Table of Contents Never use pressure sensors in the presence of inflammable or explosive gases. 16-3-19 19 Series PSE Specific Product Precautions 2 Be sure to read before handling.
Form w 1 Material e Vacuum inlet r Width across flats J A Connection thread Width across flats L 10 A8 37.5 12.5 10 2 M8 x 1 15 12 4 12 10 2 13 16 38 13 10.5 N S U F GN GS 20 25 A10 48.5 15.5 12.5 2 M10 x 1 20 14 3 16 12 3 32 49 16 13 40 A14 51.5 18.5 12.5 2.5 M14 x 1 20 19 4 21 19 5 50 52.5 19.5 13.5 ZP T F B5 D2 Width across flats K 30 (Rotating angle) 1 N: NBR, S: Silicone rubber, U:
3/8 40 37 32 17 M10 x 1.5 19 50 25 33 3 28 20 71 13 89 M10 x 1.5 depth 22 10 22 7 M22 x 1.5 80 201 130 100 to 1500 1/2 40 37 41 19 M12 x 1.75 24 60 30 38 3 29 20 71 16 110 M12 x 1.75 depth 23 10 26 8 M26 x 1.5 100 202 131 Install plug bolts, which are included, in any unused mounting holes.
D C d H B 32 40 50, 63 80 100 16.5 21 26 31 39 19.6 25.4 31.2 37.0 47.3 M10 x 1.25 M14 x 1.5 M18 x 1.5 M22 x 1.5 M26 x 1.5 6 8 11 13 16 17 22 27 32 41 NT-03 NT-04 NT-05 NT-08 NT-10 Piston rod ball joint KJ (DIN 648) Zinc chromate plated steel Bore d3 Order No. d1 h d6 b3 b1 l d7 l3 sw 32 M10x1.25 KJ10D 10 43 28 10.5 14 20 19 13 14 17 40 M12x1.25 KJ12D 12 50 32 12 16 22 22 13 16 19 50/63
P G H: M6 x 1 H: M8 x 1.25 G H: M5 x 0.8 H: M6 x 1 Model A B C D E F K L Y G ZPR10B 10 13 12 16 25 33.9 50 5.5 15 18.5 27.5 36.4 52.5 5 Model A B C D E F K L Y G ZPR40B 40 50 43 34 47.5 58.3 76.1 24.4 53 38 51.5 62.3 80.1 6 6 8.7 19 13.8 7.5 5.5 ZPR13B 8 32.4 57 48 19 16 ZPR50B 16 18 20 29 37.9 54 9.9 21 8.5 ZPR16B Applicable Tubing Applicable Tubing Applicable tubing O.D.
16.5 26 VHK-06F-01S VHK-06F-02S VHK-06F-03S 60.4 62.4 36.1 38.1 31 54 56 17 14 41 1 8 1 4 3 8 18 41 1.2 6 8 18 41 62.2 26.2 36 16.5 3.5 18.7 11 9.7 1.2 31 58 17 VHK-B1A 44.5 14.5 1 27 22 16.5 26 VHK-08F-01S VHK-08F-02S VHK-08F-03S 65.2 66.2 39 40 32 59 60 19 22 40 1 8 1 4 3 8 10 22 46 73.8 30.5 43.3 21.5 4 20.8 14 16.1 3.2 49 VHK-B2A 49 17 1 30 25 21.5 31 VHK-10F-02S VHK-10F-03S VHK-10F-
18 41 6 60.4 62.4 36.1 38.1 31 54 56 17 14 41 1 8 1 4 3 8 8 18 41 62.2 26.2 36 16.5 3.5 18.7 11 9.7 1.2 31 58 17 VHK-B1A 44.5 14.5 1 27 22 16.5 26 VHKl-08F-01S VHKl-08F-02S VHKl-08F-03S 65.2 66.2 39 40 32 59 60 19 22 40 1 4 3 8 1 2 10 22 46 73.8 30.5 43.3 21.5 4 20.8 14 16.1 3.2 49 VHK-B2A 49 17 1 30 25 21.5 31 VHKl-10F-02S VHKl-10F-03S VHKl-10F-04S 74.8 78.2 44.3 47.7 51 68 17 19 72 70
16.5 26 VHK-06F-01S VHK-06F-02S VHK-06F-03S 60.4 62.4 36.1 38.1 31 54 56 17 14 41 1 8 1 4 3 8 18 41 1.2 6 8 18 41 62.2 26.2 36 16.5 3.5 18.7 11 9.7 1.2 31 58 17 VHK-B1A 44.5 14.5 1 27 22 16.5 26 VHK-08F-01S VHK-08F-02S VHK-08F-03S 65.2 66.2 39 40 32 59 60 19 22 40 1 8 1 4 3 8 10 22 46 73.8 30.5 43.3 21.5 4 20.8 14 16.1 3.2 49 VHK-B2A 49 17 1 30 25 21.5 31 VHK-10F-02S VHK-10F-03S VHK-10F-
8 19 Rod seal NBR Component part numbers: !4, !5, !6, !8. Cushion seal Urethane 17 and 19 are non-replaceable parts, so they are not included in the seal kit. Piston seal NBR Seal kit includes a grease pack (40 g). Order with the following part number when only the grease pack is needed.
PORTS . (2) PLACES 1.00 (25.4) .30 (7.5) Standard valve porting is NPT. .56 (14.3) .20 (5.2) .41 (10.3) .30 Nominal Power: (7.5) Mtg.
] R P R 63.8 (DIN 65.1) 63 (DIN 64.3) R P R B B B B B 122 [126.4] 19 19 19 60 31.5 22 A A A A A 1/4 (P, R port) 13.8 (For DIN: 15.1) 4-4.5 (For mounting) (Pitch) P = 20 29 Manual override (Station n) (Station 1) (Light/surge voltage suppressor) + + + 73 [80] 57.6 A A 10.5 41 30.5 B B 6.5 (Pitch) P = 20 25 1/8 (A, B port) L plug connector (L) M plug connector (M) DIN terminal (D) M8 connector
19 M6 x 1.0 M6 x 1.0 M8 x 1.25 M8 x 1.25 M10 x 1.5 M10 x 1.5 M10 x 1.25 M12 x 1.25 M16 x 1.5 M16 x 1.5 M20 x 1.5 M20 x 1.5 12.2 14.2 19 19 23 27 10 13 16 16 21 21 27 27 31.5 31.5 38 38 16 16 16 16 16 16 94 105 106 121 128 138 4 4 6 6 8 8 4 4 4 4 4 4 4 4 5 9 11.5 17 6.5 9 10.5 12 14 15 26 30 37 37 46 51 146 163 179 194 218 233 190 213 244 259 300 320 46 52 65 75 95 114 32.5 38 46.5 56.5 72
For flow characteristics, refer to pages 14-19-37 to 14-19-38 for external dimensions, refer to pages 14-19-41, 43, 45, and 47. 14-19-35 32 Series IDG Standard Specifications/Unit (Type M, Type V) [Standard dew point: 60C] Model Standard dew point: 60C IDG75SM IDG100SM IDG60SM IDG60SV IDG75SV IDG100SV AFM40 AFD40 AR40 Micro mist separator Mist separator Component equipment Regulator (Type
type 1.8 [1.0] 41 to 95 [5 to 35] (400 V as standard) HRSH090 Inverter type 0.18 [0.1] 41 to 104 [5 to 40] Indoor use (400 V as standard) UL Standards (To be obtained) (400 V as standard, 200 V as an option) Outdoor installation IPX4 HRSH Inverter type 0.18 [0.1] 41 to 95 [5 to 35] (200 V only as an option) 4 Thermo-chiller Standard Type Series HRS100/150 Circulating Fluid Temperature Controller
80 to 1400 40 37 32 17 M10 x 1.5 19 50 25 33 3 28 20 71 13 89 M10 x 1.5 depth 22 10 22 7 M22 x 1.5 3/8 130 100 100 to 1500 40 37 41 19 M12 x 1.75 24 60 30 38 3 29 20 71 16 10 26 8 M26 x 1.5 1/2 110 M12 x 1.75 depth 23 131 Install plug bolts, which are included, in any unused mounting holes.
18 7 M18 x 1.5 69 Rc 1/4 109 80 Up to 1400 40 37 32 17 M10 x 1.5 19 50 25 33 3 28 20 71 13 89 M10 x 1.5 depth 22 10 22 7 M22 x 1.5 80 Rc 3/8 130 100 DUp to 1500 40 37 41 19 M12 x 1.75 24 60 30 38 3 29 20 71 16 110 M12 x 1.75 depth 23 10 26 8 M26 x 1.5 100 Rc 1/2 131 Install plug bolts, which are included, in any unused mounting holes.
18 7 M18 x 1.5 69 Rc 1/4 109 80 Up to 1400 40 37 32 17 M10 x 1.5 19 50 25 33 3 28 20 71 13 89 M10 x 1.5 depth 22 10 22 7 M22 x 1.5 80 Rc 3/8 130 100 DUp to 1500 40 37 41 19 M12 x 1.75 24 60 30 38 3 29 20 71 16 110 M12 x 1.75 depth 23 10 26 8 M26 x 1.5 100 Rc 1/2 131 Install plug bolts, which are included, in any unused mounting holes.
Connection thread L2 M 17 8 26.1 16 16.1 19 M15 x 1 19 L1 10 19 19 41.5 17 21 M18 x 1 21 24 12 21 58.3 18.6 24 M20 x 1 96 113 16 28 20.8 29 30 M27 x 1 Note) Value of FEP tube.
[mm] A B DA FB 30 st or less Over 30 st and up to 100 st Over 100 st and up to 200 st Over 200 st Bore size [mm] DA 12 56 68 97.5 97.5 55 (6) 19 16 62 78 107.5 107.5 59 (8) 19 20 72 89 113 130.5 66 (10) 21 25 78.5 94.5 113.5 130.5 66.5 (10) 20 *: For bore size 12 and 16, only M5 x 0.8 port is available. *: For bore size 20 or more, choice of Rc, NPT, G port is available.
1/4 109 80 80 to 1400 40 37 32 17 M10 x 1.5 19 50 25 33 3 28 20 71 13 89 M10 x 1.5 depth 22 10 22 7 M22 x 1.5 Rc 3/8 130 100 100 to 1500 40 37 41 19 M12 x 1.75 24 60 30 38 3 29 20 71 16 10 26 8 M26 x 1.5 Rc 1/2 131 110 M12 x 1.75 depth 23 Install plug bolts, which are included, in any unused mounting holes.