Combination Cylinder

5 5.5 5.5 6 10 14 M8 M10 X 1.25 M10 X 1.25 M14 X 1.5 24 29 35.5 44 8 10 12 16 6 8 ZZ With rod boot W Without rod boot ZZ e f h l Bore (mm) Stroke range H1 P PG PH PL PW S TA TB TC WA WW WB WH H 20 25 32 40 M5 M5 Rc(PT)1/8 Rc(PT)1/8 30 30 25 20 141 151 10 10 20 24 24 24 38 41 41 41 154 169 5 6 6 8 33 38 39 44 19.5 24 24 24 11 11 M5 M6 X 0.75 M8 M10 X 1.25 86 96 97 5.5 7 7 9 15 15 15 15 23

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

(Example) For M4: L2 = 8 mm Applicable shaft types: X, Z Q1 = M C1 = C L2 = L2 = D1 = L1 + (3 x P) L1 = C1 Q2 = M Q2 = M Z axis X axis L1 = X = (mm) (mm) (mm) D1 5 to 7.9 5 to 14.9 5 to 16.9 8 to 19.9 8 to 24.9 L1 max Size 30 50 63 80 100 X 3 to 25 3.5 to 36 3.5 to 41 4 to 50 5 to 60 Q2 M3 M4, M5, M6, M8 M4, M5, M6, M8, M10 M4, M5, M6, M8, M10, M12 M5, M6, M8, M10, M12 Q1 M3 M4, M5, M6,

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

(Example) For M4: L2 = 8 mm Applicable shaft types: X, Z Q1 = M C1 = C L2 = L2 = D1 = L1 + (3 x P) L1 = C1 Q2 = M Q2 = M Z axis X axis L1 = X = (mm) (mm) (mm) D1 5 to 7.9 5 to 14.9 5 to 16.9 8 to 19.9 8 to 24.9 L1 max Size 30 50 63 80 100 X 3 to 25 3.5 to 36 3.5 to 41 4 to 50 5 to 60 Q2 M3 M4, M5, M6, M8 M4, M5, M6, M8, M10 M4, M5, M6, M8, M10, M12 M5, M6, M8, M10, M12 Q1 M3 M4, M5, M6,

CL

1/8 1/8 1/8 1/8 1/8 1/8 1/8 MY1 100.5 P Bore 20 25 32 40 NN M20 X 1.5 M26 X 1.5 M26 X 1.5 M32 X 2 H 41 45 45 50 PG 22 27 27 29 I 28 33.5 37.5 46.5 GQ 4 7 7 8 PH 19.5 24 24 24 N 15 15 15 21.5 GR 4 7 7 7 PL 20 24 24 24 NA 24 30 34.5 42.5 H1 5 6 6 8 PW 38 41 41 41 K 5 5.5 5.5 7 RR 9 9 9 11 L 30 30 30 39 S 127 137 139 167 U 14 14 14 18 Z 198 212 214 256 ZZ 207 221 223 267 MM M8 X 1.25 1/8 1/

Modular Design with Uniform Body Style

/8, 1/4 1/8 126.4 87.6 35.9 41.6 60 21 2 30 43.2 24 33 5.5 11.5 3.5 29 38 AC30-D 1/4, 3/8 1/8 167.4 115.4 38.1 30 55.1 80 26.5 3.5 41 57.2 35 7 14 6 42.5 42.5 AC40-D 1/4, 3/8, 1/2 1/8 220.4 147.1 44 38.4 72.6 110 35.5 50 75.2 40 55 9 18 7 50 65 AC40-06-D 3/4 1/8 235.4 149.1 44 38.4 77.6 110 35.5 50 80.2 40 55 9 18 7 50 65 AC50-D 3/4, 1 1/8 282.4 220.1 48 93.1 110 45 70 96.2 50 70 11

CG1

87 102 102 122 122 12 12 12 13 14 14 20 20 11 11 11 12 13 13 35 40 40 50 58 58 71 71 11 11 11 12 13 13 18 22 22 30 35 35 40 40 12 14 18 25 30 32 40 50 15.5 19.5 19.5 27 32 32 37 37 2 2 2 2 2 2 3 3 8 10 12 16 20 20 25 30 13 17 13 19 27 27 32 41 14 16.5 20 26 32 38 50 60 6 8 10 14 18 18 22 26 M5 Depth 7.5 M10 X 1.25 M5 Depth 8 M10 X 1.25 M14 X 1.5 M6 Depth 12 M8 Depth 16 M18 X 1.5 M10

ISO Cylinder

x 0.8 19 5 16 M4 x 0.7 23 3.5, 6.5 counterbore depth 4 8 14 23.5 9.5 15 58 7 4 12 74 10 12 16 4 M5 x 0.8 19 5 16 M4 x 0.7 23 3.5, 6.5 counterbore depth 4 8 14 23.5 9.5 15 58 7 4 12 74 12 16 20 6 M5 x 0.8 25 6 21 5 M6 x 1 26 4.5, 8 counterbore depth 5 10 16 29.5 10.5 18.3 67 10 5 16 88 16 16 20 6 M5 x 0.8 25 6 21 5 M6 x 1 26 4.5, 8 counterbore depth 5 10 16 29.5 10.5 18.3 67 10 5 16 88

SQ1000/2000

B port) C3: 3.2 One-touch fitting C4: 4 One-touch fitting C6: 6 One-touch fitting M5: M5 threads Dimensions L n Formulas: L1 = 11.5n + 55.5, L2 = 11.5n + 73 n: Stations (maximum 16 stations) 16 239.5 257 287.5 298 15 228 245.5 275 285.5 14 216.5 234 262.5 273 13 205 222.5 250 260.5 12 193.5 211 237.5 248 11 182 199.5 225 235.5 10 170.5 188 212.5 223 9 159 176.5 200 210.5 8 147.5 165 187.5

Series CM2-Z 10-/11- ø20, ø25, ø32, ø40 21-/22- Air Cylinder

32 32 26 50 45 45 41 6 6 5 8 8 8 1/8 88 64 62 62 45 41 41 37 42.5 34.5 30 24 47.3 37 37 30 M26 x 1.5 M26 x 1.5 M20 x 1.5 21 19.5 19.5 15.5 M14 x 1.5 M10 x 1.25 M10 x 1.25 M8 x 1.25 26-0.033 0 7 7 7 5 4 4 1/4 1/8 1/8 14 12 10 16 13 13 26-0.033 0 32-0.039 0 82 36 10 8 M32 x 2 The bracket is shipped together.

ZP

g] ZP3-T16B;-A12-B5 [Weight: 19.3 g] M5 x 0.8 M5 x 0.8 M5 x 0.8 2 5 5 5 Width across flat 14 Width across flat 14 Width across flat 14 2 2 18 18 15 10 18 M12 x 1 M12 x 1 M12 x 1 Width across flat 14 Width across flat 14 Width across flat 14 33 Barb fitting 33 33 5 5 5 15 10 15 10 2 2 1.8 1.8 1.8 14 13 8.4 11 10 6 11.4 17 16 Vacuum Inlet Dimensions ZP3-T10B;-A12-U2 ZP3-T13B;-A12-U2 ZP3-T16B

KJ

(inch) Connection thread M R Model H (Width across flats) L A M Min. port size KQ2H01-M5 KQ2H07-M5 KQ2H01-M5 M5> Weight (g) D Note) Applicable tubing KQ2H01-M5 2 9 16 6 11 12 3.3 10 15 M5 x 0.8 13.6 18 7 16.7 22 12.7 KQ2H01-01S 1 8 1 8 10 15.5 2.5 1 4 KQ2H01-02S 19.5 13.5 14 2.5 M5 x 0.8 KQ2H05-M5 10.3 20.5 18 15 15.3 18.5 17 10.7 11 14 11 24 22 21 18.4 22.5 23 16.5 1 8 3 16

AC Servo Motor Driver (Network card type ）

If the voltage drop (maximum of 5.2 V) interferes with the relay operation, apply high voltage (maximum of 26.4 V) from external source. 13 13 14. APPLICATION OF FUNCTIONS 14. APPLICATION OF FUNCTIONS .2 14.1 Infinite feed function (setting degree) .2 14 1 14. APPLICATION OF FUNCTIONS 14.

VQ5000

37 31.5 18 53 40 66 B A A B Manual override 1 3 5 14 12 14 5 1 3 12 53 2-6.5 Mounting hole 35 2-6.5 Mounting hole 35 53 Manual override 18 31.5 37 41 50 98 PE X PE X P R1 R2 R2 R1 P 27.5 27.5 41 41 1/8 Port PE Rc1/8 External pilot port 27.5 27.5 41 41 1/8 Port PE 1/8 External pilot port 5-1/2 Ports P, A, B, R1, R2 5-1/2 Ports P, A, B, R1, R2 Numbers inside ( ) are for metal seal 3 position

JIS Standard Hydraulic Cylinder

21 11 35 14 37 104 88 M10 x 1.25 13 11 3/8 39 136 57 14 29 40 0.15 0.18 25 to 800 118 65 45 10 11 21 37.5 14 36 104 M10 x 1.25 95 13 11 3/8 42 136 57 29 14 50 25 to 800 145 76 52 10 27 14 45 17 43 116 115 M10 x 1.25 18 11 1/2 46 150 60 18 35 63 25 to 800 165 90 63 10 27 18 50 19 132 43 114 M12 x 1.5 20 14 1/2 52 156 71 19 41 0.20 80 25 to 1000 190 110 80 11 22 18 60 24 44 124 155 M16 x 1.5

Base Mounted Type, VQ5000 Series, 5 Port Metal Seal/Rubber Seal Solenoid Valve

37 31.5 18 53 40 66 B A A B Manual override 1 3 5 14 12 14 5 1 3 12 53 2-6.5 Mounting hole 35 2-6.5 Mounting hole 35 53 Manual override 18 31.5 37 41 50 98 PE X PE X P R1 R2 R2 R1 P 27.5 27.5 41 41 1/8 Port PE Rc1/8 External pilot port 27.5 27.5 41 41 1/8 Port PE 1/8 External pilot port 5-1/2 Ports P, A, B, R1, R2 5-1/2 Ports P, A, B, R1, R2 Numbers inside ( ) are for metal seal 3 position

Series 10-SYJ300/500/700 Rubber Seal 3 Port Solenoid Valve

1.0 0.68 1.0 0.43 0.52 0.36 0.49 0.37 0.35 0.27 0.13 0.21 0.25 0.20 0.26 0.17 0.25 0.74 0.81 0.92 0.80 0.96 1.0 1.0 0.32 0.28 0.24 0.23 0.25 0.25 0.30 0.19 0.20 0.22 0.19 0.24 0.24 0.26 M5 x 0.8 1/8 1/8 1/8 1/8 1/8 Type 10-SS3YJ5-40-M5 Type 10-SS3YJ5-40-01 Base mounted for internal pilot C4 1/8 1/8 M5 x 0.8 1/8 Type 10-SS3YJ5-41-M5 10-SYJ54M Type 10-SS3YJ5-41-01 Type 10-SS3YJ5-41-C4 Type

Rotary Actuator

(Example) For M4: L2 = 8 Applicable shaft types: X, Z L1 + (3 x P) Q1 = M C1 = C L2 = L1 = L2 = D1 = Q2 = M Q2 = M C1 Z axis X axis X = L1 = [mm] [mm] [mm] Size Q1 30 M3 50 M4, M5, M6, M8 63 M4, M5, M6, M8, M10 80 M4, M5, M6, M8, M10, M12 100 M5, M6, M8, M10, M12 Size Q2 30 M3 50 M4, M5, M6, M8 63 M4, M5, M6, M8, M10 80 M4, M5, M6, M8, M10, M12 100 M5, M6, M8, M10, M12 Size X L1max D1 30

Series KP/KPQ/KPG

-02 KPGY10-02 KPGY10-03 KPGY12-03 KPGY12-04 KPQY04-M5 KPQY04-01 KPQY04-02 KPQY06-M5 KPQY06-01 KPQY06-02 KPQY08-01 KPQY08-02 KPQY10-02 KPQY10-03 KPQY12-03 KPQY12-04 M5 1/8 1/4 M5 1/8 1/4 1/8 1/4 1/4 3/8 3/8 1/2 8 32.5 36.5 40.5 35 40 44 44.5 48.5 53.5 55 58 60.5 8 10 14 8 10 14 12 14 15.3 22 26 15.8 23.2 27.2 24.4 28.4 29.9 31.9 33.1 37.1 6 13 19 7 14 20 14 22 29 39 41 68 4 18 4 4 20.7 10.4

Series KP/KPQ/KPG

-02 KPGY10-02 KPGY10-03 KPGY12-03 KPGY12-04 KPQY04-M5 KPQY04-01 KPQY04-02 KPQY06-M5 KPQY06-01 KPQY06-02 KPQY08-01 KPQY08-02 KPQY10-02 KPQY10-03 KPQY12-03 KPQY12-04 M5 1/8 1/4 M5 1/8 1/4 1/8 1/4 1/4 3/8 3/8 1/2 8 32.5 36.5 40.5 35 40 44 44.5 48.5 53.5 55 58 60.5 8 10 14 8 10 14 12 14 15.3 22 26 15.8 23.2 27.2 24.4 28.4 29.9 31.9 33.1 37.1 6 13 19 7 14 20 14 22 29 39 41 68 4 18 4 4 20.7 10.4

XL

to 140F) [high temperature type: 5 to 150C (41 to 302F)] 5 to 50C (41 to 122F) Operating temperature C XLDV Operating pressure Pa {Torr} Atmospheric pressure to 1 x 10 -6 {760 to 7.5 x 10 -9} 14 45 80 160 200 Main exhaust valve Conductance l/s Note 1) Initial exhaust valve 0.5 to 3 2 to 8 2.5 to 11 4 to 18 4 to 18 1.3 x 10 -10 {1 x 10 -9} at ordinary temperatures, excluding gas permeation