Secondary Batteries

Bore size Cylinder stroke (mm) 12 16 20 25 32 40 50 63 80 100 12 mm 16 mm 20 mm 25 mm 32 mm 40 mm 50 mm 63 mm 80 mm 100 mm Built-in Magnet Cylinder Model 12, 16 20, 25 32, 40 50 to 100 5, 10, 15, 20, 25, 30 5, 10, 15, 20, 25, 30, 35, 40, 45, 50 5, 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 If a built-in magnet cylinder without an auto switch is

3 Port Air Operated Valve Series SYJA300 1

(Example) SS3YJA7-41-03-01. 1 set SYJA714 . 2 sets SYJ700-10-2A . 1 set (Example) SS3YJA5-40-03-01. 1 set SYJA514 . 2 sets SYJ500-10-3A . 1 set The asterisk denotes the symbol for assembly.

Speed Controller with One-touch Fitting Stainless Series Series AS-FG Elbow Type/Universal Type 1

Applicable cylinder bore size (mm) Elbow type Universal type Port size Metric size Inch size 12 10 8 6 4 3.2 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 1/2" AS131FG-M5 AS121FG-M5 M50.8 6, 10, 16, 20 AS231FG-01 AS221FG-01 20, 25, 32 R 1/8 AS231FG-02 AS221FG-02 20, 25, 32, 40 R 1/4 AS331FG-02 AS321FG-02 40, 50, 63 R 1/4 AS331FG-03 AS321FG-03 40, 50, 63 R 3/8 AS431FG-04 AS421FG-04 63, 80, 100 R 1/2

5 Port Solenoid Valve SY Series

SY5 40 SY7 40 Sub-plate External pilot External pilot DIN External pilot terminal M8 SY9 40 connector Note 1) All AC voltage models have built-in surge voltage suppressor.

Sine Cylinder Series REC

5.5 10 22 19.5 13 10.5 11 45 12 17 26 Note) For 32, a trunnion pivot bracket NA (42.5) is used as standard. 40 M14 x 1.5 8 56.2 7 12 24 21 16 13.5 12.5 50 14 22 32 Bore (mm) N NA NN P Z ZZ S TD TT TX TY TZ 20 30 M20 x 1.5 192 202 146 8 1/8 10 32 32 52 20 25 34.5 M26 x 1.5 196 206 146 9 1/8 10 40 40 60 20 32 42.5 M26 x 1.5 209 219 159 9 1/8 10 40 40 60 22 40 51 M32 x 2 236.5 247 181 10 1/

Sine Cylinder Series REC

5.5 10 22 19.5 13 10.5 11 45 12 17 26 Note) For 32, a trunnion pivot bracket NA (42.5) is used as standard. 40 M14 x 1.5 8 56.2 7 12 24 21 16 13.5 12.5 50 14 22 32 Bore (mm) N NA NN P Z ZZ S TD TT TX TY TZ 20 30 M20 x 1.5 192 202 146 8 1/8 10 32 32 52 20 25 34.5 M26 x 1.5 196 206 146 9 1/8 10 40 40 60 20 32 42.5 M26 x 1.5 209 219 159 9 1/8 10 40 40 60 22 40 51 M32 x 2 236.5 247 181 10 1/

Air Cylinder Series CG1 ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

I J 25.3 37 26 5 14 8 12.5 15.5 Up to 350 18 13 12 2 12 12 35 M4 x 0.7 depth 7 20 40 31 28.3 10 12.5 6 16.5 19.5 Up to 400 22 17 14 2 12 12 40 M5 x 0.8 depth 7.5 25 38 43 12 6 31.3 12 19.5 20 Up to 450 22 17 18 2 12 12 40 M5 x 0.8 depth 8 32 47 8 38.3 52.5 15 27 26 16 Up to 800 30 19 25 2 13 13 50 M6 x 1 depth 12 40 44.5 58.5 58 11 32 20 16.5 32 Up to 1200 35 27 30 2 14 14 58 M8 x 1.25 depth

Series AS-FM/AS-M/ASD-FM

Weight g d T H D1 D2 D3 L1 L2 L3 Model 4 ASD230FM-M5-04 9.3 12 29.4 17.5 12.9 29.6 33.8 28.8 9.6 10 34.6 M5 x 0.8 8 30.1 25.1 7.8 11.7 6 ASD230FM-M5-06 11.6 13 32.5 20.6 13.7 34.6 39.6 6 ASD330FM-01-06S 14 11.6 29 38.5 22.9 13.7 36.1 31.1 14.2 11.8 R1/8 12 32.1 27.1 10.6 15.8 33.9 38.9 8 ASD330FM-01-08S 15.2 31 44.8 28.2 18.5 6 ASD430FM-02-06S 12.8 53 43.5 25.2 17 18 8 ASD430FM-02-08S 36.8

reduces flow setting time

[mm] Model d T H D1 D2 D3 L1 L2 L3 L4 L5 A M W1 Y Weight [g] Unlocked Locked Unlocked Locked AS231FS1-01-01 (S) 1/8 13.3 24 17.5 36 43.9 42.4 40.8 39.3 13.3 20 15 14 AS231FS1-01-03 (S) 5/32 8.2 13.9 25.1 AS231FS1-01-07 (S) 1/4 11.2 10.2 16.4 29.1 20.2 38.7 15 AS231FS1-01-09 (S) 5/16 13.2 30.1 21.5 40 14.2 16 AS231FS1-02-03 (S) 5/32 7.2 9.6 12 1/8 13 (12.7) 24 AS231FS1-02-07 (S) 1/4 11.2

Speed Controller with Indicator Stainless Steel Type Elbow Type/Universal Type AS-FSG Series

48.8 24.5 19.2 Inch Size [mm] Model d T H D1 D2 D3 L1 L2 L3 L4 L5 A M W1 Y Weight [g] Unlocked Locked Unlocked Locked AS231FSG1-01-01 (S) 1/8 13.3 24 17.5 36 43.9 42.4 40.8 39.3 13.3 21.5 16.2 14 AS231FSG1-01-03 (S) 5/32 8.2 13.9 25.1 AS231FSG1-01-07 (S) 1/4 11.2 10.2 16.4 29.1 20.2 38.7 15 AS231FSG1-01-09 (S) 5/16 13.2 30.1 21.5 40 14.2 16 AS231FSG1-02-03 (S) 5/32 7.2 9.6 12 1/8 13 (12.7

Speed Controller for Low Speed Operation with One-touch Fitting Series AS-FM Elbow Type/Universal Type (Resin Body) 1

Weight (g) d T H D1 D2 D3 L1 L2 L3 Model 4 ASD230FM-M5-04 9.3 29.4 12 17.5 12.9 29.6 33.8 28.8 7.8 11.7 9.6 10 34.6 M5 x 0.8 8 30.1 25.1 6 ASD230FM-M5-06 11.6 32.5 13 13.7 20.6 34.6 6 ASD330FM-01-06S 14 39.6 11.6 29 13.7 38.5 22.9 36.1 31.1 10.6 14.2 11.8 12 32.1 27.1 R 1/8 15.8 33.9 8 ASD330FM-01-08S 38.9 15.2 31 18.5 44.8 28.2 6 ASD430FM-02-06S 12.8 53 17 43.5 25.2 18 8 ASD430FM-02-08S

V

U06 6 7 2.5 7 12 0.8 ZP08U U08 8 9 2.5 7 12 1 Part No Type G C B D E F Y ZP10U U10 10 12 4 13 7.7 12 3 ZP10D D10 10 12 4 13 10.7 15 6 ZP13U U13 13 15 4 13 7.7 12 3 ZP16D D16 16 18 4 13 11.7 16 7 H Y Part No Type A B C D E F G ZP16U U16 16 18 4 13 8.2 12.5 3.5 ZP25D D25 25 28 4 15 15.5 20 10 ZP06B B06 6 7 2.5 7 13 3.3 9.1 4 ZP20U U20 20 23 4 15 9.5 14 4 ZP40D D40 40 43 7 18 24.2 29 17 ZP08B

VZS

M plug connector 2 position double: VZS2250-M(Z)-01 3 position closed center: VZS2350-M(Z)-01 3 position exhaust center: VZS2450-M(Z)-01 3 position pressure center: VZS2550-M(Z)-01 DIN terminal 2 position double: VZS2250-D(Z)-01 3 position closed center: VZS2350-D(Z)-01 3 position exhaust center: VZS2450-D(Z)-01 3 position pressure center: VZS2550-D(Z)-01 Applicable cable O.D.: 3.5 to 7 MAX

OMU0023

Instruction to perform the Return to Origin operation 4 01 05 001A FF00 01 05 001A FF00 sent. 5 01 02 004B 0001 01 02 01 Acquires the INP signal information.

Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type AS-FG Series

23.1 16 27.1 12.7 20.4 14.3 31.1 36.1 27.5 3.2 9.3 1/4" 12 12 32.1 13.5 R 1/8 AS221FG-01-04 AS221FG-N01-01 12.7 20.4 27.5 4 9.3 1/8" 16 20.4 27.5 17 9.3 12.7 AS221FG-01-06 AS221FG-N01-03 13.5 20.4 13.4 27.5 6 11.6 5/32" 14.2 13.4 27.1 30.2 35.2 12 32.1 NPT 1/8 R 1/8 17 AS221FG-01-08 AS221FG-N01-05 23.1 12.7 30.2 19 18.5 35.2 25.3 32.1 30.2 32.4 8 15.2 3/16" 11.4 27.1 16.5 14.2 AS221FG-01

Vacuum System Peripherals:

R L B 01 1 Nil F G Rc 1 8 ... ...

Nozzle Type Ionizer

8 5 Width across flats 12 10.6 17 Nozzle Type Ionizer IZN10E Series Dimensions L-bracket IZN10-B1 17 (Mounting angle adjustable range) 40 2 x M3 7.5 2 x 3.4 2 x R10 25 5 40 50 Internal mounting 2 x 3.4 20.5 33 30 30 52 46 44 26 17 11 26 12 8 x 3.4 2 x Hexagon socket head cap screw M3 x 6 (Accessory) 40 5 22.7 Internal mounting Pivot mounting 21 33 30 (Mounting angle adjustable range) (83)

Series SYJ500 Rubber seal 3 Port Pilot Solenoid Valve

(For manifold type 20, 21R) 1 SYJ5 2 5 M M5 Body ported SYJ5 4 5 M 01 1 Base mounted Thread type Port size Manual override 3 port F Nil Rc Nil: Without sub-plate 01: 1/8 port With sub-plate Nil: Non-locking push type G N T NPT NPTF Coil specifications Nil Standard With power saving circuit (24, 12 VDC only) T For sub-plate style, manifold type 40, 40R, 41, 41R Power saving circuit is not

7ND9071en

T6 T5 T4 ND91_X_ -40 to +50 C -40 to +65 C -40 to +80 C ND91_X/I02 -40 to +50 C -40 to +64 C -40 to +80 C ND91_X/I09 -25 to +50 C -25 to +65 C -25 to +80 C ND91_X/I45 -25 to +50 C -25 to +64 C -25 to +80 C Number of switches: 2 Protection class of housing: IP66 (DIN 40050, IEC 60529) Conduit entry: M20 x 1.5 (ND9100U and ND9200E2, ND9300E2: 1/2 NPT) Table 12 Ambient temperatures, ND9_X Variant

Series AS Elbow Type/Universal Type Speed Controller with One-touch Fitting 1

" M5 x 0.8 18.3 23.1 12 12.7 7 13.5 AS121F-U10/32-07 AS221F-01-04 9.3 27.5 20.4 4 1/4" 10-32UNF 14.3 17 AS221F-01-01 AS221F-01-06 27.5 27.5 6 20.4 11.6 20.4 36.1 32.1 27.1 13.5 31.1 9.3 1/8" 14.2 12 (12.7) 1/8 16 12.7 AS221F-01-03 AS221F-01-08 32.4 8 20.4 15.2 18.5 19 27.5 25.3 17 9.3 5/32" 12 (12.7) AS221F-01-05 AS221F-01-10 14.2 14.3 40.2 10 23.1 18.5 21 15 21 30.2 36.1 31.1 27.1 33.1 17