Table of Contents

13 20 5 6 13 10 4.2 4.2 D2 L2 M5 x 0.8 M6 x 1.0 3.5 3.5 8 8 17 1 8 6 12.8 14 17 19 14 17 19 20.5 Applicable tubing Connection thread 9.0 11.4 1 4 10 20 3 8 1 8 23 26.5 27 16 22 23 L1 1 4 18.5 23.5 12 15.2 14.9 21.6 8 3 8 1 4 28 28.5 32.5 29.5 30 34 14.9 21.6 17 27 D1 3 8 1 2 17 19 21 18.5 10 26.5 35.2 25.0 24 17 46 D2 1 4 L2 29 Applicable tubing 17 20.9 28.5 3 8 1 2 22 19 50.2 39.7

Table of Contents

/Flange Rod end width across flats 10 10 21 21 46 46 Data Part no.

Air Cylinder

[mm] DBore size A BA BB CA CB F GA H KA MM NA NB NDh8 NN S Z 101 to 126 to 101 to 126 to 5 to 16 to 31 to 46 to 61 to 76 to 5 to 16 to 31 to 46 to 61 to 76 to -X 150 st 10 15 15 15 17 17 8 8 28 4.2 M4 x 0.7 12.5 4.8 10 0 0.022 M10 x 1.0 48.5 56 68 80 84.5 92 104 116 16 15 18.3 18.3 20 20 8 8 28 5.2 M5 x 0.8 12.5 4.8 12 0 0.027 M12 x 1.0 48.5 57 69 81 87 111 129 141 84.5 93 105 117 123 147

Fluoropolymer Piping Equipment

LQ1E41-R2 12 8 6 9 9 24 20 21 17 43 38.5 28 23 5.5 LQ1E41-R3 12 6 15 14 35.5 31.5 16.5 3.6 25 LQ1E41-R4 12 4 2.6 M1 LQ1E51-R2 19 10 39.5 20 36 17 56.5 52.5 49 23 7.4 46 LQ1E51-R3 19 8 54 47.5 5.5 12 H1 10 LQ1E51-R4 19 6 39.5 15 36 14 51 42 39 16.5 3.6 32 LQ1E51-R5 19 4 2.6 LQ1E61-R2 25 12 24 21 56.5 52.5 28 9.4 46 LQ1E61-R3 25 10 20 17 54 47.5 23 7.4 A side 39.5 36 49 LQ1E61-R4

CQ2

17 22 22 26 26 8 8 10 10 33 13 13 15 15 21 27 Rc(PT)1/8 Rc(PT)1/8 Rc(PT)1/4 Rc(PT)1/4 Rc(PT)3/8 Rc(PT)3/8 60 69 86 103 132 156 16 16 20 20 25 30 64.5 71 86 99 31.5 35 41 55.5 62 77 90 114 30 30 39 39 48 48 Note 1) Dimensions with rubber bumper are same as above standard type. 14 14 17 17 22 27 39.5 46.5 40.5 46 48.5 54 14 Depth 10.5 47.5 17.5 Depth 13.5 63.5 75 53.5 63 12.5 57.5 122.5 17.5

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

Without auto switch With auto switch Bore size (mm) Stroke range (mm) C D E F H I J K M N Q S L P O B A 44 54 53.5 63.5 65 75 B 36 46 43.5 53.5 53 63 A 10 to 50 75, 100 10 to 50 75, 100 10 to 50 75, 100 63 46 15 20 77 10.5 54 M10 x 1.5 14 depth 10.5 93 103 7 17 60 9 15 8 Rc 1/4 80 53.5 21 25 98 12.5 63.5 M16 x 2.0 17.5 depth 13.5 112.5 132 6 22 77 11 16 10 Rc 3/8 100 63 27 30 117 13 75 M20

AC Servo Motor Driver (Pulse input type/Positioning type ）

. 17-46 17.11.1 Alarm list . 17-46 17.11.2 Remedies for alarms . 17-46 17.12 DISPLAY AND OPERATION SECTIONS . 17-48 17.12.1 Point table setting . 17-48 10 - 17.13 1 Single-Step feed . 17-50 17.14 COMMUNICATION FUNCTION(Mitsubishi general-purpose AC servo protocol) . 17-52 17.14.1 Reading command . 17-52 17.14.2 Writing commands. 17-53 17.14.3 Detailed explanations of commands . 17-54 17.14.4

Table of Contents

) 18.5 (17) 20 20 12.5 12.5 22.5 22.5 2026.5 (25) 20.5 (19) 28 22 20.5 14.5 24.5 30.5 34 (32.5) 23 (21.5) 36 24.5 28 17 27 38 Data 34 (32.5) 30 (28.5) 36 31.5 28 24 34 38 44 (42.5) 35 (33.5) 46 6.5 38 29 39 48 As for auto switch mounting dimensions, auto switch mounting method and its operating range, those are the same as basic type.

Air Slide Table

4 A 6.6 12 11 A GB 7 HB NN x M8 x 1.25 thread depth 12 Cross-sectional view A-A 65 50 26 Bottom view of MXQ25A-75Z Dimensions [mm] Model F G GB H HB I J M N NN Z ZZ MXQ25A-10Z 55 18 7 55 80 30 36 131.5 4 2 95 118 MXQ25A-20Z 46 18 7 55 80 30 36 141.5 4 2 95 118 MXQ25A-30Z 55 28 17 55 80 22 54 151.5 4 2 105 128 MXQ25A-40Z 65 28 17 65 90 22 64 161.5 4 2 115 138 MXQ25A-50Z 75 36 20 80 110 43

Smooth Cylinder/Low Speed Cylinder

TY 4 x TT TD TH TF TS 4 x TR TA TL TU TU TY TC (mm) TD-H10 (Hole) Bore size (mm) TA TL TU TC TX TE TO TR TT TS TH TF TY Z Part no. +0.070 0 40 80 60 10 102 85 119 17 9 17 12 45 60 62 93 15 CA2-S04 +0.070 0 50 80 60 10 112 95 129 17 9 17 12 45 60 74 103 15 +0.070 0 CA2-S06 63 100 70 15 130 110 150 20 11 22 14 55 73 90 107 18 +0.084 0 80 120 90 15 166 140 192 26 13.5 24 17 75 100 110 129 25

Table of Contents

. 16.5) 8 (Max. 20) 9 (Max. 25) 3.2 3.5 4.5 4.5 13 13 17 17 45.6 53.5 67 81.5 5.8 6.5 8.5 9.5 43 49 61 76 6 7 9 10 12 15 MY1B25 MY1B32 MY1B40 12 16 16 56 56 46 43 33 43 With high load shock absorber + Adjusting bolt TT h MY1B H Stroke Bore size E F TT EA h EB W FW Stroke adjusting unit FB S (Shock absorber stroke) T FC Shock absorber a 2.8 15.4 Workpiece EC EY FH Since the dimension EY of

ISO Cylinder

6 38 14.2 5 M6 x 1 24 8 18.3 16 10 22 16 16 M16 x 1.5 6 M5 x 0.8 17 6 38 14.2 5 M6 x 1 24 8 18.3 16 10 22 20 20 M22 x 1.5 8 G1/8 20 8 44 17 6 M8 x 1.25 32 11 24 22 13 24 25 22 M22 x 1.5 10 G1/8 22 8 50 20 8 M10 x 1.25 32 11 30 22 17 28 Bore size S Z 1 to 50 51 to 100 101 to 150 1 to 50 51 to 100 101 to 150 8 46 (52) 74 (80) 10 46 (50) 74 (78) 12 50 (53.5) 88 (91.5) 16 50 (53.5

KQ2

10 4.2 4.2 D2 L2 M5 x 0.8 M6 x 1.0 3.5 3.5 8 8 6 17 1 8 12.8 14 17 19 14 17 19 20.5 Applicable tubing Connection thread 9.0 11.4 1 4 10 20 3 8 1 8 23 26.5 27 16 22 23 L1 1 4 8 18.5 23.5 12 15.2 14.9 21.6 3 8 1 4 28 28.5 32.5 29.5 30 34 14.9 21.6 17 27 D1 3 8 1 2 10 19 21 18.5 17 26.5 35.2 25.0 46 24 17 D2 1 4 L2 29 Applicable tubing 20.9 28.5 12 3 8 1 2 22 17 19 50.2 39.7 48 24

CJ2

H7BAL D-H7NF 6 10 16 6 10 16 10 16 8.5 9 8.5 7.5 8 7.5 9.5 9 17.5 16.5 17 16.5 15.5 16 17 17.5 21.5 28.5 29 20.5 27.5 28 29 29.5 2 2.5 3 1 1.5 2 3 3.5 89 101 47 71 D-H7C D-A7 D-A80 88 100 46 70 D-A7H/A80H D-F7/J79 D-F7W/J79W D-F7BAL/F79F D-A7/A80 17.5 10 89.5 101.5 47.5 71.5 D-A7H/A80H D-A73C/A80C D-F7/J79 D-F7W/J79W D-F7V/F7WV D-F79F/J79C D-F7BAL D-F7BAVL 20.5 16 41.5 10 10 17.5 29.5 3.5

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

Without auto switch With auto switch Bore size (mm) Stroke range (mm) H E F C D N M K J I Q S L P O B A 44 54 53.5 63.5 65 75 B 36 46 43.5 53.5 53 63 A 10 to 50 75, 100 10 to 50 75, 100 10 to 50 75, 100 63 10.5 20 77 15 46 54 9 60 17 7 M10 x 1.5 103 14 depth 10.5 93 15 8 Rc 1/4 80 12.5 98 25 21 53.5 63.5 11 77 22 6 M16 x 2.0 132 17.5 depth 13.5 112.5 16 10 Rc 3/8 100 13 117 30 27 63 75 11

5

Bore size (mm) B TA TL TU TC TX TE TO TR TT TS TH TF Z** TDH10 MB-S03 32 46 62 45 8.5 62 50 74 12 7 13 10 35 47 89 12+0.070 0 MB-S04 40 52 80 60 10 80 63 97 17 9 17 12 45 60 93 16+0.070 0 50 65 80 60 10 92 75 109 17 9 17 12 45 60 105 16+0.070 0 MB-S06 63 75 100 70 15 110 90 130 20 11 22 14 60 80 105 20+0.084 0 80 95 100 70 15 130 110 150 20 11 22 14 60 80 129 20+0.084 0 MB-S10 100 114 120

ZP

14 17 8 Buffer assembly part no.

ZP

14 17 8 Buffer assembly part no.

KJ

13 20 5 6 13 10 4.2 4.2 D2 L2 M5 x 0.8 M6 x 1.0 3.5 3.5 8 8 17 1 8 6 12.8 14 17 19 14 17 19 20.5 Applicable tubing Connection thread 9.0 11.4 1 4 10 20 3 8 1 8 23 26.5 27 16 22 23 L1 1 4 18.5 23.5 12 15.2 14.9 21.6 8 3 8 1 4 28 28.5 32.5 29.5 30 34 14.9 21.6 17 27 D1 3 8 1 2 17 19 21 18.5 10 26.5 35.2 25.0 24 17 46 D2 1 4 L2 29 Applicable tubing 17 20.9 28.5 3 8 1 2 22 19 50.2 39.7

LVQ

1/46 1/46 LVD (Max.