Electric Slide Tables 7 i y r w e #0 @9 @7 @8 @2 @0 u D A A D C-C D-D B-B @5 @4 !9 !1 !5 #1 q C B C B !4 !2 !0 !8 @1 !6 t o @3 @6 !3 Component Parts No. Description Material Note 1 2 3 4 5 6 7 8 9 No.
2 1/2 205 202 11 90 262 20 146 9 18 108 55 31 9 15 276 262 26 Series IDG1 I N SMC SMC SMC 2 SMC 202 60 Port size 1/8, 1/4 119 41.5 30 Dew point indicator (Option: S) 5.5 29 24 24 67 OUT IN 10 116 Drain Discharge 9 133.5 140 136 97 With float type auto-drain (N.C.) 3.2 5.5 Purge air for dehumidification 12
Note 2) 3 VV5Q11-09C6FU2 VQ1100-51 VQ1200-51 VVQ1000-10A-1 1 set (F kit 9-station manifold base part no.) 4 sets (Single solenoid part no.) 4 sets (Double solenoid part no.) 1 set (Blanking plate part no.)
I J 8 16 8.7 37 1.5 16.7 6H9 depth 6 +0.030 0 2 x M8 x 1.25 thread depth 9 6H9 depth 6 +0.030 0 20 6.7 N x M6 x 1 thread depth 11 7 1.5 38 40 84 44 36 74 22 6.5 F 3 4 x M6 x 1 thread depth 10 -1 x F 2 N 21.5 30 3 x M8 x 1.25 thread depth 15 NA x M8 x 1.25 thread depth 8 M 15 KA 31 Bottom view of MXQR25-75 K 15 8 31 65 22 50 15 8 49.5 0.5 8 55 Z ZZ G (NN-1) x H H 33.4 10.1 33.4 10.1 A B 6H9
H: M8 x 1 Model A B C K L Y D E G D E G H: M5 x 0.8 H: M6 x 1 G I G I ZF ZPT20B 20 25 22 27 ZPT06B 6 8 7 9 3.3 4.7 9.1 10.1 2.5 3 20 7 4 21 8 4 ZPT08B 49.5 50 55 ZPT32B 23.5 24 29 28.5 29 34 54.5 55 60 33.5 34 39 12.4 15.6 25 28 10.5 10.5 14 3 25 8 3.5 15 12 ZPT25B 32 34 18.9 37 ZP ZCU AMJ 10, 13, 16 Size 40, 50 Size Bellows Bellows Misc.
H: M8 x 1 Model A B C K L Y D E G D E G H: M5 x 0.8 H: M6 x 1 G I G I ZF ZPT20B 20 25 22 27 ZPT06B 6 8 7 9 3.3 4.7 9.1 10.1 2.5 3 20 7 4 21 8 4 ZPT08B 49.5 50 55 ZPT32B 33.5 34 39 54.5 55 60 28.5 29 34 23.5 24 29 12.4 15.6 25 28 10.5 10.5 14 3 25 8 3.5 15 12 ZPT25B 32 34 18.9 37 ZP ZCU AMJ 10, 13, 16 Size 40, 50 Size Bellows Bellows Misc.
68 M5 27 7 22 M5 7 16 10 26 40 26 4 16 26 6.6 2.8 8 38 60 73 M5 29 7 22 M5 7 16 15 32.5 46 32 4 30 32.5 7 5 10 50 64 32 79 M6 33.5 7 24.5 M6 9 18 17.5 38 52 36 4 35 38 9 5 10 55 72 36 90 M6 38 10 26 M6 9 21 20 46.5 64 45 5 40 46.5 9 6 12 70 90 45 110 M8 45 10 31 M8 9 21 22.5 56.5 74 50 5 45 56.5 9 6 12 80 100 50 120 M8 50 10 31 M8 Single clevis bracket Hexagon socket head cap screw (accessory
/m3) Standard product 105 105 105 Standard product 104 104 104 12-CY1B Standard product 103 103 103 12-CXSL 102 102 102 10-CM2 11-CXSL 11-CM2 10 10 10 1 0.1 0.5 1 0.1 0.5 1 1 1 0.1 0.5 1 Particle diameter (m) Particle diameter (m) Particle diameter (m) Front matter 23 Comparison of Cleanliness Standards ISO 14644-1 ISO Cass 1 to 9 Intermediate classes available U descriptor: Particles smaller
No. 1 2 2-1 3 4 5 6 7 8 8-1 8-2 9 10 O-ring Part No.
29.5 7.5 22.5 1/2 KQ2H10-04lS 22 15.6 22.3 15.9 15.6 41.5 29.5 7.5 44.7 10 12 1/4 KQ2H12-02lS 19 18.2 28.7 24 17 58.3 46.1 9 24.3 3/8 KQ2H12-03lS 19 18.2 25.9 20.8 17 58.3 46.1 9 25.2 1/2 KQ2H12-04lS 22 18.2 22.3 15.9 17 58.3 46.1 9 37.7 16 1/4 KQ2H16-02lS 24 23.6 32.5 27.8 20.6 58.3 58.3 9 37.4 3/8 KQ2H16-03lS 24 23.6 33.1 28 20.6 81 67 11 42.4 1/2 KQ2H16-04lS 24 23.6 32.1 25.7 20.6 113
6 30 7 5.5 28.5 36 38 51 51.5 55 19 18 22 12 200 to 1000 32 21 11 8 35 9 7.5 23 32 47 54.5 51.5 56 21 20.5 24 16 200 to 1000 40 MM LZ LY LX LT S NN ND NF NE P NB ZZ LS NA Y N WH X Bore size (mm) 55 41 40 5.5 M22 x 1.5 15.0 13 33.5 30 265 26 9 22 20 232 M8 x 1.25 192 1/4 20 55 46.5 40 5.5 M24 x 1.5 19.6 17 37 36.9 270 32 9 27 5.8 to 8.8 20 233 M10 x 1.25 193 1/4 25 60 53 45 6 M30 x 1.5 19.6
Note) Yes 5 8 9 (1) None Note) Except VQZ1000 and metal seal type. (1) (1) Yes Body (1) Yes (W/o indicator light) 5 Base mounted (1) Yes (W/o indicator light) Seal Note 1) Applicable to VQZ2000 and 3000.
lH 55 V-1Od 100 37 40 83 M26Xl .S 21 38 201re
5 @1 !9 w !3 !2 !0 !1 !4 @3 !9 20, 25 Component Parts No. No.
Inch size (mm) T D1 H D3 L1 L2 L3 M L4 Note 1) A Note 2) d Model Weight (g) Lock Unlock Lock Unlock AS22;1F-01-01(S)A 1/8" 7.2 19.1 26.1 (26) 9 (9) AS22;1F-01-03(S)A 5/32" 8.2 13.3 13 1/8 11.6 30.6 29.2 27.5 26.1 19.1 (12.7) AS22;1F-01-07(S)A 1/4" 11.2 20.8 27.8 (27.7) 10 (9) AS22;1F-01-09(S)A 5/16" 13.2 22.4 29.4 (29.3) 14.2 11 (10) AS22;1F-02-01(S)A 1/8" 7.2 20.9 30 (30.3) 18 (19) AS22;
(Pitch) VT L1 4 L2 VT VP VG Manual override (Non-locking) VP 48.5 [55] 36.1 29.5 VQ 20 VQZ [ ] for AC VZ L plug connector (L) M plug connector (M) VS 12 12 8.5 8.5 17.5 1 1.5 17.5 11.5 P R 53.2 [54.5] P R 36 36 49.2 62.8 (Lead wire length) 4-Rc(PT)1/8 4-Rc(PT)1/8 48.5 [55] 300 (P/R port) (P/R port) 300 59.6 [66.1] (Lead wire length) 36.1 48.5 [55] [ ] for AC Other dimensions are the same
2 3/4 3/8 1/2 3/4 3/8 1/2 3/4 3/8 1/2 3/4 3/8 1/2 3/4 3/8 1/2 3/4 Solenoid Plug-In Factor 4.4 5.4 5.7 4.4 5.4 5.7 3.7 4.6 4.8 3.9 4.8 5 3.9 4.8 4.9 2.2 2.7 2.8 Time (ms) Single NVFS5100 45 or less 2 Position Double NVFS5200 25 or less Closed Center NVFS5300 55 or less Exhaust Center NVFS5400 55 or less 3 Position Pressure Center NVFS5500 55 or less Perfect (Double Check) NVFS5600 60 or less
8 13 M6 x 1 6 10 27 16 94 4 4 4 6.5 26 146 190 46 32.5 15 4 M12 x 1.25 40 24 35 16 G 1/4 14 M6 x 1 6.5 13 27 16 105 4 4 4 9 30 163 213 52 38 17 4 M16 x 1.5 50 32 40 20 G 1/4 15.5 M8 x 1.25 8 16 31.5 16 106 6 4 5 10.5 37 179 244 65 46.5 24 5 M16 x 1.5 63 32 45 20 G 3/8 16.5 M8 x 1.25 8 16 31.5 16 121 6 4 9 12 37 194 259 75 56.5 24 5 M20 x 1.5 80 40 45 25 G 3/8 19 M10 x 1.5 10 21 38 16 128
0 @1 r ye t !4 !7 !3 wu !8 @0 @2 @3 !6 q !5 !9 i *1 *1 C95K32 A A-A A !2 !
4" 1/8" 3/8" 3/8" 1/4" 1/4" 1/4" 1/2" 1/2" 3/8" 1/4" 3/8" 1/4" 3/8" 3/4" 3/4" 3/4" 1/2" 3/8" 1/2" 1/2" 3/8" 1/4" 1/4" 1" 1" 1" 1" 3/4" 1/2" 3/4" 3/4" 1/2" 3/8" 1/4" 1/4" 16 9 17 10 33.5 29.5 9 16 16 9 19.5 16 19.5 19.5 16 34.5 30.5 29.5 33.5 37 32.5 44.5 37 44.5 45.5 38 10 17 17 10 22.5 17 22.5 22.5 17 30.5 34.5 38 33.5 47.5 38 47.5 48.5 39 16 11 11 16 16 11 21 16 21 21 16 20 14 14 20 20