33 72 12 8 53 8 9 40 7.5 M14 x 1.5 13 36 21 40 34 f8 to 800 24 60 24 41 18 21 9 9 66 36 84 14 11 54 10 11 48 7.5 M16 x 1.5 19 44 21 (mm) Bore size (mm) P NB NC NN S ZZ 20 19 15 M22 x 1.5 1/8 81 138 25 19 15 M24 x 1.5 1/8 81 143 32 M30 x 1.5 19 15 1/8 87 159 40 1/4 M33 x 2 24 21 108 183 50 Series CHM Dimensions Rear flange type: CHMG GA N Rc P 2-NN Width across flats B2 H2 GB N Rc P 4-FD
+ Stroke 41 84.5 Retraction locking LOCK 30.5 Pc PL Port thread type Rc NPT G 1/8 1/4 M5 x 0.8 Dust cover (Manual unlocking unit) PL unlocking port Unlocks when pressurized Rod end male threads M18 x 1.5 11 26 28.5 33.5 Rod end nut 11 Compact Cylinder with Air Cushion and Lock Series RLQ Dimensions/63 (Emergency Stop) Foot type/RLQL63 41 55 + Stroke 18 46 91.5 Special cap bolt 5 3.2 95
@2, @3, @4, #2, #3, $1, $2 Seal kit includes @1 to @4, #2, #3, $1, $2.
SW Enable SW SW 12 Unit name W 1 W-AREA1 W 1 AREA ON (mm) W 12 AREA ON + *W 1>=W 2 ,PARA W 1=W 2=0 AREA OFF W 2 W-AREA2 W 2 + ORG Correct * Sensor type * 1 (CC-Link () 1 (CC-Link ) ) () Option 1 1 (1 ) 14 (Occupied number of stations of CC-Link) 2 (2 ) 4 (4 ) CC-Link (CRC ) 11 CC-Link 11 CC-Link CC-Link 0 () UndefineN o.11 0,10 (Operation setting at CC-Link communication
x 10-6 Operating pressure Pa Main exhaust valve 14 45 80 160 200 Conductance l/s Note 1) Initial exhaust valve 0.5 to 3 2 to 8 2.5 to 11 4 to 18 4 to 18 1.3 x 10-10{1 x 10-10} at ambient temperatures, excluding gas permeation Internal Leakage Pam3/s 1.3 x 10-11{1 x 10-11} at ambient temperatures, excluding gas permeation External Main exhaust valve 0.10 0.21 0.24 0.26 0.28 Operating time
Material Description AXT335-1-11(M4 x 40) VF4000-20-1 VFR41 VF4000-20-1 VFR42 AXT335-1-11(M4 x 40) VF4000-20-1 VFR43/44/45 NBR Hexagon socket head screw Gasket o AXT335-1-11(M4 x 40) Refer to How to Order Pilot Valve Assembly on page 3-5-54. Refer to How to Order Sub-plate Assembly on page 3-5-55. Steel !0 !
Opposite side: Same) 2-M5 x 0.8 depth with 4.5 (Piping port) (Opposite side: Same) 3 8 6 22.5 11 Z (10 + 1/2 ST) (13) 4 (mm) Z S SS ZZ Stroke Model 10 15 23 55 68.5 CXS6-10 20 20 33 65 78.5 CXS6-20 30 25 43 75 88.5 CXS6-30 40 30 53 85 98.5 CXS6-40 50 35 63 95 108.5 CXS6-50 15 Series CXS Dimensions: 10, 15 Stroke ZZ SS 9 J D B M Y (Hexagon socket head set screw) L Z I 1 1 G 0.2 (G) H A P 6.3
lJlO 11 4 120 90 15 158 132 1 84 26 13.5 24 17 75 100 129 2S +
VKF (A) 2 (A) 2 X X VQZ 1 (P) 3 (R) 1 (P) 3 (R) VZ VS VFN 4-4-55 56 Series SYJ300/500/700 Specific Product Precautions 1 Be sure to read before handling.
x 10-6 up to atmospheric pressure Operating pressure (Pa)(abs) Main exhaust valve 14 45 80 160 200 Conductance (L/s) Note 1) Initial exhaust valve 0.5 to 3 2 to 8 2.5 to 11 4 to 18 4 to 18 1.3 x 10-10 {1 x 10-10} at ambient temperatures, excluding gas permeation (Standard material: FKM) Internal Leakage (Pam3/s) 1.3 x 10-11 {1 x 10-11} at ambient temperatures, excluding gas permeation (Standard
TAISEI 5. 10mUL 11 23 11 11.6 () 1 (2) (1) AC AC LECSS-S5 30A5A 30A5A 10A LECSS2-S7 30A5A 30A5A 10A 300V S-N10 240V T LECSS1-S7 30A10A 30A10A 15A LECSS2-S8 30A10A 30A5A 15A 1. UL/C-ULK5 2. 80ms 11 24 11 11.7 (1) (a) () SD 1 (3.12) (b) ( ) (c) () 11 25 11 M 1. 2. 3. () 4. 5. 1. 2. 3. () 4. 1.()(FR-BIF-(H)) 2.
8 52 41 D-9 5 23 Reed switch D-A73C D-A80C 12 54 D-9lA 9 47 Reed switch 2 wire D-A79W 11 53 10 47 D-E7lA D-E8lA 2 wire 3 wire D-J7 11 50 11 55 3 wire 2 wire 13 57 9 49 D-Z7 D-Z8 Solid state switch D-F7 4 wire 3 wire 13 56 10 55 2 wire 1 D-J79C 13 52 9 50 3 wire color 10 53 D-Yl 2 wire 2 11 54 3 wire color 11 54 2 wire 14 53 D-M5 Solid state switch 3 wire 16 60 D-Y7BA 54 1 2 wire 6 31 color
41.5 42 46.5 47 48 34.5 36.5 34.5 37 35 40 36 41 41.5 43.5 45.5 46 1 8 17.5 2.5 15.5 10 9.6 Applicable tubing 1 4 1 8 5 32 18 3 16 10.4 10 1 4 1 8 1 4 3 16 11.4 19.5 3.5 16.5 10 1 8 1 4 3 8 13.2 20.5 4.6 17 1 4 10 1 8 1 4 3 8 5 16 15.2 23.5 6 18.5 12 Connection thread 97 55 59 55.5 55 55.5 54.5 52 52.5 1 4 17.46 3 8 1 2 3 8 25.5 7 17.9 21 17 22.23 64 64 1 4 9 17.46 54 3 8 1 2 21.7 28 22
(P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) X X X X X 1.2-72
CKZ-50A013 CKZ-50A014 CKZ-50A015 NAAMS code ACA221M ACA222M ACA223M 55.0 85.0 115.0 50 mm Offset-Machined 50 mm Offset-Machined A A B B C C 6H6 through +0.008 0 8F7 through +0.028 +0.013 D D E E F F 200.03 200.03 10 G G 10 300.025 300.025 300.025 300.025 9 through 11 through H H I I J J 250.05 250.05 45 45 M6 x 1.0 M6x 1.0 750.05 750.05 R25 R25 6.5 6.5 10 10 1 1 1 1 R25 R25 18 18 19 19 19
Open Closed Open Closed Open Closed Open Closed Open Closed Open Closed Open Closed Open Closed Open Closed Open Closed Open Closed No setting No setting MHZ2-6 1 7.5 6 4 1 3 2 6.5 5 3 2 1 No setting No setting No setting No setting No setting MHZ2-10 No setting 1 4 2 11 13 5 7 2 5 3 2 2 9 11 3 5 3 1 MHZ2-16 Standard With dust cover Long stroke Double acting Single acting
No setting No setting No setting MHZ2-10 No setting 1 4 2 11 13 5 7 2 5 3 2 2 9 11 3 5 3 1 MHZ2-16 Standard With dust cover Long stroke Double acting Single acting (Normally open) Single acting (Normally closed) 2 4 1 3 2 3 2 1 No setting MHZ2-20 MHZ2-25 MHZ2-32 MHZ2-40 16 18 12 16 9 14.5 3 11 9.5 MHZJ2-6 No setting No setting MHZJ2-10 No setting No setting MHZJ2-16 3 2
60 65 40 45 50 55 60 65 45 50 55 60 65 70 75 80 85 90 50 55 60 65 70 75 80 85 90 95 30 35 40 45 50 55 30 35 40 45 50 55 35 40 45 50 55 60 65 70 75 80 40 45 50 55 60 65 70 75 80 85 CQ-M3 x 40L x 45L x 50L x 55L x 60L x 65L CQ-M3 x 40L x 45L x 50L x 55L x 60L x 65L CQ-M5 x 45L x 50L x 55L x 60L x 65L x 70L x 75L x 80L x 85L x 90L CQ-M5 x 50L x 55L x 60L x 65L x 70L x 75L x 80L x 85L x 90L
B L2 Q L1 H 1(P) 2(A) L3 L4 L5 L6 C D E F G J K 1(P) R 2(A) 2(A) R 3(R)* VHK-01S-M5 VHK-M5-M5 11 41 1.2 26 23 11 3.5 11 M5 M5 M5 18 29.1 16.5 VHK-B1A 29 29.1 44.5 14.5 1 27 22 16.5 26 61.6 58.2 2.0 2.0 54 51 1 8 11 41 8.6 1.2 13 3.5 18 32.6 16.5 13 VHK-B1A 44.5 14.5 1 27 22 16.5 26 VHK-01S-01S 1 8 1 8 30 32.6 65.2 57 VHK-02S-01S 18 41 71.6 39 32.6 39 78 16.5 3.5 11 9.0 9.7 1.2 39 13 47 62
1 o !1 i Component Parts r r No.