Series SYJ500 Rubber seal 3 Port Pilot Solenoid Valve

for internal pilot Type SS3YJ5-41-M5 SYJ54 1/8 Type SS3YJ5-41-01 Type SS3YJ5-41-C4 Type SS3YJ5-41-C6 C6 1/8 M5 x 0.8 1/8 M5 x 0.8 1/8 1/8 Body ported for external pilot SYJ52R Type SS3YJ5-21R Type SS3YJ5-40R-M5 Type SS3YJ5-40R-01 1/8 1/8 1/8 1/8 1/8 Base mounted for external pilot Type SS3YJ5-41R-M5 M5 x 0.8 1/8 SYJ54R Type SS3YJ5-41R-01 Type SS3YJ5-41R-C4 C4 C6 Type SS3YJ5-41R-C6 Note)

Modular F.R.L. Unit

E Octagon Port size C T-interface B Center of F.R.L. body D A C 12 D 14 E 8 B 19 A 11 Port size M5 x 0.8 1/8 1/4 1/8 1/4 1/4 3/8 1/4 3/8 3/8 1/2 Model Y110-M5 Y210-01 Y210-02 Y310-01 Y310-02 Y410-02 Y410-03 Y510-02 Y510-03 Y610-03 Y610-04 Applicable model AC10, AC10B AC20, AC20B AC20C AC25, AC25B AC25C, AC30 AC30B, AC30C AC40, AC40B AC40C 32 28 19 42 15 39 30 19 53 15 44 36 24 62 19 Caution

Rotary Clamp Cylinders

Example) M5 x 75 L (MK2B) 6 Moment of inertia (kgm2) 4 MK220/25 2 Mounting bolt 103 6 4 Operating range Flat washer 2 104 Note) Be sure to use a flat washer to mount cylinders via through-holes. 50 100 200 66 120 D 75 85 80 90 90 100 80 90 105 135 105 135 Cylinder model C Mounting bolt size M5 x 75 L M5 x 85 L M5 x 80 L M5 x 90 L M5 x 90 L M5 x 100 L M5 x 80 L M5 x 90 L M6 x 105 L M6 x 135

Manifold Specifications

How to Order Type 40 1(P) port Stations VV5Z3 05 40 2 M5 Rc 1/8 4(A), 2(B) port size 1(P), 3/5(R) port thread type 02 2 stations 3, 5(R) port M5 M5 x 0.8 Nil Rc 4(A), 2(B) port Rc 1/8 F G 20 20 stations M5 x 0.8 N NPT Z NPTE How to Order Type 41 VV5Z3 05 41 1 M5 Applicable solenoid valve Stations 4(A), 2(B) port size 1(P), 3/5(R) port thread type 3/5(R) port 02 2 stations G L M D G L M

CRBU

MSQ MSUB Size Q M N Size d 10 M3 8.5 9.5 3.4 10 15 M3 11 10 3.4 15 20 M5 14 13 4.5 20 30 M5 15.5 14 5.5 30 Symbol Symbol Positions of the body tightening bolts are changed. -XC3 5 Rotating range is changed.(90 to the right from the starting point) -XC4 6 XC3 CRBUWP XC4 CRBUWP Refer to "How to Order" on p.1.2-19. Refer to "How to Order" on p.1.2-19.

XL

XLAV 5 Series XLA, XLAV High Vacuum Angle Valve Specifications Model XLA(V)-50 XLA(V)-63 XLA(V)-80 XLA(V)-16 XLA(V)-25 XLA(V)-40 Valve type Normally closed (pressurize to open, spring seal) Non-corrosive gas for aluminum alloy (A6063) and SUS304/316 Fluid 5 to 60C (41 to 140F) [high temperature type: 5 to 150C (41 to 302F)] XLA Operating temperature C 5 to 50C ( 41 to 122F) XLAV Atmospheric

KP/KPQ/KPG

KPQY12-04 KPGY04-M5 KPGY04-01 KPGY04-02 KPGY06-M5 KPGY06-01 KPGY06-02 KPGY08-01 KPGY08-02 KPGY10-02 KPGY10-03 KPGY12-03 KPGY12-04 M5 1/8 1/4 M5 1/8 1/4 1/8 1/4 1/4 3/8 3/8 1/2 8 10 14 8 10 14 12 14 8 15.3 22 26 15.8 23.2 27.2 24.4 28.4 29.9 31.9 33.1 37.1 32.5 36.5 40.5 35 40 44 44.5 48.5 53.5 55 58 60.5 6 13 19 7 14 20 14 22 29 39 41 68 4 4 4 18 20.7 10.4 D1 10 M M L1 8 L2 A D1 6 K 10 10

Clean One-touch Fittings and Tubing Series KP/KPQ/KPG

-04 KPGY04-M5 KPGY04-01 KPGY04-02 KPGY06-M5 KPGY06-01 KPGY06-02 KPGY08-01 KPGY08-02 KPGY10-02 KPGY10-03 KPGY12-03 KPGY12-04 M5 1/8 1/4 M5 1/8 1/4 1/8 1/4 1/4 3/8 3/8 1/2 8 10 14 8 10 14 12 14 8 15.3 22 26 15.8 23.2 27.2 24.4 28.4 29.9 31.9 33.1 37.1 32.5 36.5 40.5 35 40 44 44.5 48.5 53.5 55 58 60.5 6 13 19 7 14 20 14 22 29 39 41 68 4 4 4 18 20.7 10.4 D1 10 M M L1 8 L2 A 6 D1 10 10 19.5 22.8

High Vacuum Angle Valve, XL Series

O After a few seconds at 10-6Torr 41

Prevents Micro-Bubbles

Symbol Thread type M5 Rc 1/8 NPT 1/8 Body class 2 3, 4, 5, 6 3, 4, 5, 6 LVH Nil N Variations LVD LVC20 LVC30 Model LVC40 LVC50 LVC60 Orifice diameter LVQ Inch sizes 4 8 10 16 22 Tubing O.D. 03 05 07 11 13 19 25 1/8 3/16 1/4 3/8 1/2 3/4 1 Metric 4, 6 6, 8, 10 10, 12 12, 19 19, 25 LQ Inch Valve type 1/8, 3/16, 1/4 1/4, 3/8 3/8, 1/2 1/2, 3/4 3/4, 1 Symbol Type LVN Basic type N.C.

0.

M5 M5 x 0.8 (PE: Pilot EXH port) (11) Approx. 300 44.9 (Lead wire length) 14 PE (66) 46.5 13.4 16.3 41.2 8 1/8 [1(P), 3(R) port] 15 45.2 Formula: L5 = 10.5n + 9.5 L3 = 10.5n + 22.5 n: Stations (Max. 20 stations) Dimensions L n 2 3 85.5 75 54 16 41 4 98 87.5 64.5 17 51.5 5 110.5 100 75 18 62 6 123 112.5 85.5 19 72.5 7 135.5 125 96 20 83 8 148 137.5 106.5 21 93.5 9 148 137.5 117 15.5 104 10

Table of Contents

E-M5 thread depth 10 6 LJ1 LG1 LC1 LX LC6D/LC6C Switches 38 46 76 Motor wire (300mm) Photo micro sensor wire (300mm) 2-M2.5 thread depth 4 3 10 8 J 25 25 27 J x K Stroke + 220 10 Stroke + 127 13 15 (5) 0.5 46.5 3.5 2-M6 thread depth 13 58 52 27 19 [18] 15 Stroke + 127 (39) The dimension inside [ ] shows the location at which the home position switch operates. 58 (52) 28 36: T-slot pitch

VHK

B Q L2 L3 L4 L5 L6 L1 H 1(P) 2(A) C D E F G J K 1(P) R 2(A) 2(A) R 3(R)* VHK-01S-M5 VHK-M5-M5 11 1.2 26 23 11 3.5 41 18 54 51 11 M5 M5 M5 VHK-B1A 44.5 14.5 1 27 22 16.5 26 2.0 2.0 29.1 16.5 29 29.1 61.6 58.2 1 8 11 3.5 41 8.6 1.2 13 18 13 VHK-B1A 44.5 14.5 1 27 22 16.5 26 32.6 16.5 VHK-01S-01S 1 8 1 8 30 57 32.6 65.2 VHK-02S-01S 18 41 71.6 39 32.6 39 78 16.5 3.5 11 9.0 9.7 1.2 39 13 47 62

IDG

For flow characteristics, refer to pages 14-19-37 to 14-19-38 for external dimensions, refer to pages 14-19-41, 43, 45, and 47. 14-19-35 32 Series IDG Standard Specifications/Unit (Type M, Type V) [Standard dew point: 60C] Model Standard dew point: 60C IDG75SM IDG100SM IDG60SM IDG60SV IDG75SV IDG100SV AFM40 AFD40 AR40 Micro mist separator Mist separator Component equipment Regulator (Type

CQS

x 35l x 40l x 45l x 50l M5 x 55l x 60l x 65l x 70l x 75l x 80l M5 x 35l x 40l x 45l x 50l x 55l x 60l x 65l x 70l x 75l x 80l 6.5 10 6.5 7 10 Note) When mounting a cylinder with through-hole, be sure to use the attached plain washer.

Intrinsically Safe Valve

EXH port) Manual override 4 x 4.5 (Mounting hole) 125.6 42.2 EB P EA A A A A X PE 26.6 26 21 21 1.9 79.6 21 73 42 B B B B 11.1 31.5 6 x 1/4" {P(1), EA(5), EB(3) port} 55.2 M5 x 0.8 (External pilot port) 21 (Pitch) P = 19 Stations 1 n 2 81.5 56.2 52.8 A A 9.4 41 28.9 B B 7 2n x 1/4" {A(4), B(2) port} (Pitch) P = 19 24 L-type plug connector with cover

Series SYJ700 Rubber seal 3 Port Pilot Solenoid Valve

[74] 51.6 35 27 8 24 (Pitch) P=19 21 1/8 (A port) 49

3 Port Solenoid Valve, VQZ Series, Base Mounted and Body Ported

for 1/4" M5: M5 thread 53 13.8 A 2 10 Manual override 24.5 7.8 (N1, N3, N7) (M5: 5.7) Cover diameter 1.4 Cross sectional area 0.2mm2 (Lead wire length) 300 SMC 27.5 16.3 18 13.6 7 23.4 Mounting holes 41 M5 x 0.8 P port M5 x 0.8 R port R 3 P 1 10.7 9 M5 x 0.8 External pilot port 32 (Only external pilot port type(R)) L type plug connector (L): VQZ115L -N1, N3, N7, M5 M type plug connector

51

27 27 32 41 14 16.5 20 26 32 38 50 60 8 10 12 14 18 18 22 26 12 14 18 25 30 32 40 50 2 2 2 2 2 2 3 3 6 7 7.5 7.5 12 12 16 16 5 6 6 8 11 11 13 16 26 31 38 47 58 72 89 110 M4 x 0.7 depth 7 Width across flats 6 length 3.5 M8 x 1.25 M10 x 1.25 M10 x 1.25 M14 x 1.5 M18 x 1.5 M18 x 1.5 M22 x 1.5 M26 x 1.5 24 M5 x 0.8 M5 x 0.8 Rc1/8 Rc1/8 Rc1/4 Rc1/4 Rc1/4 Rc3/8 14.5 17.5 17.5 23.5 29 29 35.5 35.5

Electric Actuator

) [39] 39 [(41)] Stroke 4 [2] 2 [4] (2.4) 7 65 9.2 [Origin] Note 4) Origin Note 3) Motor cable (2 x 5) 46 6 20 33 40 Vacuum port M5 x 0.5 x 5 6.5 5.5 M4 x 0.7 thread depth 7 (F.G. terminal) Step motor Servo motor Cable length y 250 (155.5) 65 Motor option: With lock 15 15 20 20 20 24 ( ) 0.025 0 20 Lock cable (3.5) 24 3H9 depth 3 n x 3.4 4 34 [mm] 40 100 D x 100 (= E) 8 Model L 300.5 342.5