Base Mounted Type, VQ5000 Series, 5 Port Metal Seal/Rubber Seal Solenoid Valve

Other models have conduit ports in two locations. 28 Base Mounted Type Series VQ5000 Dimensions (mm) 1in 25.4mm Bottom port diagram 2-G1/2 Note) Conduit port 146 111 83.5 106 59.2 46.8 9 9 2n-1/2 (ports A, B) 55.5 M5 ground screw U side 32.5 34.5 n 12 X ... ... ... ... ... ... ...

Speed Controller for Low Speed Operation with One-touch Fitting Series AS-FM Elbow Type/Universal Type (Resin Body) 1

6 M5 type U10/32 type M5 type U10/32 type e !0 i t NBR, Stainless steel !1 !6 w y Gasket M5 type only !7 r Note 1) M5 and U10/32 types are black zinc chromate plated. Note 2) AS231FM type is made of steel. Note 3) Meter-in type is black zinc chromate plated. Note 4) AS131FM(3.2, 4, 6, 1/8", 5/32", 1/4") AS231FM-01(3.2, 4, 6, 1/8", 5/32") is POM.

30

Hexagon Socket Head Male Connector: KQB2S (M5) Applicable tube O.D.

Tamper Proof Speed Controller with One-touch Fitting Series AS


1F-T Elbow Type/Universal Type 1

1 M5 type U10/32 type M5 type U10/32 type !1 y !2 u !4 !3 i !5 u e r r t w e o !0 i o q q t y !0 !2 w !1 Meter-in type Meter-in type M5 type U10/32 type M5 type U10/32 type 15-9-94 4 Tamper Proof Speed Controller With One-touch Fitting, Elbow Type/Universal Type Construction Elbow type Meter-out type Universal type Meter-out type AS3201F-02 AS3301F-02 i w o !6 !5 r t y !2 !3 !0 q u !

AC Servo Motor Driver (Network card type ）

11 32 11.

Secondary Batteries

Refer to page 66 for details. 33 Heavy Duty Stopper Cylinder 20, 32 50, 63 90-RSH/RS1H Series How to Order Piping direction Positional relationship of lever and port Port 90-RSH20 Flange side Direction of transfer Nil Nil Direction of transfer 90-RSH32 Port Cylinder stroke 15 20 Bore size 20 32 15 mm (90-RSH20) 20 mm (90-RSH32) 20 mm 32 mm Heavy Duty Stopper Cylinder 20, 32 M9BWL 32 20 D

Plug-in/Plug Lead: Single Unit

(Common EXH type) 32 16 3 R 1(P) 40.3 4(A) 2(B) 03: Rc 3/8 04: Rc 1/2 3(R') 5(R1) 3(R2) Circuit diagram Plug-in type Plug lead type 2-6-34 Base Mounted Series VQ5000 Throttle valve spacer 179 (Plug-in type) 133 (Plug lead type) 32 16 VVQ5000-20A-1 (Plug-in type) VVQ5000-20A-5 (Plug lead type) 3 5 1(P) 4(A) 40.3 A throttle valve spacer is mounted on a manifold block to control cylinder speed

LEC-OM07605CN

b LECSS2-T9 c 12 12 1560.5 6 420.3 M5 d a 4.9 /LECS / 1./ YES [ ]NO [ ] 2.

45

Dimensions Applicable fittings fitting d Model A L D KQ2P-04 16 32 6 6 KQ2P-06 18 35 8 8 KQ2P-08 20.5 39 10 10 5/32" 1/4" 5/16" 3/8" 4 4 148 L dimension 0 98 1 110.5 2 123 3 135.5 No. 5 160.5 6 173 7 185.5 8 198 9 210.5 10 223 KQ2P-10 KQ2P-03 KQ2P-07 KQ2P-09 KQ2P-11 12 6 8.5 10 11.5 43 32 35 39 43 22 16 18 20.5 22 L dimension 11 No. 235.5 12 248 13 260.5 14 273 15 285.5 16 298 17 310.5 18

45

Dimensions Applicable fittings fitting d Model A L D KQ2P-04 16 32 6 6 KQ2P-06 18 35 8 8 KQ2P-08 20.5 39 10 10 5/32" 1/4" 5/16" 3/8" 4 4 148 L dimension 0 98 1 110.5 2 123 3 135.5 No. 5 160.5 6 173 7 185.5 8 198 9 210.5 10 223 KQ2P-10 KQ2P-03 KQ2P-07 KQ2P-09 KQ2P-11 12 6 8.5 10 11.5 43 32 35 39 43 22 16 18 20.5 22 L dimension 11 No. 235.5 12 248 13 260.5 14 273 15 285.5 16 298 17 310.5 18

One-touch Fittings

KQ2 Series Model Applicable tubing Connection thread Part number 3.2 M3 x 0.5 KQ2H23-M3G1 3.2 M5 x 0.8 KQ2H23-M51 4 M3 x 0.5 KQ2H04-M3G1 4 M5 x 0.8 KQ2H04-M51 4 M6 x 1.0 KQ2H04-M61 6 M5 x 0.8 KQ2H06-M51 6 M6 x 1.0 KQ2H06-M61 6 R1/8 KQ2H06-01S1 1/8 10-32UNF KQ2H01-321 5/32 10-32UNF KQ2H03-321 3/16 10-32UNF KQ2H05-321 5/32 NPT1/16 KQ2H03-33S1 1/8 M5 x 0.8 KQ2H01-M51 3/16 M5 x 0.8 KQ2H05-M51

Prevents Micro-Bubbles

T) W Model LVC20 LVC30 LVC40 LVC50 LVC60 (mm) Dimensions 64 S T Model LVC3 LVC4 LVC5 90 24 49.5 110.5 29 54.5 147 34.5 60.5 156 Suck back (Single type) Suck back (Unit type) 50 3.5 4.5 37 30 44 37 30 44 4-3.5 20 (Max. 11.5) 51 51 (Max. 11.5) M5 x 0.8 M5 x 0.8 M5 x 0.8 45 12.5 45 30 SMC SMC SMC A B A B 12.5 61 4 4 30 (110) (78) 17-5-12 10 Series LVC Manifolds Manifold Specifications LLC5A

Vacuum System Peripherals:

Series VZ Compact size: 15 mm (VZ100/200/300) 18 mm (VZ400/500) VZ100 ZF M5 x 0.8 Vol. 4 0.11 to 3.0 VZ300/500 ZP M5 x 0.8 , VQZ200/300 Vol. 4 1.7 to 4.5 ZCU 1 8 1 4 3 port solenoid valve Series VX31/32/33 (2) (1) (2) (1) AMJ to 1 8 3 8 0.29 to 1.6 Vol. 17 Misc. 3 port solenoid valve Series VK M5 x 0.8 Vol. 4 1 8 0.47 to 0.85 (1) Compact 2 port solenoid valve Series VX2 (2) (1) to

Speed Controller with Indicator In-line Brass Stainless steel Electroless nickel plated In-line Type “Made to Order” “Made to Order” section has been added. Pages 3, 8 section has been added. ¡Lubricant: Vaseline -X12 The numerical indication of ¡Greas

3.22 04 4 06 6 08 8 10 10 12 12 01 1/8" 03 5/32" 07 1/4" 09 5/16" 11 3/8" 13 1/2" -X214 Stainless steel type (Stainless steel 303) Restrictor (Without check valve) The material can be visually identified by color of the release button.

Tamper Proof Speed Controller with One-touch Fitting Elbow Type/Universal Type Series AS  1F-T

22.1 AS121F-M5-23D 3.2 8.4 5/32" 9.3 12.7 12.7 22.1 17.3 12.3 12.3 AS121F-U10/32-03D AS121F-M5-04D M5 x 0.8 8 9.6 4.7 4 9.3 0.7 27.4 10 31 0.7 27.4 10-32 UNF 8 9.6 4.7 10 31 AS121F-U10/32-05D AS121F-M5-06D 3/16" 11.4 21.3 26.1 16.5 13.5 6 11.6 22.9 18.1 11.7 11.7 AS121F-U10/32-07D AS221F-01-23SD 12 18.3 23.1 13.5 1/4" 3.2 8.4 20 12.7 AS221F-N01-01SD AS221F-01-04SD 1/8" 8.4 4 9.3 27.5 20.4

Air Cylinder Series CG1 ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

18 22 22 30 35 35 40 40 12 14 18 25 30 32 40 50 15.5 19.5 19.5 27 32 32 37 37 2 2 2 2 2 2 3 3 13 17 17 19 27 27 32 41 8 10 12 16 20 20 25 30 14 16.5 20 26 32 38 50 60 Up to 350 Up to 400 Up to 450 Up to 500 Up to 1000 Up to 1000 Up to 1000 Up to 1000 6 8 10 14 18 18 22 26 M5 x 0.8 depth 7.5 5.5 M10 x 1.25 29 M5 x 0.8 Depth 8 5.5 M10 x 1.25 35.5 M6 x 1 depth 12 6 M14 x 1.5 44 M8 x 1.25

VCC

VCC13-02(F) 45.9 Rc1/8 pilot (12) port G1/4, Rc1/4 IN(1) port 16.5 15 2 x 6 (for M5 mounting) G1/4, Rc1/4 OUT(2) port 6 22 22 58 6 25 25 50 15 15 G1/4, Rc1/4 RETURN(3) port M5 leakage detection port 30 19 11 23 Part number for sub-base VCC13-S02 02F [Rc1/4] [G1/4] 38.4 Sub-base material is aluminum + hard anodized containing PTFE. 70 0.5 to 2 650 Valve for Water and Chemical Base Fluids

CG1

87 102 102 122 122 12 12 12 13 14 14 20 20 11 11 11 12 13 13 35 40 40 50 58 58 71 71 11 11 11 12 13 13 18 22 22 30 35 35 40 40 12 14 18 25 30 32 40 50 15.5 19.5 19.5 27 32 32 37 37 2 2 2 2 2 2 3 3 8 10 12 16 20 20 25 30 13 17 13 19 27 27 32 41 14 16.5 20 26 32 38 50 60 6 8 10 14 18 18 22 26 M5 Depth 7.5 M10 X 1.25 M5 Depth 8 M10 X 1.25 M14 X 1.5 M6 Depth 12 M8 Depth 16 M18 X 1.5 M10

SZ3000

Refer to pages 32 through 35 for safety instructions and common precautions.

One-touch Fittings Series KQ2

Nylon Urethane KQ2W23-M5 30 8 31 10 M5 0.8 8 9.6 37 43 10 17.5 15.5 38 42 19 2.8 2.4 41 1 8 KQ2W23-01S KQ2W23-02S 10 14 3.2 1 4 KQ2W04-M5 KQ2W04-01S 8 18 30 37.5 32 38.5 M5 0.8 11 3.0 3.0 8 10.4 1 8 4 16 4.0 4.0 23 14 10 10 1 4 KQ2W04-02S 43.5 42.5 38 11 26 KQ2W06-M5 KQ2W06-01S 30.5 40 33.5 42.5 M5 0.8 8 3 3 8 1 8 10 6 17 12.8 20 1 4 10 KQ2W06-02S 46 46.5 17 14 10.9 10.9 41 3 8 KQ2W06-03S