High Purity Chemical Valve

Valve type Port size 0 N.C.

HRX-OM-R016

0 0 10 20 30 40 50 0 10 20 30 40 50 Circulating fluid temperature Circulating fluid temperature 50Hz 60Hz The cooling capacity will be reduced by 300W when option: T and MT are selected.

HRX-OM-R026

fluid pressure [MPa] 0.5 50 Pump head [m] 0.4 40 Outlet Usable flow rate range 0.3 30 Usable flow rate range 0.2 20 Return port 0.1 10 0 0 0 10 20 30 40 50 60 70 Circulating fluid flow [L/min] Fig. 9-8 Pump capacity (HRSH090-A-20/40-HRSH090-W-20/40-) 0 Pump capacity HRSH Series 9-12 HRX-OM-R026 Chapter 9 Documents 9.5 Types of hazard labels (For HRSH090--20-S, HRSH090--40-) The product has

HRX-OM-W038

0 0 10 20 30 40 50 0 10 20 30 40 50 Circulating fluid temperature[] Circulating fluid temperature[] 50Hz 60Hz *The cooling capacity will be reduced by 300W when option: T and MT are selected.

HRX-OM-X027

0 0 10 20 30 40 50 0 10 20 30 40 50 Circulating fluid temperature [] Circulating fluid temperature [] 50Hz 60Hz Fig 9.4-1 Cooling capacity(HRS050-A-20-R) 9.5 Heating capacity 2000 2000 Ambient 45oC 1500 1500 Ambient 40oC Ambient 45oC Heating Capacity [W] Heating Capacity [W] Ambient 40oC 1000 1000 Ambient 32oC Ambient 25oC Ambient 32oC Ambient 25oC 500 500 Ambient 5oC Ambient 5oC 0 0 0 10

HRX-OM-O021

0 0 10 20 30 40 50 0 10 20 30 40 50 Circulating fluid temperature [] Circulating fluid temperature [] 50Hz 60Hz Fig. 9-4 Cooling capacity(HRS050--20-(BJM)) 9.5 Heating capacity 9.5.1 HRS050-A-20-(BJM) 2000 2000 Ambient Ambient temperature temperature 1500 1500 5 Heating capacity [W] Heating capacity [W] 5 20 20 25 25 1000 32 1000 32 40 40 500 500 0 0 5 10 15 20 25 30 35 40 5 10 15 20 25 30

VQC

D-side w How to order applicable valves VQC 4 0 5 E B 0 Y 1 Series VQC4000 F E D A C B Stations are numbered in ascending order from the D-side.

Title not found

to 1 00 Double rcd o12, a16/5 b 30 o2O, a25/5 b 50 o32,a4ol51o IOC) o50 to 61 00/1 0 to 1 0O Singleacting Spring return/extend s 1 2 1 0 6 4 U 5 , 1 0 o50h0.20 Ion.rotating rod Double acting Singl rod o12, @16/5 lD 30 o20, @295to 50 o32, o4ol510 1OO o50, 0631 0 to 1 00 Double rod s12, s1615 lo 30 o20 lo o40l5 to 50 o50, a6310lo 50 @Actuation Doude acting Srngle acting spnng refurn Single

Modular/F.R.L. Units Series AC

1500 0 200 400 600 800 00 25 50 75 100 125 150 0 0 Flow rate (l/min (ANR)) Flow rate (l/min (ANR)) Flow rate (l/min (ANR)) AC30 Rc3/8 AC40 Rc1/2 AC40-06 Rc3/4 0.6 0.6 0.6 Outlet pressure (MPa) Outlet pressure (MPa) Outlet pressure (MPa) 0.5 0.5 0.5 0.4 0.4 0.4 0.3 0.3 0.3 0.2 0.2 0.2 0.1 0.1 0.1 0 500 1000 1500 0 1000 2000 3000 00 1000 2000 3000 4000 5000 0 0 Flow rate (l/min (ANR)) Flow

Series H, DL, L, LL Self-align Fittings

M L 8 6 4 DT04-00 32 DT06-00 10 10 10 12 15 16 5.7 14 23.5 23.5 36 DT08-00 47 12 14 25 16 24.5 10 12 DT10-00 26.5 70 DT12-00 28.5 14 17 70 17 19 49 55 17 17 Female union: DHF Applicable tube O.D. (mm) Effective orifice (mm 2) Weight (g) H2 (Hex.) Part No. H1 (Hex.)

HRX-OM-W058

Contact input signal 2 OFF OFF Contact input signal 2 type ALT Contact input signal 2 delay timer (time delay) of 0 reading Contact input signal 2 OFF detection timer 0 Example: Connect flow switch A to contact input signal 1 in local mode.

HRX-OM-R039

0 0 10 20 30 40 0 10 20 30 40 Circurating fluid temperature[] Circurating fluid temperature[] 50Hz 60Hz The cooling capacity will be reduced by 100W when option: T is selected.

V

0 0 S E R I E S 000 (N)AK P O R T S I Z E M O D E L 01 1/8 02 1/4 03 3/8 04 1/2 06 3/4 10 1 P O R T T H R E A D 2 1/4 4 1/2 6 1 Nil Rc(PT)* N NPT F G(PF)* * Remove N when ordering Courtesy of Steven Engineering, Inc. !

VQ7-6/7-8

ARB250-00-P ARB250-00-A ARB250-00-B P reduced pressure A reduced pressure B reduced pressure A B A B 12 Series VQ7-6 Control Units Control equipment (filters, regulators, pressure switches, air release valves) has been made into standardized units which can be mounted on manifolds without any modifications.

Direct Solenoid

d.bir21, 0 ) d1.r l s, t4 d.i.ir 13, (2)d.'

AWG

Flow Characteristics (Representative values) Condition: Inlet pressure 0.7 MPa AWG20 Rc1/4 AWG30 Rc3/8 AWG40 Rc1/2 0.6 0.6 0.6 0.5 0.5 0.5 Outlet pressure (MPa) Outlet pressure (MPa) Outlet pressure (MPa) 0.4 0.4 0.4 0.3 0.3 0.3 0.2 0.2 0.2 0.1 0.1 0.1 00 200 400 600 800 00 0 500 1000 1500 0 1000 2000 3000 Flow rate (l/min (ANR)) Flow rate (l/min (ANR)) Flow rate (l/min (ANR)) Conditions:

A

NAR1000 NAW1000 K10 1/8NPT 0 ~ 160PSI NAR2000 2500 NAW2000 3000 K12 1/4NPT 0 ~ 160PSI NAR4000 NAW4000 K13 1/4NPT 0 ~ 30PSI NAR4000 NAW4000 K20 1/8NPT 0 ~ 30PSI NAR2000 2500 NAW2000 3000 G27-10-R1 116 Connection D I M E N S I O N S 5K8-10P/4P/2.5P D I M E N S I O N S 4K8-10P/4P/2.5P D I M E N S I O N S G27-10-R1 VACUUM GAUGES H O W T O O R D E R V A C U U M G A U G E S Scale in mmHg

Modular Style Regulator with Built-in Pressure Gauge Series ARG

Flow Characteristics (Representative values) Condition: Inlet pressure 0.7 MPa ARG20 Rc1/4 ARG30 Rc3/8 ARG40 Rc1/2 0.6 0.6 0.6 0.5 0.5 0.5 Outlet pressure (MPa) Outlet pressure (MPa) Outlet pressure (MPa) 0.4 0.4 0.4 0.3 0.3 0.3 0.2 0.2 0.2 0.1 0.1 0.1 00 200 400 600 800 00 500 1000 1500 0 1000 2000 3000 0 Flow rate (l/min (ANR)) Flow rate (l/min (ANR)) Flow rate (l/min (ANR)) Conditions:

Compact Pressure Switch Series ZSE1 (For Vacuum)/ISE1 (For Positive Pressure)

to 101 kPa For low pressure 0 to 100 kPa For positive pressure 0 to 1 kPa 0 0 0 101 kPa 100 kPa 1 MPa 10.1 kPa 10 kPa 0.1 MPa 5 Analog output (V) 1 0.6 C B A Pressure 775 Series ZSE1/ISE1 Calibration Procedure Hysteresis Internal Circuit and Wiring Example Set the ON-pressure by the pressure setting trimmer.

Vacuum Unit Ejector / Vacuum Pump System

ZK2-OM01301 Manifold ZZK2 04 A A 1 L 00 00 (1) (2) (3) (4) (5) (6) Remains blank when no option is selected. (1) Number of stations Note 1) Symbol Stations 01 1 station 02 2 stations 10 10 stations Note 1) In the case of an ejector, for an adequate performance, the number of stations when operated simultaneously depends on the nozzle diameter.