VDW

C37 Series 200 Symbol Port size PB 300 SUS M5 01 02 M5 1/8 (6A) 1/4 (8A) Thread type Nil F N Rc G NPT Piping to 3 Port Valve N.O. Port Caution Socket Electricity 1. Surge voltage A high voltage which is momentarily generated in the shut-off unit by shutting off the power. Cover Others 1. Material NBR: Nitrile rubber FKM: Fluoro rubber = FPM Trade names: Viton, Dai-El, etc.

7ND9071en

Unscrew the M4 screws (47, 3 pcs.), M3 screws (48, 2 pcs.) and M3 screw (49). Remove the spool valve assembly. The spool valve may be cleaned if special attention is paid to a clean environment and proper procedure. After unscrewing the M4 screws (47, 3 pcs.) the spool valve may be lifted from the fixture.

Series SYJA300 3 Port Air Operated Valve

3 Port Air Operated Valve Series SYJA300 Model Compact/Lightweight Copper free Effective area (mm2) (Cv) Valve model Actuation Port size Weight (g) Pilot port size SYJA312-M3 N.C. M3 X 0.5 Body ported 0.9 (0.05) 18 There are no copper parts that come in contact with the media; suitable for copper free applications SYJA322-M3 N.O.

SQ1000/2000

Screwing in fittings When screwing fittings into valves, tighten as follows. 1) For M3, M5 threads 1-1) When using SMC fittings, tighten in the following manner. After tightening by hand, tighten an additional 1/4 rotation for M3 and 1/6 rotation for M5 with a tool. However, when using a miniature fitting, tighten an additional 1/4 rotation with a tool after tightening by hand.

0.01

(C04) C08 (C06) 02 (C06) 02 (C08) Port size w C10 (C08) 02 (C08) C12 (C10) 02 (C10) 02 (C12) Model Port size q C04 (C06) C04 (02) C06 (C08) C06 (02) C08 (02) Model Port size q C08 (C10) C08 (02) C10 (C12) C10 (02) C12 (02) SFD100SFD200326 Related Products Mist Separator AM Series Refer to pages 223 to 230 for details.

ATEX Compliant 5 Port Solenoid Valve Series 52-SY

Note 2) 52-SY9000 has no bracket. 5 7 9 52-SY5000 52-SY7000 52-SY9000 Thread type Type of actuation Nil F N T Rc G NPT NPTF 2-position single 2-position double 3-position closed centre 3-position exhaust centre 3-position pressure centre 1 2 3 4 5 A, B port size (Body ported type) Piping type Port size Applicable series Symbol 01 C4 C6 C8 N3 N7 N9 02 C8 C10 N9 N11 02 03 C8 C10 C12 N9 N11

VS 8-2/VS 8-4

Mounting screw (M4) Terminal block cover M3 screw Gasket 6 mm Electrical entry 2 x G 3/4 Step 3. Mounting the terminal block cover Securely tighten the screws to the torque shown below, after confirming that the gasket is installed correctly.

Modular Type Air Filter Series AF

Drain guide 1/4 Note 4) AFM30, 40 Rc NPT G Nil C AFM20 to 40 1/8 1/4 3/8 1/2 3/4 01 02 03 04 06 R Flow direction: Right to left AFM20 to 40 N Note 1) Float type auto drain (N.O.)

Series CQS Compact Cylinder Compact Type ø12, ø16, ø20, ø25

A A1 MM U1 L1 RR1 A1 L1 E1 MM RR1 U1 0.4 0.2 + 0.2 + 0 0.2 0.4 0.2 0.4 10 12 16 20 +0.002 0 5 6.4 8 10 0.2 0.4 0.1 0.3 0.2 0.4 0.2 0.4 +0.002 0 5 6.5 8 10 #8-32UNC 10 12 16 20 12 16 20 25 10 12 16 20 14.6 16.6 21 25.6 RCS-01 RCS-015 RCS-02 RCS-025 RCD-01 RCD-015 RCD-02 RCD-025 21.5 32 34 41 6 6 6 8 16 25 25 30 #8-32UNC #8-32UNC #10-32UNF 1/4-28UNF 6.3 12 10.3 18 7 14 11.5 14

VDW Series, Compact Direct Operated 2/3 Port Solenoid Valve for Water and Air

Materials Thread type Symbol Nil A G H Manifold material Seal material NBR FKM NBR FKM Rc G NPT Nil F N Brass 1 D side 2 3 4 5 U side Stainless steel OUT port size Stations Series 20 Port size M5 1/8 (6A) 1/4 (8A) Symbol 02 : 10 2 stations : 10 stations 30 10 M5 01 02 Note) IN port sizes are as follows. 10: 1/8 (6A) 20: 1/4 (8A) 30: 3/8 (10A) How to Order Valves (for Manifold) VDW 2 3 5

VDW Series

Materials Thread type Symbol Nil A G H Manifold material Seal material NBR FKM NBR FKM Rc G NPT Nil F N Brass 1 D side 2 3 4 5 U side Stainless steel OUT port size Stations Series 20 Port size M5 1/8 (6A) 1/4 (8A) Symbol 02 : 10 2 stations : 10 stations 30 10 M5 01 02 Note) IN port sizes are as follows. 10: 1/8 (6A) 20: 1/4 (8A) 30: 3/8 (10A) How to Order Valves (for Manifold) VDW 2 3 5

Table of Contents

max (from 3 of graph MY2H/M3) = 60 (Nm) MX M3 = m3 x g x X = 7.525 x 9.8 x 140.1 x 10-3 = 10.33 (Nm) m3 M3 MTS Load factor 3 = M3/M3 max = 10.33/60 = 0.17 MY 5.

0.4

Flow rate characteristics: C Max. operating frequency 0.8 MPa 0.15 MPa 5 to 50C 0.60 dm3/(sbar) 180 c.p.m SZ SUP side pressure (P1) To CYL port VVQ1000-FPG-02 1 set VQ1000-FPG-C6M5-D 2 pcs.

TABLE OF CONTENTS

THRU 2 HOLES LOCATED AS SHOWN FOR M3 MOUNTING SCREW S or less.

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

Example) Bolt M3 x 35l 2 pcs.

PFA/PFW

Panel adapter B ZS-22-02 Thread type Piping port size Rc NPT G Nil N F 01 02 1/8 1/4 Specifications PFA301-m PFA300-m Model Specifications Note 1) 1 to 10, 5 to 50l/min (0.04 to 0.35, 0.18 to 1.77SCFM) Flow rate range measurement & setting Minimum setting unit 1% of maximum flow rate range Model PFA510-m PFA550-m Real-time flow rate l/min, CFM x 10-2 Display units Measured fluids Dry air,

With Factory Installed

AI Inlel pressure 0.7MPa /71 kgf/cm21 , outlel pressure 0.2MPa 1 2.0kgflcm21. flow rale 20 / min (ANR) AR2001-02 AR2001-02 0.25 -r-=:: lf~1 ~ "'" ~ :'.. ::;; 0.2 ~r. " 5 OJ> ~ o . 3k-1-j.-:=.

F/ISE

pressure ZSE50 02 M F L 22 For compound pressure Piping specifications Option 02 T2 G2 R 1/4 (M5 with female screw), Piping in backward direction None Nil NPT 1/4 (M5 with female screw), Piping in backward direction Bracket A G 1/4 (M5 with female screw), Piping in backward direction Optional A Input/output specifications 22 30 62 NPN open collector 2 output + Analog output Bracket D NPN

Auto Switch Guide

(Tightening torque of M3 screw should be 0.5 to 0.7 Nm.) Auto Switch Mounting Bracket Part No.

Auto Switch Guide

(Tightening torque of M3 screw should be 0.5 to 0.7 Nm.) Auto Switch Mounting Bracket Part No.