IN/OUT fitting type 7 stations Metric size Inch size 8 stations 9 stations IN side IN side Straight Straight Elbow OUT side Straight Elbow Straight Elbow OUT side 10 stations Elbow Note) Symbol Symbol 4 6 4 6 4 6 4 6 5/32 1/4 5/32 1/4 5/32 1/4 5/32 1/4 5.
IN/OUT fitting type 7 stations Metric size Inch size 8 stations 9 stations IN side IN side Straight Straight Elbow OUT side Straight Elbow Straight Elbow OUT side 10 stations Elbow Note) Symbol Symbol 4 6 4 6 4 6 4 6 5/32 1/4 5/32 1/4 5/32 1/4 5/32 1/4 5.
Horizontal mounting Downward mounting 83 27 94 27 26 32 Center bracket/IZS31-BM Reduced-wiring Fieldbus System 40 15 23 14 3 5.4 18 24 39 Static Neutralization Equipment M5 screw for mounting 2 Ionizer 27 100 Alphabetical Index Length Measuring/ Counter Angle adjustable Ionizer full length (L) Note) Number of center brackets included in a model with brackets.
TMH M5 Port size ASD M5 x 0.8 R 1/8 R 1/4 R 3/8 R 1/2 10-32 UNF NPT 1/8 NPT 1/4 NPT 3/8 NPT 1/2 Applicable tubing O.D. Note) Type 01 02 03 04 Inch size Metric size Elbow Universal 2 3 1/8" AS 23 01 3.2 03 05 07 09 11 13 04 06 08 10 12 4 5/32" 6 3/16" Control AS-FE U10/32 N01 N02 N03 N04 8 1/4" Meter-out Meter-in 0 1 10 5/16" Made to Order Refer to the below for details.
Valve Mounting Direction: S (Single Solenoid Coil on the Same Side as A,B Ports), Piping: 46 (5 Port/Base Mounted Common SUP Individual EXH), Stations: 9 Stations, A B Port Size: M5 (Base Mounted M5X0.8)
Valve Mounting Direction: Solenoid on the Side Opposite to A,B Ports, Piping: 46 (5 Port/Base Mounted Common SUP Individual EXH), Stations: 9 Stations, A B Port Size: M5 (Base Mounted M5X0.8)
Valve Mounting Direction: S (Single Solenoid Coil on the Same Side as A,B Ports), Piping: 32 (4 Port/Base Mounted Common SUP Common EXH), Stations: 9 Stations, A B Port Size: M5 (Base Mounted M5X0.8)
Valve Mounting Direction: Solenoid on the Side Opposite to A,B Ports, Piping: 41 (5 Port/Base Mounted Common SUP Common EXH), Stations: 9 Stations, A B Port Size: M5 (Base Mounted M5X0.8)
Valve Mounting Direction: S (Single Solenoid Coil on the Same Side as A,B Ports), Piping: 41 (5 Port/Base Mounted Common SUP Common EXH), Stations: 9 Stations, A B Port Size: M5 (Base Mounted M5X0.8)
Valve Mounting Direction: Single Solenoid Coil on the Same Side as A,B Ports, Piping: 5 Port/Base Mounted Common SUP Individual EXH, Stations: 9 Stations, A B Port Size: Base Mounted M5X0.8, P R Port Thread: -
Valve Mounting Direction: Solenoid on the Side Opposite to A,B Ports, Piping: 5 Port/Base Mounted Common SUP Individual EXH, Stations: 9 Stations, A B Port Size: Base Mounted M5X0.8, P R Port Thread: -
Valve Mounting Direction: Single Solenoid Coil on the Same Side as A,B Ports, Piping: 4 Port/Base Mounted Common SUP Common EXH, Stations: 9 Stations, A B Port Size: Base Mounted M5X0.8, P R Port Thread: -
Valve Mounting Direction: Solenoid on the Side Opposite to A,B Ports, Piping: 5 Port/Base Mounted Common SUP Common EXH, Stations: 9 Stations, A B Port Size: Base Mounted M5X0.8, P R Port Thread: -
Valve Mounting Direction: Single Solenoid Coil on the Same Side as A,B Ports, Piping: 5 Port/Base Mounted Common SUP Common EXH, Stations: 9 Stations, A B Port Size: Base Mounted M5X0.8, P R Port Thread: -
71 53 B A 58 31 8 16 16 125 With flow rate adjustment 25 30 Breathing port Breathing port PB PB PA PA M5 x 0.8 x 5 Pilot port Rc1/8 (NPT1/8) Pilot port LVP50-16A1 N LVP50-16A2 Basic type, with flow rate adjustment LVP6 78 58 90 4 x 6.5 40 58 Max. 35 Adjustment knob 2 x 6 Pilot port 34 (45) Lock nut Breathing port M5 x 5 Pilot port PB Breathing port PA PB 27.5 LVP60-A2 150 PA (32) (26) 36.5
Required screws are as follows: 2 x M5 (End plate: torque = 1.5 Nm) 2 x M5 (SI Unit : torque = 1.5 Nm) 4 x M (Valve manifold: refer to valve manifold catalogue) Fig. 7-1 Required screws All manifolds are mounted using 8 screws (except VQC4000 which uses 7 screws). 25 No.EX##-OMY0004 7.1.1. Valve manifold connection Connect the valve manifold with the 2 screws on the SI Unit.
E 03 05 07 09 't't 5132" 1l4', 5/16' 3t8" 1/2" 6mm 8mm H , T , U , X , N 1 3 06 08 t0 1 2 1 6 32 i10-32 UNF Thread 3 5 I l t N P r H ' L . W , r .
ASD Body size Port size M5 M5 x 0.8 U10/32 10-32UNF 1 M5 x 0.8 10-32UNF AS AS-FE 2 F A 1 AS 1 M5 06 0 E KE Body size 1 AS-FG F A 1 AS 2 01 06 2 0 S Body size 2/3/4 AS-FP AS-FM Body size Made to Order Refer to page 562 for details.
Port size Body size M5 M5 x 0.8 U10/32 10-32UNF 1 M5 x 0.8 10-32UNF 1 0 2 06 AS 1F S E M5 Body size 1 S Body size 2/3/4 AS 01 2 0 2 1F S 06 With indicator Made to Order Refer to page 15 for details. Body size 2 1/8, 1/4 3 3/8 4 1/2 Type 2 Elbow 3 Universal Seal method Nil Without sealant S With sealant Control type Note) Note) Face seal type is used for the G thread type.
Body size Port size M5 M5 x 0.8 U10/32 10-32UNF 1 M5 x 0.8 10-32UNF AS 2 0 F A 1 1 M5 06 G Body size 1 AS 2 0 S F A 1 2 01 06 G Body size 2/3/4 Body size Made to Order Refer to page 678 for details. 2 1/8, 1/4 3 3/8 4 1/2 Push-lock type Type 2 Elbow 3 Universal Seal method Nil Without sealant S With sealant Note) Face seal method is used for the G thread type.