Body Ported Types)

Manifold Type: 30 (Top Ported Common EXH), Stations: 16 Stations, Passage: 1 (Type 30), Port Size: None, Thread Type: 00T (NPTF, Body Ported Types)

Manifold Type: 30 (Top Ported Common EXH), Stations: 5 Stations, Passage: 1 (Type 30), Port Size: None, Thread Type: 00T (NPTF, Body Ported Types)

Manifold Type: 30 (Top Ported Common EXH), Stations: 8 Stations, Passage: 1 (Type 30), Port Size: None, Thread Type: 00T (NPTF, Body Ported Types)

Manifold Type: 30 (Top Ported Common EXH), Stations: 12 Stations, Passage: 1 (Type 30), Port Size: None, Thread Type: 00T (NPTF, Body Ported Types)

Manifold Type: 30 (Top Ported Common EXH), Stations: 6 Stations, Passage: 1 (Type 30), Port Size: None, Thread Type: 00T (NPTF, Body Ported Types)

Manifold Type: 30 (Top Ported Common EXH), Stations: 2 Stations, Passage: 1 (Type 30), Port Size: None, Thread Type: 00T (NPTF, Body Ported Types)

Manifold Type: 30 (Top Ported Common EXH), Stations: 4 Stations, Passage: 1 (Type 30), Port Size: None, Thread Type: 00T (NPTF, Body Ported Types)

MY1

30 30 Data 20 20 20 1.

Compact Cylinder Series CQS

Cylinder model C Mounting bolt size M3 x 25L x 30L M3 x 25L x 30L M5 x 25L x 30L M5 x 30L x 35L D 25 30 25 30 25 30 30 35 CQSB12-5S -10S CQSB16-5S -10S CQSB20-5S -10S CQSB25-5S -10S 6.5 6.5 Single acting, Spring return Single acting, Spring extend CUJ 6.5 Mounting bolt Mounting bolt CU 8.5 CQS Single Acting, Spring Extend Cylinder model Mounting bolt size C D 25 30 25 30 25 30 30 35 CQ2 CQSB12

VCL

66.5 68 99 VCB31 86 30 50 1/2 15 13.5 36.5 32 25 23 M5 8 24 80 46 71 101 71 68 104 22 45 90 1/4, 3/8 17 41 11 M5 36 22.5 23 8 26 84 48 74.5 103 74.5 70 107 VCB41 30 50 94 1/2 41 13.5 17 M5 36 25 23 8 26 88 48 78.5 103 78.5 70 111.5 35 60 102 3/4 17.5 17 41 36 30 28.2 M5 8 26 96 48 86.5 103 86.5 70 119 332 Direct Operated 2 Port Solenoid Valve For Steam Series VCS Series VC How to Order Valves

90

ZK2(Ejector System) 100 90 80 70 60 50 40 30 20 10 0 0 5 10 15 20 25 30 Suction flow [L/min (ANR)] 0.5 40 Release flow [L/min (ANR)] Vacuum pressure [kPa] Supply pressure [MPa] 0.4 0.35 0.3 30 20 0.2 10 0 0 1 2 3 4 5 6 7 8 9 10 Needle opening [Number of rotations] The actual suction flow at the point of suction varies depending on the piping conditions to the vacuum port.

Series VC, Direct Operated, 2 Port Solenoid Valve for Water, Series VCW

36.5 13.5 15 32 25 23 M5 24 59 46 57 60 54.5 48.5 101 57 68 1/2 22 45 89 41 11 17 36 22.5 23 M5 26 64.5 48 62.5 62 60 50.5 103 62.5 70 1/4, 3/8 VCW41 30 50 93.5 41 13.5 17 36 25 23 M5 26 66.5 48 64.5 62 62 50.5 103 64.5 70 1/2 35 60 101 41 17.5 17 36 30 28.2 M5 26 70 48 68 62 65.5 50.5 103 68 70 3/4 4 Direct Operated 2Port for Water Series VCW Dimensions (N.O.)