MQQ

Y I 4-N through M 0.2 D E L B + Stroke K A + Stroke M 0.2 E 25, 28 H effective thread depth C 2-Rc 1/8 F Q Y 2 x 4-OA effective depth RA 2 x 4-OB Depth of counter bore RB J I 4-N through M 0.2 D W E K L B + Stroke M 0.2 A + Stroke E (mm) Bore size (mm) Stroke range (mm) OA A B C D E F H RB I J K L M N OB Q RA W Y M4 x 0.7 4 14.5 7 5 M3 x 0.5 10 to 40 39.5 31.5 6 6 29 5.5 10 38 5 8 20 3.5

Electric Actuator/Slider Type

3 q u t y u o A !9 r e @0 !0 !2 !5 !6 !4 i A w A-A Component Parts No. Description Material Note No.

TABLE OF CONTENTS

A valve, which might potentially cause a hum or buzz can be very annoying to a patient, so a full wave rectified unit for AC service is often preferred. A DC unit, not requiring a rectifier, is sometimes used in specific applications. Also common is a bumper in a 2-way valve, usually just a flat disk with no sealing action.

JXCx-OMX0009

Brown 2 A B-1 A A-1 Red 1 Cable lehgth (L) Orange 6 B B-2 8 8m B A-2 Yellow 5 Green 3 COM-A/COM B-3 A 10m COM-B/ A-3 Blue 4 B 15m Shield (3) Cable color Terminal No. C 20m Vcc B-4 Brown 12 GND A-4 Black 13 A B-5 Red 7 produced upon recipt of A A-5 Black 6 order B B-6 Orange 9 B A-6 Black 8 Only Robotic type cable 3 can be selected.

Vacuum

Connection Rc 1/4 02 a a connection Bc 3/8 03 a Connection Rc 1/2 04 a Brackel B C C C t . : . !

Vacuum

Connection Rc 1/4 02 a a connection Bc 3/8 03 a Connection Rc 1/2 04 a Brackel B C C C t . : . !

Compact Vacuum Ejector Series ZA

G The lead-wire length for a valve with a lead-wire is 300 mm. When in need of a valve with a lead-wire longer than 600 mm, place an order for a valve without a connector and connector assembly.

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

3 q u t y u o A !9 r e @0 !0 !2 !5 !6 !4 i A w A-A Component Parts No. Description Material Note No.

AC Servo Motor Driver

1 A Q a q 0 0 1 0 2 STX DC2 2 B R b r 0 0 1 1 3 ETX DC3 # 3 C S c s 0 1 0 0 4 $ 4 D T d t 0 1 0 1 5 5 E U e u 0 1 1 0 6 & 6 F V f v 0 1 1 1 7 7 G W g w 1 0 0 0 8 ( 8 H X h x 1 0 0 1 9 ) 9 I Y i y 1 0 1 0 10 : J Z j z 1 0 1 1 11 ; K [ k { 1 1 0 0 12 , L l | 1 1 0 1 13 M ] m } 1 1 1 0 14 . N ^ n 1 1 1 1 15 / ?

Low Maintenance Filter Series FN1

135 180 4-11 225 (266) (60) AIR VENT G 1/4 q q A (43) OUT IN e e 150 r B t 120 327 188 (519) w w 84 OUT 2-R 1 r IN 53 DRAIN G 1/4 Note Parts list Dimensions (mm) A B No.

Series VC, Series VCB, Direct Operated 2 Port Solenoid Valve for Heated Water

entry P Port size Model Grommet: G Conduit: C Conduit terminal: T M L K H F E D C B N A U S R Q R Q R Q M4 12.8 14 28 12.5 6.5 31 64 28 4.5 13.5 83 66 50 99 50 44 59 22 1/8 VCB21 M4 12.8 18 28 12.5 8.5 31 67.5 36 6 18 86 66 53 99 53 44 62 22 1/4 M5 19 20 32 15 11 36.5 81.5 40 8 22 99 68 66.5 101 66.5 46 76 24 1/4, 3/8 VCB31 M5 23 25 32 15 13.5 36.5 86 50 8 30 104 68 71 101 71 46 80 24 1/

5 Port Solenoid Valve SY Series

(B) 4 2 JIS Symbol 2 position single u r w y q e (EB) 3 (EA) 5 (P) 1 t 2 position double JIS Symbol 2 position double (A) (B) 4 2 q w y u r (P) 1 (EB) 3 (EA) 5 t 3 Position Closed center / Exhaust center / Pressure center JIS Symbol 3 position closed center (A) (B) 4 2 q w y u r 3 position exhaust center 3 position pressure center (EB) 3 (EA) 5 (P) 1 t (This figure shows a closed center

HRX-OM-Q026

HRX-OM-Q026-V Operation Manual Installation Operation Original Instructions Thermo Chiller HRSH Series HRSH100-A-20HRSH100-A-40HRSH100-A-20-S HRSH150-A-20HRSH150-A-40HRSH150-A-20-S HRSH200-A-20HRSH200-A-40HRSH200-A-20-S HRSH250-A-20HRSH250-A-40HRSH250-A-20-S HRSH300-A-20HRSH300-A-40HRSH100-W-20HRSH100-W-40HRSH100-W-20-S HRSH150-W-20HRSH150-W-40HRSH150-W-20-S HRSH200-W-20HRSH200-W-40HRSH200

Air-hydro Unit

Suitable for slow operation of a rotary actuator. CC CC Integrate a converter and a valve unit in a compact configuration. Possible to select 4 types of valve units for applications. Possible to connect a converter and a valve unit independently. Wide range of series in terms of converter capacity and valve unit flow rate control capability.

Air Suction Filter Series ZF Prevent from occurring vacuum equipment trouble due to ZA dust from vacuum pad ZX Port size ZR Air flow Filtration Series Features Page (μm) Applicable tubing O.D. (l/min(ANR)) ZM Screw-in for one-touch fittings ZMA ZQ ZFA 

Note 2) Do not use in a line where a pressurized condition is maintained since the body may be damaged. Note 3) Polyurethane is only applicable for the ZFC050-02. SP ZCUK Made to Order (Refer to page 1115 for details.)

Guide Cylinder Series MGG

5 #9 #6 q t #8 !4 !7 @2 @3 @4 r y e #7 u o !1 i w !8 #4 !6 A @1 @0 !9 !0 #2 $0 A' Ball bushing bearing #5 @5 #0 @8 @6 !7 !0 @1 !3 #8 !2 @9 MGJ Slide bearing y MGP Long stroke 100 MGQ @7 MGG 80, 100 View A-A MGC Component Parts Component Parts MGF Note Material Description No.

AC Servo Motor Driver (Network card type ）

stop (e.g. a large load is mounted on a carrier). 7 14 7.

Modular F.R.L. Units

AD17-A AD27-A AD37-A AD47-A Spacer Y100-A Y200-A Y300-A Y400-A Y500-A Y600-A Spacer with bracket Y100T-A Y200T-A Y300T-A Y400T-A Y500T-A Y600T-A Check valve 5 6 AKM2000-01-A (02)-A AKM3000-(01)-A 02-A AKM4000-(02)-A 03-A Pressure switch 6 IS10M-20-A IS10M-30-A IS10M-40-A IS10M-50-A IS10M-60-A T-spacer 5 6 Y110-M5-A Y210-01-A (02)-A Y310-(01)-A 02-A Y410-(02)-A 03-A Y510-(02)-A 03-A Y610

Modular F.R.L. Units

Y500T-A Y200-A Y200T-A AKM2000-01-A (02)-A IS10M-20-A Y210-01-A (02)-A Check valve Note 2) Note 3) Pressure switch Note 3) IS10M-50-A Y510-(02)-A 03-A T-shaped spacer Note 2) Note 3) VHS20-01A 02A VHS30-02A 03A 3-port valve for residual pressure release Note 3) VHS40-06A 01-A E200-02-A 03-A 02 E300-03-A 04 E500-06-A Piping adapter Note 3) 01-A IS10E-2002-A 03-A 02-A IS10E-3003-A 04-A Pressure

Modular Design with Uniform Body Style

30 D q 03 e DE Option/Semi-standard: Select one each for a to j.