High Vacuum Angle Valve No. 1 2 2-1 3 4 5 6 7 8 8-1 8-2 9 10 O-ring Part No.
22 $1 e $8 o $7!1@1!6 @5 u!0 $6 #7 #6 $4@8#9 @6 #4 C85 with through piston rod C76 100 80 63 50 40 32 CG1 #1 #2 Section B Section C MB MB1 80, 100 80, 100 CP95 Description Material Note Parts list Description Material Note Parts list No. q w e r t y u i o !
1 2 52.5 55 57.5 57.5 1/8, 1/4 1/4, 3/8 1/4, 3/8 1/2 47.5 50 52.5 52.5 36 (41.5) 47 (55) 51.5 (59.5) 55 3 ( ): Denotes the Normally Open (N.O.) dimensions.
15 20 75 75 + 55 (n 2) (n = 2, 4, 6) D-A3mA/A44A D-G39A D-K39A 10 35 100 100 + 100 (n 2) 35 + 30 (n 2) Note 1) Auto switch mounting With 2 auto switches Same surface Note 1) Different surfaces Note 1) 6 A A 6 15 Auto switch model Auto switch D-M9m D-M9mW 6 B B 6 The auto switch is mounted by slightly displacing it in a direction (cylinder tube circumferential exterior) so that the auto
8, R 10, R 10, R 10, R 6 8 10 4 6 KM11 6, 10 One-touch fitting One-touch fitting 1 4 3 8 KM12 6, 10 One-touch fitting Rc KM13 3 One-touch fitting One-touch fitting KM11 1 8 1 4 3 8 1 8 1 4 3 8 1 4 3 8 1 4 One-touch fitting R male thread KM12 KM14 3 One-touch fitting KM15 KM15 3 One-touch fitting One-touch fitting rod KM16 KM14 KM16 One-touch fitting 3 One-touch fitting KM13 Miniature fittings
Values obtained from Correction Factors on page 6. *1 Values obtained from Correction Factors on page 6. 3 Check the coefficient.
6 !7 @1 !0 !9 !6 !7 AQ i ASV ASQ530F-02 type ASQ630F-03 type ASQ530F-02 type ASQ630F-03 type y !5 !3 y u AK !5 !7 !7 ASS !4 !1 !2 !4 !1 !8 !8 ASR !6 !6 ASF t q t q @0 r @0 r @1 !0 !9 !6 !7 @1 !0 !9 !6 !7 Component Parts Note Material Note Description Description Material No. q w e r t y u i o !0 !1 !2 !3 No. !4 !5 !6 !7 !8 !
Port A size Port B size Number of Port A Porting Port A Port B Model 4 8 10 12 Rc(PT) Rc(PT) 6 8 10 6, R(PT) 6, R(PT) 6, R(PT) 8 ,R(PT) 8, R(PT) 8, R(PT) 10, R(PT) 10, R(PT) 10, R(PT) 6 8 10 4 6 6 8 One-touch fitting One-touch fitting 6, 10 KM11 1 4 3 8 Rc(PT)female thread 6, 10 One-touch fitting KM12 One-touch fitting One-touch fitting 3 KM13 1 8 1 4 3 8 1 8 1 4 3 8 KM11 One-touch fitting
6 6 6 6 6 5 M26 x 1.5 M26 x 1.5 M20 x 1.5 108 82 80 80 15 11.5 10.5 8.5 40 32 25 20 M14 x 1.5 M10 x 1.25 M10 x 1.25 M8 x 1.25 20 20 20 10 8 8 8 30 28 28 25 55 40 40 40 75 55 55 55 27 25 25 21 122 120 120 3.2 3.2 3.2 24 22 22 18 22 17 17 13 41 32 32 26 14 12 10 8 1/8 21 19.5 19.5 15.5 35.5 17.5 4 4 4 11 8 8 16 13 13 1/4 1/8 1/8 7 6.8 6.8 191 155 153 35.5 17.5 37.5 35.5 17.5 M32 x 2 23 10 8
90.5 100.5 113.5 154.5 195.5 253.5 293.5 K 35 45 55 65 75 100 125 150 175 J 47 47 47 57 70 90 114 155 180 I 12 12 12 12 12 33 50 67 82 NN 2 2 2 2 3 4 5 6 7 H 45 45 45 55 35 35 35 38 40 G 22 22 22 22 20 26 32 40 30 N 4 4 4 4 6 6 6 8 8 HA 45 45 45 55 35 70 70 76 80 NA 2 2 2 2 2 2 4 4 4 FF 40 40 40 50 35 60 70 75 80 GA 22 22 22 22 55 61 102 154 190 KA 162 218 258 13-/22-MXS25L-10 13-/22-MXS25L
15 12 7 16 10 12 M12 x 1.25 4 M5 x 0.8 12 5 28 14.2 M4 x 0.7 19 6 15 12 7 16 12 16 M16 x 1.5 6 M5 x 0.8 17 6 38 14.2 5 M6 x 1 24 8 18.3 16 10 22 16 16 M16 x 1.5 6 M5 x 0.8 17 6 38 14.2 5 M6 x 1 24 8 18.3 16 10 22 20 20 M22 x 1.5 8 G1/8 20 8 44 17 6 M8 x 1.25 32 11 24 22 13 24 25 22 M22 x 1.5 10 G1/8 22 8 50 20 8 M10 x 1.25 32 11 30 22 17 28 Bore size S Z 1 to 50 51 to 100 101 to 150 1 to
OUT Fitting Type Metric size Inch size Symbol Position 1 2 Bottom Top Straight Elbow 4 6 4 6 Straight Elbow 5/32 1/4 5/32 1/4 Fitting type Symbol Fitting type Symbol 04 05 16 17 54 55 66 67 4. Accessory (Pressure Display) 5.
595 B IDF8D-1 69 55 14 G D 65 (F) C 462 490 E 4-13 H 645 IDF11C-1 Base integrated with transformer 462 490 695 427 557 IDF15C-1 IDF-TB2 53 438 466 IDU4D-1 681 Transformer IDF-TR1500-5 IDF-TR1500-6 IDF-TR1500-7 IDF-TR1500-5 IDF-TR1500-6 IDF-TR1500-7 IDF-TR4000-5 IDF-TR4000-6 IDF-TR4000-7 IDF-TR4000-5 IDF-TR4000-6 IDF-TR4000-7 Part No.
3.5 29 AC30A-B 1/4, 3/8 1/8 110.2 115.1 85.6 30 55.1 80 29.4 3.5 41 35 7 14 4 41 AC40A-B 1/4, 3/8, 1/2 1/8 145.2 147.1 91.7 38.4 72.6 110 33.8 1.5 50 40 9 18 5 48 AC40A-06-B 3/4 1/8 155.2 149.1 93.2 38.4 77.6 110 33.8 1.2 50 40 9 18 5 48 AC50A-B 3/4, 1 1/8 191.2 220.1 175.5 93.1 110 43.3 3.2 70 50 11 20 6 60 AC60A-B 1 1/8 196.2 234.1 175.5 98.1 110 43.3 3.2 70 50 11 20 6 60 Optional
8 10 12 I 6 6 6 6 K 28 33.5 37.5 46.5 MM 5 5.5 5.5 7 LC WB 13 13 13 16 LH 6.8 6.8 6.8 7 LX 3.2 3.2 3.2 3.2 LZ 40 40 40 55 X 55 55 55 75 NA M8 x 1.25 M10 x 1.25 M10 x 1.25 M14 x 1.5 NN 24 30 34.5 42.5 P M20 x 1.5 M26 x 1.5 M26 x 1.5 M32 x 2 S 1/8 1/8 1/8 1/4 WA 31 31 31 36 Y 20 20 20 23 Z 8 8 8 10 LD 4 4 4 4 LT LS 25 28 28 30 Bore size 40 47 47 54 13 17 17 22 26 32 32 41 26 26 26 31 41 45
8 5 0 0.030 156 (189) 175 (213.5) 199 (243) 259 (325) 1 8 6 0 0.030 6 0 0.030 8 0 0.036 1 4 3 8 Single shaft with four chamfers: CDRA1BX Double shaft key: CDRA1BY Double shaft with four chamfers: CDRA1BZ Note) Other dimensions are the same as the single shaft.
8 5 0 0.030 156 (189) 175 (213.5) 199 (243) 259 (325) 1 8 6 0 0.030 6 0 0.030 8 0 0.036 1 4 3 8 Single shaft with four chamfers: CDRA1BX Double shaft key: CDRA1BY Double shaft with four chamfers: CDRA1BZ Note) Other dimensions are the same as the single shaft.
154.5 195.5 253.5 293.5 K 35 45 55 65 75 100 125 150 175 J 47 47 47 57 70 90 114 155 180 I 12 12 12 12 12 33 50 67 82 NN 2 2 2 2 3 4 5 6 7 H 45 45 45 55 35 35 35 38 40 G 22 22 22 22 20 26 32 40 30 HA 45 45 45 55 35 70 70 76 80 NA 2 2 2 2 2 2 4 4 4 N 4 4 4 4 6 6 6 8 8 FF 40 40 40 50 35 60 70 75 80 GA 22 22 22 22 55 61 102 154 190 KA 162 218 258 13-/22-MXS25L-10 13-/22-MXS25L-20 13-/22-MXS25L
B A C D 5 6 Standard Motor Series LJ1H10 Motor Output Slide Screw High Rigidity Direct Acting Guide 50W 20mm/20mm lead Horizontal Mount How to Order Stroke LJ1H101 SC 1 F 2 Cable entry direction Top entry Power supply voltage Cable entry direction Cable length Left entry 1 2 100/110VAC (50/60Hz) 200/220VAC (50/60Hz) F R L T B Axial Right Left Top Bottom 2 3 4 5 2m 3m 4m 5m Axial entry Right