Guide Cylinder Series MGG

7 @2 @3 @4 r y e #7 u o !1 i w !8 #4 !6 A #2 !0 !9 @0 @1 #1 A' Ball bushing bearing #5 @5 #0 @8 !7 @6 !3 #8 !2 @1 !0 @9 Slide bearing y Long stroke 100 @7 80, 100 View A-A Component Parts Component Parts Description No. Description No.

Aluminum High Vacuum Angle Valve

No. 1 2 2-1 3 4 5 6 7 8 8-1 8-2 9 10 O-ring Part No.

MB1

7 i o A A' Cylinder tube sectional view A-A' !0 !1 Parts list No. q w e r t y u i o !0 !1 !2 !3 No. !4 !5 !6 !7 !8 !

Modular Type Regulators Series AR

Pressure gauge port size Port size Model AR425/435 AR625/635 AR825/835 AR925/935 80 98 126 160 145.5 155 216 241 3 7 5 10 1/4 1/4 1/4 1/4 1/4, 3/8, 1/2 3/4, 1 1 , 1 2 39.5 43 75 90 46.5 85 48 52 80 90 B24P B25P 67 78 110 140 73 78.5 94.5 4 1 2 1 109.5 464 SP093-001I Issued: Sep 2009 P.G.

21

2A 2B 2C 3 4 5 6 7 8 9 10 11 12 13 14 Anodized Anodized Anodized Anodized Chromated Hard chrome plated 1.

Brake mechanism added

90 (n = 2, 4, 6, 8 ) Note 1) 90 + 55 (n = 4, 8, 12, 16 ) Note 2) 100 + 55 (n 4) 2 (n = 4, 8, 12, 16 ) Note 2) 110 + 55 (n 4) 2 (n = 4, 8, 12, 16 ) Note 2) 120 + 55 (n 4) 2 (n = 4, 8, 12, 16 ) Note 2) 20 + 55 (n 2) 2 (n 4) 2 D-A59W n (Same surface) 1 100 110 120 15 90 2 (Different surfaces, Same surface) 1 120 130 140 25 110 D-F5NT (n = 2, 4, 6, 8 ) Note 1) 110 + 55 (n = 4, 8, 12, 16

One-touch Fittings

[inch] Weight [g] With a rib Nylon Urethane 1/8 10-32UNF KQ2L01-32l 7 7.1 7 15.3 14.2 14.8 13.3 2.6 2.2 2.5 3 V 5/32 10-32UNF KQ2L03-32l 7 8.2 7 15.4 14.7 15.8 13.3 3.5 3.5 2.5 3.1 V 3/16 10-32UNF KQ2L05-32l 7 9.1 7 14.5 15.8 17.4 13.3 3.5 3.5 2.5 3.2 V 1/4 10-32UNF KQ2L07-32l 7 11.1 7 15.4 16 18.6 13.3 3.5 3.5 2.5 3.5 V L1 Metric Size M, R, Rc Inch Size UNF, NPT Inch Size M, R, Rc Metric

High Power Cylinder Series RHC

44 27 53 9 7 16 18 12 36 22 8 200 to 700 25 19.5 6 51.5 55 72 50 33 55 9 7 19 18 12 44 22 9 200 to 1000 32 21 8 51.5 56 84 60 36 66 9 9 21 20.5 16 53 24 11 200 to 1000 40 NN ND NF NE NC K NB JD NA JC WH N ZZ P 1/4 I MM S H Bore size (mm) M22 x 1.5 15.0 13 33.5 5.5 5 30 30.5 26 43 22 252 26 44 M8 x 1.25 192 20 1/4 M24 x 1.5 19.6 17 37 5.5 5.5 36.9 25.5 5.8 to 8.8 32 39 27 257 31 48 M10 x

Series CQS 10-/21- 11-/22- ø12, ø16, ø20, ø25 Compact Cylinder

0.8 (Piping port) M5 x 0.8 (Relief port) 5.5 2 x 5.4 through M10 x 1.25 52 1 12 28 40 Rod end nut 15 Flat washer 19.6 10 17.5 7 7 10 28 32.5 + Stroke 22.5 40 55 + Stroke 17 6 Note 1) Standard strokes available in 5 mm increments.

CS1

1 !2 !3 !4 !5 !6 !7 !8 !

CLK1

Hs (mm) Symbol BX BY D F GA GB IA K L M N S W Wc Ws Z ZZ Hs Bore size 40 56 54 16 44 77 10 47 14 55 M12 x 1.5 86 112.5 5 39 27.5 114 228 46 50 64 64 20 55 78.5 10 58 17 58 M16 x 1.5 87.5 117 7 41 33 118.5 232.5 50 63 74 74 20 69 82 12 72 17 58 M16 x 1.5 91 120.5 5.5 48 39 122 236 56 Unclamp side lock (F) 3-Rc 1/4 Unclamp side port 3-Rc 1/4 Clamp side port Rear cushion valve Top width across

5 Port Solenoid Valve

(Stations 4 to 5) 1 set Valve part no. (Stations 6 to 7) 1 set Blanking plate part no.

Shock Absorbers and Rate Controls

Olill3.0iltx5(fl{Sl 5.0 18.8{ 7 { t + 010/.0M 7 q l + 010/ m l . +.0050 /..010 r.50 .630 +.AN/-.0n0 3.881.50 1.50 L40 |.06 il/A .90 0Eltll3.()ilx6.5(.lt(S) 6.5 22.59 7 5 1 *.oi 7. ooo .t 5l + 0t0/.1 -h9^q {0 L + 00150 / 010 1.50 3.56 .630 +.020/-.000 3.88 1.501.501.40r.06 t.ii N/A .90 33.6 lbs.

Air Combination

8 83.2 87.6 71.8 41.6 40 21 5 30 24 33 5.5 11.5 3.5 29 38 1/8, 1/4 AC30D-D 1/8 110.2 115.3 86.5 30 55.1 55 26.5 3.5 41 35 7 14 6 42.5 42.5 1/4, 3/8 AC40D-D 1/8 145.2 147.1 91.5 38.4 72.6 80 35.5 0 50 40 55 9 18 7 50 65 1/4, 3/8, 1/2 AC40D-06-D 1/8 155.2 149.1 93 38.4 77.6 80 35.5 0 50 40 55 9 18 7 50 65 3/4 Options Semi-standard specifications Metal bowl with Digital level gauge With auto

mb1

13 13 14 14 20 20 13 14 15.5 16.5 19 19 47 51 58 58 72 72 4 4 5 5 5 5 M6 x 1 M6 x 1 M8 x 1.25 M8 x 1.25 M10 x 1.5 M10 x 1.5 6 6 7 7 10 10 M10 x 1.25 26.5 26.5 31 31 37.5 37.5 1/8 1/4 1/4 3/8 3/8 1/2 84 84 94 94 114 114 4 4 5 9 135 139 156 156 190 190 46 52 65 75 95 114 22 30 35 35 40 40 9 6.5 Up to 500 Up to 500 Up to 600 Up to 600 Up to 800 Up to 800 10 14 18 18 22 26 M14 x 1.5 10.5 M18

70astamb1

D-Y7P/Y7PV 6.5 6.5 6 7 7 8 15 25 D-Y7P/Y7PV 1 D-Y7W/Y7WV 6.5 6.5 6 7 7 8 2 (Different sides, Same side) Solid state switch D-Y7W/Y7WV 20 25 1 5 5 5 5 6 D-Y7BAL 5 2 (Different sides, Same side) 20 30 1 D-Y7BAL Center trunnion is not included.

58

7 @0 t e o r !8 !4 !3@1 !2 w !1 Description Component Parts Component Parts Note Description Material No. Material Note No.

5 Port Pilot Operated Solenoid Valve VFS1000/2000/3000/4000/5000/6000 Series

2 3/4 3/8 1/2 3/4 3/8 1/2 3/4 3/8 1/2 3/4 3/8 1/2 3/4 3/8 1/2 3/4 Solenoid Plug-In Factor 4.4 5.4 5.7 4.4 5.4 5.7 3.7 4.6 4.8 3.9 4.8 5 3.9 4.8 4.9 2.2 2.7 2.8 Time (ms) Single NVFS5100 45 or less 2 Position Double NVFS5200 25 or less Closed Center NVFS5300 55 or less Exhaust Center NVFS5400 55 or less 3 Position Pressure Center NVFS5500 55 or less Perfect (Double Check) NVFS5600 60 or less

Hydraulic Cylinders

49 1/8 17 8 32 M12 x 1.75 11 depth 6.5 61 51 10 18 14 15 7 47 6.6 63 1/4 19.5 10 40 M16 x 2 14 depth 8.6 65 55 10 22.4 19 20 7 52 9 71 1/4 20.5 10 50 M20 x 2.5 17.5 depth 10.8 71 60 11 28 24 24 8 58 11 81 1/4 22 10 63 M27 x 3 20 depth 13 80 67 13 35.5 30 33 9 69 13 97 1/4 25.5 10 80 M30 x 3.5 23 depth 15.2 95 78 17 45 41 36 14 86 15 117 3/8 30 15 100 M39 x 4 26 depth 17.5 122 96 26 56 50

2/3 Port Valve

210 220 130 140 90 90 55 70 45 23 18 0.3 0.4 7 3 8 0.6 0.7 1 2 3 4 0.9 1.0 1.4 1.5 1 1 4 1 2.5 2.6 5.7 5.8 32 1 2 1 4.1 4.2 7.7 7.8 40 Symbol 6.3 6.4 2 N.C.