Compact Vacuum Unit Ejector/ Vacuum Pump System Note 2) Refer to the General Specifications on P.41 for the specifications not shown in this table. 44 - Doc. no.
) ZS-35-D (W1,WF1,M5,C4,C6) ZS-35-F +(01,N01) ZS-35-G +(W1,WF1,M5,C4,C6) -10No.PS-OMM0006CN-E M8(3 ) 01 N M L ISE40A 1/ 2 ISE40A -0.11.000 MPa Y ZSE40A 0.0-101.3 kPa K + T + 1 01 R1/8(M5) N01 NPT1/8(M5) A A D D N NPN1 M8 P PNP1 /M8 1 L M SI2 M8 P (psi)1 1 2kPaMPa 1 ZS-24-A A M35 L,M45 L, 2 ZS-24-D D M35 L,M45 L, 2 / V100-49-1-1 300 mm() V100-49-1-2 500 mm() V100-49-1-
For LECSB-S5 LECSB-S7 LECSB-S8 14 5 14.
-I With bracket Bracket A 01/N01 type W1/WF1 type -66No.PS-OMM0007-I Bracket B W1/WF1 type -67No.PS-OMM0007-I Bracket D 01/N01 type W1/WF1 type -68No.PS-OMM0007-I Panel mount adapter 01/N01 type W1/WF1/M5/C4/C6 type -69No.PS-OMM0007-I Panel mount adapter + Front protective cover 01/N01 type W1/WF1/M5/C4/C6 type -70No.PS-OMM0007-I Panel cut-out dimensions -71No.PS-OMM0007-I 01/N01 type (products
U D B C4 C6 C8 (Rail mounting hole pitch 12.5) 1-6-133
One-touch fitting for 4 C4 02 2 stations 02 2 stations One-touch fitting for 6 C6 SX3000 (1) One-touch fitting for 6 C6 Double wiring specifications SX3000 (1) Double wiring specifications Mixed M Mixed M 08 8 stations 04 4 stations One-touch fitting for 4 C4 One-touch fitting for 4 C4 02 2 stations 02 2 stations One-touch fitting for 6 C6 One-touch fitting for 8 C8 Mixed M (2) One-touch
(S) 42 Manifold base Manifold base Caution Mounting Screw Tightening Torques M3: 0.6 Nm Body ported VK300-41-1A Base mounted VK300-41-2A Manifold gasket and screw assembly Note 1) Mounting direction is fixed, do not mount on opposite side.
14 14 14 14 14 14 14 (5.5) (35) S0710-5 S0710-5 S0710-5 S0720-5 S0720-5 S0720-5 S07A0-5 S07A0-5 62 72 102.4 39 12 12 12 12 12 21.8 5 4 4 x M4 mounting hole SI unit n 8 7 6 5 4 3 2 1 Stations D side U side [Communication connector D-sub] C8: 3(R) port C8: 8 One-touch fitting DIN rail clamping screw 76.7 76.7 33.6 33.6 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 B 4 A 4 A 4 A 4 A 4 A 4 A 4 A 4 A (12) (12
Maintenance 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com NOTE: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2019 SMC Corporation All Rights Reserved 41 -
14 14 14 14 14 14 D side U side For the I/O Unit part number mounted, refer to the following pages.
354 331 18 373 350 19 392 369 20 411 388 L1 L2 3-2-8 5 Port Direct Operated Poppet Solenoid Valve Rubber Seal Series VK3000 Base mounted (Side ported) Type 41 Manifold Grommet: G DIN terminal: D VV5K3-41Station -M5 VK VZ VF VFR VP4 VZS VFS ~ = ~ = VS4 VQ7 EVS VFN Solenoid is at the same side as A port: VV5K3-S41Station Built-in One-touch fitting: VV5K3-41Station -C4 ~ = Refer to the above
VQ0140-5MO-C4 4 sets (Single solenoid No.) VQ0240-5MO-C4 4 sets (Double solenoid No.) The mark is an assembling mark. Prefix to parts nos. of solenoid valves, etc. VVQ0-R-4-C4 Individual EXH spacer VVQ0-57A-4 DIN rail mounting bracket KQP-X19 Blank plug 23 04 06 Specify valve and option nos. below the manifold base No.
(Manifold specification sheet on page 41.)
[mm] [mm] Size CRB2 CRBU2 X Y X Y 10 3 to 14 1 to 14 1 to 14 1 to 14 15 4 to 18 1.5 to 18 1.5 to 18 1.5 to 18 20 4.5 to 20 1.5 to 20 1.5 to 20 1.5 to 20 30 5 to 22 2 to 22 2 to 22 2 to 22 40 18 to 30 18 to 30 18 to 30 18 to 30 Size CRB2 CRBU2 X Y X Y 10 3 to 14 1 to 14 1 to 14 1 to 14 15 4 to 18 1.5 to 18 1.5 to 18 1.5 to 18 20 4.5 to 20 1.5 to 20 1.5 to 20 1.5 to 20 30 5 to 22 2 to 22 2
) SOL.a (14) SOL.a (14) SOL.a (14) SOL.a 22.5 90.5 22.9 56.2 Note) Reduces supply pressure from the D side of manifold.
) SOL.a (14) SOL.a (14) SOL.a (14) SOL.a 22.5 90.5 22.9 56.2 Note) Reduces supply pressure from the D side of manifold.
LECSB Positioning unit QD75D (Manufactured by Mitsubishi Electric) 24 VDC Note 2) Note 4) CN1 Note 4) 21 DICOM CN1 Failure Note 3) DICOM 20 48 ALM RA1 CLEARCOM 14 DOCOM 46 Zero speed detection 23 ZSP RA2 CLEAR 13 CR 41 Torque limiting RDYCOM 12 25 TLC RA3 Positioning completion READY 11 RD 49 24 INP RA4 PULSE F+ 15 PP 10 PULSE F 16 PG 11 10 m or less NP 35 17 PULSE R+ S/S NG 36 4 LA 18 PULSE
Indication of A B C D E F G T VCKH1209-02F VCKH1008-02F VCKH1075-02F VCKH0806-02F VCKH0604-02F 12/9 13 38.5 10 19 17 18.5 9 to 12 Nm 10/8 11 38 9 17 17 18.5 6 to 9 Nm 1075 11 38 9 17 17 18.5 6 to 9 Nm 8/6 9 36.5 8 14 14 16 4 to 9 Nm 6/4 7 36.5 8 12 14 15 3 to 8 Nm VCKK 40 swivel elbow 40 B A 10 Approx. F D Width across flats 14 Tightening torque: Tighten within 10 1 Nm. Approx.
22 30 Basic Compact 4 6 10 14 Basic Compact 4 6 8 12 10 16 20 25 32 40 10 16 20 25 10 20 32 40 10 20 32 40 5.5 22 90 130 6 8 6 8 7 28 120 180 16 (32) 24 (48) 32 (64) 40 (80) 3.5 17 14 14 28 28 40 40 130 210 Note) ( ): Long stroke Features 17 Controller/Driver Controller Driver Step data input type For step motor Programless type Pulse input type Step data input type For servo motor Series