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The home position is defined to be where the first Z-phase signal is issued or the position that is the home position shift distance away from where the first Z-phase signal is issued. Dogless Z-phase reference -107- 7.1.2 Stopper type home position return.

The home position is defined to be where the first Z-phase signal is issued or the position that is the home position shift distance away from where the first Z-phase signal is issued. Dogless Z-phase reference -112- 7.1.2 Stopper type home position return.

VZ1 0 X1 ( ) Model no. VZ 3 5 2R X20 ( ) VZ 3 5 X1 ( ) Entry is the same as standard products. Entry is the same as standard products.

Y1 NA LX BB NB LT X1 Y1 SS + Q + l + Stroke S + Stroke Z + Stroke ZZ + Q + l + Stroke ZZ + Stroke Long stroke (with tie-rod reinforcement ring) Bore size (mm) Stroke range (mm) RT RY 32 58 28 1401 to 1800 40 65 28 1401 to 1800 50 75 33 1401 to 1800 63 90 43 1501 to 1800 80 100 The maximum stroke is 1500mm for series CH2G only.

EX600-DX E EX600-DX F 1 1 2 Configuration Configuration 3 4 1 2 5 1 3 4 1 2 3 4 1 2 3 4 1 2 3 4 1 2 3 4 Configuration 2 1 3 5 4 7 6 9 8 11 10 13 12 3 7 6 5 Group Pin number 3 1 0 2 13 11 12 10 8 6 9 7 5 3 1 4 2 Pin number 4 3 2 2 1 4 3 2 1 4 3 2 4 3 2 1 4 4 24 V (control and input) X3 24 V (control and input) X2 24 V (control and input) X1 24 V (control and input) X0 0 V (control and input

) (X2, Y2, Z2) X =((X2-X1)/) Y =((Y2-Y1)/) Z =((Z2-Z1)/) X (X1, Y1, Z1) Z 3.6 64 No.SFOD-OMT0009CN-B )100mm/s 1 100mm2 100mm No.1 50mm/s 1 100mm 2 50mm No.2 Step No. mm/s / 1 2 2 2 mm mm/s mm/s mm mm mm 1 LIN-A 100 100.00 1000 1000 0 0 0.5 2 LIN-A 100.00 0 0 0.5 1 3 4 1 LIN-I 50 100.00 1000 1000 0 0 0.5 2 LIN-I 50.00 0 0 0.5 2 3 4 () 2 50mm 2 25mm/s 50mm/s Step2 Step1

Y axis [Axis speed calculation] Target position Composite speed Composite travel distance =((X2-X1)2+(Y2-Y1)2+(Z2-Z1)2) (X2, Y2, Z2) Xaxis speed = ((X2-X1)/ Composite travel distance) Composite speed Y axis speed = ((Y2-Y1)/ Composite travel distance) X axis Composite speed Z axis speed = ((Z2-Z1)/ Composite travel distance) Current position Composite speed (X1, Y1, Z1) Z axis Caution

Symbol Symbol -X1 1 Rod End Female Thread -X2 2 Intermediate Stroke Mounting Rotating angle MRQ Mounting Stroke Cushion Auto switch Rotating angle S X X1 32 40 MRQ Stroke Cushion Auto switch S X X2 32 40 Rod end female thread Intermediate stroke Operating stroke For intermediate strokes other than standard strokes, the full length is shortened by cutting the linear motion side according to

Body Size: 2, Thread: N (NPT), Port Size: 02 (1/4), Handle/Bonnet Material: B (Aluminum), Options: BS (w/Bracket + Built-in Silencer, EXH Port), Semi-Standard: KZ (K + Z)

Regulator Unit Combination: [Other FRL Combination Devices] Other FRL Combination Device, Port Size: NPT1/4, Compressed Air Quality: General Dry Air, Maximum Operating Pressure(MPa): 1, Case Material: [Resin] Polycarbonate Case, Case Guard: No, Exhaust Structure: Relief type, Flow Direction: [Standard Flow (Left to Right)] Left to right, Drain Cock: [Not Provided] No, Pressure Gauge: No (

D-X Individual -X 123 Series MXQ External Dimensions of Adjuster With Shock Absorber (BS/BT) Extension End Body mounting section Table mounting section Q P A D J M H K B F G G E E1 L C MXQ-BS20 (L) MXQ-BS25 (L) MXQ-BS 8 (L) MXQ-BS12 (L) MXQ-BS16 (L) Body mounting section Table mounting section A Stroke adjustment range (mm) Applicable size Model D H J K Q 1) B C F G M E L E1 P *1) M3 x 12

D+1 0 mm Stroke length tolerance -X 20Option Data Extension end (AS) Stroke adjustment Rubber stopper Retraction end (AT) range 0 to 5 mm Both ends (A) Extension end (BS) W/ shock absorber is not available in Series MXQ6.

10 10 22 43 52 J 40 40 40 52 60 85 130 K 26.5 36.5 46.5 56.5 66.5 91.5 116.5 NA 2 2 2 2 2 4 4 M 71 71 71 83 103 149 203 Z 70 70 70 82 102 148 202 ZZ 80 80 80 92 112 158 212 KA 125.5 179.5 MXS12-10 MXS12-20 MXS12-30 MXS12-40 MXS12-50 MXS12-75 MXS12-100 62 Air Slide Table Series MXS With shock absorber (12) MXS12-BS/BT/B 31.5 A 8 17 31.5 15 15 MXH 45 MXU Shock absorber at extension end MXS

Series CM2-Z P .352 P .356 P .474 Air Cylinder Air Cylinder Air Cylinder Series CG1-Z Series MB-Z Series CA2-Z P .592 P .686 P .750 Compact Cylinder/Double Clevis Pivot Bracket Cylinder with Stable Lubrication Function (Lube-retainer) Floating Joint: For Pneumatic Cylinders (180, 200) JA-X530 Series CQ2/CQS Series CM2-Z/CG1-Z/CA2-Z/CQS/ CQ2-Z/MXQ/MGP-Z/CXS P .830 P .832 P .842 1 This is a

Table. 9-4 Connector allocation and the process data Note Connector position Connector designation X0 X1 X2 X3 IO-Link port number 1 2 3 4 Available when the IO-Link device sub-module is configured.

A80CN 1) Lead wire symbols 0.5m: 3m: L 5m: Z : N 2) This rotary cylinder is not an improved product in water resistant ability.

Red SF LED is On x10 x1 LED display LED display Off Off URL http://www.smcworld.com PWR(V) Display ST(M) PWR BF Displays bus fault. SF for 2 hours each in direction X, Y and Z respectively (De-energized) Displays system fault. Displays the status of the power supply voltage for outputs. Displays the status of the power supply voltage for control and inputs.

Intermediate Stroke -X1 1 Rod End Female Thread -X2 2 Mounting Rotating angle MRQ Mounting Stroke Cushion Auto switch Rotating angle S X X1 32 40 MRQ Stroke Cushion Auto switch S X X2 32 40 Rod end female thread Intermediate stroke Operating stroke For intermediate strokes other than standard strokes, the full length is shortened by cutting the linear motion side according to the stroke.

Common with the MXQ series. 21 Series MXQR Dimensions: Adjuster Shock absorber (BS, JS, BT, JT) Extension stroke end Body mounting parts Table mounting parts P A D Q M J B H K F MXQR-BS20 MXQR-BS25 G MXQR-BS 8 MXQR-BS12 MXQR-BS16 G E E1 L C Stroke adjustment range (mm) Body mounting parts Table mounting parts A Applicable size Model L E1 B C F G M P 1) H J K Q 1) D E MXQR 6 M2.5 x 8 12.5

AC20 AC25 AC30 AC40 AC50 VHS20 VHS30 VHS40 VHS50 1935 Conforming to OSHA Standard Pressure Relief 3 Port Valve With Locking Holes Series VHS20/30/40/50 How to Order 30 03 RZ VHS Made to Order Nil X1 X502 Standard Body: Red Built-in silencer (EXH port) Pressure relief 3 port valve Optional specifications Symbol B R Z Description Knob color: Black Body size Flow direction: Right to left Symbol