Piping: Base Mounted Common SUP Common EXH, Stations: 11 Stations, A, B Port: ø4 One-touch Fitting, P R Port Thread: -

Fieldbus System

, N1, N3 <4(A), 2(B) port> C2: 2 One-touch fitting C3: 3.2 One-touch fitting C4: 4 One-touch fitting N1: 1/8" One-touch fitting N3: 5/32" One-touch fitting DIN rail clamping screw L2 = L1 10.5 L3 = 8.5 x n1 + 46 L4 = L3 + 81 + 47 x n2 L5 = (L1 L4)/2 L6 = 8.5 x n1 + 31 L7 = 47 x n2 + 86.1 (mm) L1: DIN Rail Overall Length Valve stations (n1) I/O Unit stations (n2) 1 2 3 4 5 6 7 8 9 10 11

Series VQ Metal Seal/Rubber Seal Body Ported

VQ0140-5MO-C4 4 sets (Single solenoid No.) VQ0240-5MO-C4 4 sets (Double solenoid No.) The mark is an assembling mark. Prefix to parts nos. of solenoid valves, etc. VVQ0-R-4-C4 Individual EXH spacer VVQ0-57A-4 DIN rail mounting bracket KQP-X19 Blank plug 23 04 06 Specify valve and option nos. below the manifold base No.

0.

DIN terminal (Y): VQZ2l2l-lYll1-C4, C6 L-type plug connector (L): VQZ2l2l-lLl1-C4, C6 (Lead wire length) Approx. 300 79 [81.2] 28.8 [35.8] 85.4 Max. 10 45.5 Pg7 Applicable cable O.D. 3.5 to 7 Unless otherwise indicated, dimensions are the same as Grommet (G). [ ]: AC M-type plug connector (M): VQZ2l2l-lMl1-C4, C6 (Lead wire length) 61.4 53.9 42.6 40.1 [47.1] Approx. 300 27.9 69.2 [71.4] 64.2

Series VQ1000 Body Ported Plug Lead Unit: Cassette Type For details about certified products conforming to international standards, visit us at www.smcworld.com.

Dimensions Formula L1 = 11n + 20 n: Station (Maximum 24) 2-C3, C4, C6, M5 C3: One-touch fitting for 3.2 C4: One-touch fitting for 4 C6: One-touch fitting for 6 M5: M5 thread U side D side Stations 1 2 3 1 2 3 4 5 6 7 8 9 10 11 12 42 62.5 73 n L 2n-C3, C4, C6, M5 C3: One-touch fitting for 3.2 C4: One-touch fitting for 4 C6: One-touch fitting for 6 M5: M5 thread L1 L2 L3 31 50 60.5 53 75 85.5

3 Port Solenoid Valve

Note) For manifold dimensions including elbow fitting, see page 11.

5 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported

light Indicator light 28.5 <32> Cover diameter 1.5 Cross section 0.23mm2 < >: AC < >: AC 1.12-11 VQZ1000/2000/3000 Body Ported Dimensions: VQZ2000 2 position single Grommet (G): VQZ212 (R)wGwC4, C6, M5 0 1 2-C4, C6, M5 C4: One-touch fittings for 4 C6: One-touch fittings for 6 23.5 Mounting holes M5: M5 thread 300 84.5 (Lead wire length) 54.5 17.3 22.5 29.5 R2.5 6 6 3.4 B 4 27 11 15 SMC

Fieldbus System

/Bottom ported Symbol A, B port Type 10/Side ported Type 11/Bottom ported SY3000 SY5000 SY7000 SY5000 SY7000 N1 SY3000 SY5000 SY7000 SY5000 SY7000 C2 1/8" V N3 5/32" V V V N7 1/4" V V V V V N9 5/16" V V V V N11 3/8" V V 2 V C3 3.2 V C4 4 V V V C6 6 V V V V V C8 8 V V V V C10 10 V V C12 12 V V Straight Straight CM* Straight port, mixed sizes V V V V V LN3 5/32" V LN7 1/4" V

Vacuum System Peripherals:

(When port sizes for A, B ports are mixed, indicate C4 or C6 in cell .)

Valve Single Unit

) SY3000-11-24 Mounting Screw Tightening Torques SX5000 SY5000-11-10 M2: 0.17 Nm M3: 0.8 Nm M4: 1.4 Nm SX7000 SY7000-11-9 Warning When mounting a valve or spacer on the manifold base or sub-plate, etc., those mounting directions are determined.

Table of Contents

12 11 12 10 11 11 12 11 11 6.3 6.8 12 12 12 12 10 11 10 10 11 11 6.5 6.8 0.18 0.15 0.18 0.15 0.18 0.18 0.16 0.15 0.22 0.22 2 position 3 position 40 or less 0.63 1,000 Single VFS4100 1 2 VFR 3 8 15 or less 0.75 Double VFS4210 VFS4200 1,200 1 2 3 8 1 2 3 8 1 2 3 8 1 2 VP4 Closed center Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650

3 Port Solenoid Valve Metal Seal/Rubber Seal, Body Ported Series VQZ100/200/300 1

Plug Lead Unit Series VQZ100/200/300 Dimensions: VQZ200 Single unit Grommet (G): VQZ22(R)-G-C4/C6/M5 C4, C6, M5 C4: One-touch fitting for 4 2-3.5 mounting hole C6: One-touch fitting for 6 70 300 (Lead wire length) M5: M5 thread 22.5 29.5 19.3 R2.7 27 34 V100 A 11 15 SMC 2 8 Cover dia.1.6 Cross section 0.34 mm2 Manual override 3.5 20.5 SY 34 M3 x 0.5 External pilot port (Only external pilot

3 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported VQZ100/200/300

R port VP Rc(PT)1/8 P port Foot bracket PE port P 1 3 R VQ 14.5 11 2-2.2 Die cast hole For manifold gasket positioning VQZ VZ VS DIN terminal (Y): VQZ2l2(R)-lYl-C4, C6, M5 L plug connector (L): VQZ2l2(R)-lLl-C4, C6, M5 Indicator light 300 83 84 (Lead wire) 32 35.5 87 MAX.10 Cover diameter 1.5 Cross section 0.23mm2 Applicable cord O.D.

3/5 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ1000/2000/3000

Note 3) When specifying more than one option, indicate them alphabetically. 1.12-55 VQZ1000/2000/3000 Base Mounted Dimensions: VQZ2000 VV5QZ25C C Station Port size 33 (11) Grommet(G) (35) 25 (7.5) C6: One-touch fitting for 6 C4: One-touch fitting for 4 01: Rc(PT)1/8 2n-01, C4, C6 11 11.8 7.4 25.5 Mounting holes (5.5) U Side n B 2 A 4 5 Manual override 4 (L4) (L3) L1 L2 3 P=16 21.7 2 P=16

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SZ3000

11 11 23 11 23 SOL.A SOL.B SOL.B Light/Surge voltage suppressor Station 10 Station 10 SOL.A SOL.A 10 10 Light/Surge voltage suppressor Light/Surge voltage suppressor 15 15 15 SOL.B SOL.B SOL.B Station 2 Station 2 Station 2 2 2 SOL.A SOL.A SOL.A Light/Surge voltage suppressor Light/Surge voltage suppressor Light/Surge voltage suppressor 2 SOL.B SOL.B SOL.B 14 Station 1 Station 1 14 14 Station

Series 10-SYJ300/500/700 Rubber Seal 3 Port Solenoid Valve

Type 10-SS3YJ3-S42-M5 Type 10-SS3YJ3-S42-C4 Base mounted for internal pilot 0.17 0.36 0.3 0.17 0.31 0.33 0.32 0.35 0.075 0.086 0.079 0.082 0.32 0.33 0.33 0.35 0.11 0.2 0.35 0.26 0.072 0.082 0.086 0.086 M5 x 0.8 10-SYJ34M 1/8 C4 M5 x 0.8 C4 10-SYJ34M 1/8 Note) The values are for individually operated 2 position type manifold bases.

7.4

fitting assembly 2n x C4 C4: 4 One-touch fitting assembly L1 L2 L3 4.5 67 1.7 3 Mounting hole for M3 67 1.7 4.5 P=11 15.5 Mounting hole for M2.5 (3.5) (30) 5.5 46.5 8 38 (14) 33 32.2 Residual pressure release manual override 11 Residual pressure release manual override 29.5 (17.5) 38 (22.5) 0.5 (43) 2.5 U side D side Stations 1 2 3 n DIN rail clamping screw 2n x C3, C4, M5 C3: 3.2 One-touch

7.5

C4 SJ3l60-C4 SJ2l60-C4 4 onetouch fitting 4 onetouch fitting 3 position 4 position 3 position 4 position 77 48 73 61 69 44 39 42 2 position 2 position C6 SJ3l60-C6 SJ2l60-M3 6 onetouch fitting M3 x 0.5 3 position 4 position 3 position 4 position 73 69 57 65 69 46 42 Note) Please contact SMC for the weight of elbow fittings. 2 position SJ3l60-M5 M5 x 0.8 3 position 4 position 65 Note) Please

5 Port Solenoid Valve Metal Seal/Rubber Seal Series SQ1000/2000 1

SOL.A 10 () (+) White Black Item Characteristics Japan Aviation Electronics Industry, Ltd. 10 stations SOL.B 23 () (+) Gray Red 11 () (+) White Red Conductor resistance /km, 20C J.S.T. Mfg. Co., Ltd. 65 or less SOL.A 11 stations Hirose Electric Co., Ltd.

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SY3000/5000/7000

included) 5 SY5000-52-1A Bushing assembly 6 VZ1000-11-1Refer to page 7.