CY1

L LD M MM N P Q QW T TC W WP WS X Y Z PW Model CY1RG10 38 3.5 4 M3 x 0.5 4.5 M5 x 0.8 68 14 17.5 14 20 13 8 15 39.5 76 26 CY1RG15 53 4.3 5 M4 x 0.7 6 M5 x 0.8 84 18 19 17 25 16 7 18 54.5 94 32 Rc(PT) 1/8 Rc(PT) 1/8 Rc(PT) 1/8 Rc(PT) 1/4 Rc(PT) 1/4 Rc(PT) 1/4 CY1RG20 62 5.6 5 M4 x 0.7 7 95 17 20.5 20 40 19 7 22 64 107 38 CY1RG25 70 5.6 6 M5 x 0.8 6.5 105 20 21.5 22.5 40 21.5 7 28 72 117 43

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

Note 4) M5 fittings for M5 thread are attached without being incorporated.

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

Note 4) M5 fittings for M5 thread are attached without being incorporated.

CRQ2

L2 max Y Y Y Y Y Size 10 15 20 30 40 (mm) Q2 Size 20 30 40 M3, M4 M3, M4, M5, M6 M4, M5, M6, M8 11-8-18 19 Simple Specials Series CRQ2 -XA31 to XA46 Symbol: A39 Symbol: A40 Symbol: A41 Shaft with through-hole Minimum machining diameter for d1 is 0.1 mm.

MXS

Model *1) * A B C D E E1 F G H K L M N J P Q MGF MXS 8 MXS12 MXS16 MXS20 MXS25 MXS-BT 8 38 23 12.5 14 40.8 5 8 12 1.4 16.6 7 15.5 14.6 M8 X 1 M3 X 12 M3 X 16 MXS-BT12 45 31 18 14 40.8 6 8 12 1.4 20.5 10 15 18.5 M8 X 1 M4 X 8 M4 X 15 CY1 MXS-BT16 55 37 23.5 16 46.7 7 10 14 1.4 23 12 18.5 21 M10 X 1 M5 X 10 M5 X 18 MXS-BT20 70 47 29 23 67.3 11 12 19 12 27 13 25.5 25 M14 X 1.5 M5 X 12 M6 X 25

0.4

D side U side Stations n 8 7 6 5 4 3 2 1 C8 [3(R) EXH port] C8: 8 One-touch fitting DIN rail clamp screw R R 25 40.7 B B B B B B B B X X P P 7.7 18.7 (12) A A A A A A A A 9.3 (7.5) P = 10.5 31.5 18 C8 [1(P) SUP port] C8: 8 One-touch fitting C3, C4, C6, M5 [4(A), 2(B) port] C3: 3.2 One-touch fitting C4: 4 One-touch fitting C6: 6 One-touch fitting M5: M5 thread With ejector unit: Formula L1

Series 10-SV1000/2000/3000/4000 5 Port Solenoid Valve

10-SV200(R)-W-02 18 19 9.5 73.3 17 61.1 17 2 x 4.3 (For mounting) M5 x 0.8 (Pilot EXH port) 15.5 15.5 48 9.3 4 A B SMC A B 35 A B PE X EA P EB Manual override 56 5.3 A side: Orange B side: Green (Light/surge voltage suppressor) M5 x 0.8 (External pilot port) 108.5 (L = 300 to 5000) 102.9 M12 waterproof connector 51 22 9.5 18 18 4.5 4.5 1/4 (Piping port) 28 3 position

VQC

With 4 (5/32") One-touch fitting C4 (N3) Cylinder port sizes Note 3) Side port C6 (N7) With 6 (1/4") One-touch fitting Side port Side port M5 M5 thread Dual flow fitting VVQ1000-52A-C8 Single wiring Special wiring Note 4) specifications Double wiring Description/Model Stations 2 1 3 4 12 13 14 15 16 17 18 19 20 21 22 23 24 11 10 9 8 7 6 5 Note 1) Indicate the shutoff position.

Modular Design with Uniform Body Style

*18 *18 *18 *18 *1 Drain guide is NPT1/8 (applicable to the AC20-D) and NPT1/4 (applicable to the AC30-D to AC60-D).

Series SV

18 solenoids possible.)

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

Applicable shaft types: S, W, Y d1 = Q1 = M L2 + (3 x P) L1 = L2 = (mm) Size 30 50 63 80 100 Q2 = M Thread M3 x 0.5 M5 x 0.8 M6 x 1 M8 x 1.25 M10 x 1.5 M12 x 1.75 Rc1/8 Rc 1/4 2.5 4 5 4 5 6.8 (mm) (mm) d1 Size 30 50 63 80 100 100 Q2 M3, M4 M4, M5, M6 M4, M5, M6 M4, M5, M6, M8 M5, M6, M8, M10 Size 30 50 63 80 100 100 6.8 8.5 10.3 8 6.8 8.5 10.3 8 11 2.5 4 to 7 4.5 to 18 6.8 to 11 6.8 to 13

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

Applicable shaft types: S, W, Y d1 = Q1 = M L2 + (3 x P) L1 = L2 = (mm) Size 30 50 63 80 100 Q2 = M Thread M3 x 0.5 M5 x 0.8 M6 x 1 M8 x 1.25 M10 x 1.5 M12 x 1.75 Rc1/8 Rc 1/4 2.5 4 5 4 5 6.8 (mm) (mm) d1 Size 30 50 63 80 100 100 Q2 M3, M4 M4, M5, M6 M4, M5, M6 M4, M5, M6, M8 M5, M6, M8, M10 Size 30 50 63 80 100 100 6.8 8.5 10.3 8 6.8 8.5 10.3 8 11 2.5 4 to 7 4.5 to 18 6.8 to 11 6.8 to 13

Battery-less

[mm] Size Stroke range [mm] A B C D EH EV H J K L M O1 R S T T2 U V X2 Y Without lock With lock 16 10 to 100 101 90.5 10 16 34 34.3 M5 x 0.8 18 14 10.5 25.5 M4 x 0.7 7 35 90.5 0.5 28 100.5 145.5 22.5 101 to 300 121 110.5 25 15 to 100 130.5 116 13 20 44 45.5 M8 x 1.25 24 17 14.5 34 M5 x 0.8 8 46 92 7.5 1 42 88.5 129 26.5 101 to 400 155.5 141 32 20 to 100 148.5 130 13 25 51 56.5 M8 x 1.25

CG5-S

(mm) Bore size (mm) Stroke range A P AL B1 B2 BM BZ C D E1 F1 GA GB H H1 I J K KA M MM NA S ZZ 20 to 350 1/8 18 15.5 13 7 M4 x 0.7 9 16.5 8 15 3 18 12 35 5 31 M4 x 0.7 depth 7 5 6 3 M8 x 1.25 29 83 118 25 to 400 1/8 22 19.5 17 8 M5 x 0.8 9.5 18.5 10 17 3 18 12 40 6 33 M5 x 0.8 depth 8 5.5 8 3.5 M10 x 1.25 29 83 123 32 to 450 1/8 22 19.5 17 8 M5 x 0.8 9.5 20 12 19 3 18 12 40 6 38 M5 x 0.8

smcmaintenancepartslist

Model Hexagon socket head cap screw Fe Ni Tightening torque (Nm) Model Hexagon socket head cap screw Fe Ni Tightening torque (Nm) MXS6 MXQ6 0.5 0.5 M2.5 x 6 M2.5 x 6 MXS8 MXQ8 0.9 0.9 M3 x 6 M3 x 6 MXS12 MXQ12 2.1 2.1 M4 x 10 M4 x 8 MXS16 MXQ16 M5 x 12 M5 x 10 4.3 4.3 MXS20 MXQ20 M5 x 14 M5 x 16 MXS25 MXQ25 M6 x 18 6.9 M6 x 16 6.9 A level difference is set to t No level difference with a

Vacuum System Peripherals:

Section code 13-14-18 Date issued: 18 Photo copying this page is recommended.

SZ3000

Weight (g) 17.6 19.9 24.4 28.9 33.4 37.9 22.1 26.6 31.1 35.6 10 11 12 13 14 15 16 17 18 19 No. Terminal no.

CJ2

nut M5 x 0.8 DPiping port 2-M5 x 0.8 -X 20Rod End Nut S + Stroke Z + Stroke Data Material: Iron Part no.

MGP

X 0.8 6 8 10 12 58 64 83 93 8 8 9.5 9.5 13 M4 M4 M5 M5 4.5 4.5 5.5 5.5 8 8 8 10 10 13 15 18 21 18 13 15 18 21 5 5 6 6 18 22 24 30 12 16 20 25 26 30 36 42 10, 20, 30, 40, 50, 75, 100 125, 150, 175, 200, 250 20, 30, 40, 50, 75, 100 125, 150, 175, 200 250, 300, 350, 400 46 33 11 M5 X 0.8 M5 X 0.8 M5 X 0.8 15 10 19 MGC 53 37 10.5 M5 X 0.8 M5 X 0.8 Rc1/8 12.5 10.5 25 53.5 37.5 11.5 M6 X 1.0 M6

3 Port Solenoid Valve Metal Seal/Rubber Seal, Body Ported Series VQZ100/200/300 1

(A) 2 Port size {2(A) port} 1 1 (P) 3 (R) One-touch fitting for 3.2 One-touch fitting for 4 One-touch fitting for 6 M5 thread (Replaceable type) C3 C4 C6 M5 Note) For the inch-size One-touch fittings, refer to page 4-14-18.