CV/MVGQ

RB J Stroke range Q H1 NN F H MM ZZ H2 HX QY I K N NA S AL A B2 D Eh8 B1 Bore size (mm) 20 25 32 40 Up to 300 13 41 116 14 5 62 19.8 5 8 65.3 28 M8 x 1.25 15 24 M20 x 1.5 18 8 15.5 13 26 20 0 0.033 DUp to 300 13 45 120 14 5.5 62 22 6 8 70.5 33.5 M10 x 1.25 15 30 M26 x 1.5 22 10 19.5 17 32 26 0 0.033 Up to 300 13 45 122 16 5.5 64 25.8 6 8 76.5 37.5 M10 x 1.25 15 34.5 M26 x 1.5 22 12 19.5 17

SYJ300/500/700

VQ VKF VQZ L plug connector (L): SYJ54-L-01 M plug connector (M): SYJ54-M-01 DIN terminal (D): SYJ54-D-01 M8 connector (WO): SYJ54-WO-01 VZ VS VFN Approx. 300 (Lead wire length) Applicable cable O.D. 3.5 to 7 82.4 74.9 MAX. 10 74.6 49.6 [56.6] 63.6 34.2 48.5 54.1 M8 x 1 36.6 Approx. 300 (Lead wire length) 60.7 [67.7] Pg7 6 6 6 6 65.5 [67.7] 55.7 [57.9] 75.5 64.6 57.2 50.7 42 42 42 42 34.7

Metal Seal/Rubber Seal Series VQ Body Ported

Series VQ1000 Plug Lead Plug-in Cassette P. 2-4-12 P. 2-4-14 P/J kit Series VQ0 P R SMC P. 2-4-38 P. 2-4-42 P. 2-4-46 P kit Series VQ1000 P. 2-4-38 P. 2-4-42 P. 2-4-46 P kit Series VQ2000 P. 2-4-38 P. 2-4-42 P. 2-4-46 P kit Series VQ1000 P. 2-4-76 P. 2-4-78 P. 2-4-80 P kit 2-4-4 Manifold Variations C S L Port size kit kit SUP EXH port Cylinder port Lead wire Serial transmission unit VQC P

MY1

13 N 20 25 30 37 45 Model MY1H16 MY1H20 MY1H25 MY1H32 MY1H40 P M5 x 0.8 M5 x 0.8 Rc 1/8 Rc 1/8 Rc 1/4 PC 7.5 14.5 14.5 15 20.5 PD 21 27 32 42 37.5 PA 40 50 60 80 100 NC 13.5 17.5 20 25 30.5 PF 3.5 4.5 5.5 6.5 8 PB 40 40 50 60 80 NE 27.8 34 40.5 50 63 Q 153 191 206 264 322 NG 13.5 17.5 28 33 42.5 QW 30 36 42 51 59 NW 37 45 53 64 75 Z 160 200 220 280 340 (PE) 9 12 13 13 23 PG 3.5

CL

CLG-020-24 CLG-025-24 CLG-032-24 CLG-040-24 20 25 32 40 13 15 17 21 3.2 3.2 4.5 4.5 21.2 21.3 25.6 26.3 47.8 54.8 57.4 65.4 42 42 48 56 26 28 28 36 28 28 28 30 50 57 61.4 71.4 CG-020-24A CG-025-24A CG-032-24A CG-040-24A 20 25 32 40 13 15 17 21 3.2 3.2 4.5 4.5 18.1 20.7 23.6 27.3 35.8 39.8 49.4 58.4 42 42 48 56 16 20 22 30 28 28 28 30 38.3 42.1 53.8 64.6 Rod End Nut Clevis Pin Knuckle Pin

MXQ

15 14 Average speed Va (mm/s) Collision speed V (mm/s) 13 13 13 13 18 31 31 31 31 36 23 41 42 41 42 41 19 19 19 19 27 47 47 47 47 57 36 66 84 75 84 75 75 Note) Use the average speed when calculating static moment.

5-Port Solenoid Valve

Manifold Exploded View 13 (+) 13 () Voltage limit V, 1 minute, AC 1000 common Negative common Positive Fitting, Plug Part Nos. Insulation resistance MW/km, 20C 5 or more * When using a valve with no polarity, either positive common or negative common can be used.

Mechanically Jointed Rodless Cylinder Series MY1

(mm) PA PB PG Q PP QW QQ RR SS TT UU WW Model VV XX Z YH PC PD PE PF ZZ 60 50 7 206 12 42 16 16 6 14.5 15 12.5 MY1H25 16 28 220 37.5 14.5 32 13 5.5 Rc 1/16 80 60 8 264 17 51 16 23 4 16 16 16 MY1H32 19 32 280 47 15 42 13 6.5 Rc 1/16 100 80 9 322 18.5 59 24 27 10.5 20 22 19.5 MY1H40 23 36 340 59.5 20.5 37.5 23 8 Rc 1/8 Y 2 x d S R WX D Bottom ported (ZZ) (Applicable O-ring) DHole Size for Centralized

CL

CLG-020-24 CLG-025-24 CLG-032-24 CLG-040-24 20 25 32 40 13 15 17 21 3.2 3.2 4.5 4.5 21.2 21.3 25.6 26.3 47.8 54.8 57.4 65.4 42 42 48 56 26 28 28 36 28 28 28 30 50 57 61.4 71.4 CG-020-24A CG-025-24A CG-032-24A CG-040-24A 20 25 32 40 13 15 17 21 3.2 3.2 4.5 4.5 18.1 20.7 23.6 27.3 35.8 39.8 49.4 58.4 42 42 48 56 16 20 22 30 28 28 28 30 38.3 42.1 53.8 64.6 Rod End Nut Clevis Pin Knuckle Pin

Table of Contents

M Dimensions with mounting bracket Model Port size (Nominal size B) A B C D E F G S 6.0 , 2 H 463.5 I 180 J 30 K 15 L 24 N 120 O 184 P 220 Q 110 R 18 460.5 AMG850 1 2 13 42 348 220 57.5 220 10 14-20-7 1 Please refer to pages 14-20-62 to 64 for specific product precautions.

Modular Design with Uniform Body Style

v*13 v*13 v*13 v*13 *1 Option B is included in the package with the product but does not come assembled.

MB

42 10.5 11 15 15 23 23 13 13 17 17 26 26 154 158 182 182 228 228 164.5 169 197 197 251 251 Data U CX to 1000 L CZ Z + Stroke RR Without Air Cushion Center trunnion Model without air cushion is designed to include rubber bumpers.

Compact Manifold Regulator Series ARM5

Handle Position Symbol Position Handle position Handle position Handle position Front Top Bottom 56 A B C Top Front Bottom 84 42 84 70 70 6 26 (Max. 28) P U S SMC SMC H L 6 O C K SMC SMC 28.5 6 51.5 80 51.5 13 OUT IN 3 28 13 OUT IN 13 OUT IN 3 3 2. OUT Piping Position 3.

LEC-OM02704CN

UL/C-ULK5 13 19 13 13.6 (1) (a) () SD 1(4.12) (b) ( ) (c) () 13 20 13 M 1. 2. 3. () 4. 5. 1. 2. 3. () 4. 1. ()(FR-BIF()) 2.

LEC-OM069xx

DISCONNECT 13 Turn the control and main circuit power supplies.

VQZ1000/2000/3000

Single 12 or less 15 or less 34 or less VQZ1121 0.19 0.40 0.71 0.26 0.40 0.90 Rubber seal 2 position 10 or less 13 or less 13 or less VQZ1220 0.13 0.26 0.54 0.13 0.20 0.54 Metal seal Double 10 or less 13 or less 13 or less VQZ1221 0.19 0.40 0.71 0.26 0.40 0.90 Rubber seal 20 or less 26 or less 40 or less VQZ1320 0.08 0.25 0.50 0.13 0.29 0.55 Metal seal Closed center VQZ1000 25 or less 33

ZP

-11-57 58 Series ZP Vacuum Pad/Components Refer to page 13-11-62 to 13-11-64 for part numbers of e to y.

Parallel Style Air Gripper/2 Finger, 3 Finger, 4 Finger Series MHS

14.5 FX 12.5 14.5 17 CB 11 13 15 EC 10 12 14 EO 14 16 20 DC 30 36 42 NB 5h9 6h9 6h9 DO 34 40 48 NA 8 10 12 B 30 36 42 K 4 5 6 Q 6 7 8 AA 35 38 40 AB 32 35 37 J 10 12 14 O 2 2.5 3 P M3 x 0.5 M5 x 0.8 M5 x 0.8 Model MHS2-16D MHS2-20D MHS2-25D 0 -0.030 0 -0.030 0 -0.030 DVA 2H9 2H9 3H9 TB 5 6 6 SC 8 9.5 10 RB 16 18 22 RA 18 24 26 WA VB 2 2 3 XA 2H9 2H9 3H9 XB 2 2 3 Model MHS2-16D MHS2-20D MHS2

Series SYJ300/500/700 3 Port Solenoid Valve Rubber Seal

[ ] for AC Other dimensions are the same as type 42.

7.5

SJ3000-42-1A-l SJ3000-42-2A-l SJ3000-42-3A-l SJ3000-42-4A-l SJ3000-42-6A-l SJ3000-42-5A For D-sub connector For flat ribbon cable 26 pins For flat ribbon cable 20 pins m: 1 (Connector upward) For flat ribbon cable 10 pins D side m: 2 (Connector lateral) For PC wiring 20 pins For EX180 serial wiring Note) For PC wiring 20 pins with power supply terminal SJ3000-76-2A-05 Note) SI unit is not