End Lock Cylinder Series CBG1

Clevis type/CBG1D 20 to 50 Clevis type (mm) With rear lock/H With front lockR Bore size (mm) Z ZZ Z ZZ Without rod boot With rod boot Without rod boot With rod boot Without rod boot With rod boot Without rod boot With rod boot 150 + l 171 + l 149 + l 170 + l 20 130 151 129 150 159 + l 180 + l 158 + l 179 + l 25 137 158 136 157 163 + l 187 + l 163 + l 187 + l 32 141 165 141 165 184 + l 212

LECA6_C

. 46 11.5 . 47 11.6 . 47 12. . 48 12.1 . 48 12.2 . 49 13. /. 53 14 /. 54 141. . 54 142. 55 143. . 56 144. . 57 145. . 58 146. . 58 15. . 59 15.1. /. 59 15.2 . 59 15.3. 61 15.4 . 61 15.5 . 62 15.6 . 62 15.7 . 62 16. . 63 16.1 . 63 16.2 . 65 3 - LECA6 Series/ 1.

Precision Cylinder Series MTS ø8, ø12, ø16, ø20, ø25, ø32, ø40 Cylinder with ball spline MXH MXU MXS MXQ MXF MXW MXJ MXP MXY MTS

Operating pressure (MPa) Bore size (mm) Operating direction Piston area (mm2) 0.2 10 8 23 17 40 30 63 47 98 72 161 121 251 188 0.4 20 15 45 34 80 60 126 94 196 143 322 241 502 377 0.3 15 11 34 25 60 45 94 71 147 107 241 181 377 283 0.7 35 26 79 59 141 105 220 165 343 251 563 422 879 659 0.6 30 22 68 50 121 90 188 141 294 215 482 362 754 565 0.5 25 19 57 42 101 75 157 118 245 179 402 302 628

Non-rotating Double Double Power Power Cylinder Cylinder (without Series MGZ Series MGZR non-rotating mechanism)

50 59.5 79 6 7.5 9.5 11.5 14 11 14 19 24 30 11 13.5 16 20 22 22 27 32 41 46 0.75 1 1.25 2 2.5 6000 11000 18000 28000 54000 1300 3100 5000 7900 15300 Individual -X 443 Series MGZR Minimum Stroke for Mounting (mm) 20 25 32 40 50 63 80 Model No. of auto switches 2 pcs.

70pvpump

(Refer to page 17-5-141.) Mount with the bottom (foot hole or mounting hole side) facing down. Since the reciprocal motion of the diaphragm propagates, the mounting bolts should be tightened securely. Furthermore, in cases where the propagation of vibration is not acceptable, insert vibro-isolating rubber when mounting.

C85

side trunnion: U (40) 51 35 25 32 0.7 64 DSeries CS1 only W Series C85: 20, 25 W 37 24 35 17 22 0.3 47 -X 100.0 T 27 18 26 12 16 0.5 35 2022 14 21 10 13 0.7 28 Foot: L Rod side flange: F Head side flange: G (100) (40) (40) (40) (40) (100) 0.3 Data Lateral load applied to the rod end fR (N) L (40) (40) (40) (40) (100) 89 0.5 W W W F 10.0 (40) (40) (40) 74 36 0.7 93 (40) 54 37 26 33 0.3 69 G 41

17

A0.2 D (mm) MGPM MGPL/A Hexagon socket head cap screw 50 56 72 82 98 106 130 142 180 210 Bore size (mm) A (mm) B (mm) C (mm) M4 x 0.7 M5 x 0.8 M5 x 0.8 M6 x 1.0 M8 x 1.25 M8 x 1.25 M10 x 1.5 M10 x 1.5 M12 x 1.75 M14 x 2.0 8 10 12 15 18 18 22 22 28 33 12 16 20 25 32 40 50 63 80 100 10 12 14 18 22 22 27 27 33 39 41 46 54 64 78 86 110 124 156 188 18 22 24 30 34 40 46 58 54 62 5.

ZP3

Form w 1 Material e Buffer spec. r Buffer stroke t Vacuum inlet A Width across flats 10 3 34.5 15 11 6 41 18 14.5 10 51 22 20.5 N S U F GN GS J K ZP3 T 10 13 16 B B5 15 59 40.5 10 20 66.5 48 JB K Dimensions Per Vacuum Inlet: One-touch Fitting 1.82 Bellows Type with Ribs Model D E F Fitting part min. hole size Fitting part no. Vacuum inlet direction q Pad dia.

Non-rotating Double Power Cylinder/ Double Power Cylinder (without non-rotating mechanism) Series MGZ/MGZR ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

(MPa) Bore size (mm) Model Rod size (mm) Operating Bore size (mm) 50 80 63 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.9 1.0 726 236 1085 378 1621 603 2533 942 3848 1473 5945 2313 9715 3770 20 x 25 20 25 x 30 25 36 x 32 32 45 x 40 40 55 x 50 50 68 x 63 63 87 x 80 80 OUT IN OUT IN OUT IN OUT IN OUT IN OUT IN OUT IN 145 218 290 363 436 508 581 653 726 MGZ20 10 Foot MGZ-L05 MGZ-L06 MGZ-L08 47 71 94 118 141

MTS

Operating pressure (MPa) Bore size (mm) Operating direction Piston area (mm2) 0.2 0.3 0.4 0.5 0.6 0.7 OUT IN OUT IN OUT IN OUT IN OUT IN OUT IN OUT IN 35 26 79 59 141 105 220 165 343 251 563 422 879 659 30 22 68 50 121 90 188 141 294 215 482 362 754 565 25 19 57 42 101 75 157 118 245 179 402 302 628 471 20 15 45 34 80 60 126 94 196 143 322 241 502 377 15 11 34 25 60 45 94 71 147 107 241 181

Table of Contents

(mm) Model Connection thread M5 x 0.8 L1 KQ2ZF04-M5 9.8 19.5 21 11 15.5 15.5 22 17 22 22 20 29.5 29.5 16.5 25.5 25.5 35 27 35 35 39 39 42 M5 x 0.8 8 21 21 47 32 49 54 8 4 10.4 16 10.4 1 8 1 8 1 4 1 8 1 4 1 4 3 8 3 8 1 2 KQ2ZF04-01S 13.4 14 KQ2ZF06-01S 13.4 22 14 6 12.8 17 12.8 KQ2ZF06-02S 41 20.6 25.5 19 D1 L3 L2 KQ2ZF08-01S 31 41 41 17 20.6 27 17.6 25.5 8 15.2 18.5 15.2 KQ2ZF08-02S 19

Modular/F.R.L. Units Series AC

123 29 43 24 33 5.5 7 14 161 160 41 4 194 166 186 41 57 35 7 7 14 161 160 41 4 194 166 186 41 57 35 7 9 18 195 194 50 4 226 200 220 48 75 40 9 9 18 195 194 50 4.6 226 200 220 48 80 40 9 11 20 272 271 70 6.4 303 276 296 60 96 50 11 11 20 287 286 70 6.4 318 292 312 60 96 50 11 11 20 288 287 70 6.4 319 293 313 60 101 50 11 Note) For the AC20 only, the position of the pressure gauge is

AC

Q R Model Port size A B C D M P N B B E F G H J K L 1/8, 1/4 1/4, 3/8 124.5 153 153 188 3.3 4.3 0.8 0.8 80 80 80 105 140 181 181 238 38 38 38 41 40 48 53 70 147.5 56.8 60.8 60.8 65.5 30 41 41 50 50 64 64 84 24 35 35 40 5.5 7 7 9 8.5 11 11 13 5 7 7 7 22 34.2 34.2 42.2 50 70.5 70.5 88 23 26 26 33 AC2001 AC2501 AC3001 AC4001 194 194 229 1/4, 3/8 1/4, 3/8, 1/2 Option marks in the dimension diagram

AC Servo Motor Driver

The life of battery is five years from the production date regardless of the connection. (2) Configuration Positioning module I/O module QD75 QX40 41 42 QY40 41 42 50 A1SD75 AX40 41 42 AY40 41 42 FX2N-1GP FX2N-10PG FX2N-10GM FX2N-20GM FX2N(c) series FX3U(c) series Programmable controller Servo amplifier PC or PLC...etc Driver QD75 etc.

Air Fittings & Tubing

Kl 9.8 19.5 20 16.5 21 11 KQ2ZF04-M5 8 21 24 47 32 49 54 M5 X 0.8 8 10.4 16 10.4 4 13.4 1 8 1 8 1 4 1 8 1 4 1 4 3 8 3 8 1 2 15.5 29.5 25.5 KQ2ZF04-01S 14 Ml 15.5 22 17 22 22 29.5 25.5 35 27 35 35 39 39 42 KQ2ZF06-01S 13.4 22 14 6 12.8 17 12.8 41 KQ2ZF06-02S 20.6 25.5 19 31 41 41 17 KQ2ZF08-01S 17.6 25.5 Hl 8 15.2 15.2 18.5 19 19 22 22 24 KQ2ZF08-02S 20.6 27 KQ2ZF10-02S 20.6 29 Dl

SX

-05-C6 One-touch fitting (Inch size) Symbol Port size Applicable series One-touch fitting for 5/32" N3 SX3000 One-touch fitting for 1/4" N7 SS5X3-41-05-C6 1 set (Type 41, 5-station manifold base part no.)

KJ

(mm) Model Connection thread M5 x 0.8 L1 KQ2ZF04-M5 9.8 19.5 21 11 15.5 15.5 22 17 22 22 20 29.5 29.5 16.5 25.5 25.5 35 27 35 35 39 39 42 M5 x 0.8 8 21 21 47 32 49 54 8 4 10.4 16 10.4 1 8 1 8 1 4 1 8 1 4 1 4 3 8 3 8 1 2 KQ2ZF04-01S 13.4 14 KQ2ZF06-01S 13.4 22 14 6 12.8 17 12.8 KQ2ZF06-02S 41 20.6 25.5 19 D1 L3 L2 KQ2ZF08-01S 31 41 41 17 20.6 27 17.6 25.5 8 15.2 18.5 15.2 KQ2ZF08-02S 19

Modular F.R.L. Unit

123 36 80 126 55 57 41 35 14 7 71 28.5 7 4 64 0 194 153 38 80 167 55 57 41 35 14 7 7 4 71 66 30.5 3.5 194 153 38 80 167 72.5 75 50 40 18 9 9 4 88 74 35 3.5 226 187 40 105 220 77.5 80 50 40 18 9 88 35 9 4.6 74 3 226 187 38 105 235 93 96 70 50 20 11 115 44.5 11 6.4 84 3.3 303 264 43 105 282 98 96 70 50 20 11 11 6.4 117.5 84 44.5 3.3 318 279 45 105 292 98 101 70 50 20 11 11 6.4 117.5

KQ2

19 41 41 19 20 42 69 30 47 74 69 76 147 72 78 149 Applicable tubing 9.6 10 17.5 1 8 42.5 36.6 43 37.1 43.5 39.6 46 47.4 42.6 49 50.4 55.5 56.9 63.6 57.5 58.9 65.6 16 3 10.4 10 18 5 32 16.5 3.5 11.4 10 19.5 3 16 1 4 17 4.6 13.2 10 20.5 5 16 18.5 6 15.2 12 23.5 17.46 3 8 21 7 17.9 17 25.5 Connection thread (with sealant) 22.23 9 17.46 1 2 9.6 22 21.7 17 28 22.23 Reference dimensions after

Modular F.R.L. Unit

5.5 3.2 65 2 Note 1) 123 36 60 126 55 57 41 35 0 14 7 7 4 71 64 28.5 194 153 38 80 167 55 57 41 35 3.5 194 14 7 7 4 71 66 30.5 153 38 80 167 72.5 75 50 40 3.5 226 18 9 88 35 9 4 74 187 40 110 220 77.5 80 50 40 18 9 88 35 3 226 9 4.6 74 187 38 110 235 93 96 70 50 3.3 20 11 11 6.4 115 84 44.5 303 264 43 110 282 98 96 70 50 3.3 318 20 11 11 6.4 117.5 84 44.5 279 45 110 292 98 101 70 50