Compact Manifold Regulator

size Size 4 6 5/32 1/4 Symbol C4 C6 N3 N7 Size 6 8 10 1/4 5/16 3/8 Symbol C6 C8 C10 N7 N9 N11 Semi-standard Semi-standard VY1 Description None Oil-free Description None Oil-free Symbol Nil X17 Symbol Nil X17 VBA VBAT AP100 Straight type Straight type Elbow type Elbow type 6.5 X X 12.5 X X Y Y X X Y X X Y Fitting size Fitting size Fitting size Fitting size 5 5 5.5 5 6 4, 5/32 4, 5/32 6 3

5 Port Solenoid Valve, Body Ported Type/Flip Plug-in Unit, Series VQ1000

N1: 1/8 N3: 5/32 N7: 1/4 Y Note 2) Note 1) When specifying two or more options, enter symbols in alphabetical order.

Secondary Batteries

Refer to page 66 for details. 33 Heavy Duty Stopper Cylinder 20, 32 50, 63 90-RSH/RS1H Series How to Order Piping direction Positional relationship of lever and port Port 90-RSH20 Flange side Direction of transfer Nil Nil Direction of transfer 90-RSH32 Port Cylinder stroke 15 20 Bore size 20 32 15 mm (90-RSH20) 20 mm (90-RSH32) 20 mm 32 mm Heavy Duty Stopper Cylinder 20, 32 M9BWL 32 20 D

Modular F.R.L. Units

Model 1 Port size A B C D E Applicable model Y110-M5-A M5 x 0.8 11.2 19 12 14 8 AC10-A, AC10B-A Y210-l01-A 1/8 14.6 41.8 32 28 19 AC20-B, AC20B-B AC20C-B Y210-l02-A 1/4 Y310-l01-A 1/8 14.6 52.7 38.7 30 19 AC25-B, AC25B-B AC25C-B, AC30C-B Y310-l02-A 1/4 Y410-l02-A 1/4 18.6 62 44 36 24 AC40-B, AC40B-B AC40C-B Y410-l03-A 3/8 Y510-l02-A 1/4 18.6 66 46 44 24 AC40-06-B, AC40B-06-B AC40C-06-B Y510

Serial Transmission System Series EX250 Series EX500

(Fill out for I/O unit only) LM Ports 2, 4 size (inch) Nil PNP (+) or without SI unit/input block (SD0) Ports 2, 4 Symbol N3 N7 N9 NM Ports 1, 3, 5 NPN () N 5/32" One-touch fitting 1/4" One-touch fitting 5/16" One-touch fitting Mixed Top ported elbow 5/32" One-touch fitting Top ported elbow 1/4" One-touch fitting Top ported elbow 5/16" One-touch fitting Bottom ported elbow 5/32" One-touch

PFxx-OMJ0005CN

) 10.1 8.1 C4 4(5/32) 10.1 8.1 C6 6 10.3 8.3 C6 6 10.3 8.3 C8 8(5/16) 12 10 C8 8(5/16) 12 10 N7 1/4 10.3 8.3 N7 1/4 10.3 8.3 PFM7-01/02--X693 PFM7S-01/02--X693 A B C() A B C() Rc1/81/4 Rc1/81/4 NPT1/81/4 NPT1/81/4 13 11 17 13 11 17 G1/8 G1/8 G1/4 17 15 21 G1/4 17 15 21 -73No.PF-OMJ0005CN-I PFM7-C4/C6/C8/N7--X694 PFM7S-C4/C6/C8/N7--X694 A B A B C4 4(5/32) 10.1 36.1 C4 4(5/32) 10.1 8.1

Intrinsically Safe Valve

The safety barrier must meet the specifications listed in the Installation Instructions section. 14 Series 53-SY5000/7000 Manifold Specifications 53-SS5Y5-20 53-SS5Y7-20 Model 53-SY520 53-SY720 Applicable valve Manifold type Single base B mount P (SUP)/R (EXH) Common SUP/EXH Valve stations 2 to 20 stations Note 1) A, B port location Valve 1/4 P, EA, EB port 1/8 C4 (4 One-touch fitting) C6

Proposals for Energy Saving

L1 Low noise nozzle with male thread/KNS (mm) Model Nozzle size D Connection size L1 A Width across flats H1 0.75 x 4 1 x 4 0.9 x 8 0.75 x 4 0.9 x 8 1 x 4 1.1 x 8 R 1/8 R 1/8 R 1/8 R 1/4 R 1/4 R 1/4 R 1/4 12 12 12 14 14 14 14 18 18 18 20 20 20 20 14 14 14 14 14 14 14 KNS-R01-075-4 KNS-R01-100-4 KNS-R01-090-8 KNS-R02-075-4 KNS-R02-090-8 KNS-R02-100-4 KNS-R02-110-8 D 2 H1 A L1 Connection

EtherNet/IP TM Compatible Fieldbus System

SI unit which is not 32 output is connected to the port specified by diagnostic setting < 32 point switch diagnostic > 0x8-0xF Reserve 24 No.EX-OMS0014-A Diagnostic setting Output data Offset Meaning MSB LSB MSB LSB (INT) 15 8 7 0 Slave 8 #D4 #D3 #D2 #D1 #C4 #C3 #C2 #C1 #B4 #B3 #B2 #B1 #A4 #A3 #A2 #A1 connection diagnostic 32 point 9 COM_D COM_C COM_B COM_A switch diagnostic -: Unused < Slave

Table of Contents

This specification is not available for the rotary actuator with auto switch unit. 3-d Body (B) (mm) Q M N Size (mm) d 10 Size M3 8.5 9.5 3.4 15 15 M3 11 10 Body (A) 20 4.5 20 M5 14 13 A port B port A port B port Q N 30 30 5.5 M5 15.5 14 (Standard) (Altered) M 40 40 M5 21 20 5.5 (Top view from long shaft side) 11-2-34 34 Made to Order Series CRB2 Symbol: C3 Symbol: C4 Change the position

2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

(-L) 84.4 12 14 2.8 depth 8.4 2 x P PF2M701/702/705/710/ 725/750L-F1(-L) 84.4 13 14 2.8 depth 8.4 PF2M711/721L-02(-L) 88 13 17 2.8 depth 6.2 PF2M711/721L-N2(-L) 88 13 17 2.8 depth 6.2 PF2M711/721L-F2(-L) 88 17 21 2.8 depth 6.2 20 PF2M7(-L) Series Dimensions 76 A PF2M7mS-C4/C6/C8/N7(-L) 76 A 68 68 58 58 48 48 18 18 OUT1 OUT2 OUT1 OUT2 DC(+) 10.2 DC() 1.4 DC(+) 10.2 DC() 1.4 46.9 (Max. 53.9

CRB2/CRBU2/CRB1

NBR 14 Holding rubber Parts list No.

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

This specification is not available for the rotary actuator with auto switch unit. 3-d Body (B) (mm) Q M N Size (mm) d 10 Size M3 8.5 9.5 3.4 15 15 M3 11 10 Body (A) 20 4.5 20 M5 14 13 A port B port A port B port Q N 30 30 5.5 M5 15.5 14 (Standard) (Altered) M 40 40 M5 21 20 5.5 (Top view from long shaft side) 11-2-34 34 Made to Order Series CRB2 Symbol: C3 Symbol: C4 Change the position

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

This specification is not available for the rotary actuator with auto switch unit. 3-d Body (B) (mm) Q M N Size (mm) d 10 Size M3 8.5 9.5 3.4 15 15 M3 11 10 Body (A) 20 4.5 20 M5 14 13 A port B port A port B port Q N 30 30 5.5 M5 15.5 14 (Standard) (Altered) M 40 40 M5 21 20 5.5 (Top view from long shaft side) 11-2-34 34 Made to Order Series CRB2 Symbol: C3 Symbol: C4 Change the position

modular-press-e

Pressure Control Equipment Fitting type One-touch fittings for regulator block 6.5 Symbol Nil L1 Type Straight Elbow X X Fitting size Y Size 4 6 5/32 1/4 Symbol C4 C6 N3 N7 Semi-standard Description None Oil-free Symbol Nil X17 Y 19 19.5 22 X 3 3 7 X 11.5 11.5 11.5 Fitting size 4, 5/32 6 1/4 Fitting size 4, 5/32 6 1/4 Air Preparation Equipment Industrial Filters Replacement Procedure Actuators

Modular F.R.L. Pressure Control Equipment

Pressure Control Equipment Fitting type One-touch fittings for regulator block 6.5 Symbol Nil L1 Type Straight Elbow X X Fitting size Y Size 4 6 5/32 1/4 Symbol C4 C6 N3 N7 Semi-standard Description None Oil-free Symbol Nil X17 Y 19 19.5 22 X 3 3 7 X 11.5 11.5 11.5 Fitting size 4, 5/32 6 1/4 Fitting size 4, 5/32 6 1/4 Air Preparation Equipment Industrial Filters Replacement Procedure Actuators

VQC

VQC2000 VVQ1000-50A-C3 VVQ1000-50A-C4 VVQ1000-50A-C6 VVQ1000-50A-M5 VVQ1000-50A-N1 VVQ1000-50A-N3 VVQ1000-50A-N7 VVQ1000-51A-C4 VVQ1000-51A-C6 VVQ1000-51A-C8 VVQ1000-51A-N3 VVQ1000-51A-N7 VVQ1000-51A-N9 3.2 4 6 8 M5 1/8" 5/32" 1/4" 5/16" With miswiring prevention mechanism (stop diode) Note) A-side energized: Light (orange) ON B-side energized: Light (green) ON With surge absorbing mechanism

Digital Flow Switch (Integrated display type)

PFM7-C4/C6/C8/N7--X693 PFM7S-C4/C6/C8/N7--X693 PFM7-01/02--X693 PFM7S-01/02--X693 -73No.PF-OMJ0006-J PFM7-C4/C6/C8/N7--X694 PFM7S-C4/C6/C8/N7--X694 PFM7-01/02--X694 PFM7S-01/02--X694 -74No.PF-OMJ0006-J For a mixture of Argon (Ar) and carbon dioxide (CO2) The mixture ratio can be selected from Ar : CO2 = 92 : 8, 90 : 10, 80 : 20, 70 : 30 or 60 : 40.

Digital Flow Switch (Integrated display type)

11 14 2.8 depth 8.4 PF2M701/702/705/710/725/750L-N1(-L) 84.4 12 14 2.8 depth 8.4 PF2M701/702/705/710/725/750L-F1(-L) 84.4 13 14 2.8 depth 8.4 PF2M711/721L-01(-L) 88 13 17 2.8 depth 6.2 PF2M711/721L-N1(-L) 88 13 17 2.8 depth 6.2 PF2M711/721L-F1(-L) 88 17 21 2.8 depth 6.2 -102No.PF-OMW0007-E PF2M7#S-C4/C6/C8/N7(-L) (mm) Model A P Q PF2M705/710S-C4(-L) 87.1 2.8 depth 8.4 2.5 depth 6 PF2M705

Plug-in Unit

Port size VQC1000/2000 VQC4000 --C8 Port size VQC2000 VQC1000 Symbol C3 C4 C6 C8 C10 C12 N1 N3 N7 N9 N11 M5 02 03 B C0 VVQC 1 000-2A-1 For 3.2 One-touch fitting For 4 One-touch fitting For 6 For 8 For 10 For 12 For 1/8" For 5/32" For 1/4" For 5/16" For 3/8" For M5 thread Rc 1/4" Rc 3/8" Rc 1/4" bottom ported Without One-touch fitting Option Series Nil R Centralized exhaust External pilot