MY1

Applicable cylinder Port variations MY1B10 MY1H10 L R L L R R R Note 1) Note 1) R R R L L R L L L L R Slide table operating direction Note 1) These ports are not applicable to MY1H10.

Plug-in Unit

1.5 m L dimension Part no.

5 Port Solenoid Valve Series SV

Specification SV2000 SV1000 SV4000 SV3000 Applicable series Manifold type Tie-rod base manifold 1(P: SUP)/3, 5(E: EXH) type Common SUP, EXH Valve stations (maximum) 20 stations Max. number of solenoids 32 points Port size 1(P)/3, 5(E) port C10, N11 C8, N9 C12, N11, 03 C12, N11 C4, C6, C8 N3, N7, N9 C3, C4, C6 N1, N3, N7 C8, C10, C12 N9, N11, 02, 03 C6, C8, C10 N7, N9, N11 4(A)/2(B) port Flow

Valve for Water and Chemical Base Fluids (2/3 Port Air Operated Valve)

Symbol Description Surface treatment Note Material A VCC12(D)-00 For VVCC12-1A-02FC4 C6 PPS resin C4 C6 VVCC12-1A-02F Pilot port C4: 4 piping C6: 6 piping Manifold block assembly for 2 port valve Manifold block q Hard anodized containing PTFE For VVCC12-1G-02FC4 C6 Aluminum C O-ring Special FKM w C4 C6 VVCC12-1G-02F Pilot port C4: 4 piping C6: 6 piping Manifold block assembly for gate

SY3000/5000/7000/9000 Series (Pilot Valve:V100)

Description SY3000 SY5000 Note SY3000 (Metric size) C4:With one-touch fitting for 4 C6:With one-touch fitting for 6 (Inch size) N3:With one-touch fitting for 5/32 N7:With one-touch fitting for 1/4 SY5000 (Metric size) C4:With one-touch fitting for4 C6:With one-touch fitting for 6 C8:With one-touch fitting for 8 (Inch size) N3:With one-touch fitting for5/32 N7:With one-touch fitting for1/4

Table of Contents

ISA2 52.5 l/min 2.5 l/min IS 10 l/min 100 l/min PF2A511 105 l/min 5 l/min ZSM 20 l/min 200 l/min 210 l/min 10 l/min PF2 PF2A521 IF 50 l/min 500 l/min 525 l/min 25 l/min PF2A551 Data Sensor Flow rate range 0.5 l/min 2 l/min 5 l/min 10 l/min 20 l/min 40 l/min 100 l/min 0.5 l/min 4 l/min PF2W504 PF2W504T 0.35 l/min 4.5 l/min 16 l/min 2 l/min PF2W520 PF2W520T 1.7 l/min 17l/

MY1

Data MY1B16 to 100 MY1M16 to 63 MY1C16 to 63 MY1H16 to 40 L L R L L L L R R R R R L R R L Note 2) Note 2) R R L L O-ring L R Slide table operating direction Piping tube Note 2) For bottom piping, refer to the figure above.

ATEX Compliant 5 Port Solenoid Valve Series 52-SY

plug connector with cover (LL) 52-SY5120-LL-01 (-F2) Insulation: Red (+) Insulation: Black () 4.1 0.3 mm2 12 14.7 L 104 (Lead wire length) Cable type (TT) 52-SY5120-TT-01 (-F2) Lead wire marking No.1 (+), No.2 () 5.9 0.75 mm2 L 120.8 (Lead wire length) Max.10 5 ATEX Compliant Body Ported Type Series 52-SY5000 Dimensions 2-position double L plug connector (L) 52-SY5220-L-01 (-F2) 22.6 16.7

Compact Manifold Regulator

AXT100-DR7 L dimension Select L dimension from the table below and enter an applicable symbol.

CRBU

R73C 3m: L Ex.) R73CL 5m: Z Ex.) R73CZ : N Ex.)

ARM10/11

block gauge pressure supply block L side L side switch block Nil A B C D E F G H J K L M N O P Q R F.R.L.

Compact manifold regulator ARM5 Series

L 1.25 P=12.5 5.25 7.5 25 35 5.5 1.5 L Dimension L=12.5 x n+10.5 No. L dimension 1 23 2 35.5 3 48 4 60.5 5 73 6 85.5 7 98 8 110.5 9 123 10 135.5 No. L dimension 11 148 12 160.5 13 173 14 185.5 15 198 16 210.5 17 223 18 235.5 19 248 20 260.5 No. L dimension 21 273 22 285.5 23 298 24 310.5 25 323 26 335.5 27 348 28 360.5 29 373 30 385.5 No.

ARM10/11

block gauge pressure supply block L side L side switch block Nil A B C D E F G H J K L M N O P Q R F.R.L.

SJ3A6

Caution Single solenoid SJ3000-46-SC-l Double solenoid, 3 position type, 4 position type SJ3000-46-DC-l Connector Assembly Part No.

Series: 2 (VQ21), Body Style: A (Single Unit), Coil Voltage: 6 (12VDC), Lead Wire: G (Grommet), Voltage Protection: None (Or w/Surge Suppressor in Case of AC Volts), Manual Override: None, Port Size: C8 (ø8 One-touch Fitting), Option: L Type (VQ21 Only)

Series: 2 (VQ21), Body Style: A (Single Unit), Coil Voltage: 5 (24VDC), Lead Wire: Y (DIN Terminal), Voltage Protection: Z (DC: Light & Surge Suppressor; AC: w/Full Wave Rectifier), Manual Override: None, Port Size: C8 (ø8 One-touch Fitting), Option: L Type (VQ21 Only)

Series: 2 (VQ21), Body Style: A (Single Unit), Coil Voltage: 3 (110VAC 50/60HZ), Lead Wire: Y (DIN Terminal), Voltage Protection: None (Or w/Surge Suppressor in Case of AC Volts), Manual Override: None, Port Size: C8 (ø8 One-touch Fitting), Option: L Type (VQ21 Only)

Series: 2 (VQ21), Body Style: A (Single Unit), Coil Voltage: 6 (12VDC), Lead Wire: Y (DIN Terminal), Voltage Protection: H [w/o Energy Saving, Light/Surge Voltage Suppressor (DC Voltage)], Manual Override: None, Port Size: C8 (ø8 One-touch Fitting), Option: L Type (VQ21 Only)

Series: 2 (VQ21), Body Style: A (Single Unit), Coil Voltage: 3 (110VAC 50/60HZ), Lead Wire: G (Grommet), Voltage Protection: None (Or w/Surge Suppressor in Case of AC Volts), Manual Override: None, Port Size: C8 (ø8 One-touch Fitting), Option: L Type (VQ21 Only)

Series: 2 (VQ21), Body Style: A (Single Unit), Coil Voltage: 5 (24VDC), Lead Wire: G (Grommet), Voltage Protection: Z (DC: Light & Surge Suppressor; AC: w/Full Wave Rectifier), Manual Override: None, Port Size: C8 (ø8 One-touch Fitting), Option: L Type (VQ21 Only)