VQ4000

) VQD 1 4/2 (P A/B) 2 position rubber seal 1 2 VQ4 51 4/2 5/3 (A/B EA/EB) Note) Port size: Rc 3/8 Manifold Option Refer to pages 2-5-34 to 2-5-38 for detail dimensions of each option.

Table of Contents

Note 2) Fixed unit: kPa Built-in silencer Port exhaust Nil P Vacuum pressure sensor Digital vacuum pressure switch specifications Nil GN G E EB EE None Adaptor Rc 1/8 With vacuum pressure gauge With digital vacuum pressure switch ZSE4 With digital vacuum pressure switch ZSE4B With digital vacuum pressure switch ZSE4E For E (ZSE4) EB (ZSE4B) 25 26 65 Lead wire length 0.6 (3.0) m Lead wire

Multistage Ejector Series ZL112/212 1

Note 2) Fixed unit: kPa Built-in silencer Port exhaust Nil P Vacuum pressure sensor Digital vacuum pressure switch specifications Nil GN G E EB EE None Adaptor Rc 1/8 With vacuum pressure gauge With digital vacuum pressure switch ZSE4 With digital vacuum pressure switch ZSE4B With digital vacuum pressure switch ZSE4E For E (ZSE4) EB (ZSE4B) 25 26 65 Lead wire length 0.6 (3.0) m Lead wire

Mechanically Jointed Rodless Cylinder MY1H Series Linear Guide Type: ø25, ø32, ø40  Piping can be connected from 4 directions on the head cover.  Allows on-site piping to suit the MY1B installation MY1H MY1H conditions. MY1B MY1M MY1C MY

bolt MY1H LZ Stroke Bore size (Shock absorber stroke) T S E EA EB W h TT Stroke adjustment unit Shock absorber FC FA EY EC (mm) E EA EB EC EY h S T TT FA FC Shock absorber model Applicable cylinder W F MY1H25 18 9 40 7.5 53.5 16 21 3.5 46.7 7 53 RB1007 5 (Max.16.5) MY1H32 25 14 45.6 9.5 67.5 23 20 4.5 67.3 12 64 RB1412 8 (Max.20) MY1H40 31 19 55 11 82 24.5 26 4.5 67.3 12 9 (Max.25) 75

        Series VKF300

( , 0( , = ) % $ B /EB3A /EB '!' B /EBA /EB '' B /EBA /EB '' B /EB3A /EB '' i D 3 B /EB A /EB '4' % *% o ?%) , < Series VKF300 $ "# $ %& ! %& ! ! "# $ %& ' ( &) $%% / / 01 * & * * & ) # ! %& !+ & ,,& &-% + &) ,.. ! "# ! * & ) $%% / / 01 * & * ' ( &) !+ & ,,& &-% + &) ,.. ! " # $ # ! %& Series VKF300 * ( / 73 * "" ()*+ "" ,&30 ! // 44 44 $ %& ' !"

VS7-6

Note) Symbol EA and EB correspond to R1 and R2 respectively (R1=EA, R2=EB) 1.19-18 VS7-8 Interface Speed Control/Dimensions AXT510-32A Interface Speed Control SV SY SYJ Symbol SX VK Interface Regulator/Dimensions VZ P port regulation/ARB350-00-P Interface Regulator VF VFR VP7 VQC SQ VQ VQ4 Symbol VQ5 A port regulation/ARB350-00-A B port regulation/ARB350-00-B VQZ VQD P port regulation VFS

Combination Cylinder

(mm) Stroke range (mm) A Bore (mm) 40 50 63 80 100 125 140 160 AL B B1 BX BY BP C D EA EB F GA GB GC H1 J K KA LH FA LD With rod boot 20 to 500 20 to 600 20 to 600 20 to 750 20 to 750 30 to1400 30 to 1400 30 to 1400 Without rod boot to 500 to 600 to 600 to 750 to 750 to 1400 to 1400 to 1400 1 4 1 4 1 4 1 4 1 4 1 2 1 2 3 4 / / / / / / / / 69 78 84 92 100 44 52 64 78 92 115 128 144 16 20 20

Fieldbus System

Positive common) Source/PNP (Negative common) Sink/NPN (Positive common) Source/PNP (Negative common) Sink/NPN (Positive common) Source/PNP (Negative common) Sink/NPN (Positive common) Source/PNP (Negative common) Sink/NPN (Positive common) Source/PNP (Negative common) Sink/NPN (Positive common) QAN QA QBN QB NAN NA NBN NB NCN NC NDN ND VAN VA VBN VB DAN DA DBN DB FAN FA FBN FB EAN EA EBN EB

5 Port Solenoid Valve

When the built-in silencer type is used, keep the exhaust port from coming in direct contact with water or other liquids. w SI unit specifications 16 02 16 stations 2 stations Number of outputs Symbol Communication connector Protocol Specified layout Note 2) (Available up to 32 solenoids) 0 QA QB NA NB NC ND VA VB DA DB FA FB EA EB Without SI unit 24 24 stations 32 16 32 16 32 16 32 16

Electric Actuator

Support Block Model LEYG S 016 Size 016 025 032 For size 16 For size 25 For size 32 Support block Support block Body mounting bolts EB X 2 x OA thread effective depth OB 2 x G through ST (0.5) GA WC + Stroke Caution Do not install the body using only a support block. The support block should be used only for support.

Mechanically Jointed Rodless Cylinders

Eb Zb1 JJ H Eb Eb P A2 A1 L (Counterbore depth) L (Counterbore depth) 2 x 2 x LD Detail drawing of Zb2 (Adjustable range) Detail drawing of Zb1 (Adjustable range) 2 x 2 x LD MY3 Floating Bracket Mounting Dimensions (mm) Applicable cylinder Model Common JJ L P LD H G 1 1 1 Applicable cylinder Model Common JJ L P LD H G Adjustment range Adjustment range Ea Eb Ea Eb MY316 MY320 MY325 MY332

0.4

When the built-in silencer type is used, keep the exhaust port from coming in direct contact with water or other liquids. w SI unit specifications 16 02 16 stations 2 stations Number of outputs Symbol Communication connector Protocol Specified layout Note 2) (Available up to 32 solenoids) 0 QA QB NA NB NC ND VA VB DA DB FA FB EA EB Without SI unit 24 24 stations 32 16 32 16 32 16 32 16

Regulator

EB EB EB PNP open collector 1 output EC EC EC EC NPN open collector 1 output + Analog voltage output ED ED ED ED NPN open collector 1 output + Analog current output + Flow direction : Left to right c Flow direction Nil Nil Nil Nil R R R R Flow direction : Right to left + d Knob Nil Nil Nil Nil Upward V V V V Downward + 6 Name plate and pressure gauge in imperial unit : MPa Nil Nil Nil Nil

Air Cylinder NCA1 Series

t below) B6 High Temperature * C3 Por t and Cushion Location (see Page 23) C6 Stainless Steel Piston Rod (Std. on XTSS series) C8 Adjustable Stroke Extended Piston Rod * C9 Adjustable Stroke Return Piston Rod * C10 Dual Operation/Double Piston Rod * C11 Dual Operation/Single Piston Rod * C12 Tandem Cylinder* * (Contact P/A Customer Service) M O U N T I N G / S I N G L E R O D O N LY EA EB

Multistage Ejector (N)ZL Series

1MPa = 145 psi 1kPa = 0.145 psi Pmax Vacuum pressure P1 Qmax Q1 Suction flow rate 3 Series (N)ZL Multistage Ejector How to Order N ZL1 12 K1 12 25 5 M Z E With valve Without valve N ZL1 Fitting Size Lead wire length Air Supply Port Vacuum Port 6 12 1/4" 1/2" Nil N 0.5m 2.9m Nil L 1.2mm 12 Nozzle diameter Digital vacuum pressure switch specifications Exhaust specifications For E (ZSE4) EB

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

Support Block Model LEYG S 025 Size 025 For size 25 032 For size 32 Support block Support block Body mounting screw EB X 2 x OA thread depth OB 2 x G through ST (0.5) GA WC + Stroke Caution Do not install the body using only a support block. The support block should be used only for support.

Electric Actuator High Rigidity and High Precision Slider Type Circular arc grooves allow for high rigidity and high precision. Moment resistance*1 *2 61% Improved by up to Table displacement*1 50% Reduced by up to With internal battery-less absolute e

30 50 Lead 8: LEKFS32(L/R)EB Lead 8: LEKFS32(L/R)EB 40 Work load: W [kg] Work load: W [kg] 20 30 Lead 16: LEKFS32(L/R)EA Lead 16: LEKFS32(L/R)EA 20 10 Lead 24: LEKFS32(L/R)EH Lead 24: LEKFS32(L/R)EH 10 0 0 0 200 400 600 800 1000 1200 0 100 200 300 400 500 600 Speed: V [mm/s] Speed: V [mm/s] Vertical LEKFS40(L/R)/Ball Screw Drive Horizontal 70 60 30 Lead 10: LEKFS40(L/R)EB Lead 10: LEKFS40

15

Dimensions: In-line Motor LEYG25, 32 Rod operating range Note) 4 x OA through 2 x FA thread depth FB FD depth FE FC Section XX1 (Stroke + 4 mm) Motor Motor flange EV S Q U H GA LEF J Y (EB) FG EH T EB X LEJ C EC ED 0.5 XA H9 depth XA LEL B + Stroke FF LEM L + Stroke Section XX1 4 x OA thread depth OB Bottom hole G through XA H9 depth XA DB LEY XAH9 2 x NA thread depth NC LES DA X C EC ED

Slider Type/Ball Bushing Bearing

C Q + Stroke Shock absorber Shock absorber RB0805 Side plate Section IF (CY1L6) (mm) A B D d C EA FA EB Model G HP J JK FB GP H HB HG HI HO HS HT HA CY1L6 CY1L10 7.6 8 3 6.5 7 M4 x 0.7 6 26 6.5 36 27 10 11 9 25 14 16 5 12 10 4 8 8.5 M5 x 0.8 6 3 12 7.5 33 9.5 5 50 34 17.5 14.5 13.5 33 21.5 18 6 PA (N) (NA) (NB) RW Q Z W tb ta T PB MM NN M L QW LD Model CY1L6 CY1L10 TT PW 12 54 68 56 10

NCA1

t below) B6 High Temperature * C3 Por t and Cushion Location (see Page 23) C6 Stainless Steel Piston Rod (Std. on XTSS series) C8 Adjustable Stroke Extended Piston Rod * C9 Adjustable Stroke Return Piston Rod * C10 Dual Operation/Double Piston Rod * C11 Dual Operation/Single Piston Rod * C12 Tandem Cylinder* * (Contact SMC Customer Service) M O U N T I N G / S I N G L E R O D O N LY EA EB