Stations: 5 Stations, Exhaust Style: Common Exhaust, A Port Size: 1/8 Common Exhaust/Individual Exhaust, Thread: G

Stations: 20 Stations, Exhaust Style: Common Exhaust, A Port Size: 1/8 Common Exhaust/Individual Exhaust, Thread: NPTF

Stations: 11 Stations, Exhaust Style: Common Exhaust, A Port Size: 1/8 Common Exhaust/Individual Exhaust, Thread: NPT

Stations: 14 Stations, Exhaust Style: Common Exhaust, A Port Size: 1/8 Common Exhaust/Individual Exhaust, Thread: NPTF

Stations: 14 Stations, Exhaust Style: Individual Exhaust, A Port Size: 1/8 Common Exhaust/Individual Exhaust, Thread: NPTF

Stations: 4 Stations, Exhaust Style: Common Exhaust, A Port Size: 1/8 Common Exhaust/Individual Exhaust, Thread: G

Stations: 16 Stations, Exhaust Style: Individual Exhaust, A Port Size: 1/4 Individual Exhaust, Thread: NPT

Stations: 16 Stations, Exhaust Style: Common Exhaust, A Port Size: 1/8 Common Exhaust/Individual Exhaust, Thread: NPT

High Vacuum L Type Valve

Valve size Valve size Material 63 80 Standard AS568-043V AS568-045V External seal (4) Special AS568-043 AS568-045 Standard AS568-233V B2401-V85V Valve seal 1 (2) Special AS568-233 B2401-V85 Valve seal 2 (3) Standard B2401-P8V B2401-P10V Special B2401-P8 B2401-P10 Note 1) Add the seal material symbol shown on page 8 at the end of the model number (in place of ).

High Vacuum L Type Valve

AS568-030 AS568-035 AS568-039 Standard B2401-V15V B2401-V24V B2401-P42V AS568-227V Valve seal 1 (2) Special B2401-V15 B2401-V24 B2401-P42 AS568-227 Standard B2401-P4V B2401-P5V B2401-P6V B2401-P8V Valve seal 2 (3) Special B2401-P4 B2401-P5 B2401-P6 B2401-P8 Description Valve size Valve size Material Part indication No. 63 80 Standard AS568-043V AS568-045V External seal (4) Special AS568-043

XL-OMV0005

AS568-025 AS568-030 AS568-035 AS568-039 Nut assembly (9) SUS304 XL1A16-10-1 XL1A25-10-1 XL1A40-10-1 XL1A50-10-1 Description Valve size Valve size Material Part indication No. 63 80 Standard AS568-233V B2401-V85V Valve seal 1 (2) Special AS568-233 B2401-V85 Valve seal 2 Standard B2401-P8V B2401-P10V (3) Special B2401-P8 B2401-P10 Standard AS568-043V AS568-045V External seal (4) Special AS568-043

High Vacuum L Type Valve

AS568-030 AS568-035 AS568-039 Standard B2401-V15V B2401-V24V B2401-P42V AS568-227V Valve seal 1 (2) Special B2401-V15 B2401-V24 B2401-P42 AS568-227 Standard B2401-P4V B2401-P5V B2401-P6V B2401-P8V Valve seal 2 (3) Special B2401-P4 B2401-P5 B2401-P6 B2401-P8 Description Valve size Valve size Material Part indication No. 63 80 Standard AS568-043V AS568-045V External seal (4) Special AS568-043

XLA Series

Material 63 80 100 160 Standard AS568-043V AS568-045V AS568-050V AS568-167V Exterior seal (3) Specific AS568-043 ** AS568-045 ** AS568-050 ** AS568-167 ** Standard AS568-233V B2401-V85V AS568-349V B2401-G155V Valve seal (2) Specific AS568-233 ** B2401-V85 ** AS568-349 ** B2401-G155 ** Note1) List the optional seal material symbol after the model number, except for the standard sealant material

XLA- ∗ -F7NJ ∗ - ∗ Series

Material Valve seal (2) Standard B2401-V15V B2401-V24V B2401-P42V AS568-227V Valve size 63 80 100 160 Specific AS568-043 ** AS568-045 ** AS568-050 ** AS568-167 ** Standard AS568-043V AS568-045V AS568-050V AS568-167V Exterior seal (3) Specific AS568-233 ** B2401-V85 ** AS568-349 ** B2401-G155 ** Valve seal (2) Standard AS568-233V B2401-V85V AS568-349V B2401-G155V Note1) List the optional sealant

XL-OMV0002

XLC63-30-1H-1 XLC80-30-1H-1 XLC100-30-1H-1 XLC160-30-1H-1 1) M9// 2 (FKM:No.1349-80) XLC16-30-1-M9//-XN1 3)Assy / 16 25 40 50 AS568-025V AS568-030V AS568-035V AS568-039V AS568-025 ** AS568-030 ** AS568-035 ** AS568-039 ** B2401-V15V B2401-V24V B2401-P42V AS568-227V B2401-V15 ** B2401-V24 ** B2401-P42 ** AS568-227 ** 63 80 100 160 AS568-043V AS568-045V AS568-050V AS568-167V AS568-043

XLDV Series

Material 63 80 100 160 Standard AS568-043V AS568-045V AS568-050V AS568-167V External seal 3 Specific AS568-043** AS568-045** AS568-050** AS568-167** Standard AS568-233V B2401-V85V AS568-349V B2401-G155V Valve seal 2 Specific AS568-233** B2401-V85** AS568-349** B2401-G155** Standard XLD80-2-9-3A XLD80-2-9-3A XLD100-2-9-3A XLD160-2-9-1A S valve seal assembly 4 Specific Note1) List the optional

XMC/XYC Series

Material 63 80 Standard AS568-043V AS568-045V External seal 3 Specific AS568-043 ** AS568-045 ** Standard AS568-233V B2401-V85V Valve seal 2 Specific AS568-233 ** B2401-V85 ** Note1) List the optional seal material symbol after the model number, except for the standard seal material (FKM: compound no. 1349-80). Note2) Refer to the Construction on the page 8 for the construction numbers.

XMD/XYD Series

Material 25 40 50 63 80 Standard AS568-030V AS568-035V AS568-039V AS568-043V AS568-045V External seal (3) Specific AS568-030 ** AS568-035 ** AS568-039 ** AS568-043 ** AS568-045 ** Standard B2401-V24V B2401-P42V AS568-227V AS568-233V B2401-V85V Valve seal (2) Specific B2401-V24 ** B2401-P42 ** AS568-227 ** AS568-233 ** B2401-V85 ** Standard XLD40-2-9-1A XLD50-2-9-1A XLD63-2-9-1A XLD80-2-9-

High Vacuum L Type Valve

AS568-030 AS568-035 AS568-039 Standard B2401-V15V B2401-V24V B2401-P42V AS568-227V Valve seal 1 (2) Special B2401-V15 B2401-V24 B2401-P42 AS568-227 Standard B2401-P4V B2401-P5V B2401-P6V B2401-P8V Valve seal 2 (3) Special B2401-P4 B2401-P5 B2401-P6 B2401-P8 Description Valve size Valve size Material Part indication No. 63 80 Standard AS568-043V AS568-045V External seal (4) Special AS568-043

High Vacuum L Type Valve

Material 63 80 100 160 Exterior seal (3) Standard AS568-043V AS568-045V AS568-050V AS568-167V Specific AS568-043 ** AS568-045 ** AS568-050 ** AS568-167 ** Valve seal (2) Standard AS568-233V B2401-V85V AS568-349V B2401-G155V Specific AS568-233 ** B2401-V85 ** AS568-349 ** B2401-G155 ** S Valve seal Standard XLD63-2-9-1A XLD80-2-9-1A XLD100-2-9-1A XLD160-2-9-1A Specific XLD63-2-9-1A ** XLD80