LX

Positioning driver Model Operating Conditions Plate non-rotating accuracy () Allowable plate rotation torque (T) Allowable lateral load (F) Non-rotating accuracy () Stroke 50 75 100 125 150 175 200 Load (N) Stroke 50 75 100 125 150 175 200 Torque (Nm) 42 2.87 0.09 42 2.47 40 2.17 + 42 2.38 32 2.16 24 1.98 17 1.82 F T F Refer to page 304 for deflection data. 218 2 Phase Stepper Motor/Without

LEC-OM069xx

DISCONNECT 11 Turn off the control and main circuit power supplies.

CRB2/CRBU2/CRB1

9 14 10 15.5 25 10 25 13 25 14 0.004 0.012 0 0.043 5 12 34 20 9 18 4 1.5 6 10 0.5 29 M3 M4 (13.5) 4.5 (11) M4 (7.5) 0.004 0.012 0 0.043 6 14 42 29 10 20 4.5 1.5 7 10 0.5 36 M5 M5 (18) M5 (10) 5.5 (16.5) 0.005 0.014 0 0.043 8 16 50 40 13 22 5 2 8 12 1.0 43 M5 11 Series CRB2 Dimensions: 40 Single vane/Double vane type M5 x 0.8 with depth 10 CRB2BW40-S, D 3-M5 x

Fluoropolymer Fittings Hyper Fitting / Flare Type Series LQ3

H1 1/4 3 4 3 8 6 6 4 10 8 12 10 19 12 4 LQ3E11-R1 LQ3E21-R1 LQ3E21-R2 LQ3E31-R1 LQ3E31-R2 LQ3E32-R1 LQ3E32-R2 LQ3E41-R1 LQ3E41-R2 LQ3E51-R1 LQ3E51-R2 LQ3E61-R1 LQ3E61-R2 3.5 4.8 11 28.5 14 27.5 10 11 27.5 28.5 14 9 9 10 M (E1,E1) 6 4 6 16 34.5 20 29.5 17 11 33.5 30.5 14 16 9 10 H 44.5 21 16 16 11 47.5 25 20 20 14 19.5 22.5 A side 10 5 9 21 47.5 25 22.5 44.5 19.5 37 38 16 17 KK 37 38 16 17

MB

11 11 NCA D-A5/A6 D-A59W D-A3/A44 13 13 13 14 14 15 D9 9 10 11 11 11 10 D-Y59/Y69 D-Y7P/Y7V D-Y7W/Y7WV 7 5.5 5.5 7 7.5 6.5 5.5 -X D-Y7BAL 6 3.5 3.5 3.5 4 4.5 5 20D-F5/J5 D-F5W/J59W D-F5BAL/F5NTL D-F59F 3.5 4 4 4.5 4.5 4.5 5 Data D-G39/K39 D-P5DWL 9 4 9 4 9 4 10 4.5 10 4 11 11 4.5 4.5 These values are given as guidelines including the hysteresis and are not guaranteed.

KJ

38.5 42 42 44 44 16 17 16.5 17 17 18.5 21 21 22 22 3 5 4 4 5 6 11 11 16 17 15.5 2.5 1 8 Applicable tubing Applicable tubing 1 4 3 16 16 3 5 32 1 4 1 4 5 16 3 8 3 8 1 2 1 2 3 16 16.5 3.5 1 4 17 4.6 18.5 6 5 16 3 8 21 7 Note) D: Max. diameter Male Elbow: KQ2L Connection thread UNF NPT 10-32 UNF Applicable tubing O.D.

7.5

SJ3000-42-1A-l SJ3000-42-2A-l SJ3000-42-3A-l SJ3000-42-4A-l SJ3000-42-6A-l SJ3000-42-5A For D-sub connector For flat ribbon cable 26 pins For flat ribbon cable 20 pins m: 1 (Connector upward) For flat ribbon cable 10 pins D side m: 2 (Connector lateral) For PC wiring 20 pins For EX180 serial wiring Note) For PC wiring 20 pins with power supply terminal SJ3000-76-2A-05 Note) SI unit is not

VQZ1000/2000/3000

L dimension 135.5 9 123 8 160.5 11 148 10 185.5 13 173 12 210.5 15 198 14 235.5 17 223 16 19 248 18 20 260.5 285.5 21 273 No.

CQS

to 100 75 to 200 75 to 300 5 to 30 5 to 30 5 to 50 5 to 50 Bore (mm) 12 16 20 25 FZ FX FV FT FD 55 55 60 64 45 45 48 52 25 30 39 42 5.5 5.5 8 8 4.5 4.5 6.6 6.6 CDQSG Bore size SCQS Bore size , #4 (#4+#11+#13) (All dimensions are common between standard stroke and long stroke except "A", "B", "C", "L" and "L1".)

Free Mount Cylinder Series CU

10 11 8 8 8 8 10 12 9 12 17 20 22 29 11 12 13 16 20 24 20.5 22 28 33 43.5 51.5 15 10 10 11.5 12.5 13 12.5 18 21 26 29 33 42 10 11 14 16 20 24 17 18 25 30 38 48 5 6 8 10 M3 x 0.5 M4 x 0.7 M5 x 0.8 M6 x 1.0 M8 x 1.25 M10 x 1.25 16.5 16.5 Note) 19 21.5 23 Without auto switch With auto switch Bore size (mm) 6 10 16 20 25 32 DNN P Q QA R T Y S 33 36 30 36 40 42 Z 51 57 56 65 73 84 S 33 36 40

LEC-OM02704CN

PA12 P A 11 PA12 P A 11 PA12 15 46 15 1.

Series 10-SYJ300/500/700 Rubber Seal 3 Port Solenoid Valve

-01 Type 10-SS3YJ7-42-C6 1/4 Type 10-SS3YJ7-42-C8 Note) The values are for individually operated 2 position type manifold bases.

Electric Actuator

Note 10) With lock only Note 11) For an actuator with lock, add the power consumption for the lock.

Magnetically Coupled Rodless Cylinder

70 46 47 M4 28.5 20 7 M6 x 1.0 21 5.5 47 35 9.5 6 80 60 61 M5 36 22.5 8 M6 x 1.0 27.5 6.0 55 40 9.5 6 92 70 71 M5 41 26 8 M6 x 1.0 28.5 6.0 65 40 11 8 110 86 87 M6 49 35 11 M8 x 1.25 35 6.0 80 50 18 10 122 100 101 M6 57 36 11 M8 x 1.25 42 7.0 Note 1) Dimension F provides a clearance of 1 mm between the body and the floating joint, but does not consider dead weight deflection of the cylinder

LVQ

Symbol 07 11 13 19 25 1/4 3/8 1/2 3/4 1 Note) Refer to page 540 for How to order fitting parts. Select the fittings of the same size as the one at the valve side.

HRX-OM-S004

Air cooled type only Fig. 8-10 Positions of danger warning label Fig. 8-11 Positions of danger warning label 8.6 Types of Hazard Labels (HRS -40/46) HRS Series 8-16 HRX-OM-S004 Chapter 8 Documents 8.7 Standards This product complies with the standards shown below: Table 8-7 Standards Standard Model CE Mark EMC Directive 2014/30/EU HRS--40HRS--46Machinery Directive 2006/42/EC NRTL E112803(

CQS

9.5 0.5 11 9.5 26.5 ( ): Denotes the values of D-A93.

Table of Contents

50 70 93 44.5 84 16 303 11 6.4 115 3.3 277 43 20 191 11 20 50 98 70 84 44.5 11 6.4 117.5 16 3.3 316 280 46 20 196 11 20 98 50 70 44.5 84 13 319 11 6.4 117.5 3.3 Note 1) For AC20 only, the position of the pressure gauge is above the center of the piping.

ZP

-57 58 Series ZP Vacuum Pad/Components Refer to page 13-11-62 to 13-11-64 for part numbers of e to y.

7ND9071en

When ordering spare parts, always include the following information: Valve controller type designation and serial number from the ID plate The code of this manual, the part number, the part name and quantity required 42 7 ND90 71 en 12 DRAWINGS AND PARTS LISTS 12.1 Exploded view ND9100, ND9400, ND7100 100 107 110 109 228 39 223 217 219 42 218 215 220 210 44 19 43 18 139 11 120 47 49 222