Vacuum

Y, Z directions 3limes each 12.6FS or lesis at 25'C 01: Rl/8. [.r5 x 0 8, Tl: NPT1/8, M5 x 0 8.

HRX-OM-W038

AL.01 Contact output 2 function Sets output signal function of contact output 2. RMT Contact output 2 operation Sets output signal operation of contact output 2. A Contact output 2 selected alarm Sets alarm which is selected for contact output 2. AL.01 Contact output 3 function Sets output signal function of contact output 3.

OMS0020

Acquires the information repeatedly until the received information shows that the INP is "1". 18 Repeat No. 17-18 (INP = 1 indicates that the target location has been reached.)

Prevents Micro-Bubbles

Removal of drainage Flush drainage from filters regularly. 17-5-42

High Purity Chemical Valve

Double acting Body Applicable option Actuator section End plate PPS Diaphragm Port size Symbol Note 1 2 3 4 Port size 1/8 1/4 1/8 1/4 1/4 3/8 3/8 1/2 1/2 3/4 1 Symbol 01 02 01 02 02 03 03 04 04 06 10 Body class LQ3 Stainless steel PTFE A 1 Note) Refer to Variations in the table below for valve type combinations.

High performance type Step Motor Controller (Servo/24 VDC)

Product Specifications 16 3.1 Basic specifications 16 3.2 Parts description 17 3.3 Outside dimension diagram 18 (1) Screw mount type JXC5H7#-#, JXC6H7#-# 18 (2) DIN rail mount type JXC5H8#-#, JXC6H8#-# 18 3.4 How to install 19 (1) How to install 19 (2) Ground wire connection 19 (3) Mounting location 20 4.

ZX

R1 1 ZX1 06 R ZZX1 Supply port location 01 1 Stations Arrangement (First station from the right end of the valve side is station 1.)

5 Port Solenoid Valve SY Series

SY3120-C6 SY3140-01 T0604 x 1 m T0806 x 1 m AS3001F-06 T0604 x 1 m T0806 x 1 m AS3001F-08 AS3001F-06 SY5120-01 SY5140-02 AS3001F-08 AN101-01 AN101-01 T1075 x 1 m T0604 x 1 m T0604 x 1 m T1209 x 1 m T1075 x 1 m AS4001F-10 SY7120-02 SY7140-03 AS3001F-06 AS4001F-10 AS3001F-06 AN110-01 AN200-02 T0604 x 1 m T1075 x 1 m T1209 x 1 m T0604 x 1 m T1075 x 1 m T1209 x 1 m AS3001F-06 AS4001F-10 AS4001F

Speed Controller: Standard Type Elbow Type (Metal Body) Series AS

L1 L2 A (2) L3 H (1) T2 T1 D1 D2 Model AS1200-M3 M3 x 0.5 M3 x 0.5 4.5 6.6 23.5 21.5 8 5 5 20.5 18.5 AS120-M5 M5 x 0.8 M5 x 0.8 8 10 28.3 10.3 9 9 25 22.2 25.5 AS120-U10/32 10-32UNF 10-32UNF AS220-01 30.5 13.2 14.3 14.6 32.4 27.4 12 (12.7) 35.5 18 1/8 1/8 AS220-02 35.3 17.5 18 19.5 34.8 29.8 17 (17.5) 27.2 40.3 1/4 1/4 AS320-03 40.8 19.7 22.5 24.3 40.6 35.6 19 30 45.8 3/8 3/8 AS420-04 42.4

3 Port Solenoid Valve Metal Seal/Rubber Seal, Base Mounted Series VQZ100/200/300 21

Model VQZ100 VQZ200 VQZ300 AN110-01 AN200-02 AN200-02 AN200-02 AN110-01 Port plug VVQZ100-CP (For VQZ100) This is used when changing piping location.

3 Port Solenoid Valve Metal Seal/Rubber Seal, Body Ported Series VQZ100/200/300 1

Model VQZ100 VQZ200 VQZ300 AN110-01 AN110-01 AN200-02 AN200-02 AN110-01 Refer to page 4-14-3 for silencer for single valve unit. 4-14-17 18 Series VQZ Option Body Ported External Pilot Specifications Inch-size One-touch Fittings and Option Threads External pilot specifications are used when the operating pressure is below the minimum operating pressure 0.1 to 0.15 MPa or when valve is used

Speed Controller with Indicator

Inch Size [mm] Model d T (R, NPT) H D1 D3 L1 L2 L3 L4 Note 1) A Note 2) M W1 W2 X Y Weight [g] Unlocked Locked Unlocked Locked AS221FS-01-01 (S) 1/8" 7.2 12 19.1 26.2 19.1 43.9 42.4 40.8 39.3 13.3 20 21.5 6.5 15 13 (13) AS221FS-01-03 (S) 5/32" 8.2 AS221FS-01-07 (S) 1/4" 11.2 20.8 27.9 14 (13) AS221FS-01-09 (S) 5/16" 13.2 22.4 29.5 14.2 15 (14) AS221FS-02-01 (S) 1/8" 1/8 13 (12.7) 7.2 20.9

KF

O.D. 1 8 1 4 1 8 1 4 3 8 1 8 1 4 3 8 1 8 1 4 3 8 1 4 3 8 1 2 1 4 3 8 1 2 1 4 3 8 1 2 1 4 3 8 1 2 21 25 22 27 38 30 32 39 31 32 37 38 44 66 38 43 65 53 53 68 51 52 67 10 17 19 17 19 20 18 21 20 18 21 20 22 21 25 22 21 25 23 22 25 23 22 25 KFL04-01 KFL04-02 KFL06-01 KFL06-02 KFL06-03 KFL08U-01 KFL08U-02 KFL08U-03 KFL08N-01 KFL08N-02 KFL08N-03 KFL10U-02 KFL10U-03 KFL10U-04 KFL10N-02 KFL10N-03

VK3000

Refer to the above drawing for DIN terminal dimensions. n L 1 44 27 2 63 46 3 82 65 4 101 84 5 120 103 6 139 122 7 158 141 8 177 160 9 196 179 10 215 198 11 234 217 12 253 236 13 272 255 14 291 274 15 310 293 16 329 312 17 348 331 18 367 350 19 386 369 20 405 388 L1 L2 3-2-9 Series VK3000 Base mounted (Side ported) Type 42 Manifold Grommet: G DIN terminal: D VV5K3-42Station -01 ~ = ~ = Solenoid

One-touch Fittings Series KQ2

L D A M Nylon Urethane 3.2 KQ2R23-04 KQ2R04-06 4 6 2 2.1 9.6 33.5 34.5 3.4 2.9 18.5 17.5 15.5 10.4 4 KQ2R04-08 36.5 5.6 5.6 2.3 8 18 16 KQ2R04-10 12.8 39.5 3.6 10 18.5 KQ2R06-04 4 3 12.8 37 4 4 21 6 KQ2R06-08 37 3 8 18.5 17 KQ2R06-10 12.8 39.5 13.1 13.1 3.5 10 18.5 KQ2R06-12 42 15.2 5.2 12 20 8 KQ2R08-10 15.2 41 26.1 18.0 4.5 10 20 18.5 KQ2R08-12 42 5.1 12 12 KQ2R10-12 17 42 41.5 32.8 33

5 Port Air Operated Valve

How to Order Valve VFA 3 1 3 0 01 VFA 3 1 3 0 01 Pilot port direction Series 1 3 5 Nil: Upward P: Lateral VFA1000 VFA3000 VFA5000 Pilot port Type of actuation 1 2 3 4 5 2 position single 2 position double 3 position closed center 3 position exhaust center 3 position pressure center Pilot port Only 1 and 2 are available with the VFA1000.

Standard Combinations

Threads for IN and OUT ports are not machined. 1/8, 1/4 40 40 28 11 11 1/8, 1/4 53 48 34 14 13 1/4, 3/8 70 54 42 18 15 How to Order Refer to the attachment table on page 4 or 7 for standard bypass port sizes applicable to ACG. 30 01 00 AKM Check valve Bypass port size for redirecting air flow Body size Body size 20 30 40 Port size Symbol 30 40 20 01 02 03 1/8 1/4 3/8 Thread type Nil N F Rc

SYA3000/5000/7000

(For 20, 41, 42 and 45 Types) Pilot pressure range SS5YA Fill the same as SS5Y . 3 5 7 3 5 7 SYA Pilot pressure MPa SYJA Specify the part numbers for valves and options together beneath the manifold base part number. VZA VFA SS5YA5-42-03-02 1 set (Type 42, 3 station manifold base part no.) SYA5140 1 set (Single air operated valve part no.)

5 Port Air Operated Valve SYA3000/5000/7000 Series

(For 20, 41, 42 and 45 Types) Pilot pressure range SS5YA Fill the same as SS5Y . 3 5 7 3 5 7 Pilot pressure MPa (Refer to Best Pneumatics No. 1-1.) Specify the part numbers for valves and options together beneath the manifold base part number. SS5YA5-42-03-02 1 set (Type 42, 3 station manifold base part no.) SYA5140 1 set (Single air operated valve part no.)

25

A 13 15 22 06 08 10 340 400 460 580 640 820 1120 1300 1600 1900 2320 2500 End bracket/IZS40-BE 35 22 4.5 30 18 2 x 5.4 105 33 L 33 Intermediate bracket/IZS40-BM 55 35 22 4.5 36 30 18 2 x 5.4 A 105 33 A A-A section 431 IZS40/41/42 Series Dimensions Ionizer/IZS41, 42 30 44 304 6.8 30 85 9 60 50 A 60 x (n-1) L n (Number of emitter cartridges), L Dimension L (mm) IZS4-340 IZS4-400 IZS4-460 IZS4