Air Slide Table

8.3 8 1 M2.5 x 6 14.5 7 M6 x 0.75 28.5 4 8 9 19 12 6 MXQR-BS6 1.4 MXQR-BS8 MXQR 8 M3 x 12 14.6 12 12 M3 x 12 16.6 8 M8 x 1 40.8 5 12.5 14 24.5 20 7 7 MXQR-JS8 1.4 6 MXQR-BS12 MXQR12 M4 x 12 18.5 13 12 M4 x 12 20.5 11 M8 x 1 40.8 11 14 29 18 9.5 7 5 MXQR-JS12 1.4 7 46.7 MXQR-BS16 MXQR16 M5 x 16 21 16 13.5 14 M10 x 1 M5 x 16 23 13.5 17 36 11 22 9 6 45.3 MXQR-JS16 11 67.3 MXQR-BS20 MXQR20 M6

Guide Cylinder Series MGG ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

P Bore size (mm) W V U T S Z X Y Q Y R R Q HR HN 20 20 107 (115) 12 (14) 104 11 21 47.5 40 48 82 12 26 157 30 M6 x 1 depth 9 Rc 1/8 25 20 25 107 (115) 12 (14) 25.3 37 104 11 21 48 46 57 100 13 31 175 37 Rc 1/8 M6 x 1 depth 13 32 25 32 110 (118) 12 (14) 28.3 40 106 11 21 49 52 65 114 16 38 201 37 Rc 1/8 M6 x 1 depth 13 40 32 40 121 (130) 12 (15) 31.3 43 123 11 25 53 62 84 138 20 47 238 44

10

) 94 (102) 100.5 R 34 (39.5) 45 (53) 49.5 (57.5) 53 R 42 (47.5) 53.5 (61.5) 57.5 (65.5) 61 Q 108 110.5 113 113 R 36 (41.5) 47 (55) 51.5 (59.5) 55 1 2 52.5 55 57.5 57.5 1/8, 1/4 1/4, 3/8 1/4, 3/8 1/2 47.5 50 52.5 52.5 36 (41.5) 47 (55) 51.5 (59.5) 55 3 ( ): Denotes the Normally Open (N.O.) dimensions.

Vacuum System Peripherals:

VX2250 VX2350 1 8 1 4 2 , 0.58 , 1 8 1 4 1.3 3 , 1 4 3 8 1.3 ZX , 1 8 1 4 2.6 ZR 4.5 ZM , 1 4 3 8 2.6 Series VX21 Series VX22 Series VX23 ZH , 1 4 3 8 6 4.3 ZU Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com ZL , 1 4 3 8 6.4 8 8.8 11 8.8 11 1 4 M V ZY N.C.

Brake mechanism added

90 (n = 2, 4, 6, 8 ) Note 1) 90 + 55 (n = 4, 8, 12, 16 ) Note 2) 100 + 55 (n 4) 2 (n = 4, 8, 12, 16 ) Note 2) 110 + 55 (n 4) 2 (n = 4, 8, 12, 16 ) Note 2) 120 + 55 (n 4) 2 (n = 4, 8, 12, 16 ) Note 2) 20 + 55 (n 2) 2 (n 4) 2 D-A59W n (Same surface) 1 100 110 120 15 90 2 (Different surfaces, Same surface) 1 120 130 140 25 110 D-F5NT (n = 2, 4, 6, 8 ) Note 1) 110 + 55 (n = 4, 8, 12, 16

Pin Clamp Cylinder Series CKQ/CLKQ

1 !3 @2 q $4 #3 #1 #0 @1 $2 !7 @5 #8 #6 #4 @6 @7 @8 @4 Auto switch $1 #5 #9 #8 #2 @3 !9 $0 $2 !1 !8 !6 #7 !0 @9 A @0 !5 A !

Guide Cylinder Series MGG

Bore size (mm) Stroke range (mm) S A AA AB AG AH AI AJ AL AP B I J K L M N O P T U V AK 20 25 32 40 50 6.6 75, 100, 125, 150, 200 90 11 11 112 125 82 95 9 25 108 30 55 60 80 25 45 1/8 26 12 82 48 M6 x 1 depth 9 9 100 14 13 134 150 92 108 9 30 130 35 65 70 100 35 54 1/8 31 13 100 57 M6 x 1 depth 13 75, 100 125, 150 200, 250 300 9 120 14 16 134 150 102 118 9 35 135 40 73 80 106 35 60 1/8 38

Electric Slide Tables

Description Material Note 1 2 3 4 5 6 7 8 9 10 11 12 No.

Series SY 5 Port Rubber Seal Solenoid Valve High Capacity & Simple Choices

dimensions AXT100-FC1 2 3 1 11 VZ1000 Refer to the table below for dimension L.

AS

Inch size Metric size 01 02 23 2 3.2 4 6 8 10 12 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 1/2" 03 05 07 09 11 13 Control type 04 06 08 10 12 0 1 Meter-out Meter-in Use 1/8" tube.

0.55

Built-in strainer 7 Pilot valve assembly HNBR DXT031-30-11 DXT156-9-8 8 Gasket 1/4: VF5000-71-1; 3/8: VF5000-71-2; 1/2: VF5000-71-3; 9 1/4: VF3000-71-1; 3/8: VF3000-71-2; Aluminum die-casted Sub-plate Caution Round head combination screw (1 pc.) DXT031-44-1 Tightening Torque for Mounting Valve For mounting valve (M4 x 39.5, With spring washer) Hexagon socket head cap screw (1 pc.)

Air Cylinder

S 1 pc. n n pcs.

51

Different surfaces Different surfaces Same surface Same surface (n 2) 2 55 + 35 (n 2) 20 + 35 D-M9 5 15 Note 1) 40 Note 1) (n = 2, 3, 4, 5) (n = 2, 4, 6) Note 3) (n 2) 2 55 + 35 (n 2) 20 + 35 D-M9W 15 Note 1) 40 Note 1) 10 (n = 2, 3, 4, 5) (n = 2, 4, 6) Note 3) (n 2) 2 60 + 35 (n 2) 25 + 35 D-M9A 25 40 Note 1) 10 (n = 2, 3, 4, 5) (n = 2, 4, 6) Note 3) (n 2) 2 50 + 35 (n 2) 15 + 35

0.4

Hirose Electric Co., Ltd. 55 2 x M2.6 x 0.45 Socket side 14 25 1 13 47.04 Terminal no. Note 1) Types with 15 pins are also available. Refer to page 55 for details. Note 2) Lengths other than the above are also available. Please contact SMC for details.

Series MXS 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

depth 8 6 2 (With stroke adjuster at extension end) 5 (With stroke adjuster at retraction end) 30 30 76 46 73 58 FF 22.5 5H9 ( ) depth 5 +0.030 0 F 25 +0.030 0 5H9 ( ) depth 5 N 1 x F 2 51 2 x M6 x 1 thread depth 13 37 M 0.5 46.5 50 Z ZZ H G (NN 1) x H 11.5 29 11.5 29 B A 9.5 5.1 11 11 5H9 ( ) depth 5 +0.030 0 30 1.5 NN x M6 x 1 thread depth 12 B A 6 Section AA Section BB HA GA 5H9 ( )

smcmaintenancepartslist

GB2-10AS 1 Pressure gauge cover 10 ARG30P-400S ARG40P-400S ARG20P-400S PC 1 Clip 11 ARG30P-420S ARG40P-420S ARG20P-420S Stainless steel 1 Note 1) Including O-ring.

CQM

-1.5 -4.5 14.5 15 11.5 9.5 10 7.5 4.5 1.5 (4) 2 (4.5) -1.5 (1) -3.5 (-1) -3 (-0.5) -5.5 (-3) -8.5 (-6.5) 4.5 4 7.5 9.5 9 11.5 14.5 3.5 3 6.5 8.5 8 10.5 13.5 0 0 3.5 5.5 5 7.5 10.5 5.5 6 10 11 12 16 14 4.5 5 9 10 11 15 13 1.5 2 6 7 8 12 10 Data Bore size (mm) The dimension inside ( ) is for D-A93.

One-touch Fittings

13.3 3.4 1 1/4 5/16 KQ2N07-09 41.5 13.3 13.3 4.6 1 3/8 KQ2N07-11 45 15.6 13.3 4.6 1 5/16 3/8 KQ2N09-11 46.5 15.6 14.2 6 1.8 1/2 KQ2N09-13 47.5 17 14.2 6 2.6 3/8 1/2 KQ2N11-13 50 17 15.6 7 3.2 Color Cap: KQ2C Applicable tubing Applicable tubing O.D.

2–4

Symbol A B W A B W A B W HS 16.5 18.5 22 24 26.5 30 36 12 16 20 25 32 40 50 5.5 6 2.5 0.5 1 -1.5 -4.5 14.5 15 11.5 9.5 10 7.5 4.5 1.5 (4) 2 (4.5) -1.5 (1) -3.5 (-1) -3 (-0.5) -5.5 (-3) -8.5 (-6.5) 4.5 4 7.5 9.5 9 11.5 14.5 3.5 3 6.5 8.5 8 10.5 13.5 0 0 3.5 5.5 5 7.5 10.5 5.5 6 10 11 12 16 14 4.5 5 9 10 11 15 13 1.5 2 6 7 8 12 10 Bore size (mm) The dimension inside ( ) is for D-A93.

High Power Cylinder Series RHC

A 1-B 1-C 2-A 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 2-B 2-B 1-A 1-B 1-C 2-A 2-B 1-C 2-A 2-B 2-B 2-B 2-B 2-B 1-A 1-B 1-C 2-A 2-B 2-B 2-B 2-B 2-B 2-B 6 1/8,1/4 500 1.5 0 1,000 2,000 3,000 6 1/4, 3/8 10 1/4, 3/8 Maximum speed Vmax [mm/s] 1000 3 25 20 1500 4.5 Composite effective area So [mm] Composite effective area So [mm] Composite effective area So [mm