C85

5.5 17 38 22 6 12 9 16 14 9.5 16 19.7 20 M22 x 1.5 G 1/8 M8 x 1.25 24 8.2 62 32 11 126 6 115 13 11 8.5 95 20 44 24 8 16 12 22 17 8 8 11.5(13) 15(17) 15(17) 20 28 8 25 M22 x 1.5 G 1/8 M10 x 1.25 30 65 32 11 137 8 126 17 11 104 22 50 28 10 16 12 22 20 8 8 11.5(13) 15(17) 15(17) 10.5 10.2 22 33.5 ( ): In the case of air cushion.

Air Slide Table Series MXQ

17 21 0.04 6 8 13 17 25 29 Note 1) For caution on handling the one with buffer mechanism,refer to page 132.

Modular F.R.L. Units

13 13 13 13 13 1 Drain guide is NPT1/8 (applicable to the AF20-A) and NPT1/4 (applicable to the AF30-A to AF60-A).

Rubber seal Series 10-SYJ3000/5000/7000 4/5 port solenoid valve

22 (Station n) (Station 1) 11 (Pitch) P = 10.5 12.5 4.5 41.5[48.5] + + + + + (Station 1) (Station n) 26.1 A A 13 10 41.5[48.5] (Pitch) P = 10.5 13.5 M3 x 0.5 (A port) A A 13 10 (Pitch) P = 10.5 11.5 M3 x 0.5 (A port) L plug connector (L) M plug connector (M) M8 connector (WO) Approx. 300 (Lead wire length) 41.5[48.5] 26.1 46 28.5 52.6[59.6] Approx. 300 (Lead wire length) 58.7[60.9] 48.9[

Series 10-SZ3000 5 Port Solenoid Valve Cassette Type Manifold

Internal Pilot Manifold L Dimension n: Stations L n 2 110.5 100 86 12 3 123 112.5 96.5 13 4 135.5 125 107 14 5 148 137.5 117.5 15 6 160.5 150 128 16 7 173 162.5 138.5 17 8 173 162.5 149 12 9 185.5 175 159.5 13 10 198 187.5 170 14 11 210.5 200 180.5 15 12 223 212.5 191 16 13 235.5 225 201.5 17 14 235.5 225 212 12 15 248 237.5 222.5 13 16 260.5 250 233 14 17 273 262.5 243.5 15 18 285.5 275

CY1

13 15 19 23 23 NN M20 x 1.5 M26 x 1.5 M26 x 1.5 M32 x 2.0 F 13 13 16 16 2 2 Model CY1B20 CY1B25 CY1B32 CY1B40 CY1B50 CY1B63 Port size Rc(PT)1/8 Rc(PT)1/8 Rc(PT)1/8 Rc(PT)1/4 Rc(PT)1/4 Rc(PT)1/4 0.007 0.037 0.007 0.043 Q x R M8 x 1.25 x 16 M10 x 1.5 x 16 TC x R M12 x 1.25 x 7.5 M14 x 1.5 x 11.5 S 106 111 124 150 176 188 TB 14 14 W 50 50 50 60 60 70 X 25 30 40 40 60 70 ZZ 132 137 156

VQC

B 24 25 19 12 13 C6 (EXH port) 6 One-touch fitting COM 13 Connector terminal no. Standard manifolds are for double wiring, but mixed wiring (single and double wiring) can be specified as options.

Sine Cylinder Series REC

10.5 10 41 8 13 20 NANote) 0 -0.033 0 -0.033 0 -0.039 25 37.5 5.5 8 6 22 19.5 32 13 10.5 10 45 10 17 26 32 32 46.5 5.5 10 6 22 19.5 32 13 10.5 11 45 12 17 26 40 56.2 7 12 8 24 21 41 16 13.5 12.5 50 14 22 32 Note) For 32, a trunnion pivot bracket NA (42.5) is used as standard.

Cylinder with Lock Series MNB

19.5 12 13 54 32 to 500 22 17 6 1/8 8.5 10 46 97 45.5 12 32.5 83 13 13 30 27 16 13 63 40 to 500 30 22 8 1/8 10 14 52 104 52.5 12 38 91 14 16.5 35 32 20 14 75 50 to 600 35 27 11 1/4 12.5 18 65 120.5 58.5 15 46.5 104.5 15.5 19 40 32 20 14 90 63 to 600 35 27 11 1/4 17.5 18 75 134.5 68 12 56.5 119.5 16.5 23 45 37 25 20 102 80 to 750 40 32 13 1/4 22 22 95 169 81 18 72 150 19 33 45 37 30 20 116

Sine Cylinder Series REC

10.5 10 41 8 13 20 NANote) 0 -0.033 0 -0.033 0 -0.039 25 37.5 5.5 8 6 22 19.5 32 13 10.5 10 45 10 17 26 32 32 46.5 5.5 10 6 22 19.5 32 13 10.5 11 45 12 17 26 40 56.2 7 12 8 24 21 41 16 13.5 12.5 50 14 22 32 Note) For 32, a trunnion pivot bracket NA (42.5) is used as standard.

Sine Cylinder Series REC

10.5 10 41 8 13 20 NANote) 0 -0.033 0 -0.033 0 -0.039 25 37.5 5.5 8 6 22 19.5 32 13 10.5 10 45 10 17 26 32 32 46.5 5.5 10 6 22 19.5 32 13 10.5 11 45 12 17 26 40 56.2 7 12 8 24 21 41 16 13.5 12.5 50 14 22 32 Note) For 32, a trunnion pivot bracket NA (42.5) is used as standard.

CNA

JIS B 4636 CLS 10 40 2 point angle socket 10 JIS B 1181 Class 3 M8 x 1.25 JIS B 4636 13 2 point angle socket 13 50 JIS B 4636 CLQ 13 2 point angle socket 13 JIS B 4636 JIS B 4636 JIS B 1181 Class 3 M10 x 1.25 MLGP 63 17 13 2 point angle socket 17 2 point angle socket 13 4. Allow at least 0.5 seconds from a locked stop (intermediate stop of the cylinder) until release of the lock.

CNA

JIS B 4636 CLS 10 40 2 point angle socket 10 JIS B 1181 Class 3 M8 x 1.25 JIS B 4636 13 2 point angle socket 13 50 JIS B 4636 CLQ 13 2 point angle socket 13 JIS B 4636 JIS B 4636 JIS B 1181 Class 3 M10 x 1.25 MLGP 63 17 13 2 point angle socket 17 2 point angle socket 13 4. Allow at least 0.5 seconds from a locked stop (intermediate stop of the cylinder) until release of the lock.

7ND9071en

L+ 12 NOTE 8 (SOL2) Ex i Barrier 13 L+ (SOL PWR1) (SOL PWR2) TOP SW+ TOP SW BTM SW+ BTM SW Ui (Vmax) Ii (Imax) Pi (Pmax) Li Ci L 14 L 13 NOTE 8 L+ L 14 16 L+ 14 Uo (Voc) Ui (Vmax) Io (Isc) Ii (Imax) Po Pi (Pmax) 15 L 15 16 L+ L+ 16 17 L L+ 18 Notes 1.

Electric Slide Tables

Shield Brown Black Red Black Orange Black 12 13 7 6 9 8 3 Vcc GND A A B B B-4 A-4 B-5 A-5 B-6 A-6 Connector B terminal no.

MLU

13 13 13 CLS Different side(s) 20 Same side 75 D-A79W 13 13 14 14 2 pcs. 1 pc. 5 5 10 5 15 10 15 15 D-F7, J79 D-F7V, J79C D-F7W, F7WV D-J79W, F7NTL D-F7BAL, F7BAVL D-F79F CLQ 20 Only size 40 and 50 can be mounted. 6.5 7 6.5 6.5 MLGP RLQ D-P5DWL 5 5 Hysteresis specifications are given as a guide, it is not a guaranteed range.

HRX-OM-X084

8.4.1 Replacing Particle Filters .8-13 8.4.2 Replacing the DI filter (Option DM) .8-13 8.5 Electrical schematic diagram . 8-16 8.5.1 HRR010-A/W-10.8-16 8.5.2 HRR010-A/W-20.8-18 Chapter 9 Documents . 9-1 9.1 Specifications . 9-1 9.1.1 HRR010-A-10/20. 9-1 9.1.2 HRR010-W-10/20. 9-3 9.1.3 Refrigerant with GWP reference . 9-5 9.1.4 Communication specification . 9-5 9.2 Outline dimensions . 9-

IDX-OM-W026

T 13-1 . 13-1 13-2 . 13-1 13-3 . 13-1 13-4 . 13-2 13-5 . 13-2 13-6 . 13-3 14 14-1 . 14-1 2 IDX-OM-W026 i i i-1 () 3 i 1 1 3 IDF Series i-1 i-1 IDX-OM-W026 i i-2 5 i 2 1 IDF Series i-2 i-2 IDX-OM-W026 i i 2 2 i 2 3 50 i 2 4 i 2 5 0 IDF Series i-2 i-3 IDX-OM-W026 i i 2 6 WARNING !

Step Motor Controller

Shield 12 13 7 6 9 8 3 B-4 A-4 B-5 A-5 B-6 A-6 Brown Black Red Black Orange Black Vcc GND A A B B Connector B terminal no.

Battery-less

140.5 32 20 to 100 220 263 128 13 60 69.5 25 51 56.5 M8 x 1.25 31 22 18.5 40 M6 x 1 10 60 61 8.5 1 73.5 116.5 32 101 to 500 250 293 158 40 20 to 100 242 285 128 13 60 69.5 25 51 56.5 M8 x 1.25 31 22 18.5 40 M6 x 1 10 60 61 8.5 1 95.5 138.5 32 101 to 500 272 315 158 6 Refer to page 70.