High Vacuum Angle Valve, XL Series

B A Series XLA (mm) B mm Model Weight kg (lb) A mm Conductance l/s 40 XLA-16 XLA-25 XLA-40 XLA-50 Little heavy metal contamination The valve does not contain heavy metals such as Ni (nickel) or Cr (chrome) and a low sputtering yield also helps to minimize heavy metal contamination of semiconductor wafers. 103 0.25 (0.55) 5 50 113 0.45 (0.99) 14 65 158 1.1 (2.43) 45 70 170 1.6 (3.53) 80

VK300

1/8 R port: Rc 1/8 01 Nil None 1 station Port size Nil Rc G NPT NPTF CE-compliant F With bracket (Not mounted) F N T 01 Rc 1 8 20 20 stations Q CE-compliant Nil A port: Rc 1/8 Note) Applicable only for DIN terminal type Type 42: Base mounted (A port side ported) Applicable solenoid valve VK334-(-Q) How to Order VV3K3 05 01 42 Applicable blanking plate assembly VK300-42-1A Thread type

VK300

-1A Bracket VK300-43-1A VG VV3K3 05 40 01 VP P port: Rc 1/8 Thread type Option Valve stations S070 R port: Rc 1/8 01 Nil None 1 station Port size Nil Rc G NPT NPTF F With bracket (Not mounted) VQ F N T 01 Rc 1 8 20 20 stations A port: Rc 1/8 VKF Type 42: Base mounted (A port side ported) How to Order Applicable solenoid valve VK334Applicable blanking plate assembly VK300-42-1A VQZ VV3K3

Prevents Micro-Bubbles

Removal of drainage Flush drainage from filters regularly. 17-5-42

2–4

HS A B Reed switch Solid state switch D-A7 H D-A80H D-F7 D-J79 D-F7 W D-J79W D-F7BAL D-F7 F D-F7NTL 32, 40, 50 (mm) D-F7 D-J79 D-F7 W D-F79F D-J79W D-F7BAL D-F7LF D-A7 H D-A80H D-F7NTL Auto switch model A B Hs 9.5 13.5 11.5 Symbol A B Hs A B Hs A B Hs 32 40 50 32.5 36 42 10.5 13 16 13.5 17.5 15.5 32.5 36 42 11.5 14 17 14.5 18.5 16.5 32.5 36 42 32.5 36 42 6.5 9 12 6.5 9 12 9.5 13.5 11.5 Bore

CQM

HS A B Reed switch D-A7H D-A80H Solid state switch D-F7 D-J79 D-F7W D-J79W D-F7BAL D-F79F D-F7NTL 32/40/50 (mm) D-F7 D-J79 D-F7 W D-F79F D-J79W D-F7BAL D-A7 H D-A80H D-F7NTL Auto switch model A B Hs 9.5 13.5 11.5 Symbol A B Hs A B Hs 32 40 50 32.5 36 42 11.5 14 17 14.5 18.5 16.5 32.5 36 42 32.5 36 42 6.5 9 12 6.5 9 12 9.5 13.5 11.5 Bore size (mm) Solid state switch D-P5DW A B HS (mm) D-P5DW

Integrated Controller

Refer to the specific product precautions (Handling) in the Web Catalog when mounting end brackets such as knuckle joint or workpieces. 16 13 12 16 5 14 24.5 14 M8 x 1.25 25 22 20.5 20 8 17 38 23.5 M14 x 1.5 32 22 20.5 25 8 22 42 23.5 M14 x 1.5 The L1 measurement is when the unit is in the original position. At this position, 2 mm at the end.

3 Port Direct Operated Poppet Solenoid Valve Series VKF300 1

stations 01 Nil 1 station None VZ Bracket VK300-43-1A With bracket (Not mounted) F 20 20 stations VS 2(A) port: Rc 1/8 Port size 01 Rc 1/8 VFN Type 42: Base mounted (A port side ported) How to Order Applicable solenoid valve VKF334Applicable blanking plate assembly VK300-42-1A VV3KF3 05 01 42 Solenoid direction Port size 01 C4 C6 Rc 1/8 4 cassette 6 cassette Solenoid on opposite A port

Compact Cylinder with Air Cushion Series RQ

A A1 E1 L1 MM U1 L M8 x 1.25 M10 x 1.25 M14 x 1.5 M18 x 1.5 16 Y-G02 Y-G03 Y-G04 Y-G05 34 41 42 56 8.5 10.5 14 18 16 20 22 28 25 30 30 40 10.3 12.8 12 16 11.5 14 14 20 34 41 42 56 8.5 16 25 30 30 40 M8 x 1.25 10.3 11.5 21 I-G02 I-G03 I-G04 I-G05 8 10 18 22 8 10 10 14 8 10 18 22 8 10 10 14 IY-G02 IY-G03 IY-G04 IY-G05 +0.058 0 +0.4 +0.2 0.2 0.4 +0.058 0 20 10.5 12.8 14 25.6 20 M10 x 1.25 +0.058

3 Port Direct Operated Poppet, Solenoid Valve, Series VKF300

20 Port A: Rc(PT) 1/8 Port size 01 Rc(PT) 1/8 Type 42/for base mounted type (Port A side ported) How to Order Applicable solenoid valves VKF334Applicable blanking plate assembly VK300-42-1A VV3KF3 05 01 42 Solenoid direction Port size Rc(PT) 1/8 4 cassette 6 cassette 01 C4 C6 Solenoid on side opposite port A Nil Port P: Rc(PT) 1/8 Port R: Rc(PT) 1/8 Port A: Rc(PT) 1/8 Solenoid on same side

VKF300

20 Port A: Rc(PT) 1/8 Port size 01 Rc(PT) 1/8 Type 42/for base mounted type (Port A side ported) How to Order Applicable solenoid valves VKF334Applicable blanking plate assembly VK300-42-1A VV3KF3 05 01 42 Solenoid direction Port size Rc(PT) 1/8 4 cassette 6 cassette 01 C4 C6 Solenoid on side opposite port A Nil Port P: Rc(PT) 1/8 Port R: Rc(PT) 1/8 Port A: Rc(PT) 1/8 Solenoid on same side

PA300/500/700

Note Symbol 1P Common Common 3R Common Individual 1 Type 41 Type 42 VHS 3 VV3PA3-42-053-02 Stations 02 2 stations ... ... 20 20 stations To order valves and blank plate assembly mounted onto the manifold, list valves and blanking plate assembly with manifold base part number.

Tie-rod Type Low Pressure Hydraulic Cylinder Double Acting/Double Rod Series CHAW

9 174 140 45 38 36 22 28 17 38 M33 x 2 40 3/4 94 159 12 43 36 (mm) Bore size (mm) Z ZZ TT TX TY TZ V W 40 123 246 24 70 65 95 7.5 8 50 131 262 26 83 78 108 10 9 63 140 280 26 90 86 115 12 10 80 156 312 36 112 106 162 16 13 100 170 340 42 140 130 204 20 16 125 170 340 42 170 162 234 20 16 160 187.5 375 52 212 200 284 24 20 111 Tie-rod Type Low Pressure Hydraulic Cylinder Double Acting/Double

NVJ100, NVJ300, NVJ3000 3,5 Port Solenoid Valve/Rubber Seal Type

Manifolds,"Side Ported Type 41 Type S41 Type 42 1o-32No'n{Msf ,!!L 10-32 No.n, (i,ts) Common EXH. Manifolds,,/Side Ported Type S32 .4 1 r ! t I I I I I I Common EXH. Manifolds,,/Side Ported Common EXH. Manifold,/ Top Ported The EXH.

VQ5000

Hirose Electric Company 2-M2.6 x 0.45 55 Socket side 1425 113 Terminal Nos. 47.04 How to Order Manifolds F 03 U K VV5Q 5 1 1 Option 08 Series Option None Exhaust cleaner for Rc1: D side exhaust Exhaust cleaner for Rc1 1/2: D side exhaust Exhaust cleaner for Rc1: U side exhaust Exhaust cleaner for Rc1 1/2: U side exhaust Symbol 5 VQ5000 Nil CD1 CD2 CU1 CU2 K Note3) Cable length Manifold type

o

Manifolds,"Side Ported Type 41 Type S41 Type 42 1o-32No'n{Msf ,!!L 10-32 No.n, (i,ts) Common EXH. Manifolds,,/Side Ported Type S32 .4 1 r ! t I I I I I I Common EXH. Manifolds,,/Side Ported Common EXH. Manifold,/ Top Ported The EXH.

o

Manifolds,"Side Ported Type 41 Type S41 Type 42 1o-32No'n{Msf ,!!L 10-32 No.n, (i,ts) Common EXH. Manifolds,,/Side Ported Type S32 .4 1 r ! t I I I I I I Common EXH. Manifolds,,/Side Ported Common EXH. Manifold,/ Top Ported The EXH.

Compressed Air Preparation Filter

3.2 52.5 AMK60-D 1 90 299.1 32 45 30 45 70 66 40.5 11 13 113 3.2 52.5 Semi-standard specifications Metal bowl B AMK20-D 139.1 AMK30-D 167 AMK40-D 212.4 AMK50-D AMK60-D Model Accessories Sold Separately/ International Standard Specific Product Precautions 24 AFF/AM/AMD/AMK Series Modular Connection Example (Dimensions) Products do not come assembled.

Stroke Reading Cylinder and Counter

Auto Switch Mounting Height (mm) D-A7H D-A80H D-F7 D-J79 D-F7W D-J79W D-F7BA D-F79F D-F7NT Auto switch model D-F7V D-F7WV D-F7BAV D-J79C D-A79W D-A9V D-M9V D-M9WV D-M9AV D-A7 D-A80 D-A73C D-A80C Bore size (mm) U 20.5 25.5 27 30.5 36.5 40 U 20.5 25.5 29 32.5 38.5 42 U 20.5 25.5 32.5 36 42 48.5 U 26.5 31.5 38.5 42 48 54.5 U 23 28 35 38.5 44.5 51 U 26 31 38 41.5 47.5 54 U 22 27 34 37.5 43.5

51

NA P ZZ Z RR S TE TF TH TT TV TW TX TY TZ CA2 20 25 32 40 50 63 112 120 129 141 176 186 91 99 105 113 144 149 Up to 200 CD-G02 CD-G25 CD-G03 CD-G04 CD-G05 CD-G06 24 29 35.5 44 55 69 M5 x 0.8 M5 x 0.8 Rc1/8 Rc1/8 Rc1/4 Rc1/4 11 13 15 18 20 22 57 60 62 62 84 84 10 10 10 10 20 20 5.5 5.5 6.6 6.6 9 11 25 30 35 40 50 60 3.2 3.2 4.5 4.5 6 8 (35.8) (39.8) (49.4) (58.4) (72.4) (90.4) 42 42 48 56