3 Port Solenoid Valve Metal Seal/Rubber Seal, Body Ported Series VQZ100/200/300 1

light 37 <42> < >: AC 4-14-9 Body Ported 10 Series VQZ100/200/300 Dimensions: VQZ300 Single unit Grommet (G): VQZ32(R)-G-C6/C8/C10/02 C6, C8, C10, 02 C6: One-touch fitting for 6 C8: One-touch fitting for 8 75.5 300 (Lead wire length) C10: One-touch fitting for 10 60.5 2-4.5 mounting hole 02: Rc 1/4 41.8 22 23.4 mounting hole 28.5 20 A 4 13 18 SMC 38 2 Cover dia.1.6 Cross section 0.34 mm2

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Individual VV3PA5-41 Common VPA500 Common 2 to 20 stations W = 190n + 150 3/8 VPA544 VV3PA5-42 Individual VV3PA7-41 Common VPA700 2 to 20 stations W = 410n + 380 1/2 VPA744 VV3PA7-42 Individual Note) Supply pressure to 1(P) ports and exhaust air from 3(R) ports on both sides for 10 stations or more.

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ON OFF Time 16-3-42 11 Series PSE Specific Product Precautions 1 Be sure to read before handling. Pressure Sensor Handling Handling Warning Make sure that the air tubing is firmly inserted to avoid possible disconnection. (Tensile strength is approx. 25 N when being inserted 8 mm.)

ATEX Compliant 5 Port Solenoid Valve Series 52-SY

Manifold Specifications for 41 and 42 Type Manifold Specifications for 41 and 42 Type SS5Y5-41 SS5Y5-42 SS5Y7-42 Port size Flow characteristics Model 52-SY740 52-SY540 1 4/2 (P A/B) 4/2 5/3 (A/B EA/EB) 1,5,3 Model Applicable valve 4,2 (A,B) (P ,EA,EB) b Cv c[dm3/(sbar)] c[dm3/(sbar)] Single base / B mounting Manifold style b Cv SS5Y5-41 1 (SUP) / 3/5 (EXH) Common SUP / Common EXH 1/4

MY1

(mm) PC 14.5 PD 32 PE 13 PF 5.5 VV 16 XX 28 YH 37.5 Z 220 ZZ PA PB PG Q PP QW QQ RR SS TT UU WW Model 60 50 7 206 12 42 16 16 6 14.5 15 12.5 MY1H25 Rc 1/16 80 60 8 264 17 51 11 16 4 16 16 16 MY1H32 15 42 13 6.5 19 32 47 280 Rc 1/16 100 80 9 322 18.5 59 11 24 10.5 20 22 19.5 MY1H40 23 36 340 59.5 20.5 37.5 23 8 Rc 1/8 2-d Y S R WX D Bottom ported (ZZ) (Applicable O-ring) Hole Size for Centralized

Speed Controller with One-touch Fitting Stainless Series Series AS-FG Elbow Type/Universal Type 1

M1 AS1001FG-23 AS1001FG-04 AS1001FG-06 AS2001FG-04 AS2001FG-06 AS2051FG-06 AS2051FG-08 AS3001FG-06 AS3001FG-08 AS3001FG-10 AS3001FG-12 AS4001FG-10 AS4001FG-12 AS1001FG-01 AS1001FG-03 AS1001FG-05 AS1001FG-07 AS2001FG-03 AS2001FG-05 AS2001FG-07 AS2051FG-05 AS2051FG-07 AS2051FG-09 AS3001FG-07 AS3001FG-09 AS3001FG-11 AS4001FG-11 AS4001FG-13 20.7 21.4 20.7 21.4 22.4 27.6 28.7 30.2 27.6 33.3 34.1

Speed Controller with One-touch Fitting Stainless Series Series AS-FG Elbow Type/Universal Type

M1 AS1001FG-23 AS1001FG-04 AS1001FG-06 AS2001FG-04 AS2001FG-06 AS2051FG-06 AS2051FG-08 AS3001FG-06 AS3001FG-08 AS3001FG-10 AS3001FG-12 AS4001FG-10 AS4001FG-12 AS1001FG-01 AS1001FG-03 AS1001FG-05 AS1001FG-07 AS2001FG-03 AS2001FG-05 AS2001FG-07 AS2051FG-05 AS2051FG-07 AS2051FG-09 AS3001FG-07 AS3001FG-09 AS3001FG-11 AS4001FG-11 AS4001FG-13 20.7 21.4 20.7 21.4 22.4 27.6 28.7 30.2 27.6 33.3 34.1

AS-FG/ASD-FG

21 54.4 64.4 7.1 8.2 13.2 15.2 8 1/4" 17 18 19.8 27.6 35.6 32.6 40.6 AS3001FG-10 AS2051FG-09 31 32 59.8 71.6 8.1 9.8 15.2 18.5 10 5/16" 18 21 33.3 36.8 38.3 41.8 AS3001FG-12 AS3001FG-07 42 33 59 76 7.4 11 13.2 20.9 12 1/4" 17 22 19.8 34.1 43.6 39.1 51.1 AS4001FG-10 AS3001FG-09 46 36 64.4 8.2 15.2 18.5 10 5/16" 18 21 26.5 82 11.3 35.3 44.6 40.3 52.1 AS4001FG-12 AS3001FG-11 53 40 70.8 9.5

VQ7-6/7-8

) 50 (63) 32 (42) 5 3 5 3 38 (53) 38 (53) 1 23 (30) 1 23 (30) 2-Rc3/8, 1/2, 3/4 Ports R1, R2 Rc3/8, 1/2, 3/4 Port P 2-Rc3/8, 1/2, 3/4 Ports R1, R2 Rc3/8, 1/2, 3/4 Port P Rc1/8 Port X (PE) Rc1/8 Port X (PE) 30 (42) 30 (42) 30 (42) 30 (42) Dimensions inside ( ) are for Rc3/4 Dimensions inside ( ) are for Rc3/4 Dimensions inside are for rubber seals 20 Series VQ7-8 Construction DIN Connector

VM

VM120-01-07S VM130-01-07 VM130-01-07S VM122-M5-07 VM122-M5-07S VM132-M5-07 VM132-M5-07S Toggle lever VM120-01-08 VM130-01-08 VM122-M5-08 VM132-M5-08 VM-30AR Red Push button (Mushroom) VM130-01-30R VM130-01-30B VM130-01-30G VM130-01-30Y VM120-01-30R VM122-M5-30R VM122-M5-30B VM122-M5-30G VM122-M5-30Y VM132-M5-30R VM132-M5-30B VM132-M5-30G VM132-M5-30Y VM-30AB Black VM120-01-30B VM-30AG Green

Industrial Filters

Note) For a comparison with the nominal filtration accuracy according to the element category, refer to pages 41 and 42.

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

(mm) A B C D G E(g6) F(h9) H K L M N R S1 S2 T U V W X Y Model CRBU2WU15-D 5 0.004 0.012 0 0.043 34 25 21.2 18 1.5 15.5 10 0.5 10.5 10.5 M5 x 0.8 3.5 M3 x 0.5 21 3 29 36 48 3.2 12 CRBU2WU20-D 0.004 0.012 0 0.043 42 34.5 25 20 1.5 17 10 0.5 11.5 11 M5 x 0.8 4.5 M4 x 0.7 26 4 36 44 59 4 6 14 CRBU2WU30-D 0.005 0.014 0 0.043 50 47.5 29 22 2 17.5 12 1 12 13 M5 x 0.8 5.5 M5 x 0.8 29 4.5 42 52 69

CRB2/CRBU2/CRB1

A B C D G E (g6) F (h9) S2 S1 R N M T U V W X Y L K H Model CRBU2WU15-D 5 0.004 0.012 0 0.043 M3 x 0.5 3.5 21 3 M5 x 0.8 29 10.5 34 10.5 36 0.5 48 25 3.2 21.2 10 18 15.5 1.5 12 CRBU2WU20-D 0.004 0.012 0 0.043 M4 x 0.7 4.5 26 M5 x 0.8 4 11 36 44 42 11.5 59 34.5 0.5 25 10 4 17 20 1.5 6 14 CRBU2WU30-D 0.005 0.014 0 0.043 M5 x 0.8 5.5 29 M5 x 0.8 4.5 13 42 12 52 50 69 47.5 1 4.5 29 12 22 17.5

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(mm) A B C D E (g6) F (h9) G H K L M N R S1 S2 T U V W X Y Z Model 1 1 3 3 5 0.004 0.012 6 0.004 0.012 8 0.005 0.014 12 0 0.043 14 0 0.043 16 0 0.043 CDRBU2W15-D 48 36 29 3 21 10.5 10.5 0.5 10 15.5 1.5 18 34 25 29 M5 x 0.8 3.5 24 30 M3 x 0.5 18.5 CDRBU2W20-D 59 44 36 4 26 11 11.5 0.5 10 17 1.5 20 42 34.5 30 M5 x 0.8 4.5 M4 x 0.7 25 25.5 34.5 CDRBU2W30-D 69 52 42 4.5 29 13 12 1 12 17.5 2 22

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

(mm) A B C D E (g6) F (h9) G H K L M N R S1 S2 T U V W X Y Z Model 1 1 3 3 5 0.004 0.012 6 0.004 0.012 8 0.005 0.014 12 0 0.043 14 0 0.043 16 0 0.043 CDRBU2W15-D 48 36 29 3 21 10.5 10.5 0.5 10 15.5 1.5 18 34 25 29 M5 x 0.8 3.5 24 30 M3 x 0.5 18.5 CDRBU2W20-D 59 44 36 4 26 11 11.5 0.5 10 17 1.5 20 42 34.5 30 M5 x 0.8 4.5 M4 x 0.7 25 25.5 34.5 CDRBU2W30-D 69 52 42 4.5 29 13 12 1 12 17.5 2 22

Air Suction Filter Series ZF Prevent from occurring vacuum equipment trouble due to ZA dust from vacuum pad ZX Port size ZR Air flow Filtration Series Features Page (μm) Applicable tubing O.D. (l/min(ANR)) ZM Screw-in for one-touch fittings ZMA ZQ ZFA 

15.6 23.1 27 24 35 ZFC201-07 1/4" ZFC201-09 5/16" 1113 Series ZFC Element Replacement Element replacement procedure 4.

Speed Controller with

L4 Note) Weight (g) 5 5.5 6.5 8.5 9.5 19 22 35 38 52 86 95 Model Applicable tube O.D. d AS1002F-01 AS1002F-03 AS1002F-07 AS2002F-03 AS2002F-07 AS2052F-07 AS2052F-09 AS3002F-07 AS3002F-09 AS3002F-11 AS4002F-11 AS4002F-13 MIN.

Series VQ1000 Body Ported Plug Lead Unit: Cassette Type For details about certified products conforming to international standards, visit us at www.smcworld.com.

Dimensions Formula L1 = 11n + 20 n: Station (Maximum 24) 2-C3, C4, C6, M5 C3: One-touch fitting for 3.2 C4: One-touch fitting for 4 C6: One-touch fitting for 6 M5: M5 thread U side D side Stations 1 2 3 1 2 3 4 5 6 7 8 9 10 11 12 42 62.5 73 n L 2n-C3, C4, C6, M5 C3: One-touch fitting for 3.2 C4: One-touch fitting for 4 C6: One-touch fitting for 6 M5: M5 thread L1 L2 L3 31 50 60.5 53 75 85.5

SJ3A6

SJ3000-42-1A-l SJ3000-42-2A-l SJ3000-42-3A-l SJ3000-42-4A-l SJ3000-42-6A-l SJ3000-42-5A For D-sub connector For flat ribbon cable 26 pins For flat ribbon cable 20 pins For flat ribbon cable 10 pins For PC wiring 20 pins For EX180 serial wiring Note) For PC wiring 20 pins with power supply terminal m: 1 (Connector upward) D side m: 2 (Connector lateral) SJ3000-76-2A-05 Note) SI unit is not

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Pg7 3.5 to 7 30.5 64.3 56.8 (AC) 53.1 46.1 (AC) 42 35 19.6 45.3 35.5 47.5 (AC) 30 37.7 (AC) 30 28 Series VF1000/3000 Dimensions (mm) VF3000 1/8", 1/4" [4(A), 2(B) port] 2 x 4.3 (For mounting) 25.5 10 Manual override 4A 1 26.4 20 2B 23 19 (1.6) 66.2 G: Approx. 300 H: Approx. 600 (Lead wire length) (6) 90.9 (AC: 93.1) (Indicator light) 55.5 (10) (E type) (AC) 38.6 42 (45) (55) 31.5 35 35 19.6