Smooth Cylinder/Low Speed Cylinder I-020B I-032B I-040B +0.058 0 +0.058 0 0.1 0.2 0.1 0.2 9 9 9 9 18 41 M8 x 1.25 14 10 11 66 46 16 20 36 M8 x 1.25 10 14 +0.058 0 +0.058 0 0.1 0.2 0.1 0.2 9 M10 x 1.25 M10 x 1.25 9 9 9 22 45 14 10 14 69 48 18 20 38 10 14 +0.070 0 +0.070 0 0.1 0.3 0.1 0.3 12 M14 x 1.5 M14 x 1.5 15.5 16 12 16 24 50 20 14 13 92 69 22 24 55 20 Double Knuckle Joint Y (Max.)
43 61 49 98 65 14 23 55 55 55 103.5 10.5 19 58 58 58 103 17.5 40 25 36 25 46 63 50 101 68 14 23 61 61 61 111 The figures in parentheses are the normally open type. 22 23 Series VX21/22/23 For Water, Oil, Steam/Manifold Dimensions: Manifold/Base Material: Brass, Stainless Steel Normally closed (N.C.): VVX21/VVX22/VVX23 Normally open (N.O.)
(SNJ-016B for 10, SNKJ-016B for 16) NB NA MM LY LZ LX LT LH LC LB KA H GA F CB CA BB Y BA X A NN Bore size (mm) 10 16 5.5 12.5 25 33 2.3 14 5.5 21.5 4.2 28 8 8 14 17 12 9 15 6 15 M10 x 1.0 M4 x 0.7 42 5.5 12.5 25 33 2.3 14 5.5 23 5.2 28 8 8 20 20 18.3 9 18.3 6 15 M12 x 1.0 M5 x 0.8 42 Dimensions by Stroke Symbol S Z Bore size (mm) Stroke 61 to 75 87 61 to 75 115 46 to 60 80 81 46 to 60
(mm) GB 5 5 GA 14.5 8 8 FZ 32 32 42 FY 14 14 20 FX 24 24 33 FT 1.6 1.6 2.3 FC 4.5 4.5 5.5 FB 13 13 19 F 8 8 8 D 3 4 5 T 3 NN M6 X 1.0 M8 X 1.0 C 14 14 20 S 49 46 47 MM M3 X 0.5 M4 X 0.7 M5 X 0.8 B 12 12 18 NB 7 9.5 9.5 H 28 28 28 A 15 15 15 NA 16 12.5 12.5 Z 77 74 75 Bore 6 10 16 M10 X 1.0 With air cushion/Dimensions not mentioned in the below table are the same as the above table.
tubing: 6 Applicable tubing: 6 Applicable tubing: 6 Width across flat 14 Width across flat 14 Width across flat 14 2 2 2 2 2 2 7 18 12 12 18 18 12 M12 x 1 M12 x 1 M12 x 1 33.2 33.2 Width across flat 14 Width across flat 14 Width across flat 14 7 5 5 5 7 1.8 1.8 1.8 1 1.2 1.2 10 13 16 11 14 17 9 With Adapter: Vacuum Inlet Series ZP3 Vertical 4 to 8 Pad diameter Vertical Dimensions/With Adapter
40 68.5 78.5 39.5 10 6 14 22 18 28.5 36 7 Double clevis style: CQ2KD/CDQ2KD CT 4-N 50 Cap bolt 76.5 40.5 90.5 14 7 20 28 22 33.5 44 8 CD hole H10 63 46 84 98 14 8 20 30 22 33.5 44 8 Shaft d9 For details about the rod end nut and accessory brackets, refer to page 7-6-20.
+0.30 +0.10 +0.30 +0.10 0.10 0.30 +0.30 +0.10 0.10 0.30 0.10 0.30 0.10 0.30 0.10 0.30 0.10 0.30 40 14 19 24 26 26 36 20 22 28 40 40 46 30 40 50 60 60 92 M10 x 1.25 M14 x 1.5 M18 x 1.5 M22 x 1.5 M26 x 1.5 M27 x 2.0 12 16 19 24 34 34 34 M10 x 1.25 M14 x 1.5 M18 x 1.5 M22 x 1.5 M26 x 1.5 M27 x 2 10 11 14 20 20 27 16 19 24 34 34 42 10 10 14 22 22 25 10 10 14 22 22 25 14 14 20 30 30 32 14 14
) depth 3 19.3 10.7 6 A 9.5 10 5.1 29 29 +0.030 0 2 x 5H9 ( ) depth 3 A 6 +0.030 0 2 x 5H9 ( ) depth 3 HA GA NN x M6 x 1 thread depth 9 Cross-sectional view A-A 48 36 16 Bottom view of MXQ20-50Z Dimensions [mm] Model F G GA GB H HA HB I J M N NN Z ZZ MXQ20-10Z 45 18 14 8 46 50 70 24.5 34 113.5 4 2 85 104 MXQ20-20Z 40 18 14 8 46 50 70 24.5 34 123.5 4 2 85 104 MXQ20-30Z 48 28 24 18 46 50 70
Applicable bore size A A1 E1 LB MM NDH10 NX R1 U1 I-020B 20 46 16 20 36 M8 x 1.25 9 +0.058 0 9 0.1 0.2 10 14 Bore size A H MM NDH10 NX1 U1 R2 Y Z 20 18 41 M8 x 1.25 9 +0.058 0 9 0.1 0.2 14 10 11 66 Low Speed 25, 32 22 45 M10 x 1.25 9 +0.058 0 9 0.1 0.2 14 10 14 69 I-032B 25, 32 48 18 20 38 M10 x 1.25 9 +0.058 0 9 0.1 0.2 10 14 MQ 40 24 50 M14 x 1.5 12 +0.070 0 16 0.1 0.3 20 14 13 92 I-040B
tubing: 6 Applicable tubing: 6 Applicable tubing: 6 Width across flat 14 Width across flat 14 Width across flat 14 2 2 2 2 2 2 7 18 12 12 18 18 12 M12 x 1 M12 x 1 M12 x 1 33.2 33.2 Width across flat 14 Width across flat 14 Width across flat 14 7 5 5 5 7 1.8 1.8 1.8 1 1.2 1.2 10 13 16 11 14 17 9 With Adapter: Vacuum Inlet Series ZP3 Vertical 4 to 8 Pad diameter Vertical Dimensions/With Adapter
Stations Formula L1 = 46 x n + 29 L2 = 46 x n + 14 10 489 474 9 443 428 8 397 382 7 351 336 6 305 290 5 259 244 4 213 198 3 167 152 2 121 106 L L1 L2 Precautions Be sure to read before handling.
(mm) (1) A Mass (g) D1 L P M Model Nylon Urethane 11 2 x applicable tubing 14 11 36 10.4 40 1 8 KQ2U04-U01 10.4 16 4 4.2 4.2 1 4 KQ2U04-U02 42 16 14 13 1 8 KQ2U06-U01 39.5 3 8 KQ2U06-U03 46 45 43.5 6 17 1 4 12.8 KQ2U06-U02 17 14 12.8 39 13.4 13.4 18 40 26 1 8 1 4 KQ2U08-U01 KQ2U08-U02 46.5 46 50.5 52 27 25 15.2 8 15.2 KQ2U08-U03 17 25.6 17.7 18.5 3 8 51.5 45.5 28 1 4 3 8 KQ2U10-U02 KQ2U10
6 900 850 1038 856 980 14 6 900 900 1088 906 1030 14 6 900 950 1138 956 1080 16 7 1050 1000 1188 1006 1130 16 7 1050 LAT LZ LC3F2 Motor Mounting Dimensions [mm] Motor type FA FB FC FD FE FF NZ/NT M5 x 0.8 9 70 50 5 46 NY M4 x 0.7 8 70 50 5 46 NX M5 x 0.8 9 63 40* 4.5* 49.7 NW/NU M5 x 0.8 9 70 50 5 47.5 NV M4 x 0.7 8 63 40* 4.5* 49.7 NM1 M4 x 0.7 8 l47.14 38.1* 4.5* 21 NM2 M4 x 0.7 8 l50
11 22 14 30 C8512 0.3 10 15 6 15 9 20 C8510 Head ( side ) C858 0.5 6 10 4 10 6 14 0.1 0.7 4 8 3 8 4 11 Clevis: N Rod trunnion: U 0.3 24 36 17 35 22 46 0.5 18 27 12 26 16 W W 34 0.7 14 22 10 21 13 28 0.01 (40)1 (40)1 (40)1 (40)1 (100)1 0.3 80 400 350 300 250 200 150 100 50 450 0 (40)1 (40)1 Cylinder stroke [mm] Rod (side) 0.5 38 30 61 77 Head trunnion: U (40)1 0.7 35 32 25 51 64 W C85 Series
to 450 Up to 800 Up to 1200 Up to 1200 Up to 1400 Up to 1500 Bore (mm) 20 25 32 40 50 63 80 100 B E F FX FD FT CM2 40 44 53 61 76 92 104 128 12 14 18 25 30 32 40 50 2 2 2 2 2 2 3 3 28 32 38 46 58 70 82 100 5.5 5.5 6.6 6.6 9 11 11 14 6 7 7 8 9 9 11 14 C85 C76 CG1 MB End boss is machined on the flange for E.
Vacuum regulator 13-14-2 Series IRV 13-14-3 Controls the vacuum pressure in accordance with external electric signals.
L06-03 L08-01 43 55 46 12 10 14 9 21.8 35.8 37.5 36 34.9 36.9 31.9 16 14 17 12 1 4 3 8 1 4 L08-02 L08-03 L10-02 52 61 68 8 14 17 12 38 39.7 40.7 19 35.9 37.9 36.9 23.3 16 14 17 14 Connection thread 3 8 1 2 1 4 3 8 1 2 Reference dimensions after R thread installation.
225 250 262.5 275 287.5 300 300 63.3 58.1 48.4 L3 91.5 81 102 112.5 123 133.5 144 154.5 70.5 181.5 192 202.5 213 223.5 234 42.6 34.5 7.5 L4 14 13 12 15 16 17 12 13 14 13 14 15 16 17 11.5 Two SUP/EXH blocks are provided for models with 11 stations or more.
(mm) With rod boot Bore size (mm) Stroke range (mm) l J B BB C F GA GB M NA NB P R S CD LH LT LW LX X Y Z SS e f Q 32 M10 x 1.25 58 109 38 14 21 15 11 37 31 3/8 39 130 11 35 14 13 88 29 14 98 57 52 21.5 15 25 to 1400 1/3.5 stroke 40 M10 x 1.25 65 118 45 10 21 15 11 36 30 3/8 42 130 11 37.5 14 13 95 29 14 98 57 52 12 15 25 to 1400 50 M10 x 1.25 76 145 52 10 27 19 11 43 35 1/2 46 142 14 45