Air Cylinder Series CG1 ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

MB = ~Hs Auto switch = ~ Hs Auto switch MB1 CA2 CS1 Proper Auto Switch Mounting Position Auto Switch Mounting Height D-G5W D-K59W D-G59F D-G5 D-K5 D-G5NTL D-G5BAL D-H7 D-H7C D-H7W D-H7BAL D-H7NF C76 D-G5NTL D-G59F D-H7C D-G5BAL D-C7/C8 D-H7 D-H7W D-H7F D-H7BAL D-B5/B6 D-B59W D-G5/K5 D-G5W D-K59W Auto switch model D-C7/C8 D-C73C D-C80C D-C73C D-C80C D-B5/B6 D-B59W C85 Bore size (mm) C95 HS

LEC-OM02704CN

W W (UVW) M U V W U V W PE M P1-P2(11kWP1-P) P 1 P 2 (C) 200V3.5kW CNP2P-D PC (13.2) 15 31 15 (2) (a) DO CN6ON/OFF (b) CN6DC24V (c) CN6SDDOCOM CN 6 DOCOM S D 15.4.3 (1) (a) (b) (12.4) (c) (2) 15 32 15 15.5 15.5.1 (1) ON(RYn0) (RYn1)OFF b01(1 ) (A25) ON 3000r/min (2) (RYn1)OFF ON(RYn0) 15.5.2 , 4.11.2 (a) ON(RYn0)OFF (B) (C) (EMG)OFF (AE6) (d) (LSP)(LSN)OFF

AC Servo Motor Driver ( ＳＳＣＮＥＴⅢ/H Type ）

H T E d W T D L Max.

LVQ

N.C. valve LVQ20S N M C A B D (Max.

ASR

) L6 L8 Note 4) A2 M L7 L4 A1 Note 4) Weight (g) Note 5) Note 1) d D3 MAX.

Series 10-SV1000/2000/3000/4000 5 Port Solenoid Valve

U side D side D D D D D D 3 2 1 Stations How to Order Solenoid Valve 10 SV 1 1 0 0 F 5 Note) Clean series Note) Available with manifold block for station additions. Refer to the WEB catalog.

Mini Free Mount Cylinder

(Example) L D-M9BW Nil Lead wire length 0.5 m 1 m M 3 m 5 m L Z Note) Switch operation position (ON) Note) 1 m (M): D-M9W only 1 mm or less Hysteresis Switch operation position (OFF) Solid state switch Oilproof flexible heavy-duty cable indication To designate solid state switches with flexible specifications, add -61 after the lead wire length.

Series SV

D D D D D D 3 2 1 Stations D side How to Order Solenoid Valves SV 1 1 0 0 F 5 Note) Available with manifold block for station additions. Refer to pages 77 and 81.

Vacuum Ejector Box Type (Built-in Silencer)/Body Ported Type Series ZH 1

S type: White color L type: Black color (Mounting hole) B C D E F G H Model A 3 8 Rc3 8 Rc3 8 Rc3 8 ZH18DS-03-03-03 ZH18DL-03-03-03 ZH20DS-03-04-04 ZH20DL-03-04-04 Rc 133 52.45 42 19 3.5 19 20.95 20.95 133 52.45 42 19 3.5 19 151.1 60.95 47.7 19 3.5 24 26.75 151.1 60.95 47.7 19 3.5 24 26.75 I J K L M N O Model 3 8 Rc3 8 Rc3 8 Rc1 2 Rc1 2 ZH18DS-03-03-03 ZH18DL-03-03-03 ZH20DS-03-04-04 ZH20DL

Air Suction Filter Series ZF Prevent from occurring vacuum equipment trouble due to ZA dust from vacuum pad ZX Port size ZR Air flow Filtration Series Features Page (μm) Applicable tubing O.D. (l/min(ANR)) ZM Screw-in for one-touch fittings ZMA ZQ ZFA 

D-G

VQ7-6/7-8

FHG FJG FIG FHG FJG FIG VQ7-6-DVQ7-6-D-R VQ7-6-FPG-DValve replacement parts FHG FJG FIG FHG FJG FIG Description Material VQ7-6-FG-SVQ7-6-FG-DVQ7-6-FPG-DVQ7-6-FG-S-R VQ7-6-FG-D-R VQ7-6-D-R VQ7-6-DNo.

Magnetically Coupled Rodless Cylinder

x mcos + msin P m P 0.1 x m + m P D M 1.6 x D M 5.0 x D M 5.0 x m m m mv P m Pv m L mv Determination of allowable load mass & pressure P L Pv Inclined operation (Refer to page 29) L 1 Review of operating conditions Determination of load factor () = Load mass (m) Maximum allowable load (m max) + Static moment (M) Allowable static moment (Mmax) + Dynamic moment (ME) (Refer to page 27)

ASR

Note3) L6 L8 Note 4) A2 M L7 L4 A1 Note 4) Weight (g) Note 5) Note 1) d D3 MAX.

5

Dd9 2 x d D C L l m REA H B Part no.

H/DL/L/LL

DT08-01 18 45 25 8 14 DT08-02 16 21 52 14 12 24.5 K DT08-03 22 73 26.5 M 49 10 17 DT10-02 23 72 Connection thread 14 26.5 DT10-03 17 22 78 DT10-04 27 28.5 120 DT12-02 25 106 17 H 55 12 19 DT12-03 17 28.5 26 111 DT12-04 27 17 D MS Male Run Tee: DY T H1 (width across flats) H2 (width across flats) Applicable tubing O.D.

HRX-OM-M090

If foreign objects with a size of 20 m or more are likely to enter, install the particle filter. 6 Filter Rc1/2 20m Note FQ1011N-04-T020-B-X61 Note) The filter shown above cannot be directly connected to the thermo-chiller.

AC Servo Motor Driver (Network card type ）

H T E d W T D L Max.

Plug-in/Plug Lead: Single Unit

Direct exhaust with silencer box: U side exhaust IP65 enclosure Note) 12 12 stations Note) U D U D Note) Combination of [C ] and [S ] is not possible.

HRX-OM-O021

If foreign objects with a size of 20 m or more are likely to enter, install the particle filter. 6 Filter Rc1/2 20m Note FQ1011N-04-T020-B-X61 Note) The filter shown above cannot be directly connected to the thermo-chiller.

Series AS-FM/AS-M/ASD-FM

Weight g Model d T D1 H D2 D3 L1 L4 L2 L3 Min. Max.