MHZ

Refer to page 12-13-1 for further information on auto switches.

MHZ

Refer to page 12-13-1 for further information on auto switches.

MTS

8 @5 @1 i @8 !4 !5 !2 @9 !3 w Component Parts Qty. 2 1 1 2 1 1 3 1 1 1 1 1 2 1 2 2 1 1 Note 8 12 to 40 Qty. 1 1 1 1 1 1 1 1 1 1 1 1 2 1 1 1 Note Clear anodized Clear anodized Hard anodized Chromated Chromated 8: Quenched Description Material Description Rod cover Head cover Cylinder tube Piston Spacer for switch type Material No. q w e r t No. Aluminum alloy !

Stability of suction position,

1 o !1 i Component Parts r r No.

IDG

Port size: Rc 1/8, 1/4 (NPT, G threads are not available.)

JXCx-OMT0061CN

0 0 0 100 0 0 0.1 () 1No.1(IN0ON) / 2DRIVEON (2)(5)(10)(13) No.1 DRIVE (1) No.

ZP

ZP3-(10/13/16)UM; ZP3-(10/13/16)B; ZP3-(10/13/16)UM; ZP3-(10/13/16)B; ZP3-(10/13/16)UM; ZP3-(10/13/16)B; ZP3-(10/13/16)UM; ZP3-(10/13/16)B; ZP3-(10/13/16)UM; ZP3-(10/13/16)B; ZP3B-Y2B(J/K)3-B5 Note 1) ; in the table indicates the pad material.

High Power Cylinder:

) AS3000, AS3500 (12.3) AS4001F (16) AS32l0 (13) AS3000, AS3500 (12.3) AS4000 (25.5) AS5000 (74) AS5000 (74) AS5000 (74) AS32l1F (10) AS33l1F (10) AS4001F (16) AS32l0 (13) AS3000, AS3500 (12.3) AS4000 (25.5) AS5000 (74) AS5000 (74) AS5000 (74) AS420 (74) 1-A 1-B 1-C 2-A 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 2-B 2-B 1-A 1-B 1-C 2-A 2-B 1-C 2-A 2-B 2-B

SQ1000/2000

COM COM 25 26 COM COM 1 2 3 4 5 6 7 8 9 10 11 12 13 23 24 14 15 16 17 18 19 20 21 22 23 24 25 21 22 19 20 19 20 19 20 17 18 17 18 17 18 15 16 15 16 15 16 13 14 13 14 13 14 11 12 11 12 11 12 9 10 9 10 9 10 7 8 7 8 7 8 5 6 5 6 5 6 3 4 3 4 3 4 COM 1 2 1 2 1 2 COM COM P kit Flat ribbon cable connector (for 26P) J kit Flat ribbon cable connector (20P) PC Wiring System compatible P kit Flat ribbon

Vacuum Pad

ZP3-(10/13/16)UM; ZP3-(10/13/16)B; ZP3-(10/13/16)UM; ZP3-(10/13/16)B; ZP3-(10/13/16)UM; ZP3-(10/13/16)B; ZP3-(10/13/16)UM; ZP3-(10/13/16)B; ZP3-(10/13/16)UM; ZP3-(10/13/16)B; ZP3B-Y2B(J/K)3-B5 Note 1) ; in the table indicates the pad material.

High Vacuum Angle Valve, XL Series

Dimensions (mm) 1in=25.4mm (b) C D E C E E (a) F (c) Heater (optional) B G A A (mm) D 1 1 2 2 C 38 48 66 79 B 100.5 114 162.5 179.5 F 30 40 55 75 A 40 50 65 70 G 17 26 41 52 E Note 1) Model XLH-16 XLH-25 XLH-40 XLH-50 12 11 11 Note 1) Dimension E applies when heater option is included.

Silencers/Exhaust Cleaner Series AN
/Series AMC 1

AMC520 12 16 55 Note 1) On the type for the AMC220, an R 1/4 fitting can be attached by removing the drain cock.

SMC Electronic Switch Series Variations

trimmer 1 Pressure setting trimmer 2 SET2 SET2 SET1 SET1 15 15 Indicator light Indicator light 23 23 8.5 Lead wire length 600 Lead wire length 600 (3000) 9.5 1.5 (3000) 47.5 47.5 3.5 3.5 2-3.5 Mounting hole 2-3.5 Mounting hole 8.5 13 M5 X 0.8 M5 X 0.8 13 01: R(PT) 1/8 T1: NPTF 1/8 01: R(PT) 1/8 T1: NPTF 1/8 3.9-4 Quick response 10mS Easy and simple wiring Compact Pressure Switch Series ZSE2

Guide Cylinder Series MGG

37 55 182 M14 x 2 depth 25 For long strokes Bracket mounting strokes Bore size (mm) Stroke range (mm) Bore size (mm) Bracket mounting stroke Bore size (mm) O P Y Z Y X W V U T S R Q R 20 25 32 40 50 20 25 32 40 50 20 25 32 40 50 100mm or more Rc 1/8 M6 x 1 depth 9 88 157 80 30 40 48 82 12 26 12 250 to 400 14 21 Rc 1/8 M6 x 1 depth 13 88 125mm or more 175 80 37 46 57 100 13 31 12 350 to 500

Speed Controller with Indicator

Inch Size [mm] Model d T (R, NPT) H D1 D3 L1 L2 L3 L4 Note 1) A Note 2) M W1 W2 X Y Weight [g] Unlocked Locked Unlocked Locked AS221FS-01-01 (S) 1/8" 7.2 12 19.1 26.2 19.1 43.9 42.4 40.8 39.3 13.3 20 21.5 6.5 15 13 (13) AS221FS-01-03 (S) 5/32" 8.2 AS221FS-01-07 (S) 1/4" 11.2 20.8 27.9 14 (13) AS221FS-01-09 (S) 5/16" 13.2 22.4 29.5 14.2 15 (14) AS221FS-02-01 (S) 1/8" 1/8 13 (12.7) 7.2 20.9

7

Description Material Qty Note 18 19 20 21 22 23 24 25 26 27 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 Rod cover Tube cover Piston Piston rod Bushing Cushion valve Speed controller valve Clevis bushing Coil scraper Rod seal Piston seal Tube gasket Magnet holder Magnet Switch mounting rod Chromated Hard anodized Chromated 1 1 1 1 1 1 1 2 1 1 1 1 1 1 2 2 4 1 2 2 1 1 1 1 2 Phosphor bronze NBR

ARM10/11

OUT fitting type AMR Inch size Metric size Straight Elbow Straight Elbow Symbol Symbol 4 5/32 6 1/4 ITV 4 6 5/32 1/4 04 05 16 17 54 55 66 67 Note 1) A pressure gauge with a full span of 0.4 MPa is attached. Note 2) The oil-free type has nongreased fluid contact areas. IC VBA A ARM11B 1 A R 1 06 Z Individual supply type VE 1 2 3 4 5 6 1.

ARM10/11

OUT fitting type AMR Inch size Metric size Straight Elbow Straight Elbow Symbol Symbol 4 5/32 6 1/4 ITV 4 6 5/32 1/4 04 05 16 17 54 55 66 67 Note 1) A pressure gauge with a full span of 0.4 MPa is attached. Note 2) The oil-free type has nongreased fluid contact areas. IC VBA A ARM11B 1 A R 1 06 Z Individual supply type VE 1 2 3 4 5 6 1.

VFS

0.20 0.21 0.20 0.23 0.25 0.24 0.20 0.22 0.16 0.18 0.16 0.18 0.14 0.18 0.15 0.20 0.11 0.17 0.65 0.65 0.65 0.65 0.61 0.62 0.63 0.63 0.62 0.63 2 position 3 position 15 or less 0.34 Single 1200 VFS2100 1 4 VFR 1 8 Double 1200 13 or less 0.42 VFS2200 VFS2210 1 4 1 8 1 4 1 8 1 4 1 8 1 4 1 8 1 4 VP4 Closed center Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080

Auto Switch Guide

(Including nut, screw, (spacer)) Applicable bore size (mm) 12 BQ-1 BQ-1 Cylinder series 40 BQ-2 BMU1-025 80 BQ-2 32 BQ-2 BMU1-025 50 BQ-2 BMU1-025 100 BQ-2 25 BQ-1 BMU1-025 140 BQ-2 160 BQ-2 125 BQ-2 BQ-1 20 63 BQ-2 BMU1-025 16 BQ-1 CDQ2 MDU RSDQ MK, MK2 CE1 CXT BQ-1 BQ-2 BQ-1 BQ-2 BQ-2 BQ-2 [Mounting screws set made of stainless steel] The set of stainless steel mounting screws (with nuts