Aluminum High Vacuum Angle Valve Indicator: Dimensions (b) E C D E C XLA F A (a) XL XL XLQ E (c) XM XY H DXSA XVD B G XGT CYV A (mm) A B C D E Note 1) F G H Model XLH-16 XLH-25 XLH-40 XLH-50 40 100.5 38 1 30 17 35 50 114 48 1 12 40 26 41 65 162.5 66 2 11 55 41 57 70 179.5 79 2 11 75 52 70 Note 1) Dimension E applies when heater option is included.
Female rod end Female Rod End [mm] [mm] Bore size A AL B1 C D E F H H1 J KA MM NA Bore size A1 H MM 20 14.5 12 13 15.5 8 14 0 0.1 2 21 5 M4 x 0.7 depth 7 Width across flats 6 length 3.5 M8 x 1.25 24 20 8 6.5 M4 x 0.7 25 17.5 15 17 16.5 10 14 0 0.1 2 24 6 M5 x 0.8 depth 7.5 Width across flats 8 length 3.5 M10 x 1.25 27 25 8 6.5 M5 x 0.8 32 17.5 15 17 20 10 18 0 0.1 2 24 6 M5 x 0.8 depth 8
14 18 18 22 26 12 14 18 25 30 32 40 50 2 2 2 2 2 2 3 3 28 32 38 46 58 70 82 100 5.5 5.5 6.6 6.6 9 11 11 14 6 7 7 8 9 9 11 14 6 7 7.5 7.5 12 12 16 16 26 31 38 47 58 72 89 110 M4 x 0.7 M8 x 1.25 24 29 35.5 44 55 69 80 100 M5 x 0.8 57 60 62 62 84 84 104 105 Width across flats 6 length 3.5 Up to 300 M5 x 0.8 M10 x 1.25 M5 x 0.8 Width across flats 8 length 3.5 Up to 300 M5 x 0.8 M10 x 1.25 Rc1
-Outside Local Area: (800) 258-9200-www.stevenengineering.com 10, 16, 20, 25 Mounting nut Rod end nut G1 G2 NN 2-P I NA D J N2 N1 A F MM F S + Stroke H ZZ + Stroke Bore size (mm) NN A P D MM F G1 G2 S ZZ I H J N1 N2 NA 10 M12 x 1 15 M5 x 0.8 4 M4 x 0.7 8 15 6 65 101 18.5 28 16 11 20 16 16 M14 x 1 15 M5 x 0.8 5 M5 x 0.8 10 15 6 74 114 22 30 22 12 21 19.5 20 M20 x 1.5 18 Rc 1/8 8 M8 x 1.25
-M5 x 0.8 2 x 4-OB Counterbore depth RB 2 x 4-OA effective depth RA Y Q F I 4-N through M 0.2 D E K B + Stroke L M 0.2 A + Stroke E 25, 28 H thread effective depth C 2-Rc 1/8 2 x 4-OB Counterbore depth RB 2 x 4-OA effective depth RA Y Q F E J I 4-N through M 0.2 D W K B + Stroke L A + Stroke M 0.2 E Bore size (mm) Stroke range (mm) F A H B C D E OA I J K L M N OB Q RA W Y RB 10 10 to 40 69.5
Valve Body (for Swagelok) Body (for VCR) Spacer (optional) P 33 Series XSA High Vacuum Angle Valve Dimensions (mm) 1in=25.4mm Electrical entry Grommet (G) Electrical entry Conduit (C) F G 27010 F G D 29010 H C G(PF)1/2 DIN terminal (D) F G J C H 29.5 39 H C OUT IN A P G(PF)1/2 6 to 9 22 E B (body dimension) P (fitting size) 2-M5 Thread depth M A Terminal (T) F G2 (Bs) J (XSA S) 25 33 H K
center SYJA3420-M3 28 3 Position exhaust center SYJA3520-M3 3 Position pressure center SYJA3140-M5 48(22) 2 Position single Base mounted type SYJA3240-M5 51(25) 2 Position double 1.8 (0.1) SYJA3340-M5 M5 0.8 M3 0.5 3 Position closed center 54 (28) SYJA3440-M5 3 Position exhaust center SYJA3540-M5 3 Position pressure center SYJA3130 22 4 Port base mounted type (For manifold) 2 Position single
'i,-.1-)^' l z N F Noz l!
Note 2) Use 1/8" tube. Body size Port size M5 M5 x 0.8 U10/32 10-32UNF 1 M5 x 0.8 10-32UNF AS 2 0 F A 1 1 M5 06 G Body size 1 AS 2 0 S F A 1 2 01 06 G Body size 2/3/4 Body size Made to Order Refer to page 678 for details. 2 1/8, 1/4 3 3/8 4 1/2 Push-lock type Type 2 Elbow 3 Universal Seal method Nil Without sealant S With sealant Note) Face seal method is used for the G thread type.
AS-T A (1) (2) L4 (1) (2) Weight (g) Model M1 D1 D2 L1 L2 L3 d T H Min.
-1/2 Ports P, A, B, R1, R2 0 1 G H 2 position double: VQ525 3 position closed center: VQ535 3 position exhaust center: VQ545 3 position pressure center: VQ555 3 position double check: VQ565 0 1 0 1 0 1 0 1 G H G H G H G H 194.5 (200) 121.3 53 73.2 (78.7) Indicator light 213 121.3 91.5 13.5 (Port B) 59.5 53 (Port A)17.5 13.5 (Port B) 59.5 (Port A) 17.5 Indicator light SMC 2 4 2 4 SMC A B A
Model r e b m u N A f o t r o P l e d o M g n i t r o P e z i s t r o P B e z i s t r o P A c i r t e M " 2 3 / 5 " 4 " 4 / 1 " 6 " 6 1 / 5 " 8 t r o P A t r o P B h c n I 1 1 M K h c u o t e n O g n i t t i f g n i t t i f h c u o t e n O 0 1 , 6 6 1 / 5 8 8 / 3 0 1 2 / 1 2 1 2 1 M K h c u o t e n O g n i t t i f d a e r h t T P N 0 1 , 6 4 / 1 T P N ) T P ( c R 4 / 1 d a e r h
+ t Note 2) Note 2) Note 2) Note 2) Nil Z Note 2) Pressure unit c Name plate and caution plate for bowl in imperial units: MPa Name plate and caution plate for bowl in imperial units: psi, F Note 1) A bracket is not assembled and supplied loose at the time of shipment.
With air cushion WA 2-M5 x 0.8 Relief port GB 2-P (Rc, NPT, G) GA GA RA MM H1 RA 10 10 Width across flats B1 MM H1 W W Width across flats B1 D D MAX.WH MAX.WH E-0.05 0 E-0.05 0 I AL H + Stroke K A AL C0.1 KA A K F F 8-J S + Stroke H ZZ + 2 Stroke NA (mm) MM NA P RA S WA WH 20 20 20 A AL Bore size B1 C D E F GA H H1 I M6 x 1 depth 12 M8 x 1.25 depth 16 M10 x 1.5 depth 16 J K KA M14 x 1.5
Smooth Cylinders Low Speed Cylinders Section Y detail Mounting nut NDh8 GA GB NN YY Y Piping port 2 x M5 x 0.8 Rod end nut NN MM C B 0 0.3 NB A F NA B 0 0.3 D Section YY detail F H S + Stroke Z + Stroke Refer to page 8 for details of the mounting nut.
H A B C H A B C 16 25 32 16 25 Rod flange: EQY H -F Head flange: EQY H -G LL FV M FV M FZ FX FT FX FZ 4 x FD FT 4 x FD The head flange type is not available for the EQY32.
Basic (B): CG1WB 1011With rubber bumper 2 x M5 x 0.8 Relief port F GA F GA Port on rod end Port on rod end Width across flats KA 2 2 Width across flats KA RA RA 2 x Rc P 1 1 0 E0.05 MM H1 H1 MM D D I 0 E0.05 C R0.4 R0.4 ZZ + 2 Stroke S + Stroke H A AL Width across flats B1 Width across flats B1 H + Stroke A AL K K 8 x J NA C Female rod end effective depth A1 MM ZZ + 2 Stroke H + Stroke H
Series: 250 [3 Port COM (Single Unit)], Voltage: 24VDC, Electrical Entry: Grommet / Tape winding, Orifice: 1 [250 (3 Port) ø1], Port Size: M5 Thread, Thread: Rc, Material: Stainless Steel Body, FKM Seal, Class B Coil, Option: Foot Bracket, CE Compliance: -
Series: 250 [3 Port COM (Single Unit)], Voltage: 5 (24VDC), Electrical Entry: G (Grommet / Tape winding), Orifice: 1 [250 (3 Port) ø1], Port Size: M5 Thread, Thread: Rc, Material: H (Stainless Steel Body, FKM Seal, Class B Coil), Option: F (Foot Bracket)