MXW

For details, refer to page 8-30-31. 8-7-22

10

Av = Q (8) P Av : Flow coefficient [m2] Q : Flow rate [m3/s] P : Pressure difference [Pa] : Fluid density [kg/m3] (3) Formula of flow rate It is described by the practical units. Also, the flow-rate characteristics are shown in Graph (2).

CQ2

Bolt M3 X 40 l 2 pcs.

AC Servo Motor Driver ( ＳＳＣＮＥＴⅢ Type ）

A leakage current breaker having Ig of 15[mA] is used with the NV-SP/SW/CP/CW/HW series. 11 31 11. OPTIONS AND AUXILIARY EQUIPMENT 11.9 EMC filter (recommended) For compliance with the EMC directive of the EN Standard, it is recommended to use the following filter.

Vacuum System Peripherals:

Section code Note) Mounting SUP/EXH block assembly When the location is non-standard, indicate both SUP/EXH block assembly part no., quantity and manifold part number. 13-14-31 31 Date issued: Photo copying this page is recommended.

Compact Cylinder

CDQP2B12-5T -10T CDQP2B16-5T -10T CDQP2B20-5T -10T CDQP2B25-5T -10T CDQP2B32-5T -10T CDQP2B40-5T -10T CDQP2B50-10T -20T CDQP2B12-5S -10S CDQP2B16-5S -10S CDQP2B20-5S -10S CDQP2B25-5S -10S CDQP2B32-5S -10S CDQP2B40-5S -10S CDQP2B50-10S -20S CQ-M3 x 35L x 40L CQ-M3 x 40L x 45L CQ-M5 x 40L x 45L CQ-M5 x 40L x 45L CQ-M5 x 40L x 45L CQ-M5 x 45L x 50L CQ-M6 x 55L x 60L CQ-M3 x 40L x 45L CQ-M3 x

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

Example) Bolt M3 x 35l 2 pcs.

NCQ2/CQ2

CQ-M3 x 35L x 40L CQ-M3 x 40L x 45L CQ-M5 x 40L x 45L CQ-M5 x 40L x 45L CQ-M5 x 40L x 45L CQ-M5 x 45L x 50L CQ-M6 x 55L x 60L Cylinder model Mounting bolt part no.

E-P HYREG

12 4 ITVX A M5 M5 (3) (3) 1 01 18 (3) (3) 02 14 PVQ 3 02 14 03 38 04 12 VY1 VY1 VBA VBAT Body ported 5 04 12 VY1B0-X39 (5) 06 34 10 1 AP100 7 10 1 1 14 12 1 14 9 14 1 12 2 20 2 Note 3) Only bracket or foot may be mounted.

VQ20/30

M3 x 45 M3 x 40 M3 x 35 M4 x 45 Bracket assembly AXT835-13A AXT835-13A-2 AXT835-13A-3 AXT837-13A Manifold Option DIN rail AXT100-DRL 12.5 (Pitch) 5.25 7.5 Suffix the number from DIN rail dimensions table below. Refer to the dimension drawing for each manifold for L dimension. 25 35 5.5 1.25 Each manifold can be mounted on a DIN rail.

Air Slide Table Series MXW

31 31 31 B 104 124 149 174 199 MXW12 W 31 11 11 11 11 V 124 144 169 194 219 W V A 34.5 34.5 59.5 34.5 34.5 34.5 B 235.5 260.5 135.5 160.5 185.5 210.5 MXW16 W 14.5 14.5 39.5 14.5 14.5 14.5 V 225.5 280.5 155.5 180.5 205.5 230.5 A 43.5 43.5 43.5 43.5 68.5 43.5 43.5 B 293.5 318.5 243.5 268.5 168.5 193.5 218.5 MXW20 W 23.5 23.5 23.5 23.5 48.5 23.5 23.5 V 313.5 338.5 263.5 288.5 188.5 213.5 238.5

0.4

Red Power supply terminal block (Terminal screw M3) Indicator light VV5Q11 Terminal no. SI unit made by OMRON Corp. Mountable for G71-OD16 (Order separately) Flat Ribbon Cable Connector Assembly D side D side Stations Note Assembly part no.

5 Port Solenoid Valve SY Series

Speed controller Silencer SGP15A x 1 m AS420-04 AN400-04 Features 1 Valve Variations Note 1) Electrical entry Actuation Voltage Light/surge voltage suppressor 2 position 3 position DC AC 100 V 50/60 Hz 110 V 50/60 Hz 200 V 50/60 Hz 220 V 50/60 Hz M plug connector Sonic conductance C [dm3/(sbar)] L plug connector 24 V Series M8 Connector Pressure center 12 V DIN terminal Closed center Exhaust

Applicable Auto Switch Model

(Tightening torque of M3 screw should be 0.5 to 0.7Nm.) tModification of the detecting position should be made in the condition of e.

Table of Contents

M3 screw For details on specifications and handling, refer to the separate technical instruction manual.

Electric Actuators

LC6D-507AD-Q (Refer to page 306 for details.) 0.05mm Holding plate: MB1 (1 pc.), Phillips countersunk head screw: M3 x 6l (1 pc.) Phillips binding head screw: M3 x 4l (2 pcs.), Toothed lock washer M3 (2 pcs.) Binding band: T18S (1 pc.)

ARM10/11

Dimensions 28 IN OUT 58(Max.60) 37 20 22 15 5 34 14 SMC 31 IN OUT 62 O-ring size 4 x 1.5W Holding screw M3 x 0.5 x 20 SMC P K U C S O H L 9 14-4-46 29 Compact Manifold Regulator/Series ARM10/11 Specific Product Precautions 1 Be sure to read before handling. Design & Selection Piping Warning Caution 1. Confirm the specifications.

ARM10/11

Dimensions 28 IN OUT 58(Max.60) 37 20 22 15 5 34 14 SMC 31 IN OUT 62 O-ring size 4 x 1.5W Holding screw M3 x 0.5 x 20 SMC P K U C S O H L 9 14-4-46 29 Compact Manifold Regulator/Series ARM10/11 Specific Product Precautions 1 Be sure to read before handling. Design & Selection Piping Warning Caution 1. Confirm the specifications.

/

(mm) Port size Av x 10-6m2 Cv converted 10 10 15 10 15 20 25 35 40 50 1/4 (8A) 1.9 2.4 4.5 2.4 5.5 9.5 13 23 31 49 46 58 110 58 130 230 310 550 740 1200 VXED2130-02 VXED2130-03 VXED2140-03 VXED2130-04 VXED2140-04 VXED2150-06 VXED2260-10 VXED2270-32 VXED2380-40 VXED2390-50 420 0.5 3/8 (10A) 670 500 670 1150 1650 5400 6800 8400 1.0 0.5 Thread (Nominal size) 0.02 1/2 (15A) 1.5 3/4 (20A) 1 (25A

Table of Contents

G 28 58 5H9 +0.030 0 depth 5 (5.5) 10 D-M4 x 0.7 (for work piece mounting) 10.5 12 2-M3 thread depth 5 (3.5) 6 4-8 50 18.5 10 20 17.5 22 25 35 (5) 62 72 12 (15) (6) 8 1 0.2 31 5H9 +0.030 0 depth 5 Photo micro sensor wire (300mm) 10 13 1.5 [5.5] 6 25 (4) 30.5 10 (39.5) E Motor wire (300mm) Stroke + 135 The dimension inside [ ] shows the location at which the home position switch operates