IR1000/2000/3000

Conditions: Supply pressure 0.7MPa Set pressure 0.2MPa Flow rate 0 l/min (ANR) IR3000-03 IR3000-03 IR3000-03 Conditions: Supply pressure 0.5MPa Conditions: Back pressure 0.5MPa 0.204 0.5 0.2 Set pressure P2 MPa Set pressure MPa Set pressure MPa 0.202 0.4 Setting point 0.15 0.200 0.3 0.1 0.198 0.2 0.196 0.05 0.1 0.194 0 0.2 0.1 0.4 0.3 0.6 0.5 0.8 0.7 0.9 1.0 0 500 1000 1500 2000 2500 3000

CG1

M5 X 0.8 M6 X 0.75 M8 X 1.0 M10 X 1.25 M12 X 1.25 M14 X 1.5 27 32 38 48 59 72 59 71 55 62 62 70 78 78 80 80 16 17 17 17 17 18 10 7 5.5 6.5 7.5 8.5 10 4 5 5.5 6 7.5 0.5 1 30 30 35 35 40 40 52 62 (14.5) (11.5) 126 (134) 133 (141) 135 (143) 150 (159) 170 (182) 170 (182) 191 (205) 191 (205) Bore (mm) 8 10 12 14 16 18 Bore (mm) ZZ GB S HH GA PD HD (17.5) (11.5) 20 25 32 40 50 63 20 25 32 40

Process Pump Series PA3000/5000/PAX1000 Series PB1000

Since a large quantity of liquid will be pumped out, use a suitable throttle in the discharge port if problems occur. 16 Series PB1000 Process Pump Built-in Solenoid Valve Type/Air Operated Type Performance Curves/Built-in Solenoid Type/Air Operated Type 1l/min = 0.035SCFM 1MPa = 145psi Cycle 1Hz Cycle 5Hz Cycle 10Hz 70 70 70 60 60 60 50 50 50 40 40 40 Total lifting range m Total lifting

Process Pump Series PA3000/5000/PAX1000 Series PB1000

Since a large quantity of liquid will be pumped out, use a suitable throttle in the discharge port if problems occur. 16 Series PB1000 Performance Curves/Built-in Solenoid Type/Air Operated Type Cycle 1Hz Cycle 5Hz Cycle 10Hz 70 70 70 60 60 60 50 50 50 40 40 40 Total lifting range m Total lifting range m Total lifting range m SUP=0.7MPa SUP=0.7MPa SUP=0.7MPa SUP=0.5MPa SUP=0.5MPa SUP=0.5MPa

Series AS Elbow Type/Universal Type Speed Controller with One-touch Fitting 1

M3 Port size With One-touch fitting AS M3 x 0.5 M5 x 0.8 10-32 UNF 1/8 1/4 3/8 1/2 M5 Thread type U10/32 01 02 03 04 ASP R Unified thread (10-32 UNF) Metric thread (M3, M5) Nil ASN N NPT AQ ASV Needle Valve/Flow Characteristics AK AS1201F-M5, AS1211F-M5 AS1301F-M5, AS1311F-M5 AS2201F-01, AS2211F-01 AS2301F-01, AS2311F-01 AS1201F-M3, AS1211F-M3 AS1301F-M3, AS1311F-M3 ASS Inlet pressure: 0.5

Ozone Resistant

120-M3 (U10, 32) 120-M5-F 220-01 220-01-F 220-02 220-02-F 320-03 (02) 320-03-F (02) 420-04 420-04-F 121F-M3 131F-M3 121F-M5 (U10, 32) 131F-M5 (U10, 32) 221F-01 231F-01 2211F-01-06 221F-02 231F-02 321F-03 (02) 331F-03 (02) 421F-04 431F-04 1000F 2000F 2050F 3000F 4000F 1001F 2001F 2051F 3001F 4001F 230F 330F 430F 530F 630F 330F 430F 530F 630F Manifold regulator 4-, 5-port solenoid valve VQ

I

D 00 Without subplate 1% 0.5% + -0.5% M5 M5 0.007 00 Without subplate B M5 M5 0.28 01 18 0.41 2.5% 1% + -1% Base Mounted Type 00 Without subplate 2 01 18 0.9 02 14 1.4 00 Without subplate 02 14 2.0 3% 1.5% + -1% 4 03 38 3.3 04 12 3.9 A M5 M5 0.28 1 01 18 0.9 02 14 1.4 2.5% 1% + -1% Wiring: The use of three-core screened cable is strongly recommended with the screen earthed at the end away

Speed Controller: Standard Type Series AS In-line Type 1

32, 40, 50, 63 124 AS3000-03 3/8 810 12.3 810 12.3 221 AS4000-02 1/4 1,670 25.5 1,670 25.5 40, 50, 63 80, 100 214 AS4000-03 3/8 1,670 25.5 1,670 25.5 205 AS4000-04 1/2 1,670 25.5 1,670 25.5 242 AS5000-02 1/4 2,840 44 2,840 44 40, 50, 63 80, 100 233 AS5000-03 3/8 4,270 66 4,270 66 224 AS5000-04 1/2 4,270 66 4,270 66 AS4000 Note) Flow rate values are measured at 0.5 Mpa and 20C.

VCA

48 56 58.5 41 50 60 68 64 76 86 91 18 24 30 35 28 34 40 40 11.5 14 15 17.5 15 17 20 20 20.5 25 30 34 12.8 19 23 23 M4 M5 M5 M5 VCA21 VCA31 1/4 1/4, 3/8 3/8, 1/2 3/4 VCA41 4 Series VCA How to Order Manifolds (VCA20) VV2C A 2 02 02 How to Order Manifold Assemblies (Example) Enter the valve and option models to be mounted under the manifold base part number.

Speed Controller: Standard Type Series AS Elbow Type (Metal Body) 1

AS1200-M3 AS1400-M3 AS120-M5 AS220-01AS220-02 AS320-03 AS420-04 10-32UNF Port size M3 x 0.5 2.5, 4, 6 1.05 MPa 0.7 MPa 0.1 MPa M5 x 0.8 1/8 1/4 20, 25, 32, 40 3/8 1/2 6, 10, 15, 20, 25 80, 100 32, 40, 50, 63 Applicable cylinder bore size (mm) 1.5 MPa 1 MPa 0.1 MPa Proof pressure Max. operating pressure Body swivels 360 Swivel type allows free setting of piping.

Speed Controller: Standard Type In-line Type AS Series

Free flow Controlled flow Weight (g) Sonic conductance dm3/(sbar) Sonic conductance dm3/(sbar) Critical pressure ratio Critical pressure ratio Model Port size Flow rate (L/min (ANR)) Flow rate (L/min (ANR)) AS1000-M3 AS1000-M5 AS2000-01 AS2000-02 AS3000-02 AS3000-03 AS4000-02 AS4000-03 AS4000-04 AS5000-02 AS5000-03 AS5000-04 0.06 20 0.06 20 M3 x 0.5 4.7 0.15 0.22 80 0.25 90 M5 x 0.8 33 0.7

Table of Contents

x 0.8 (Port) XX XX VV VV 2-M5 x 0.8 (Hexagon socket head plug) 2-M5 x 0.8 (Hexagon socket head plug) MY1MG MY1MG (mm) A B C G GA GB H K J LD L LH LL LW MM N Model M NH NC NE NW PA 80 6 3.5 13.5 8.5 16.2 40 10 M5 x 0.8 3.6 80 22.5 40 54 M4 x 0.7 20 MY1M16 14 28 56 40 6 27.7 100 7.5 4.5 12.5 12.5 20 46 12 M6 x 1 4.8 100 23 50 58 M5 x 0.8 25 MY1M20 7.5 33.7 17 34 60 50 Detailed Dimensions of

CRB2/CRBU2/CRB1

M5 (18) M5 (10) 5.5 (16.5) 0.005 0.014 0 0.043 8 16 50 40 13 22 5 2 8 12 1.0 43 M5 11 Series CRB2 Dimensions: 40 Single vane/Double vane type M5 x 0.8 with depth 10 CRB2BW40-S, D 3-M5 x 0.8 with depth 10 56 3-M5 x 0.8 with depth 16 25 25 A port B port 5.5 with depth M5 x 0.8 with depth 16 11.5 10g6 0.005 0.014 2 20 0 0.030 4 Vane type 6.5 10 30 45 Single

A

-G AV3000-03-GS AV3000-03-D AV3000-03-DZ AV3000-03-Y AV3000-03-YZ AV4000-04-G AV4000-04-GS AV4000-04-D AV4000-04-DZ AV4000-04-Y AV4000-04-YZ AV5000-G AV5000-GS AV5000-D AV5000-DZ AV5000-Y AV5000-YZ M4 x 0.7 Depth 4.5 22 29 0 38 40 31 105 93 66 1/4 47.5 23.5 65.5 6 M4 x 0.7 Depth 4.5 22 29 0 38 40 31 125 66 1/4 23.5 82.5 23 67.5 10.5 M4 x 0.7 Depth 4.5 22 29 0 38 40 31 125 66 1/4

Miniature Fittings M3, R(PT) 1/8, M5 Series M

I.D. 1 8 1 4 1 8 1 4 3 8 1 8 1 4 3 8 1 8 1 4 3 8 1 4 3 8 1 2 1 4 3 8 1 2 1 4 3 8 1 2 1 4 3 8 1 2 KFH04-01 KFH04-02 KFH06-01 KFH06-02 KFH06-03 KFH08U-01 KFH08U-02 KFH08U-03 KFH08N-01 KFH08N-02 KFH08N-03 KFH10U-02 KFH10U-03 KFH10U-04 KFH10N-02 KFH10N-03 KFH10N-04 KFH12U-02 KFH12U-03 KFH12U-04 KFH12N-02 KFH12N-03 KFH12N-04 10 10 15.5 1.5 1.6 13 23 14 25 36 16 25 37 16 24 36 32 40 65 31 39 64

ARM10/11

Common IN Individual IN Common IN Individual IN Bonnet Polyacetal w o ARM2500 -A-02 ARM2500 -B-02 ARM3000 -A-03 ARM3000 -B-03 1 Regulator Regulator Replacement Parts 1 1 1 End plate R End plate L O-ring !0 !1 !2 Description Material Part no. No.

ARM10/11

Common IN Individual IN Common IN Individual IN Bonnet Polyacetal w o ARM2500 -A-02 ARM2500 -B-02 ARM3000 -A-03 ARM3000 -B-03 1 Regulator Regulator Replacement Parts 1 1 1 End plate R End plate L O-ring !0 !1 !2 Description Material Part no. No.

VCW

36.5 13.5 15 32 25 23 M5 24 59 46 57 60 54.5 48.5 101 57 68 1/2 22 45 89 41 11 17 36 22.5 23 M5 26 64.5 48 62.5 62 60 50.5 103 62.5 70 1/4, 3/8 VCW41 30 50 93.5 41 13.5 17 36 25 23 M5 26 66.5 48 64.5 62 62 50.5 103 64.5 70 1/2 35 60 101 41 17.5 17 36 30 28.2 M5 26 70 48 68 62 65.5 50.5 103 68 70 3/4 4 Direct Operated 2Port for Water Series VCW Dimensions (N.O.)

CXS

CXSJ6-10 10 15 19 42 52 CXSJ6-20 20 25 29 52 62 CXSJ6-30 30 35 39 62 72 CXSJ6-40 40 45 49 72 82 CXSJ6-50 50 55 59 82 92 5 Series CXSJ Dimensions: 10 Standard Piping 16 12 + ST 4-M3 x 0.5 with depth 4.5 3.5 8 7.5 2-M5 x 0.8 with depth 4 (Piping port) 28.5 8 ST 56 + ST 15 44.5 + ST 8 3.5 13 1 M5 x 0.8 x 4 (Hexagon socket head set screw) 4 16 8 + ST 4.5 4.5 M8 x 1.25 x 7.5 (Bolt holder) 1 40

REA/REB

Construction/Dimensions (mm) R Note 2) F Note 1) Model PA M MD MM LA L C HB B HA W A REA25 36 5 M4 M5 x 0.8 30 70 8.0 28.5 46 21 47 20 5.5 7 REA32 47 6 M5 M6 x 1.0 35 80 9.5 36 60 27.5 61 22.5 6.0 8 REA40 55 6 M5 M6 x 1.0 40 92 9.5 41 70 28.5 71 26 6.0 8 REA50 65 8 M6 M8 x 1.25 40 110 11 49 86 35 87 35 6.0 11 REA63 80 10 M6 M8 x 1.25 50 122 18 57 100 42 101 36 7.0 11 Note 1) Dimension F provides