Modular F.R.L. Units

AD17-A AD27-A AD37-A AD47-A Spacer Y100-A Y200-A Y300-A Y400-A Y500-A Y600-A Spacer with bracket Y100T-A Y200T-A Y300T-A Y400T-A Y500T-A Y600T-A Check valve 5 6 AKM2000-01-A (02)-A AKM3000-(01)-A 02-A AKM4000-(02)-A 03-A Pressure switch 6 IS10M-20-A IS10M-30-A IS10M-40-A IS10M-50-A IS10M-60-A T-spacer 5 6 Y110-M5-A Y210-01-A (02)-A Y310-(01)-A 02-A Y410-(02)-A 03-A Y510-(02)-A 03-A Y610

Modular F.R.L. Units

Y500T-A Y200-A Y200T-A AKM2000-01-A (02)-A IS10M-20-A Y210-01-A (02)-A Check valve Note 2) Note 3) Pressure switch Note 3) IS10M-50-A Y510-(02)-A 03-A T-shaped spacer Note 2) Note 3) VHS20-01A 02A VHS30-02A 03A 3-port valve for residual pressure release Note 3) VHS40-06A 01-A E200-02-A 03-A 02 E300-03-A 04 E500-06-A Piping adapter Note 3) 01-A IS10E-2002-A 03-A 02-A IS10E-3003-A 04-A Pressure

Compact 5-Port Solenoid Valve

e r w q e r w 5 (EA) 4 (A) 3 (EB) 2 (B) 1 (P) 2-position single 2-position double (A)4 2(B) (A)4 2(B) 3(EB) (EA)5 1 3(EB) (EA)5 1 (P) (P) 4-position dual 3-port valve 3-position closed center/exhaust center/pressure center q e r w q e r w 3-position closed center 3-position exhaust center 4-position dual 3-port valve N.C. valve x 2 pcs.

0.4

w e q w VQC1100 VQC1101 (B) 2 (A) 4 (B) 2 (A) 4 r r 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) e q w e w q VQC1200 VQC1201 (B) 2 (A) 4 (B) 2 (A) 4 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) r r e q w e q w VQC1301 VQC1401 VQC1300 VQC1400 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) VQC1500 VQC1501 r r (B) 2 (A) 4

Table of Contents

This can cause a loss of holding force and malfunction. AS2201F-01-06-X214 AS2301F-01-06-X214 RS H A AS2201F-01-06-X214 AS2301F-01-06-X214 AS2201F-02-06-X214 AS2301F-02-06-X214 RZQ 3. When disassembling to replace the seals and wear ring, refer to the separate disassembly instructions. AS3201F-02-08-X214 AS3301F-02-08-X214 AS3201F-02-08-X214 AS3301F-02-08-X214 MI W S 4.

VFR

Thread type Piping port (P, A, B, EA, EB port) Nil Rc G F 06 10 1 3 4 N NPT NPTF T 3-5-95 96 Series VFR6000 Construction 2 position single 2 position double VFR620 VFR610 (B) (A) 4 2 (B) (A) 4 2 (EA)(P)(EB) 5 1 3 (EA) (P) (EB) 5 1 3 !1 u q t q e i e !1 i u !

VFS

1, Metal joint q, w, Gasket A e, Guard !3 End plate (U side) assembly !1 AXT625-2A-20 End plate (U) !1, Metal joint q, w, Gasket A e, Guard !3 AXT625-2A-10 End plate (U) !1, Metal joint q, w, Gasket A e, Guard !3 AXT625-3A End plate (D) !2, Metal joint q, w, Gasket B r, Guard !3, Steel ball End plate (D side) assembly !2 AXT625-3A-20 End plate (D) !

5 Port Solenoid Valve

4 (A) 1 (P) 2 (B) 3 (R2) t u Dual 3-Port: S07B0 A Plug-in Manifold Stacking Base C i r e w q y r S07A0 4 (A) 2 (B) 5 (R1) 1 (P) 3 (R2) N.C. + N.C.

Modular F.R.L. Unit

-4004 03 04 04 with piping adapter 06 Note 6) Y24-01 Y34-01 Y34-01 Y44-02 Y54-03 Cross interface Y14-M5 02 02 02 03 04 Note 1) in part numbers for a round pressure gauge indicates a type of connection thread.

42

) 1 (P) 5 (R1) 3 (R2) e q w q w (A) 4 (B) 2 (A) 4 (B) 2 VQ5200 VQ5201 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) e r q w e r q w (A) 4 (B) 2 (A) 4 (B) 2 VQ5301 VQ5401 (A) 4 (B) 2 (A) 4 (B) 2 VQ5300 VQ5400 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) (A) 4 (B) 2 VQ5500 (A) 4 (B) 2 VQ5501 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) Component Parts Component Parts

Proposals for Energy Saving

06 VM230-02-06S Polyacetal roller Hard steel roller Cross roller plunger VM230-02-07 VM230-02-07S Toggle lever VM230-02-08 VM-30AR Red VM230-02-30R VM230-02-30B VM230-02-30G VM230-02-30Y Push button (Mushroom) VM-30AB Black VM-30AG Green VM-30AY Yellow VM-32AR Red VM230-02-32R VM230-02-32B VM230-02-32G VM230-02-32Y Push button (Extended) VM-32AB Black VM-32AG Green VM-32AY Yellow A set of

V

E S V Q Z 1 0 0 0 / 2 0 0 0 / 3 0 0 0 P O R T P L U G S E R I E S V Q Z 1 0 0 0 / 2 0 0 0 / 3 0 0 0 E X H P O R T S I L E N C E R PORT PLUG VVQZ100-CP (FOR VQZ1000/VQZ2000) VVQZ2000-CP (FOR VQZ3000) SILENCER IS INSTALLED IN THE EXH PORT USED TO BLOCK AN UNUSED CYLINDER PORT WHEN USING A 4 WAY VALVE AS A 3 WAY VALVE SILENCER P/N TYPE AN110-01 VQZ1000 AN200-02 VQZ2000 AN200-02 VQZ3000 O T

Modular Design with Uniform Body Style

30 D q 03 e DE Option/Semi-standard: Select one each for a to j.

KJ

Connection L2 M d A Effective area (mm2) Weight (g) L1 thread R Model 1 8 1 4 1 8 1 4 3 8 1 8 1 4 3 8 1 8 1 4 3 8 1 4 3 8 1 2 1 4 3 8 1 2 1 4 3 8 1 2 1 4 3 8 1 2 KFH04-01 KFH04-02 KFH06-01 KFH06-02 KFH06-03 KFH08U-01 KFH08U-02 KFH08U-03 KFH08N-01 KFH08N-02 KFH08N-03 KFH10U-02 KFH10U-03 KFH10U-04 KFH10N-02 KFH10N-03 KFH10N-04 KFH12U-02 KFH12U-03 KFH12U-04 KFH12N-02 KFH12N-03 KFH12N-04 10 10

Modular F.R.L. Unit

06 IS1000E-30 IS1000E-30 02 03 04 IS1000E-20 01 02 03 Note 6) Pressure switch with piping adapter 02 03 04 IS1000E-40 Note 6) Y24-01 02 Y34-01 02 Y34-01 02 Y44-02 03 Y54-03 04 Y14-M5 Cross interface Note 1) in part numbers for a round pressure gauge indicates a type of connection thread.

VM

VM220-02-30B VM-30AG Green VM220-02-30G VM-30AY Yellow VM220-02-30Y VM220-02-32R VM230-02-32R VM230-02-32B VM230-02-32G VM230-02-32Y VM-32AR Red Push button (Extended) VM-32AB Black VM220-02-32B VM-32AG Green VM220-02-32G VM-32AY Yellow VM220-02-32Y With a set of red, black, green, yellow VM-33A Push button (Flush) VM220-02-33 VM230-02-33 VM230-02-34R VM230-02-34B VM230-02-34G VM230-02-34Y

Vacuum System Peripherals:

(mm ) 0 2 4 M V VX311 -01 1.5 ZCU 0.29 0 2 4 M V VX312 -01 2.2 1 8 0.60 AMJ 0 2 4 M V VX313 -01 3 0.82 Misc. 0 2 4 M V VX311 -02 1.5 0.29 0 2 4 M V VX312 -02 0.60 M V VX3224 -02 2.2 0.64 M V VX3324 -02 0 2 4 M V 0.82 VX313 -02 1 4 Series VX31 Series VX32 Series VX33 M V 3 VX3234 -02 1.1 M V VX3334 -02 M V 4 VX3244 -02 1.6 M V VX3344 -02 M V VX3224 -03 2.2 0.64 M V VX3324 -03 M V VX3234 -03

Direct Operated

Upstr eam press ure of v av e Downstream pressure of valve (P2) MPa Subsonic Critical pressure Sonic Flow rate Q l/min (ANR) For Water How to read the graph When a water flow of 2 l/min is generated, P 0.033 MPa for a 3 orifice (VX313), P 0.088 MPa for a 2.2 orifice (VX312), and P 0.31 MPa for a 1.5 orifice (VX311).

60

VXK2122-02 VXK2-02 VXK2322-02 VXK2132-02 VXK2232-02 VXK2332-02 VXK2242-02 VXK2342-02 VXK2-03 VXK2322-03 VXK2232-03 VXK2332-03 VXK2242-03 VXK2342-03 VXK2110-01 VXK2120-01 VXK2130-01 VXK2110-02 VXK2120-02 VXK2220-02 VXK2320-02 VXK2130-02 VXK2230-02 VXK2330-02 VXK2240-02 VXK2340-02 VXK2250-02 VXK2350-02 VXK2220-03 VXK2320-03 VXK2230-03 VXK2330-03 VXK2240-03 VXK2340-03 VXK2250-03 VXK2350-03

Direct Operated 2 Port Solenoid Valve For Water, Oil, Steam, Air Series VX21/22/23 1

VX2122-02 VX2-02 VX2322-02 VX2132-02 VX2232-02 VX2332-02 VX2242-02 VX2342-02 VX2-03 VX2322-03 VX2232-03 VX2332-03 VX2242-03 VX2342-03 VX2110-01 VX2120-01 VX2130-01 VX2110-02 VX2120-02 VX2220-02 VX2320-02 VX2130-02 VX2230-02 VX2330-02 VX2240-02 VX2340-02 VX2250-02 VX2350-02 VX2260-02 VX2360-02 VX2220-03 VX2320-03 VX2230-03 VX2330-03 VX2240-03 VX2340-03 VX2250-03 VX2350-03 VX2260-03 VX2360