3 Port Solenoid Valve Series VQ100 1

Dimensions Grommet VQ10-G-M5 (M3) 29.2 6.1 Manual override 4.9 12.4 14.8 E 2-2.7 mounting hole 12 3.7 18.1 (Lead wire length) 300 Locking type manual override 30.7 28 11 A P (5.9) (5.9) 7 ( 4 . 1 ) 5 5 5 4.9 9.7 4.9 3-M5, (M3) (18.1) ( ): M3 Broken line: Locking type manual override 4-12-10 11 3 Port Solenoid Valve Series VQ100 Dimensions L plug connector VQ10-L-M5 (M3) 35.1 Manual override

Compact manifold regulator ARM5 Series

Tightening torque for round head Phillips screws for tie-rods of the regulator manifold. 0.32 0.03N.m M3 thread Square nut (M3) Square nut (M3) Note) M3 threads and square nuts are not included. End block 0.32 0.03 N.m Round head Phillips screw (with SW) (M3) 3. Tightening torque for hexagon socket set screws for DIN rail of the regulator manifold DIN rail 2.

Air Cylinder Series MB

25.5 34 25.5 31.5 28.5 25.5 38.5 27.5 36.5 27.5 71.5 27.5 81.5 27.5 29.5 26 30 26 42 33 31 38.5 31 36 33.5 31 43.5 34.5 41 34 77 87 33.5 31 34.5 31 46.5 39 36 43 36 40.5 38.5 36 48.5 39.5 46 39 83.5 93.5 39 36 40 36 51.5 44 45 52 45 49 46.5 45 55 46.5 52.5 46.5 92.5 103 47.5 45 48.5 45 58 51.5 53.5 59.5 53.5 57 54 53.5 62 55 59.5 55 103 113.5 55.5 53.5 56.5 53.5 65.5 60.5 64.5 71

VZ5000

Round head combination screw Round head combination screw ( ) M3 x 47 With spring washer ( ) M3 x 31 With spring washer Adapter plate assembly DXT201-3-1A Round head combination screw ( ) M3 x 31 With spring washer Gasket Individual EXH spacer Applicable base VV5Z5-20 VV5Z5-21 VV5Z5-21P (EXH port) 2-Rc 1/8 Gasket Gasket Round head combination screw Applicable base VV5Z5-20 VV5Z5-21 ( ) M3

EX120/121/122

Mounting hole 44 EX510-S01B PWR COM EX510-S02C 31 47.6 (24.5) PWR COM 1715 Series EX510 Parts Description You can place an order for the manifold (valve series mentioned below) with the SI unit.

Series VQ4000 Base Mounted Plug-in/Plug Lead Single Unit For details about certified products conforming to international standards, visit us at www.smcworld.com.

A 4(A) port 2(B) port 14 12 1 5 3 4 2 30 45 24.6 A B 2-5.6 Mounting hole Manual override 38 48 B A 14 5 3 1 12 30 45 2-5.6 Mounting hole Manual override 14.5 27 30.5 32 41.5 91.5 129 G1/2 Electrical entry 79 PE X 41.5 32 30.5 X PE 27 R1 R2 P 15.5 14.5 R2 R1 P 15.5 Rc 1/8 External pilot port 19.5 (21) 19.5 (21) Rc 1/8 PE port Rc 1/8 PE port 19.5 (21) 19.5 (21) 31 31 5-Rc 1/4, 3/8 31 G1/2 31

5 Port Solenoid Valve SY Series

Length Speed controller Silencer Tubing bore x Length Speed controller Silencer Tubing bore x Length Speed controller Silencer Tubing bore x Length Speed controller Silencer Tubing bore x Length Speed controller Silencer Tubing bore x Length Speed controller Silencer AS2051F-06 AN120-M5 AS3001F-06 AN110-01 SY3120-C6 SY3140-01 T0604 x 1 m T0806 x 1 m AS3001F-06 T0604 x 1 m T0806 x 1 m AS3001F-08

F

Japanese N ...North American No Of Needle Revolutions 10 Turns / 8 Turns (AS1001F) Applicable Tube Material Nylon, Soft Nylon, Polyurethane A P P L I C A B L E T U B E OD B O D Y S I Z E mm 23 32 04 4 06 6 08 8 10 10 12 12 Inch 01 1/8 03 5/32 05 3/16 07 1/4 09 5/16 11 3/8 13 1/2 100 ...M5 (04, 06) 200 ...1/8 (04, 06) 205 ...1/4 (06, 08) 300 ...3/8 (06, 08, 10, 12) 400 ...1/2 (10, 12) W I

MGG

D-G79, D-K79, D-K79C Cover Auto switch mounting screw M3 x 0.5 x 6l Auto switch Auto switch Auto switch Auto switch mounting screw M4 x 0.7 x 22l Auto switch mounting screw M3 x 0.5 x 14l Auto switch mounting band (with bracket) Cylinder tube Auto switch mounting band (with bracket) Auto switch mounting band (with bracket) 1.

Table of Contents - Tubing

Tightening of M3 and M5 screws 1) M3 1. After tightening by hand, the barb fitting type should be tightened by an additional 1/4 rotation using an appropriate wrench. 2. After tightening by hand, the barb elbow type should be tightened by an additional 1/2 rotation using an appropriate wrench. 2) M5 1.

ZQ

VQ1 1 0 5 L Vacuum pressure switch ZQ1S D AS 31 C Solenoid valve VQ1 ZQ1 2 0 5 L Electrical entry Switch specifications Actuation Connector type 31 32 51 52 1 NPN output and analog output 2 NPN outputs 1 PNP output and analog output 2 PNP outputs 2 Normally open C Lead wire length: 0.6 m Connector type Pilot valve CL Lead wire length: 3 m Nil Standard type (1W) CN Without connector Rated

Compact Vacuum Ejector Series ZQ

VQ1 1 0 5 L Vacuum pressure switch ZQ1S D AS 31 C Solenoid valve VQ1 ZQ1 2 0 5 L Electrical entry Switch specifications Actuation Connector type 31 32 51 52 1 NPN output and analog output 2 NPN outputs 1 PNP output and analog output 2 PNP outputs 2 Normally open C Lead wire length: 0.6 m Connector type Pilot valve CL Lead wire length: 3 m Nil Standard type (1W) CN Without connector Rated

Speed Controller with

Accessory: Cross Recessed Round Head Screw for Mounting (Zinc chromated) Model Size (Nominal x Length) Piece Metric size Inch size TMH-01J TMH-03J TMH-07J TMH-07 TMH-09 TMH-23J TMH-04J TMH-06J TMH-06 TMH-08 TMH-10 TMH-12 M3 x 15 M3 x 20 1 M4 x 25 M4 x 35 TMH-13 Series Holder mounting Select the applicable holder/TMH for each speed controller from the below table.

0.55

VF1000 VF3000 VF5000 Made to Order > > > 3: Main/Pilot valve common Nil exhaust Rated voltage Pilot exhaust port with piping thread (M3) specification (Refer to page 14.)

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL MLGC CNA CB CV/MVG Maintains the cylinder’s CXW original position even if the CXS air supply is interrupted. CXT MX

D C B E1 L1 MM H A A1 R1 U1 d NDH10 NX 40 50, 63 80 100 I-04 I-05 I-08 I-10 NT-04 NT-05 NT-08 NT-10 21 25.4 22 8 69 22 24 55 M14 X 1.5 15.5 20 M14 X 1.5 12 16 +0.070 0 0.1 0.3 26 31.2 27 11 74 27 28 60 M18 X 1.5 15.5 20 M18 X 1.5 12 16 +0.070 0 0.1 0.3 31 37.0 32 13 91 37 36 71 M22 X 1.5 22.5 26 M22 X 1.5 18 28 +0.070 0 0.1 0.3 39 47.3 41 16 37 40 83 M26 X 1.5 24.5 28 M26 X 1.5 105 20 30

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL Locking of door Prevention of dropping at the rising end MLG With front lock With rear lock CNA CNG MNB CNS Maintains the cylinder’s CLS original position even if t

Part No. 40 50, 63 80 100 D H B C A A1 E1 L1 MM R1 U1 d NDH10 NX 40 50, 63 80 100 I-04 I-05 I-08 I-10 NT-04 NT-05 NT-08 NT-10 +0.070 0 0.1 0.3 25.4 21 69 22 24 55 M14 X 1.5 15.5 20 M14 X 1.5 8 22 12 16 +0.070 0 0.1 0.3 74 M18 X 1.5 11 27 31.2 26 27 28 60 M18 X 1.5 15.5 20 12 16 +0.070 0 0.1 0.3 32 37.0 31 91 37 36 71 M22 X 1.5 22.5 26 M22 X 1.5 13 18 28 +0.084 0 0.1 0.3 39 16 41 47.3 105

T

Tightening of M3 and M5 screws 1) M3 1. After tightening by hand, the barb fitting type should be tightened by an additional 1/4 rotation using an appropriate wrench. 2. After tightening by hand, the barb elbow type should be tightened by an additional 1/2 rotation using an appropriate wrench. 2) M5 1.

Air Cylinder NCA1 Series

No Thread IMPERIAL Code : Thread Form 00 : None (No reduction in METRIC Code : Thread Form METRIC Code : Thread Form Code : Thread Form 27 : 3/4-10 60 : M3 x 0.35 88 : M14 x 1.5 piston rod diameter) 28 : 3/4-16 61 : M3 x 0.5 89 : M20 x 1.5 01 : 2-56 29 : 7/8-9 62 : M4 x 0.5 90 : M12 x 1.25 02 : 2-64 30 : 7/8-14 63 : M4 x 0.7 91 : M42 x 1.5 03 : 4-40 31 : 1-8 64 : M5 x 0.5 92 : M24 x 3.0 04

NCA1

No Thread IMPERIAL Code : Thread Form 00 : None (No reduction in METRIC Code : Thread Form METRIC Code : Thread Form Code : Thread Form 27 : 3/4-10 60 : M3 x 0.35 88 : M14 x 1.5 piston rod diameter) 28 : 3/4-16 61 : M3 x 0.5 89 : M20 x 1.5 01 : 2-56 29 : 7/8-9 62 : M4 x 0.5 90 : M12 x 1.25 02 : 2-64 30 : 7/8-14 63 : M4 x 0.7 91 : M42 x 1.5 03 : 4-40 31 : 1-8 64 : M5 x 0.5 92 : M24 x 3.0 04

Vacuum Manifold for fieldbus system

The purity class of compressed air quality based on ISO8573-1:2010 2 : 6 : 3 Solid particle Moisture Oil Max number of particles per m3 Oil concentration (mg/m3) 0.1 < d 0.5 0.5 < d 1.0 1.0 < d 5.0 Pressure dew point Particle size d (m) Class Class Class (oC) at air pressure of 0.7 MPa 1 20,000 400 10 1 -70 1 0.01 2 400,000 6,000 100 2 -40 2 0.1 3 Not specified 90,000 1,000