SYJ300/500/700 Cable length (L) + B A 300 mm V100-49-1-1 VS V100-49-1-2 500 mm 1000 mm 2000 mm 5000 mm Interface V100-49-1-3 V100-49-1-4 V100-49-1-7 VFN Pilot valve (SY114) Adapter plate 22 33.9 14 4-4-61
4 6 4 10 8 6 10 8 6 12 10 12 10 19 12 19 12 25 19 25 19 21 1/8" 25 11.5 10 10 Class 1 31.5 1/8" 35 16.5 14 15 14 L 29 1/4" H (A) W M 36.5 1/4" 1/4 42.5 23 19 20 17 (E) Port size 36 3/8" Class 2 to 5 R (NPT) 46 3/8" 52 28 23 24 21 44 1/2" M H 55 1/2" 62.5 39 32 29 26 53.5 3/4" 72 3/4" 25 1 81 49 46 39.5 36 71 1" Class 6 Inch sizes Connection threads Rc/NPT Model Applicable tubing O.D.
A 1-B 1-C 2-A 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 2-B 2-B 1-A 1-B 1-C 2-A 2-B 1-C 2-A 2-B 2-B 2-B 2-B 2-B 1-A 1-B 1-C 2-A 2-B 2-B 2-B 2-B 2-B 2-B 6 1/8,1/4 500 1.5 0 1,000 2,000 3,000 6 1/4, 3/8 10 1/4, 3/8 Maximum speed Vmax [mm/s] 1000 3 25 20 1500 4.5 Composite effective area So [mm] Composite effective area So [mm] Composite effective area So [mm
mounting. 37 Series CXSW Dimensions: 25, 32 ZZ CXSW25 SS 12 S 12 12 12 30 (30) Z 6 30 2-M8 x 1.25 x 6 (Hexagon socket head set screw) 2-6.9 through 2-11 counterbore with depth 6.3 2-R3.5 28 1 8 78 1 60 0.2 60 0.2 60 0.2 0.2 35 80 64 6.3 5 2-R3.5 8 12 14 4-M6 x 1 (Through) 4-M5 x 0.8 with depth 7.5 2-M6 x 1 x 18.5 (Hexagon head bolt) 2-M6 x 1 (Hexagon nut) 2-M6 x 1 x 14 (Hexagon socket head
L H A M W E LQ1H1A-M LQ1H2A-M LQ1H2B-M LQ1H2C-M LQ1H2D-M LQ1H2E-M LQ1H2F-M LQ1H3A-M LQ1H3B-M LQ1H3C-M LQ1H3D-M LQ1H4A-M LQ1H4B-M LQ1H4C-M LQ1H4D-M LQ1H5A-M LQ1H5B-M LQ1H5C-M LQ1H5D-M LQ1H6A-M LQ1H6B-M LQ1H6C-M LQ1H6D-M 1/8" 1/4" 3/16" 1/8" 1/4" 3/16" 1/8" 3/8" 1/4" 3/8" 1/4" 1/2" 3/8" 1/2" 3/8" 3/4" 1/2" 3/4" 1/2" 1" 3/4" 1" 3/4" 1/8" 10 25 11.5 10 21 1/8" 31.5 15 35 16.5 14 14 1/4" 29 1
D-A7/A8 D-A7H/A80H D-A73C/A80C 10 2 5 1 D-F7 D-J79 D-F7V D-J79C D-A79W D-F7W D-J79W D-F7BAL D-F7WV D-F79F Rail mounting 2 5 1 5 2 15 ( ) 10 1 10 16 2 15 D-F7LF 1 15 Note 1) Cannot be mounted on 6 cylinder. 1.3-14 Standard: Double Acting Double Rod Series CJ2W Mounting Accessories/Refer to p.1.3-12 details.
5 32 36 12 16 3 10.4 10.4 1 4 1 8 1 4 38 39 40.5 40 40.5 46.5 46 45.5 14 3 16 16.5 3.5 11.4 11.4 1 8 14.29 1 4 3 8 15 17 4.6 13.2 13.2 1 4 17.46 1 8 20 18 25 1 4 3 8 5 16 18.5 6 15.2 15.2 17.46 38 32 37 1 4 Connection thread 50.5 56.5 19.05 3 8 1 2 3 8 21 7 17.9 17.9 22.23 51 59 30 26 1 4 55 61 22.23 3 8 1 2 22 9.6 21.7 21.7 1 2 54.7 62.7 50 Reference dimensions after Uni thread installation
8 @5 @1 i @8 !4 !5 !2 @9 !3 w Component Parts Qty. 2 1 1 2 1 1 3 1 1 1 1 1 2 1 2 2 1 1 Note 8 12 to 40 Qty. 1 1 1 1 1 1 1 1 1 1 1 1 2 1 1 1 Note Clear anodized Clear anodized Hard anodized Chromated Chromated 8: Quenched Description Material Description Rod cover Head cover Cylinder tube Piston Spacer for switch type Material No. q w e r t No. Aluminum alloy !
Description Pilot valve assembly AXT627-42-1(M5 x 50) AXT627-10-1 VFR51 AXT627-10-1 VFR52 AXT627-42-1(M5 x 50) AXT627-10-1 VFR53/54/55 NBR Hexagon socket head screw Gasket i AXT627-42-1(M5 x 50) Refer to How to Order Pilot Valve Assembly on page 3-5-78. Steel o !
1 !3 @2 q $4 #3 #1 #0 @1 $2 !7 @5 #8 #6 #4 @6 @7 @8 @4 Auto switch $1 #5 #9 #8 #2 @3 !9 $0 $2 !1 !8 !6 #7 !0 @9 A @0 !5 A !
Auto switch: Heater: Indicator: 14 High Vacuum Angle Valve Series XLF, XLFV Dimensions (mm) 1in=25.4mm (b) XLF/Air operated type E C E Fn (KF flange) Fd (K flange) (a) C E (c) Heater (optional) G A B H A (mm) H 40 G 17 26 41 52 70 83 Fd Fn 30 40 55 75 87 114 D 1 1 2 2 3 3 C 38 48 66 79 100 117 B 103 113 158 170 196 235 A 40 50 65 70 88 90 E Note 1) Model XLF-16 XLF-25 XLF-40 XLF-50 XLF-63
Blank plate SYJ3000-21-1 Blank plate SYJ3000-21-1 A Mark A Mark Manifold gasket Manifold gasket VJ3000-14 -3 VJ3000-14 -1 Applicable manifold base SS5YJ3-20 Applicable manifold base (sub-plate) SS5YJ3-41 SS5YJ3-S41 SS5YJ3-46 SS5YJ3-S46 SS5YJ3-31 SS5YJ3-S31 SS5YJ3-32 SS5YJ3-S32 Configuration of surface is different.
A 1 () () [] A 2 LECSSSeries/ / *3) 1 1.5 *3)1 1 A 3 1. 15P()-N() 2. L1L2L3 (MC) 3. () () A 4 4. (1) 0+55() 0+40() -20+65() -15+70() 90%RH() 80%RH() 90%RH() () 1000m LECS-S5 LECS-S7 LECS-S8 () 5.9m/s2 XY49m/s2 .
Refer to the p.5.3-6 for the details of contact protection box. 13 13 13 13 13 13 13 13 13 13 13 13 14 14 14 14 14 14 14 14 14 14 14 16 15 17 17 17 17 14 16 16 13 13 13 13 Note) Average value at normal temperature including hysteresis.
LED . 28 8.1 LED . 28 8.2 LED . 28 9. . 29 9.1 . 29 9.2 No. . 29 9.3 / . 29 9.4 . 30 9.5 . 30 10. . 32 10.1 . 32 11. . 47 11.1 . 47 11.2 . 50 11.3 . 52 11.4 . 53 12. . 54 12.1 . 54 12.2 . 54 12.3 . 55 (1) . 55 (2) () . 55 (3) . 55 12.4 . 56 12.5 . 56 13. () . 57 13.1 . 57 13.2 . 58 14. . 59 14.1 . 59 14.2 No. . 59 [1] . 59 [2] . 60 2 - [3] . 61 [4] HOLD . 61 [5]
Recommended tightening torque Unit: Nm Connection thread 3/4 28 to 30 1/8 7 to 9 1/4 12 to 14 3/8 22 to 24 1/2 28 to 30 1 36 to 38 Torque 5-8-23
1l'" Immj 32 -700 50 7 5 10 64 72 32 36 79 90 25 31 ", 40 -800 55 9 7 10 Cushi()(\ vl\lve Port 4 50 -1000 70 9 12 12 90 45 50 110 120 36,S 39.5 63 1000 80 9 12 12 100 80 1000 100 12 14 16 126 63 153 45.5 J()a, -1000 120 14 1 6 I. 150 75 176 54 FE FT Head Iionge/ (G) Head flange 101m) ' ~," BoreSiW .
tubing: 6 Applicable tubing: 6 Applicable tubing: 6 Width across flat 14 Width across flat 14 Width across flat 14 2 2 2 2 2 2 7 18 12 12 18 18 12 M12 x 1 M12 x 1 M12 x 1 33.2 33.2 Width across flat 14 Width across flat 14 Width across flat 14 7 5 5 5 7 1.8 1.8 1.8 1 1.2 1.2 10 13 16 11 14 17 9 With Adapter: Vacuum Inlet Series ZP3 Vertical 4 to 8 Pad diameter Vertical Dimensions/With Adapter
1 2 3 4 5 6 7 8 9 10 11 12 13 80 0 5 10 15 20 25 30 35 40 45 50 55 60 Load capacity (N) Load capacity (pounds) 63 300 12.0 280 11.0 Distance from pivot point (inches) 260 Distance from pivot point (mm) 10.0 240 9.0 220 200 8.0 180 7.0 160 6.0 140 5.0 120 100 0 5 10 15 20 25 30 35 40 45 50 55 60 65 70 75 80 4.00 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 Load capacity (N) Load capacity