5 Port Air Operated Valve

02 03 3 4 5 33 28 1/4, 3/8 [4 (A), 2 (B) port] 13 22 1/8 (Pilot port: Upward) 46 81 1 36 20 4A 2B 26.4 35 42 B A 3EB 1P 5EA 2 x 4.3 (For mounting) 8.5 97 1/8 [Pilot port: Lateral (-P)] 64.5 Breathing hole 27 22 13 1/4, 3/8 [1 (P), 5 (EA), 3 (EB) port] 25 25 43 81 1510 5 Port Air Operated Valve Base Mounted/Single Unit VFA3000/5000 Series Dimensions: VFA5000 Series/Base Mounted 2 position

Precision Regulator

Supply pressure: 0.3 to 1.0 MPa Set pressure: 0.2 MPa Flow rate: 0 L/min (ANR) IR3000-03 IR3000-03 IR3000-03 Supply pressure: 0.5 MPa Back pressure: 0.5 MPa 0.204 0.5 0.2 Set pressure P2 (MPa) Set pressure (MPa) Set pressure (MPa) Set pressure (MPa) 0.202 0.4 Set point 0.15 0.200 0.3 0.1 0.198 0.2 0.196 0.05 0.1 0.194 0 0.2 0.1 0.4 0.3 0.6 0.5 0.8 0.7 0.9 1.0 0 500 1000 1500 2000 2500 3000

VZ3000

-43 (5(R1), 3(R2) port) Before using, refer to page 3-3-8.

New New 2-Color Display Digital Flow Switch ® (200 L type only) Applicable fluid Air, N2 Expanded flow range! Wide range of flow measurement with one product (100: 1) (100: 1) Setting resolution: 1 L/min Flow ratio Flow ratio is 10: 1 for current PF2A

If a bend (R) is used, limit it to R3 or less. 12 Series PFMB7 Dimensions PFMB7201 With bracket/Without flow adjustment valve With bracket/With flow adjustment valve 48 76 36 24 28 28 4 x 3.4 34 26 18 34 26 18 4 x 3.4 36 51.5 (Max. 58.5) 43 43 48 48 18 18 1.2 1.2 DIN rail mounting 18 x n pcs. + 34.4 18 48 43 52.4 1 1 IN 1 IN IN DIN rail is prepared by customer.

Manifold Specifications

-43 (5(R1), 3(R2) port) Before using, refer to page 3-3-8.

Digital Flow Switches

-3502-2740 Fax: 03-3508-2480 URL http://www.smcworld.com 2003 SMC CORPORATION All Rights Reserved 1st printing June, 2003 D-YGA P-120 (YG) This catalog is printed on recycled paper with concern for the global environment.

Digital Flow Switches

RUSSIA SMC Pneumatik LLC. 1-16-4 Shimbashi, Minato-ku, Tokyo 105-8659 JAPAN Tel: 03-3502-2740 Fax: 03-3508-2480 URL http://www.smcworld.com 2004 SMC Corporation All Rights Reserved Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 1st printing IW printing IW 120DN Printed in Japan D-DN This catalog is printed on recycled paper with

3 Port Air Operated Valve

04 A B 3/8, 1/2 2(A) port 51.5 2 x 5.2 (For mounting) 1/8 12(PA) port NC 33 12 4.5 2A 31 41 107.1 (2) (9) 115.1 2 x 5.2 (For mounting) (1/8) 12(PA) port (Mounting groove for M6 thread) (6.4) 12 64 9.4 38.5 63 56.5 (63) 31.5 51.5 31 (60) (74) (43) 3/8, 1/2 1(P), 3(R) port (Distance between ports) 3R 1P NO 40 3 9 M5 x 0.8 (Breathing hole) 42 30.5 100.8 For vacuum/VPA742V-1(-F) 03 04 A B 3/

PF2A/PF2W

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Port size Applicable model Flow rate (l/min) Output specifications ZSP Symbol Output specifications Applicable model Symbol 100 200 500 50 10 PF2A710, PF2A750 PF2A711, PF2A721, PF2A751 01 02 03 04 1/8 1/4 3/8 1/2 27 NPN open collector 2 outputs PF2A710

Digital Flow Switches, Series PF2A, Series PF2W

to 200l/min 50 to 500l/min 10 50 11 21 51 Output specification Nil 1 2 Output for display unit Thread type Output for display unit + analog output (1 to 5V) Output for display unit + analog output (4 to 20mA) Nil N F Rc NPT G Wiring specification Nil N 3m lead wire with connector Without lead wire Port size Applicable models Flow rate (l/min) Port size Symbol 100 200 500 50 10 01 02 03

Modular Type Regulator Series AR

AR 30 BG F N X425 03 Regulator Regulator For high/low temperature For high pressure 25 30 40 50 60 Body size Body size X430 X440 Low temperature 20 25 30 40 50 60 High temperature Thread type Thread type Rc NPT G Nil N F Rc NPT G Nil N F Port size Port size Body size Port size Body size Symbol Port size 25 30 40 50 60 Symbol 20 25 30 40 50 60 02 03 04 06 10 1/4 01 02 03 04 06 10 1/8 3/8

45

Dimensions Applicable fittings fitting d Model A L D KQ2P-04 16 32 6 6 KQ2P-06 18 35 8 8 KQ2P-08 20.5 39 10 10 5/32" 1/4" 5/16" 3/8" 4 4 148 L dimension 0 98 1 110.5 2 123 3 135.5 No. 5 160.5 6 173 7 185.5 8 198 9 210.5 10 223 KQ2P-10 KQ2P-03 KQ2P-07 KQ2P-09 KQ2P-11 12 6 8.5 10 11.5 43 32 35 39 43 22 16 18 20.5 22 L dimension 11 No. 235.5 12 248 13 260.5 14 273 15 285.5 16 298 17 310.5 18

45

Dimensions Applicable fittings fitting d Model A L D KQ2P-04 16 32 6 6 KQ2P-06 18 35 8 8 KQ2P-08 20.5 39 10 10 5/32" 1/4" 5/16" 3/8" 4 4 148 L dimension 0 98 1 110.5 2 123 3 135.5 No. 5 160.5 6 173 7 185.5 8 198 9 210.5 10 223 KQ2P-10 KQ2P-03 KQ2P-07 KQ2P-09 KQ2P-11 12 6 8.5 10 11.5 43 32 35 39 43 22 16 18 20.5 22 L dimension 11 No. 235.5 12 248 13 260.5 14 273 15 285.5 16 298 17 310.5 18

OMU0023

Step Request data Response data Operation details 1 01 03 0600 0004 01 03 08 Acquires the alarm history. 2 Alarm history confirmation Confirms the acquired alarm history. (9) Alarm history clearance example E.g) The Alarm History saved in the Card Motor controller (controller ID1) is cleared.

REGULATOR

SPECIFICATIONS Model AR20K-B AR25K-B AR30K-B AR40K-B AR40K-06-B AR50K-B AR60K-B Port size 1/81/4 1/43/8 1/43/8 1/43/81/2 3/4 3/41 1 1/8 Gauge port size Note1) Air Fluid Ambient and fluid -5 60 (Should be no freezing) temperature 1.5 MPa Proof pressure 1.0 MPa Max. operating pressure 0.05 0.85 MPa Set pressure range Note2) Relieving type Construction Mass kg 0.16 0.21 0.29 0.44 0.47 1.17

One-touch Fittings Series KQ2

D1 D2 L1 L2 M A 5 32 3 16 3 16 1 4 1 4 5 16 5 16 3 8 3 8 1 2 1 2 KQ2L01-03 KQ2L01-05 KQ2L03-05 KQ2L03-07 KQ2L05-07 KQ2L05-09 KQ2L07-09 KQ2L07-11 KQ2L09-11 KQ2L09-13 KQ2L11-13 9.6 7 10 10 8 3 7 6 3 8 11 12 17 17 30 25 17 17.5 25 13.5 2.2 2.5 3 2.5 1 8 15.5 33 33.5 26 34.5 35.5 36.5 37.5 40.5 41.5 43 21.5 22.5 14.5 23.5 23 24.5 23.5 5 32 16 18 10.4 3 16 3.5 16.5 19.5 10 11.4 1 4 4.6 17 20.5

Manifold Type: 43 (Individual Wiring), Valve Stations: 8 Stations, P, R Port Location: B (Both Sides 2~20 Stations), SUP/EXH Block Specification: Internal Pilot, Port Size: 03 (3/8), Thread: Rc, Manifold Mount Style: D (DIN Rail Mounting)

Manifold Type: 43 (Individual Wiring), Valve Stations: 6 Stations, P, R Port Location: U (U Side 2~10 Stations), SUP/EXH Block Specification: Internal Pilot, Port Size: 03 (3/8), Thread: Rc, Manifold Mount Style: D (DIN Rail Mounting)

Manifold Type: Individual Wiring, Valve Stations: 8 Stations, P, R Port Location: Both Sides 2~20 Stations, SUP/EXH Block Specification: Internal Pilot, Port Size: 3/8, Thread: Rc, Manifold Mount Style: DIN Rail Mounting

Manifold Type: Individual Wiring, Valve Stations: 6 Stations, P, R Port Location: U Side 2~10 Stations, SUP/EXH Block Specification: Internal Pilot, Port Size: 3/8, Thread: Rc, Manifold Mount Style: DIN Rail Mounting