CRBU

X Y (mm) Size Y X 10 3 19 Body (B) 15 6.5 20.5 Body (A) 20 7.5 22.5 30 8.5 26.5 40 9 36 11-3-31

3 Port Direct Operated Poppet Solenoid Valve Series VKF300 1

16 323 313 17 342 332 18 361 351 19 380 370 20 399 389 4-13-10

VKF300

Light (DZtype only) 67.5 59 32 17 2 2-4.5 (mounting holes) P 19 35 P Pg.7 2-Rc(PT) 1/8 (ports P) A A A 11 20 26 49 Approx. 300 (lead wire length) 1 P = 19 13.5 L2 5.5 L1 47.5 11 5 n-Rc(PT) 1/8, M5 x 0.8 (port A) 19 35 n-Rc(PT) 1/8 (port R) 47.5 11 R R P = 19 19 L: Dimension table n: Stations n L 1 38 27 2 57 46 3 76 65 4 95 84 5 114 103 6 133 122 7 152 141 8 171 160 9 190 179 10 209 198

Electric Actuator

19 Output Load Load Output 20 AREA AREA 20 Output FG Round terminal 0.5-5 FG Round terminal 0.5-5 Note 1) For pulse signal wiring method, refer to Pulse Signal Wiring Details.

3 Port Direct Operated Poppet, Solenoid Valve, Series VKF300

Light (DZtype only) 67.5 59 32 17 2 2-4.5 (mounting holes) P 19 35 P Pg.7 2-Rc(PT) 1/8 (ports P) A A A 11 20 26 49 Approx. 300 (lead wire length) 1 P = 19 13.5 L2 5.5 L1 47.5 11 5 n-Rc(PT) 1/8, M5 x 0.8 (port A) 19 35 n-Rc(PT) 1/8 (port R) 47.5 11 R R P = 19 19 L: Dimension table n: Stations n L 1 38 27 2 57 46 3 76 65 4 95 84 5 114 103 6 133 122 7 152 141 8 171 160 9 190 179 10 209 198

Rotary Actuator/Vane Type

[mm] Size CRB2 CRBU2 Y X Y X 10 12 (3) 10 (19) 19 (10) 3 (12) 15 15.5 11.5 20.5 6.5 20 17 13 22.5 7.5 30 19 16 26.5 8.5 40 28 17 36 9 Symbol: X5 Specifications with connection port size of sizes 10 and 15 changed to M5 The rotating angle is only 90 and 180. The vane type is compatible with single vanes only.

Rotary Actuator

For details, refer to pages 19 to 30.

2-Color Display Digital Flow Switch Series PFM

Dimensions PFM -C4/C6/C8/N7--X693 7 5 PFM -C4/C6/C8/N7--X694 7 5 10.2 10.2 1 43 A 43 1 IN OUT (34.2) 3 (34.2) 13 3 13 A 18 OUT 2 x 3.4 18 IN B B 48 20 48 20 2 x 3.4 One-touch fitting Applicable tube O.D.

Compact Vacuum Unit

Latching Vacuum pump system ZB00 ZB03 ZB04 ZB05 ZB06 0.3 mm 1 to 12 stations Ejector 0.4 mm 0.5 mm 0.6 mm Manifold Features 2 Compact Vacuum Unit Series ZB RoHS How to Order Single Unit 5 L 0 2 K1 ZB 00 P1 C4 Vacuum Pump System 5 L 1 1 K1 ZB 04 P1 C4 Ejector Nominal Nozzle Size Body Type Rated Voltage 5 6 Applicable supply valve and standard supply pressure 24 VDC 12 VDC Port specification

Rubber Seal 5 Port Solenoid Valve Series SY3000/5000

(max. 20 stations) 3 SY3000 5 SY5000 Connector mounting position A, B port size Symbol Mounting position U U side SY5000 SY3000 D D side Symbol Port size 4 One-touch fitting C4 Symbol Port size 4 One-touch fitting C4 6 One-touch fitting C6 Mixed M 6 One-touch fitting C6 Valve stations 8 One-touch fitting C8 Mixed M Stations Symbol Note Single wiring specifications (up to 16 solenoids are

Vacuum

oP X Adaolor olate: incllded shndard Applicable Tube Pad Diameters s10. s13. s16 Bellows type Pad Diameters s4O. o5O Bellows type O _ F l a l s : 1 0 F ats: 19 [ -i 1 0 '16 3 3 9 50 a4 95 5.5 13. 18.527.5 36.452.5 63.5 86.5 97.5 4.7 '19 zPRr6E l '16 1B 20 29 37.9 54 88 99 9.9 8.5 1 1 8 IPY $enies Wllrout Bullm Pad Diameters s2. a4' s6' sB Pad Diameters o2o. o25. o32 Oeep Type/ZPY2sD only

Vacuum

oP X Adaolor olate: incllded shndard Applicable Tube Pad Diameters s10. s13. s16 Bellows type Pad Diameters s4O. o5O Bellows type O _ F l a l s : 1 0 F ats: 19 [ -i 1 0 '16 3 3 9 50 a4 95 5.5 13. 18.527.5 36.452.5 63.5 86.5 97.5 4.7 '19 zPRr6E l '16 1B 20 29 37.9 54 88 99 9.9 8.5 1 1 8 IPY $enies Wllrout Bullm ) Pad Diameters s2. a4' s6' sB Pad Diameters o2o. o25. o32 Oeep Type/ZPY2sD only

Electric Actuator

For auto switches, refer to pages 19, 20.

Compact Vacuum Unit Ejector/ Vacuum Pump System

ZB-OM00201-B Revision history A P.19 Recommended tube fittings P.21 Piping to the Manifold Base B P.21 Change of description about tightening of fitting.

ZQ-OM01401

(1) 50A-M5 (M5x0.8) (1) 50A-C3 3.2 () 50A-C4 4 () 8 (10 ) 50A-C6 6 () ZK1-CP-A F1-LC3 3.2 () F1-LC4 4 () 9 Assy ZQ1-BK1-A 25 - No.ZQ-OM01401-B 7.3 b a a a 1. (2 ) 2.

JSY1000/3000/5000 Series (Non Plug-in)

KQSY10-C4-X1336 (JSY1000) KQSY11-C6-X1336 (JSY1000) KQSY30-C8-X1336 (JSY3000) KQSY50-C12-X1336 (JSY5000) * It is not possible to replace C2 or C4 fittings with C6 fittings for the JSY1000 series. * Refer to page 18 for One-touch fitting, clip, and port plate part numbers. 15 No.JSY1000V-OMW0004-A JSY1000/3000/5000 series Specific Product Precautions 7 Be sure to read this before handling.

PFxx-OMJ0005CN

) 10.1 8.1 C4 4(5/32) 10.1 8.1 C6 6 10.3 8.3 C6 6 10.3 8.3 C8 8(5/16) 12 10 C8 8(5/16) 12 10 N7 1/4 10.3 8.3 N7 1/4 10.3 8.3 PFM7-01/02--X693 PFM7S-01/02--X693 A B C() A B C() Rc1/81/4 Rc1/81/4 NPT1/81/4 NPT1/81/4 13 11 17 13 11 17 G1/8 G1/8 G1/4 17 15 21 G1/4 17 15 21 -73No.PF-OMJ0005CN-I PFM7-C4/C6/C8/N7--X694 PFM7S-C4/C6/C8/N7--X694 A B A B C4 4(5/32) 10.1 36.1 C4 4(5/32) 10.1 8.1

VZ3000

plug connector (M) VZ3220-M-M5 300 (Lead wire length) 300 (Lead wire length) : With light/surge voltage suppressor DIN terminal (D) VZ3220-D-M5 C4 C6 Built-in One-touch fittings VZ3220-MAX. 10 C4: MAX. 7 C6: MAX. 7.5 Applicable cable O.D. 3.5 to 7 2-One-touch fitting (A, B port) Applicable tubing model C4: T0425 C6: T0604 3-3-22 5 Port Solenoid Valve Body Ported Series VZ3000 3 Position Closed

5 Port Solenoid Valve Series SQ1000/2000

L6 (for 6) C4 (for 4) C10 (for 10) L6 (for 6) Side SQ2000 C8 (for 8) 35 J kit: Flat cable 1 to 8 stations SQ230 SQ231 Option SS5Q23 580 Note 2) L4 (for 4) Built-in Silencer Direct exhaust C6 (for 6) Top C8 (for 8) Note 1) One-touch fittings for inch sizes are also available.

Digital Flow Switch (Integrated display type)

PFM7-C4/C6/C8/N7--X693 PFM7S-C4/C6/C8/N7--X693 PFM7-01/02--X693 PFM7S-01/02--X693 -73No.PF-OMJ0006-J PFM7-C4/C6/C8/N7--X694 PFM7S-C4/C6/C8/N7--X694 PFM7-01/02--X694 PFM7S-01/02--X694 -74No.PF-OMJ0006-J For a mixture of Argon (Ar) and carbon dioxide (CO2) The mixture ratio can be selected from Ar : CO2 = 92 : 8, 90 : 10, 80 : 20, 70 : 30 or 60 : 40.