MGG

30.5 26.5 28 29.5 28 25 31.5 30.5 24.5 (33.5) 23.5 (32.5) 22.5 (31.5) 19.5 (28.5) 18 (27) 24.5 (33.5) 21 (30) 40 38 38 37.5 35 31.5 33 34.5 33 30 36.5 35.5 29.5 (41.5) 28.5 (40.5) 27.5 (39.5) 29 (41) 24.5 (36.5) 23 (35) 26 (38) 50 43.5 43.5 43 40.5 38.5 40 41.5 40 37 43.5 42.5 26 (38) 23 (35) 29.5 (41.5) 28.5 (40.5) 27.5 (39.5) 24.5 (36.5) 29 (41) 63 50.5 50.5 50 47.5 38.5 40 41.5 40 37

VFS

x n + 63 L2 = 33 x n + 75 363 384.5 3 162 174 L L1 L2 6-RC 1/2 327 339 528 549.5 360 372 561 582.5 393 405 594 615.5 L3 = 33 x n + 264 L3 = 33 x n + 285.5 195 207 396 417.5 228 240 429 450.5 261 273 462 483.5 294 306 495 516.5 L3 (MP) L3 (AP) 3-8-66 67 5 Port Pilot Operated Solenoid Valve Metal Seal, Plug-in/Non Plug-in Series VFS3000 Plug-in type, Non plug-in type Manifold Option Parts

Vacuum Module Series ZX

Release flow rate adjusting needle + + Release pressure supply port (PD) M5 SMC SMC PD 61.5 A PD) PS 3(PV PD) PS 1(PV PD) PS 1(PV 60 PD PD PD 50.8 50.5 PD 50 0.5 PE PE PE A EXH 28.5 33 PS PS PS 7.5 20.5 PS PV PV PV PV 10 PV Individual air pressure supply port (PV) M5 (or M6) 2.5 3 37.4 Common EXH port (EXH.) 1 1/8 (Rc, NPTF, G) 5 20 44 Pitch = 21 22.5 Common air pressure SUP port (PV) 1/8

VVX31/32/33

Series VVX31/32/33 Normally Closed (N.C.), Normally Open (N.O.), Common (C.O.)

V

www.stevenengineering.com I 2.b VALVES VX21/22/23 2.48 2 PORT SOLENOID VALVE DIRECT OPERATED TYPE VXD21 2.50 2 PORT SOLENOID VALVE PILOT OPERATED TYPE VX31/32/33 2.52 3 PORT SOLENOID VALVE DIRECT OPERATED TYPE VXZ22 2.54 2 PORT SOLENOID VALVE PILOT OPERATED TYPE / DIFFERENTIAL PRESSURE OPERATION TYPE VZ100 2.56 3/2 DIRECT ACTING SOLENOID VALVE M5 PORTED VZ300 2.58 3/2 PILOT OPERATED SOLENOID

MXQ

With end lock (20): MXQ20-R Operating port 2-Rc 1/8 8 34 33 65 11.5 78.5 Other dimensions are the same as basic style.

DOT/J844 Nylon Tubing

Tube Size Packaging Table 01 03 05 07 09 11 13 15 19 1/8 5/32 3/16 1/4 5/16 3/8 1/2 5/8 3/4 Tube Size Type A (Monowall) Type B (Reinforced) TIV01 TIV03 TIV05 TIV07 TIV09 TIV11 TIV13 TIV15 TIV19 3/4 1/8 5/32 3/16 1/4 5/16 3/8 1/2 5/8 33 77 153 305 33 77 153 305 33 77 153 305 33 77 153 305 33 77 153 305 33 77 153 305 33 77 153 305 33 77 153 305 33 77 153 305 Length (Meters) S S S S S S S S

New New 2-Color Display Digital Flow Switch ® (200 L type only) Applicable fluid Air, N2 Expanded flow range! Wide range of flow measurement with one product (100: 1) (100: 1) Setting resolution: 1 L/min Flow ratio Flow ratio is 10: 1 for current PF2A

Option 1 W Nil DIN Rail Mounting Bracket (Order Separately) With lead wire with connector (2 m) With lead wire with connector (2 m) Connector cover (Silicone rubber) ZS 33 R ZS-33-F S Stations ZS-33-D S 1 2 3 4 5 ZS-33-D 1 station 2 stations 3 stations 4 stations 5 stations IN IN N Note) If an accessory is required, order separately using ZS part numbers.

/

M 33 33 36 36 L 72.5 80.5 92.5 99 M 51.5 51.5 54 54 L 73.5 81.5 93.5 100 M 68.5 68.5 71 71 N 56.5 56.5 59 59 L 72.5 80.5 92.5 99 M 103.5 103.5 106 106 N 72.5 72.5 75 75 1/4, 3/8 1/2 3/4 1/1 28 35 43 45 7.5 8.5 9 9 5.5 6.5 6.5 6.5 26 33 40 45.5 1.6 2.3 2.6 2.6 14 17 22 22 67 75 87 92 52 60 68 73 77.5 85.5 97.5 104 VXEZ2230 VXEZ2240 VXEZ2350 VXEZ2360 42 Series VXE21/22/23 For Air/Water/Oil

2/3 Port Valve for Various

$% % 33 1 ,) % % 1 ) ,, ) /) H B 7 !"# ! , & Ordering example VX021-001GB-01 !"# $ % & VX021-002DBT-04 ' ( !

5-Port Solenoid Valve

33 SY3000/5000/7000 Series Made to Order Please contact SMC for detailed dimensions, specifications, and lead times.

Series SY 5 Port Rubber Seal Solenoid Valve High Capacity & Simple Choices

Refer to p.0-33 to 0-36 for Safety Instructions and common precautions. Warning Caution How to Use Plug Connectors Manual Override Operation 1. Attaching and detaching connectors Since connected equipment will operate when manual override is performed, firtst confirm that conditions are safe.

KG

27 27.5 29 29 1 8 Applicable tubing 6 1 4 17 11.4 9.0 12.8 10 20 Connection thread 3 8 1 8 1 4 3 8 1 8 1 4 3 8 1 2 1 4 3 8 24.5 28 28.5 30 30.5 31.5 27 32 30 33 32 34.5 8 21.6 14.9 18.5 15.2 12 23 Applicable tubing 21.6 14.9 17 10 17 26.5 21 18.5 35.2 25.0 36 63 22 36 37 28 38 31 35.5 33 37 17 12 22 20.9 17 28.5 50.2 39.7 1 2 3 8 1 2 KGL12-04 KGL16-03 KGL16-04 65 22 37 39.5 71 (71) 101

Step Motor Controller

Refer to page 33 for the noise filter set. Refer to the LECA Operation Manual for installation.

SMC Pneumatic Clean Series

33 LY 16.5 25 25 Y 7 9 9 16 10 6 A X 5 6 6 9.5 9.5 7 8 8 8 15 15 15 83 82 85.5 54 55 M4 x 0.7 M10 x 1.0 M5 x 0.8 M12 x 1.0 With air cushion type is not available for 21/ 22CJ2.

15

Y = x (mn x yn) 1 mt = x (1.5 x 0 + 1.0 x 0 + 0.5 x 25 + 2.5 x 50) 1 5.5 = 25 mm Z = x {mn x (A + zn)} 1 mt = x {1.5 x (33 + 5) + 1.0 x (33 + 50) + 0.5 x (33 + 105) + 2.5 x (33 + 105)} 1 5.5 = 100 mm [4] Check the allowable load. Item Result Note (1) Check allowable load mass by thrust. Check allowable load by thrust. The bore size is 25, so the allowable load by thrust will be 20 kg.

CLQ

CLQ Rod Side Flange Style MLGP Stroke range Without auto switch With auto switch Bore size (mm) A B A B RLQ 82 23 33 72 82 10 to 50 75, 100 33 32 Rod end nut 38.5 MLU Head Side flange style: CLQG32 ML1C D54.2 48 34 -X 207 32 B + Stroke 8 A + Stroke 4-5.5 65 56 Data Head Side Flange Style Stroke range Without auto switch With auto switch Bore size (mm) A B A B 80 23 33 70 80 10 to 50 75,

HRX-OM-S004

5.13.1 Temperature unit change. 5-33 5.13.2 Setting/checking of temperature unit change . 5-33 5.14 Pressure unit Change . 5-34 5.14.1 Pressure unit change . 5-34 5.14.2 Setting/checking of pressure unit change . 5-34 5.15 Data reset function . 5-35 5.15.1 Data reset function . 5-35 5.15.2 How to operate reset function . 5-35 5.16 Accumulated Operating Time Reset Function . 5-36 5.16.1 Accumulated

Rotary Actuator with Solenoid valve Ｃ ( Ｄ ) ＶＲＡ１＊＊＊３０～１００－＊＊Ｚ

Table (17) Parts where grease is to be applied Application of grease Grease 1 Body (inner sliding surface) Piston(Seal groove) 4 Slider(Sliding surface) 7 GR-S-010 9 Tube gasket Piston seal 10 Cushion sealFor with air cushion 36 O-ring 25 26 33 36 9 10 10 1 9 36 4 4 26 33 25 33 26 25 37 - 2. Mount the tube gasket 9 to the left cover 3 to mount to the body 1 .

JXCx-OMY0006

Memory map 33 9.1 Memory allocation 33 (1) Input Area Mapping 33 (2) Input area mapping of upper level device 34 (3) Output area mapping 38 (4) From upper devices to controller (details) 38 10. Settings and Data Entry 42 10.1 Step Data 42 10.2 Basic parameters 45 10.3 Return to origin parameter 47 11.