Compact Cylinder 68 M5 27 7 22 M5 7 16 10 26 40 26 4 16 26 6.6 2.8 8 38 60 73 M5 29 7 22 M5 7 16 15 32.5 46 32 4 30 32.5 7 5 10 50 64 32 79 M6 33.5 7 24.5 M6 9 18 17.5 38 52 36 4 35 38 9 5 10 55 72 36 90 M6 38 10 26 M6 9 21 20 46.5 64 45 5 40 46.5 9 6 12 70 90 45 110 M8 45 10 31 M8 9 21 22.5 56.5 74 50 5 45 56.5 9 6 12 80 100 50 120 M8 50 10 31 M8 Single clevis bracket Hexagon socket head cap screw (accessory
/m3) Standard product 105 105 105 Standard product 104 104 104 12-CY1B Standard product 103 103 103 12-CXSL 102 102 102 10-CM2 11-CXSL 11-CM2 10 10 10 1 0.1 0.5 1 0.1 0.5 1 1 1 0.1 0.5 1 Particle diameter (m) Particle diameter (m) Particle diameter (m) Front matter 23 Comparison of Cleanliness Standards ISO 14644-1 ISO Cass 1 to 9 Intermediate classes available U descriptor: Particles smaller
No. 1 2 2-1 3 4 5 6 7 8 8-1 8-2 9 10 O-ring Part No.
29.5 7.5 22.5 1/2 KQ2H10-04lS 22 15.6 22.3 15.9 15.6 41.5 29.5 7.5 44.7 10 12 1/4 KQ2H12-02lS 19 18.2 28.7 24 17 58.3 46.1 9 24.3 3/8 KQ2H12-03lS 19 18.2 25.9 20.8 17 58.3 46.1 9 25.2 1/2 KQ2H12-04lS 22 18.2 22.3 15.9 17 58.3 46.1 9 37.7 16 1/4 KQ2H16-02lS 24 23.6 32.5 27.8 20.6 58.3 58.3 9 37.4 3/8 KQ2H16-03lS 24 23.6 33.1 28 20.6 81 67 11 42.4 1/2 KQ2H16-04lS 24 23.6 32.1 25.7 20.6 113
6 30 7 5.5 28.5 36 38 51 51.5 55 19 18 22 12 200 to 1000 32 21 11 8 35 9 7.5 23 32 47 54.5 51.5 56 21 20.5 24 16 200 to 1000 40 MM LZ LY LX LT S NN ND NF NE P NB ZZ LS NA Y N WH X Bore size (mm) 55 41 40 5.5 M22 x 1.5 15.0 13 33.5 30 265 26 9 22 20 232 M8 x 1.25 192 1/4 20 55 46.5 40 5.5 M24 x 1.5 19.6 17 37 36.9 270 32 9 27 5.8 to 8.8 20 233 M10 x 1.25 193 1/4 25 60 53 45 6 M30 x 1.5 19.6
Note) Yes 5 8 9 (1) None Note) Except VQZ1000 and metal seal type. (1) (1) Yes Body (1) Yes (W/o indicator light) 5 Base mounted (1) Yes (W/o indicator light) Seal Note 1) Applicable to VQZ2000 and 3000.
lH 55 V-1Od 100 37 40 83 M26Xl .S 21 38 201re
5 @1 !9 w !3 !2 !0 !1 !4 @3 !9 20, 25 Component Parts No. No.
Inch size (mm) T D1 H D3 L1 L2 L3 M L4 Note 1) A Note 2) d Model Weight (g) Lock Unlock Lock Unlock AS22;1F-01-01(S)A 1/8" 7.2 19.1 26.1 (26) 9 (9) AS22;1F-01-03(S)A 5/32" 8.2 13.3 13 1/8 11.6 30.6 29.2 27.5 26.1 19.1 (12.7) AS22;1F-01-07(S)A 1/4" 11.2 20.8 27.8 (27.7) 10 (9) AS22;1F-01-09(S)A 5/16" 13.2 22.4 29.4 (29.3) 14.2 11 (10) AS22;1F-02-01(S)A 1/8" 7.2 20.9 30 (30.3) 18 (19) AS22;
1 !0 o i !6 !7 w e r !8 @1 @6 @5 Cable 0.3 mm2 x 25 pins O.D. 1.4 !9 y t @0 u 10 Seal (Length) Polarity Terminal 015 no.
(Pitch) VT L1 4 L2 VT VP VG Manual override (Non-locking) VP 48.5 [55] 36.1 29.5 VQ 20 VQZ [ ] for AC VZ L plug connector (L) M plug connector (M) VS 12 12 8.5 8.5 17.5 1 1.5 17.5 11.5 P R 53.2 [54.5] P R 36 36 49.2 62.8 (Lead wire length) 4-Rc(PT)1/8 4-Rc(PT)1/8 48.5 [55] 300 (P/R port) (P/R port) 300 59.6 [66.1] (Lead wire length) 36.1 48.5 [55] [ ] for AC Other dimensions are the same
2 3/4 3/8 1/2 3/4 3/8 1/2 3/4 3/8 1/2 3/4 3/8 1/2 3/4 3/8 1/2 3/4 Solenoid Plug-In Factor 4.4 5.4 5.7 4.4 5.4 5.7 3.7 4.6 4.8 3.9 4.8 5 3.9 4.8 4.9 2.2 2.7 2.8 Time (ms) Single NVFS5100 45 or less 2 Position Double NVFS5200 25 or less Closed Center NVFS5300 55 or less Exhaust Center NVFS5400 55 or less 3 Position Pressure Center NVFS5500 55 or less Perfect (Double Check) NVFS5600 60 or less
8 13 M6 x 1 6 10 27 16 94 4 4 4 6.5 26 146 190 46 32.5 15 4 M12 x 1.25 40 24 35 16 G 1/4 14 M6 x 1 6.5 13 27 16 105 4 4 4 9 30 163 213 52 38 17 4 M16 x 1.5 50 32 40 20 G 1/4 15.5 M8 x 1.25 8 16 31.5 16 106 6 4 5 10.5 37 179 244 65 46.5 24 5 M16 x 1.5 63 32 45 20 G 3/8 16.5 M8 x 1.25 8 16 31.5 16 121 6 4 9 12 37 194 259 75 56.5 24 5 M20 x 1.5 80 40 45 25 G 3/8 19 M10 x 1.5 10 21 38 16 128
0 @1 r ye t !4 !7 !3 wu !8 @0 @2 @3 !6 q !5 !9 i *1 *1 C95K32 A A-A A !2 !
4" 1/8" 3/8" 3/8" 1/4" 1/4" 1/4" 1/2" 1/2" 3/8" 1/4" 3/8" 1/4" 3/8" 3/4" 3/4" 3/4" 1/2" 3/8" 1/2" 1/2" 3/8" 1/4" 1/4" 1" 1" 1" 1" 3/4" 1/2" 3/4" 3/4" 1/2" 3/8" 1/4" 1/4" 16 9 17 10 33.5 29.5 9 16 16 9 19.5 16 19.5 19.5 16 34.5 30.5 29.5 33.5 37 32.5 44.5 37 44.5 45.5 38 10 17 17 10 22.5 17 22.5 22.5 17 30.5 34.5 38 33.5 47.5 38 47.5 48.5 39 16 11 11 16 16 11 21 16 21 21 16 20 14 14 20 20
5 stroke 156.5 M30 x 1.5 30.5 1/2 98 45 20 110 273 75 40 133 296 112 9 1/ 5 stroke 178.5 M30 x 1.5 30.5 1/2 98 45 30 110 283 75 40 133 306 118 9 1/ 5 stroke 194.5 M36 x 1.5 34.5 3/4 106 50 25 120 301 75 40 141 322 The minimum stroke with rod boot is 30 mm or more.
22 18 14 12 10 8 21.5 15 15 15 171 137 135 131 50 45 45 41 27 25 25 21 20 20 20 10 8 8 8 30 28 28 25 104 102 102 3.2 3.2 3.2 55 40 40 40 75 55 55 55 21 19.5 19.5 15.5 M10 x 1.25 M8 x 1.25 M26 x 1.5 M20 x 1.5 4 4 4 7 6.8 6.8 1/4 1/8 1/8 16 13 13 11 8 8 M26 x 1.5 M10 x 1.25 23 10 8 3.2 134 M32 x 2 M14 x 1.5 With air cushion Relief port M5 x 0.8 H A K F AL Width across flats B1 H1 H2 GC GA
M8 x 1.25 M10 x 1.5 M16 x 2 M20 x 2.5 M20 x 2.5 M22 x 2.5 19 26 21 34 37 44 50 56 66 M5 x 0.8 1/8 1/8 1/4 1/4 1/4 3/8 86 107 120 138 150 171 198 5 6.5 8.5 9.5 12.5 15 20 106 128 155 178 195 221 248 25 30 36 45 55 68 87 21 24 30 36 46 53 65 16 26 28.5 34.5 40 46.5 54 20 21 35 40 45 50 50 29 33 38 46 55 66 86 39 43 49 59 71 82 106 12.5 18 19.5 23.5 28 34.5 36 Up to 800 Up to 800 Up to 1000
(Set the maximum allowable load so that it does not exceed the following percentages of the theoretical output: 40% for 20, 50% for 25 and 32, 55% for 40 and 60% or less for 50, respectively.) 400 Guide Cylinder/Compact Type Series MGC Construction: With Rear Plate t q $3 @2 !5 @6 #1#2 #3 !8 y e $2 !7 i !3 o !6 u !9 w #9 @5 $1 @7 @4 #8 #0 @9 @8 r !4 #6 #7 @3 #5 $0 #4 $4 !1 !2 !
1 !3 @2 q $4 #3 #1 #0 @1 $2 !7 @5 #8 #6 #4 @6 @7 @8 @4 Auto switch $1 #5 #9 #8 #2 @3 !9 $0 $2 !1 !8 !6 #7 !0 @9 A @0 !5 A !