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31 22 4.5 2 x 5.4 22 4.5 32 20 Ionizer 27 2 100 Hexagon socket head cap screw M4 x 6 (Accessory) 6 Ionizer full length (L) Angle adjustable (90) (31) 12 2 Angle adjustment range is 45.

. * The load ratio is obtained by the following formula: ((Load mass x 9.8)/Theoretical output) x 100% VEX VEX Conditions System Solenoid valve Speed controller Silencer Tubing diameter x Length A VEX31 22-02 AS4000-02 AN20-02 10 x 1 m B 12 x 1 m C VEX33 42-03 04 AS420-03 AN30-03 12 x 1 m D AS420-04 AN40-04 SGP15A x 1 m 1723 3 Port 3 Position Valve Body Ported VEX3 Series How to Order Air

A Round head combination screw M3 2 1 + "+" mark "" mark A Round head combination screw M3 Conduit terminal View A-A (Internal connection diagram) There is polarity only when equipped with light. Note) Tighten the terminal cover mounting screws and terminal screws with a torque of 0.5N-m.

(mm) Electrical entry P Port size B C D E F H K L M N A Model Grommet: G Conduit: C Conduit terminal: T Q R Q R Q R S U 13.5 28 64 31 6.5 12.5 28 14 12.8 M4 4.5 22 59 44 50 99 50 66 83 1/8 VCS21 18 36 67.5 31 8.5 12.5 28 18 12.8 M4 6 22 62 44 53 99 53 66 86 1/4 22 40 81.5 36.5 11 15 32 20 19 M5 8 24 76 46 66.5 101 66.5 68 99 1/4, 3/8 VCS31 30 50 86 36.5 13.5 15 32 25 23 M5 8 24 80 46 71 101

Note 2) AS1000, AS2000 are not applicable. 8 3 2 1 Bore size 2 1 Bore size Applicable series M3 M5 01 02 03 04 M3 x 0.5 M5 x 0.8 Rc 1/8 Rc 1/4 Rc 3/8 Rc 1/2 AS1000 AS1000 AS2000 AS2000/3000/4000/5000 AS3000/4000/5000 AS4000/5000 Thread type Nil Metric thread (M3, M5) Rc NPT G N F Caution Be sure to read before handling.

31 Series MGG Dimensions Front mounting flange style: MGGF 20 to 50 M N HR HN (MAX.)

RL a 2 0.54~0.66Nm) 1 Ass'y P.27 1 2 L POM,POM,PET,SUS 3 R POM,POM,PET,SUS 4 () (PET) P.27 2 5 Assy PBT P.27 3 6 Assy () P.27 7 7 NBR P.27 4 8 NBR P.27 5 9 Ass'y P.27 6 26 - No.ZQ-OM01401-B 7.4 1 Ass'y2 ) ZQ1-SR1-04-A (1) 01 1 (1) 02 2 08 8 2 () (2 ) ZQ1-SE2-A 3 Assy (2 ) ZQ1-SC1-A 4 (10 ) ZQ-3-005-10AS 5 (10 ) ZQ-3-009-10AS 6 Assy (4 ) ZQ1-WS3-A (1) 3 M3 () (1) 4 M4 ()

IDFB4E to 15E AT 1.6 [40] IDF IDU Air Flow Capacity 2.36 [60] Model IDFB3E IDFB4E IDFB6E IDFB8E IDFB11E IDFA D Circuit breaker 5 SCFM (8 m3/h) 13 SCFM (23 m3/h) 17 SCFM (29 m3/h) 19 SCFM (32 m3/h) 23 SCFM (39 m3/h) Air flow capacity (ANR) IDFB IDFB A Conditions: Inlet air pressure: 100 psi (0.7 MPa), Inlet air temperature: 100F (37.8C), Outlet air temperature: 50F (10C), Ambient temperature

24 55 24 31 64 72 Y-G10 22 32 100 79 Knuckle pin and snap ring are included.

24 55 24 31 64 72 22 32 79 Knuckle pin and snap ring are included.

52 50 56 31 03 65 Response message (Slave to Master) STX Slave Address ACK Command Reading data ETX BCC 02 30 31 06 50 56 31 30 30 31 38 37 03 0F 5.5 Message configuration HRS090 Series 5-14 HRX-OM-T004 Chapter 5 Simple communication protocol function 5.6 BCC EXOR algorithm of all characters from STX to ETX is read with the check code for error detection.

52 50 56 31 03 65 Response message (Slave to Master) STX Slave Address ACK Command Reading data ETX BCC 02 30 31 06 50 56 31 30 30 31 38 37 03 0F 5.5 Message configuration HRSH Series 5-14 HRX-OM-R028 Chapter 5 Simple communication protocol function 5.6 BCC EXOR algorithm of all characters from STX to ETX is read with the check code for error detection.

NT-04 NT-05 NT-08 NT-10 21 25.4 22 8 M14 x 1.5 CX 26 31.2 27 11 M18 x 1.5 31 37.0 32 13 M22 x 1.5 CY 39 47.3 41 16 M26 x 1.5 MQQ M Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Allowable Kinetic Energy RHC Operate the stroke reading cylinder with brake within the

2 (16AWG) 812mm3 () 1.25mm 0.1m 30m (11 ) M3 6.5mm () M3 0.631Nm () 2-2 IDF Series 2 4 IDX-OM-W011 2 2 3 ()2 2 2-2-3 4 2-3 IDF Series 2 5 IDX-DM-W011 3 3 1 IDF4E15E1 ` 3 2 ON IDF1E3E IDF4E15E1 5 0.15MPa (IDF1E ) 3-1 IDF Series 3 1 IDX-DM-W011 3 3 3 3 4 3 3 5 3 5 OFF 3 6 24 3-3 IDF Series 3 2 IDX-OM-W011 4 4 4-1 5 310 4-2 4-2-1 () 4-2-2 1.

x 0.5 (port size) 2-M3 x 0.5 (port size for axial piping type MTS8-P) 9 2-M3 x 0.5 Effective length 5 0.2 5 +0.035 +0.025 4 16 0.2 22 12 M2.5 x 0.45 12 41 + Stroke 53 + Stroke 9 15 0.2 9 4-M3 x 0.5, effective length 5 10 15 0.2 Rod end male threads Width across flats 3.5 +0.035 +0.025 4 M3 x 0.5 3.9 M3 x 0.5 6.4 7 8 4 24 5.5 2.4 Stud bolt part number: MT-S8 Rod end nut part number: NTJ-006A

Qi '5 0 ~ 5l :r 0. 31<.-t-~-+---="I--;;::'--t-t_1 Q. 0.15 f-t.,---+t--t-+---1--+-t--t-l 8Tightening torque of mounting screw (M3) for gauge is 3-Skgf . cm.

Made to Order Specifications (For details, refer to page 4-6-46.) 4-6-30 31 3 Port Solenoid Valve Rubber Seal, Body Ported/Base Mounted Series VZ500 External Pilot VZ500R JIS Symbol VZ51R Pilot valve pressure is supplied separately from the main valve pressure through the use of a separate supply port.

AN400-04 Conditions (With SGP (Stainless steel gas piping)) Direct piping Series CS1 Series MB, CA SGP10A x 1 m AS420-03 AN400-04 VQC4000 Tube x Length Speed controller Silencer 2-2-10 10 For details about certified products conforming to international standards, visit us at www.smcworld.com.

L 285.5 21 273 310.5 23 298 22 335.5 25 323 24 360.5 27 348 26 385.5 29 373 28 410.5 31 398 30 435.5 33 423 32 460.5 35 448 34 485.5 37 473 36 39 498 38 40 510.5 Fitting blank plug KQP-23-X19 KQP-04-X19 KQP-06-X19 KQP-08-X19 KQP-10-X19 L A Dimensions (mm) Applicable fitting d Part number A L D D KQP-23-X19 KQP-04-X19 KQP-06-X19 KQP-08-X19 KQP-10-X19 3.2 4 6 8 10 16 16 18 20.5 22 31.5 32

Applicable cylinder bore size (mm) 32, 40 50, 63 Applicable cylinder bore size (mm) Applicable snap ring 32, 40 50, 63 NT-04 NT-05 Part No.