MXQ

x 0.8 MXQ-CS6(L)-X11 15 25.5 MX MXQ-CS8(L) 5 18 B MXQ8(L) 7 22 7.5 8 16.6 14.6 9 3 8 9.8 MXQ-CS8(L)-X11 M3 x 8 M3 x 10 M6 x 1 15 28 MTS F MXQ-CS8(L)-X12 25 38 G E MXQ-CS12(L) 5 22 MY C MXQ12(L) M8 x 1 M4 x 12 M4 x 12 MXQ-CS12(L)-X11 9.5 29 11 12 20.5 18.5 14 4 11 13 15 32 MXQ-CS12(L)-X12 25 42 CY Table mounting section MXQ-CS16(L) 5 23 MXQ16(L) Q M10 x 1 MXQ-CS16(L)-X11 M5 x 16 M5 x 16 11

MGP

29 11 7.5 8 8.5 9 M4 X 0.7 10 12 13 15 M4 X 0.7 4.3 4.3 5.6 5.6 M5 X 0.8 6 8 10 12 58 64 83 93 8 8 9.5 9.5 13 M4 M4 M5 M5 4.5 4.5 5.5 5.5 8 8 8 10 10 13 15 18 21 18 13 15 18 21 5 5 6 6 18 22 24 30 12 16 20 25 26 30 36 42 10, 20, 30, 40, 50, 75, 100 125, 150, 175, 200, 250 20, 30, 40, 50, 75, 100 125, 150, 175, 200 250, 300, 350, 400 46 33 11 M5 X 0.8 M5 X 0.8 M5 X 0.8 15 10 19 MGC 53 37

CRB2/CRBU2/CRB1

9 14 10 15.5 25 10 25 13 25 14 0.004 0.012 0 0.043 5 12 34 20 9 18 4 1.5 6 10 0.5 29 M3 M4 (13.5) 4.5 (11) M4 (7.5) 0.004 0.012 0 0.043 6 14 42 29 10 20 4.5 1.5 7 10 0.5 36 M5 M5 (18) M5 (10) 5.5 (16.5) 0.005 0.014 0 0.043 8 16 50 40 13 22 5 2 8 12 1.0 43 M5 11 Series CRB2 Dimensions: 40 Single vane/Double vane type M5 x 0.8 with depth 10 CRB2BW40-S, D 3-M5 x

MB

11 11 NCA D-A5/A6 D-A59W D-A3/A44 13 13 13 14 14 15 D9 9 10 11 11 11 10 D-Y59/Y69 D-Y7P/Y7V D-Y7W/Y7WV 7 5.5 5.5 7 7.5 6.5 5.5 -X D-Y7BAL 6 3.5 3.5 3.5 4 4.5 5 20D-F5/J5 D-F5W/J59W D-F5BAL/F5NTL D-F59F 3.5 4 4 4.5 4.5 4.5 5 Data D-G39/K39 D-P5DWL 9 4 9 4 9 4 10 4.5 10 4 11 11 4.5 4.5 These values are given as guidelines including the hysteresis and are not guaranteed.

KJ

38.5 42 42 44 44 16 17 16.5 17 17 18.5 21 21 22 22 3 5 4 4 5 6 11 11 16 17 15.5 2.5 1 8 Applicable tubing Applicable tubing 1 4 3 16 16 3 5 32 1 4 1 4 5 16 3 8 3 8 1 2 1 2 3 16 16.5 3.5 1 4 17 4.6 18.5 6 5 16 3 8 21 7 Note) D: Max. diameter Male Elbow: KQ2L Connection thread UNF NPT 10-32 UNF Applicable tubing O.D.

VQZ1000/2000/3000

L dimension 135.5 9 123 8 160.5 11 148 10 185.5 13 173 12 210.5 15 198 14 235.5 17 223 16 19 248 18 20 260.5 285.5 21 273 No.

CQS

to 100 75 to 200 75 to 300 5 to 30 5 to 30 5 to 50 5 to 50 Bore (mm) 12 16 20 25 FZ FX FV FT FD 55 55 60 64 45 45 48 52 25 30 39 42 5.5 5.5 8 8 4.5 4.5 6.6 6.6 CDQSG Bore size SCQS Bore size , #4 (#4+#11+#13) (All dimensions are common between standard stroke and long stroke except "A", "B", "C", "L" and "L1".)

LEC-OM02704CN

PA12 P A 11 PA12 P A 11 PA12 15 46 15 1.

CQS

9.5 0.5 11 9.5 26.5 ( ): Denotes the values of D-A93.

HRX-OM-S004

Air cooled type only Fig. 8-10 Positions of danger warning label Fig. 8-11 Positions of danger warning label 8.6 Types of Hazard Labels (HRS -40/46) HRS Series 8-16 HRX-OM-S004 Chapter 8 Documents 8.7 Standards This product complies with the standards shown below: Table 8-7 Standards Standard Model CE Mark EMC Directive 2014/30/EU HRS--40HRS--46Machinery Directive 2006/42/EC NRTL E112803(

Table of Contents

50 70 93 44.5 84 16 303 11 6.4 115 3.3 277 43 20 191 11 20 50 98 70 84 44.5 11 6.4 117.5 16 3.3 316 280 46 20 196 11 20 98 50 70 44.5 84 13 319 11 6.4 117.5 3.3 Note 1) For AC20 only, the position of the pressure gauge is above the center of the piping.

ZP

-57 58 Series ZP Vacuum Pad/Components Refer to page 13-11-62 to 13-11-64 for part numbers of e to y.

7ND9071en

When ordering spare parts, always include the following information: Valve controller type designation and serial number from the ID plate The code of this manual, the part number, the part name and quantity required 42 7 ND90 71 en 12 DRAWINGS AND PARTS LISTS 12.1 Exploded view ND9100, ND9400, ND7100 100 107 110 109 228 39 223 217 219 42 218 215 220 210 44 19 43 18 139 11 120 47 49 222

Table of Contents

For pipe fitting 4B through 6B Applicable fittings For pipe fitting 3/4B through 3B Welding Welding Piping B Reducing tees B 1 1 x 1 x 1 24 or more 11/4 11/2 11/4 x 11/4 x 1 1B socket 11/2 x 11/2 x 1 cut in half 2 x 2 x 1 2 21/2 x 21/2 x 1 21/2 3 x 3 x 1 3 Pipe 4B through 6B Reducing tees B Socket Pipe : JIS B 2301 : JIS B 2302 : JIS B 3452 Without flash 16-12-8 4 Paddle Style Flow Switch

CLA

aize (mm) 40 550 63 80 9 12 80 42 100 51 216 43 11.2 59 224 ~6 20 27 % 42 11 20 45 153 8 60 30 ~ 46 10 21 50 168 0 70 9 12 90 50 11 0 58 238 52 11 .2 66 ""246 y. ~ Siroke 13.5 18 130 76 160 71 297 65 12.5 60 ~ 13.5 18 150 92 180 72 316 65 14.0 81 ~ 11 .5 15 105 59 130 58 255 52 11.2 66 0/. 16 31 ~ 48.5 13 23 60 182 0 86 37 ~. 55 15 23 70 208 0 102 1 14 40 \; 56.5 15 25 80 226 0 116 100

CY1

36 80 35 60 27.5 61 22.5 6.0 8 CY1B40 6 55 M5 92 40 M6 x 1.0 9.5 41 26 70 6.0 28.5 8 71 CY1B50 65 8 40 M8 x 1.25 M6 110 35 86 11 6.0 35 49 11 87 CY1B63 80 M8 x 1.25 M6 10 50 100 18 42 57 122 101 36 7.0 11 Note 1) Dimension F provides a clearance of 1mm between the body and the floating joint, but does not consider dead weight deflection of the cylinder tube, etc.

Battery-less

Brown 12 Black 13 Red 7 Black 6 Orange 9 Black 8 Yellow 11 Black 10 Black 3 Robotic cable A B-2 A A-2 B B-3 B A-3 SD+ (RX) B-4 SD (TX) A-4 Signal Connector C terminal no.

Proposals for Energy Saving

depth 8 14 depth 10.5 17.5 depth 13.5 17.5 depth 13.5 5.5 5.5 5.5 5.5 6.6 9 11 11 11 0 0.052 0 0.062 0 0.062 0 0.062 0 0.074 28 35 35 43 59 10.5 15 16 23 Note 1) Dimensions other than above are the same as the standard double acting single rod type.

VQ7-6/7-8

800) 258-9200-www.stevenengineering.com Y(PE) port 1/8 153(166) 141(154) SMC 108.5(121.5) 23(30) (A, B port) Y 12 50(63) 38(53) 5 3 32(42) 38(53) 23(30) 1 2-3/8, 1/2, 3/4 3/8, 1/2, 3/4 R1, R2 port 2-3/8, 1/2, 3/4 X(PE) port 1/8 P port 30(42) 30(42) 10 (11) A, B port ( ): 3/4 2 position double : VQ7-8-FG-D double (Reverse pressure): VQ7-8-YZ-D 3 position closed center : VQ7-8-FHG-D exhaust

Table of Contents

Series AS-FG Speed Controller with One-touch Fittin Stainless Series . 5 5 6 7 9 11 11 11 11 12 13 13 13 15 15 16 16 16 17 17 18 19 21 22 22 23 24 25 27 27 27 29 30 31 31 31 32 34 35 35 35 36 36 37 37 37 38 38 39 39 39 41 42 43 43 43 44 45 46 46 Specifications. How to Order . Construction. Dimensions . Series AS-FG Speed Controller with One-touch Fittings Stainless Series In-line Type.