VZ100/300/500

) Dimensions VZ300: 8 mm longer in total length VZ500: 8 mm longer in total length Dimensions: VZ312R-G-M5-X20 Manual override (Non-locking) (External pilot port) PE port M5 x 0.8 4-6-46

LJ1H

Thread size M4 x 0.7 8 2 46 Effective thread length (mm) Quantity P.C.D.

High Vacuum Angle Valve

M: Size 16, 25, 40 only.

Modular/F.R.L. Units Series AC

AF F F E E B C AR Cross spacer E: 4 x Rc F: Without thread E D A AL A 23 B 16 C 14 D 25 Applicable model AC10 Model Y14-M5 Y24-01 Y24-02 Y34-01 Y34-02 Y44-02 Y44-03 Y54-03 Y54-04 Port size M5 1/8 1/4 1/8 1/4 1/4 3/8 3/8 1/2 AW AC20 40 40 22 40 AG AC25, AC30 49 43 28 48 AV AC40 60 48 36 54 AF800 AF900 Caution on Mounting AC40-06 72 62 40 62 1.

Series 10-SYJ300/500/700 Rubber Seal 3 Port Solenoid Valve

Station L1 L2 Station 20 224.5 217.5 3 46 39 6 77.5 70.5 8 98.5 91.5 10 119.5 112.5 Station 2 35.5 28.5 4 56.5 49.5 5 67 60 7 88 81 9 109 102 11 130 123 12 140.5 133.5 13 151 144 14 161.5 154.5 15 172 165 16 182.5 175.5 17 193 186 18 203.5 196.5 19 214 207 613 3 Port Pilot Solenoid Valve 10-SYJ300 C4 N3 [ ] for AC Type 42 Manifold: Side Ported/10-SS3YJ3-42Stations -M5, Grommet (G) For M5

SMC Pneumatic Clean Series

14 C 130 121 119 114 ZZ 14 10 8 6 KA 78 79 77 77 S 16 12 10 8 D 25 18 14 12 E 2 2 2 2 F 40 32 25 20 30 22 22 18 23 0<23> 0 0 10 0 0 0 M5 x 0.8 depth 7.5 M5 x 0.8 depth 8 M14 x 1.5 M6 x 1 depth 12 12 12 1/4 1/4 3/8 1/2 58 58 27 27 32 41 14<12> 14<12> 10 10 10 10 23 20 20 20 11 11 58 72 20<17> 20<17> 16 16 71 71 13 16 89 110 7 7 10 10 55 69 80 100 10 10 10 10 32 38 50 60 150 150 182 182 18

Series SV

21 22.5 13.5 M5 x 0.8 (External pilot port) 99.2 84.9 23.4 M5 x 0.8 (Pilot EXH port) 2-4.3 (Mounting hole) 21 21.5 A B PE 38 46 A B A B SMC B A X Manual override (non-locking) A side: Orange B side: Green EA EB P 21.5 21 61 69 19.4 (Light/Surge voltage suppressor) (L = 300 to 5000) 134.4 128.8 M12 waterproof connector 60.5 58.7 26.5 13.5 5-Rc 3/8, 1/4 (Piping port

17

MGPM, MGPL, MGPA Common Dimensions (mm) P Standard stroke (mm) Bore size (mm) B C DA FA FB G GA GB H HA J K L MM ML NN OA OB OL Nil TN TF 42 46 53 53.5 G1/8 G1/8 29 33 37 37.5 6 8 10 10 7 7 8 9 6 6 8 7 26 30 36 42 10 10.5 11.5 11.5 7 7.5 9 10 58 64 83 93 12 16 20 25 M4 M4 M5 M5 13 15 18 21 13 15 18 21 18 22 24 30 M4 x 0.7 M5 x 0.8 M5 x 0.8 M6 x 1.0 10 12 13 15 M4 x 0.7 M5 x 0.8 M5 x 0.8

CL

32 111 + Stroke 150 + Stroke Axial Foot Style (L) E D P CLJ2L1619 16 LOCK FREE 2 42 54 6 Silencer 12 Piping port M5 x 0.8 25.5 Spring lock Head cover port in axial direction (R) Manual unlocking cam M5 x 0.8 Pressurized locking port Pneumatic locking and spring and pneumatic locking M5 x 0.8 unlocking port Unlocked when pressurized Lock nut 6 71 46 M5 x 0.8 Rod side cylinder port 31 20 14

XL

For further details, refer to mounting positions under Replacement heaters/Part Nos. on page 46.

0.4

Digital Unit M12 connector (5 pins) M8 connector (3 pins) D-sub connector Spring type terminal block Input Unit 8 inputs 8 inputs 8 inputs 16 inputs 16 inputs 16 inputs 8 inputs 8 inputs 8 inputs 16 inputs 16 inputs 16 inputs 16 inputs 16 inputs 16 inputs Output Unit 8 outputs 8 outputs 8 outputs 16 outputs 16 outputs 16 outputs 16 outputs 16 outputs 16 outputs Input/ Output Unit 8 inputs

Rotary Table/

M5 x 0.8 depth 5 M5 x 0.8 depth 5 (Vacuum port) DC DB DA High precision type 11-MSQAA 11-MSQAR Basic type 11-MSQBA 11-MSQBR DC DB DA (Vacuum port) HB HB HA HE (HD) (HD) 11.5 5.5 HC HC DD DD (mm) (mm) DA(h8) DB(h8) DC(h8) DD(h8) HA HB HC HD HE DA(h9) DB(h9) DC(h9) DD(h9) HB HC HD Size 10 20 30 50 Size 10 20 30 50 46 45 20 35 15.5 24 5 63 9.5 46 45 20 35 20 5 59 61 60 28 40 19.5 30 6 73 13.5

Electric Grippers

Max. tightening torque [Nm] 10 Max. tightening torque [Nm] 6 Max. screw-in depth L [mm] Model Model Bolt Bolt LEHZ(J)10(L) LEHZ(J)16(L) LEHZ(J)20(L) LEHZ(J)25(L) LEHZ32 LEHZ40 LEHF10 LEHF20 LEHF32 LEHF40 M4 x 0.7 M5 x 0.8 1.4 3.0 M4 x 0.7 12 M6 x 1 6 1.4 5.0 M5 x 0.8 M8 x 1.25 16 8 3.0 12.0 M6 x 1 M8 x 1.25 16 5.0 10 12.0 M6 x 1 5.0 10 M8 x 1.25 14 12.0 Mounting of Electric Gripper, Series

Integrated Controller

Control mode switching Size 16 has been added.

Speed Controller with One-touch Fitting Stainless Steel Type Elbow Type/Universal Type AS-FG Series Push-lock type

Model Port size Seal method Metric size Inch size Elbow type Universal type 2 Note 2) 3.2 4 6 8 10 12 16 1/8" 5/32" 1/4" 5/16" 3/8" 1/2" AS AS12l1FG-M5 AS13l1FG-M5 M5 x 0.8 Gasket seal Note 3) AS-FE AS12l1FG-U10/32 AS13l1FG-U10/32 10-32UNF Note 3) KE AS22l1FG-l01 AS23l1FG-l01 1/8 Note 3) AS22l1FG-l02 AS23l1FG-l02 1/4 Note 3) Note 3) AS-FG AS-FG R NPT Note 1) Sealant AS32l1FG-l02 AS33l1FG-l02

Auto Switch Guide

x 0.8 x 16 M5 x 0.8 x 20 M5 x 0.8 x 25 6-16-37 38 Solid State Switch Direct Mounting Style D-Y59 /D-Y69 /D-Y7P(V) A B A B For details about certified products conforming to international standards, visit us at www.smcworld.com.

LEC-OM02704CN

14 45 14 (c) [C][7][0][1][F][F] 14.4.2 [C][7] [0][1][F][F] 0 16 0 EEP-ROMRAM 1 RAM 1 RAM 1 1 EEP-ROM (d) [C][8][0][1][F][F] 14.4.2 [C][8] [0][1][F][F] 0 16 0 EEP-ROMRAM 1 RAM 1 RAM 1 1 EEP-ROM 14 46 14 (e) (DWELL) (DWELL) [C][A][0][1][F][F] 14.4.2 [C][A] [0][1][F][F] 0 16 0 EEP-ROMRAM 1 RAM 1 RAM 1 1 EEP-ROM (f) [C][B][0][1][F][F] 14.4.2 [C][B] [0][1][F][F] 0 16 0

Electric Actuator with Integrated Guide Series LTF Series LTF Lead screw lead mm Mounting Series Guide type Motor type Model Page orientation Ground ball screw Rolled ball screw 6 10 6 10 LTF6 Page 60 to Horizontal 10 20 10 20 LTF8 Page 68 to Frame-type

alloy Mild steel Chromate Aluminum alloy Aluminum alloy Connector cable for sensor Carbon steel 92 Series LTF Mounting Top Mount LTF6 M5 bolt 2 5.5 or M5 2 x n x Mounting hole Pitch = 100 Mounting hole quantity n Quantity Stroke 100 2 4 200 3 6 300 4 8 A = (n 1) x pitch 400 5 10 30 500 6 12 600 7 14 LTF8 M6 bolt 3.5 2 x n x Mounting hole 6.6 or M6 Pitch = 100 Mounting hole quantity n n

Rotary Table Rack & Pinion Style Series MSQ Size: 1, 2, 3, 7, 10, 20, 30, 50, 70, 100, 200 1

2H9 2 11.5 2H9 2 M3 x 0.5 3.5 M5 x 0.8 M3 x 0.5 20.5 60 15.2 31 11.8 30.5 12 2H9 2 M3 x 0.5 5.3 25 27 2H9 2 13.5 2H9 2 M4 x 0.7 4.5 M6 x 1 M5 x 0.8 23 73.5 15.4 37.4 14.9 34.5 14 3H9 3 M4 x 0.7 6.5 29 32.5 3H9 3 15.5 3H9 3 11-9-15 16 Rotary Table: Basic Type/High Precision Type Rack & Pinion Style Series MSQ Size: 10, 20, 30, 50, 70, 100, 200 How to Order Size 10 20 30 50 MSQ A 10 A M9B

3 Port Air Operated Valve Series SYJA300

Pilot Type)/SS3YJ5-41RStations -M5, 01 [ ] for AC For M5 For 1/8 L3 7.5 M5 x 0.8 (X port) M5 x 0.8 (X port) L3 7.5 35 (DIN 36.2) 35 (DIN 36.2) 21.5 21.5 6.5 6.5 6.5 6.5 X X X X 57.1 [59.3] 57.1 [59.3] 2-5.5 (For mounting) 2-5.5 (For mounting) Manual override Manual override (Pitch) P=16 23 (Pitch) P=17 23 Approx. 300 (Lead wire length) Approx. 300 (Lead wire length) L2 4.5 L2 4.5 L1 L1 (