M5 X 40 l M5 X 45 l M5 X 50 l M5 X 55 l M5 X 60 l M5 X 65 l M5 X 70 l M5 X 75 l M5 X 80 l M5 X 85 l 40 45 50 55 60 65 70 75 80 85 M3 X 30 l M3 X 35 l M5 X 40 l M3 X 45 l M5 X 50 l M3 X 55 l 30 35 40 45 50 55 6.5 8.5 Note 1) The appropriate plain washer must be used for through-hole mounting.
KE [mm] Bore size A B D E F G H J K M N O P Q T V Y Z W Rc NPT G Rc NPT G 16 59.5 41.5 10 29 6 3 18 18 28 3.5 6.5 depth 4 M5 x 0.8 M5 x 0.8 M5 x 0.8 17 20 18 37 0 0 0 20 67 45 12 36 8 4 22 22 36 5.5 9 depth 7 1/8 1/8 M5 x 0.8 20 24 22 47 1.5 1.5 0 32 68 48 20 45 7.5 8 20 4.5 32 34 5.5 9 depth 7 1/8 1/8 1/8 20 36 20 14 40 80.5 52.5 25 52 8 10 28 5 41 40 5.5 9 depth 7 1/8 1/8 1/8 24.5
Form w 1 Material e Width across flats K A Connection thread 10 13 A5 38 17 2.5 M5 x 0.8 M3 x 0.5 3.5 21 8 4 8 16 38.5 17.5 10 13 43 17 2.5 M6 x 1 M3 x 0.5 3.5 26 8 4 8 16 43.5 17.5 20 25 45 19 C2 N S U F GN GS A6 ZP T U Construction p. 117 32 45.5 19.5 40 50.5 24.5 12 50 51.5 25.5 20 25 A8 Adapter Assembly p. 121 40 24 4 M8 x 1 M5 x 0.8 5 16 12 4 12 32 40.5 24.5 40 4.2 50 41.5 25.5 1 N:
75.4 70 10.6 29 18.5 14 5 12 50 32 84 37 6.5 33.5 65h9 67h9 32H9 9 22H9 10 4.5 3 6.5 17 8.6 14 8.5 85.4 80 14 38 22 19 6 15.5 63 37.5 100 50 10 37.5 75h9 77h9 35H9 10 26H9 12 5 3 7.5 20 10.5 18 10.5 (mm) JC JD JJ JU P Q S SD SE SF SU UU WA WB WC WD WE WF XA XB XC YA YB YC Size 10 20 30 50 M8 x 1.25 12 M5 x 0.8 M8 x 1 M5 x 0.8 34 92 9 13 45 17.7 47 15 3H9 3.5 M5 x 0.8 8 32 27 3H9 3.5 19 3H9
Page 17 Order Made . Page 33 Model Selection .Page 37 Flow Rate Characteristics . Page 39 Purge Air Flow Rate Charts ... Page 41 Precautions .
27 40 50 60 I 10 10 7 19 25 NN 2 2 3 3 4 H 25 35 20 30 24 G 6 6 11 13 17 HA 20 20 20 30 48 N 4 4 6 6 6 GA 11 21 31 43 41 13-/22-MXS6L-10 13-/22-MXS6L-20 13-/22-MXS6L-30 13-/22-MXS6L-40 13-/22-MXS6L-50 782 MXS 1322Air Slide Table Dimensions: MXS8 1322Basic 2 x M3 x 0.5 thread depth 4 Operating port 2 x M5 x 0.8 7 2 Vacuum suction port M5 x 0.8 5.5 J 6 Max. 9.5 (Stroke adjuster at retraction
PE port Pilot valve exhaust port M5 PD port M5 PE port Pilot valve exhaust port M5 PD port Non-locking push type Manual override Non-locking push type Manual override Vacuum release pressure port Vacuum release pressure port EXH EXH 109 PE PE PE PE PD PD PD PD 81.5 80.8 80.8 PD PD PD PD PS PS PS PS PV PV PV PV 52 52 13.5 13.5 50 42 42 PD PS PD PS 35.5 35.5 31.5 33 33 28 28 16.5 17 17 PV
(With stroke adjuster at extension end) 20 F 35 62 58 48 26 18 1 6 4-M5 x 0.8 thread depth 7 N-M5 x 0.8 thread depth 6 (Insert) 12 6 37.5 (With stroke adjuster at extension end) Stroke adjuster at retraction end Stroke adjuster at extension end KA 21 NA-M5 x 0.8 thread depth 5.5 10 21 5.5 K Vacuum suction port M5 x 0.8 10 5.5 5.5 9.5 12 12 J 10 Maximum 13.5 (With stroke adjuster at retraction
Description Pilot valve assembly AXT627-42-1(M5 x 50) AXT627-10-1 VFR51 AXT627-10-1 VFR52 AXT627-42-1(M5 x 50) AXT627-10-1 VFR53/54/55 NBR Hexagon socket head screw Gasket i AXT627-42-1(M5 x 50) Refer to How to Order Pilot Valve Assembly on page 3-5-78. Steel o !
RLQB32-20 RLQB32-25 RLQB32-30 RLQB32-40 RLQB32-50 RLQB32-75 RLQB32-100 RLQB40-20 RLQB40-25 RLQB40-30 RLQB40-40 RLQB40-50 RLQB40-75 RLQB40-100 RLQB50-30 RLQB50-40 RLQB50-50 RLQB50-75 RLQB50-100 RLQB63-30 RLQB63-40 RLQB63-50 RLQB63-75 RLQB63-100 M5 x 90l M5 x 95l M5 x 100l M5 x 110l M5 x 120l M5 x 145l M5 x 170l M5 x 100l M5 x 105l M5 x 110l M5 x 120l M5 x 130l M5 x 155l M5 x 180l M6 x 120l
Drain Discharge Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 115 Drain Drain (Maintenance space 100 mm or more) M5 x 0.8 5.5 M5 x 0.8 IDG10V/20V IDG10HV/20HV Port size 1/4, 3/8 70 A 41 59 C Purge air for dew point indicator 14 22 IN OUT 35 10 129 11 (B) Purge air
24 16 17 17 17 20 24 24 24 30 30 35 35 38 41 41 41 178 193 196 221 141 151 154 169 35 40 40 50 Up to 200 Up to 300 Up to 300 Up to 300 11 11 11 12 5 6 6 8 11 11 10 10 24 29 36 44 M5 x 0.8 M6 x 0.75 M8 x 1 M10 x 1.25 198 215 218 241 20 25 32 40 0.25 stroke For long stroke refer to page 9-2-32. 9-2-30 Series CLG1 Fine Lock Cylinder Double Acting, Single Rod With Mounting Bracket Foot style
Model C D Mounting bolt M5 x 90l M5 x 95l M5 x 100l M5 x 110l M5 x 120l M5 x 145l M5 x 170l M5 x 100l M5 x 105l M5 x 110l M5 x 120l M5 x 130l M5 x 155l M5 x 180l M6 x 120l M6 x 130l M6 x 140l M6 x 165l M6 x 190l M8 x 125l M8 x 135l M8 x 145l M8 x 170l M8 x 195l RLQB32-20 RLQB32-25 RLQB32-30 RLQB32-40 RLQB32-50 RLQB32-75 RLQB32-100 RLQB40-20 RLQB40-25 RLQB40-30 RLQB40-40 RLQB40-50 RLQB40-75
35 Up to 1000 24 244 37 10.5 6 4 106 16 37.5 17 M16 x 1.5 8 M8 x 1.25 15.5 G 1/4 5 20 24 40 Up to 1000 32 259 37 12 9 4 121 16 45 17 M16 x 1.5 8 M8 x 1.25 16.5 G 3/8 5 20 24 45 Up to 1000 32 300 46 14 11.5 4 128 17 45 22 M20 x 1.5 10 M10 x 1.5 19 G 3/8 25 30 45 Up to 1000 40 320 51 15 17 4 138 17 50 22 M20 x 1.5 10 M10 x 1.5 19 G 1/2 25 32 55 Up to 1000 40 398 65 15 17 6 160 20 58 27 M27
9 4 15.5 0.5 29 22 8 14 1 5 9 24 3.5 M3 x 0.5 17 3 25 31 41 8.5 9.5 10.5 10.5 -0.004 -0.012 0 -0.043 12 5 15.5 0.5 M3 x 0.5 34 25 9 18 1.5 6 10 29 3.5 M3 x 0.5 21 3 29 36 48 11 10 11.5 11 -0.004 -0.012 0 -0.043 14 6 17 0.5 M4 x 0.7 42 34.5 10 20 1.5 7 10 36 4.5 M4 x 0.7 26 4 36 44 59 M5 x 0.8 14 13 D12 13 -0.005 -0.014 0 -0.043 16 8 1 4.5 17.5 M5 x 0.8 50 47.5 13 22 2 8 12 43 5.5 M5
For details, refer to Common Option [2] Mounting position of the heater on page 17.
RUN 15 Starting PRO-NO BIT 1 17 17 Pro-no. bit1 The terminal that designates the program to be executed. Can designate 8 types of programs with a total of 3 bits. (Set by the binary system.)
NH NC DTT UU TT UU Auto switch magnet holder M5 x 0.8 (Port) -X GA GA 2-M5 x 0.8 (Hexagon socket head plug) 2-M5 x 0.8 (Hexagon socket head plug) Cushion needle G G 20GB M5 x 0.8 (Hexagon socket head plug) N A M5 x 0.8 (Port) Data Z + Stroke M5 x 0.8 (WW) (WW) (Hexagon socket head plug) 2 x 2-J depth K M5 x 0.8 (Hexagon socket head plug) XX XX M5 x 0.8 (Port) VV VV 2-M5 x 0.8 (Hexagon socket
above are the same as those on pages 17 through 20.