smcmaintenancepartslist

Plate mount bolt tightening torque (kgfcm) Width across flat (mm) 5 Bore size (mm) Retaining ring size 12 RTW-13 14 16 RTW-18 6 34 20 RTW-22 8 52 25 RTW-26 10 88 q w 32 RTW-34 14 220 40 RTW-42 14 220 Not to hurt 50 RTW-52 17 440 63 RTW-65 17 440 80 RTW-82 22 1,240 100 RTW-102 27 2,000 Removal of End Lock (With End Lock) 1.

CG5-S

17 212 100 to 1500 40 37 41 125 60 30 29 20 71 16 M12 x 1.75 10 26 14 70 83 6 120 160 8 M26 x 1.5 100 1/2 131 30 15 216 110 Foot brackets and plug bolts are installed before shipment from factory.

Cylinder with Lock Series MNB

1/8 4 19.5 to 500 40 35 10 30 22 8 52 104 38 10 14 16 13 14 16.5 63 12 91 52.5 1/8 4 14 27 to 500 50 40 12.5 35 27 11 65 120.5 46.5 14 20 20 14 15.5 19 75 15 104.5 58.5 1/4 5 18 32 to 600 63 45 17.5 35 27 11 75 134.5 56.5 14 20 20 14 16.5 23 90 12 119.5 68 1/4 9 18 32 to 600 80 45 22 40 32 13 95 169 72 22 30 25 20 19 33 102 18 150 81 1/4 11.5 22 37 to 750 100 55 25 40 41 16 114 189 89 22

ZP

Width across flats 12 r Buffer stroke t Vacuum inlet y Connection thread D C B 10 86 52 23 20 124 62 51 30 134 72 40 170 82 77 50 180 92 Width across flats 7 10 41 25 2.5 6 M10 x 1 14 3 10 87 53 23 20 125 63 51 30 135 73 40 171 83 77 50 181 93 N4 N6 U4 U6 A10 N S U F GN GS 16 42 26 E2 J K ZP Y D 10 93 59 23 Construction p. 118 14 3 20 131 69 51 30 141 79 40 177 89 77 50 187 99 25 48 30 3.5

Profile Design ISO/VDMA Air Cylinder Series CP95

E B1 B2 B3 TG1 T L1 L3 I1 I2 FL H d1 d2 d3 CN XD 32 45 14 34 3.3 32.5 3 11.5 41 5 5.5 22 10 30 10.5 6.6 10 142 40 55 16 40 4.3 38 4 12 48 5 5.5 25 10 35 11 6.6 12 160 50 65 21 45 4.3 46.5 4 14 54 5 6.5 27 10 40 15 9 16 170 63 75 21 51 4.3 56.5 4 14 60 5 6.5 32 12 45 15 9 16 190 80 95 25 65 4.3 72 4 16 75 5 10 36 16 45 18 11 20 210 100 115 25 75 6.3 89 4 16 85 5 10 41 16 55 18 11 20 230 Mounting

MB

19 24 26 26 36 20 22 28 40 40 46 30 40 50 60 60 92 M10 x 1.25 M14 x 1.5 M18 x 1.5 M22 x 1.5 M26 x 1.5 M27 x 2.0 12 16 19 24 34 34 34 M10 x 1.25 M14 x 1.5 M18 x 1.5 M22 x 1.5 M26 x 1.5 M27 x 2 10 11 14 20 20 27 16 19 24 34 34 42 10 10 14 22 22 25 10 10 14 22 22 25 14 14 20 30 30 32 14 14 20 30 30 32 28 28 40 60 60 64 50 12.5 CS1 64 16.5 80 23.5 C76 80 23.5 119 28.5 Note) For a double clevis

Series CQS Compact Cylinder Compact Type ø12, ø16, ø20, ø25

21.5 28 34 41 6 6 6 8 16 21 25 30 6.3 12 10.3 18 7 10 11.5 14 3/16 3/16 +0.002 0 +0.002 0 +0.002 0 +0.002 0 +0.002 0 +0.002 0 #8-32UNC 3/16 3/16 #10-32UNF 5/16 5/16 1/4-28UNF 3/8 3/8 Knuckle pin and snap ring are contained.

Table of Contents

10.5 9.5 10.5 10 11 13 13 14 0.004 0.012 0 0.036 4 9 15.5 0.5 29 22 8 14 1 5 9 24 3.5 M3 x 0.5 17 3 25 31 41 0.004 0.012 0 0.043 5 12 34 25 9 18 1.5 29 3.5 M3 x 0.5 21 3 29 36 48 15.5 0.5 M3 x 0.5 6 10 0.004 0.012 0 0.043 6 14 M5 x 0.8 42 34.5 10 20 1.5 36 4.5 M4 x 0.7 26 4 36 44 59 M4 x 0.7 17 0.5 7 10 0.005 0.014 0 0.043 M5 x 0.8 8 16 1 50 47.5 13 22 43 5.5 M5 x 0.8 29 42 52 69 M5

ZP

13 14 1 ZPY16CT 16 17 Dimensions of D, E are the same.

Intrinsically Safe Valve

53-SS5Y5-41-05-01 1 set (Type 41, 5 station manifold base part no.) 53-SY5240-LL3 2 sets (Double solenoid part no.) 53-SY5140-LL3 2 sets (Single solenoid part no.)

25

0.5 0.5 IZD IZE 11 13 8.8 8.8 6.5 7.8 10.2 10.2 IZH 13 14 60 7 7.7 Detection hole 1 6 10.5 2 x R3.3 10 61 (7.5) Auto balance sensor [High accuracy type]/IZS31-DG 2 x 3.4 2 x 3.4 Amplifier Head 3500 1500 0.2 0.2 20 4.8 6.6 4.8 69 95 23 78 98 14.5 5 8.8 7.8 10.2 10.2 13 Sensor 60 7.7 71 12 1 6 14 2 x Counterbore 6.6, Depth 5.7 (Height of thread bearing surface 8.8) 433 IZS40/41/42 Series Dimensions

Basic Type/Direct Mount Type

45 51 HR 17 24 30 36 41 51 62 80 90 HS 6 5 8.5 7.5 6.5 7 8 9 9.5 K 7 9 14 11 15 13 15 25 24 G 3 4 5 6 6 7 7 8.5 8.5 HA 17 24 30 36 41 52 62 80 92 HT 10.5 14 17 24 23.5 29 36 45 51 J x E M4 x 0.7 x 6 M4 x 0.7 x 6 M5 x 0.8 x 7 M6 x 1 x 8 M6 x 1 x 8 M8 x 1.25 x 10 M8 x 1.25 x 10 M10 x 1.5 x 15 M10 x 1.5 x 15 GP 20 27 33 39 44 55 65 83 95 HB 10.5 14 17 21 23.5 29 36 45 51 B 6.5 8 9.5 9.5 11

Integrated Controller

Weight [g] Auto switch model D-M9NE(V) D-M9PE(V) D-M9BE(V) 0.5 m (Nil) 8 7 1 m (M)1 14 13 Lead wire length 3 m (L) 41 38 5 m (Z)1 68 63 1 The 1 m and 5 m options are produced upon receipt of order.

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

Refer to Semi-standard on page 562 for details. 16 SOL.B 18 17 14 16 15 SOL.A () () (+) (+) 12 Station 3 14 13 SOL.B Triangle mark indicator position 10 12 11 SOL.A () () (+) (+) 8 Station 4 9 10 SOL.B 6 8 7 SOL.A () () (+) (+) 19 Station 5 SOL.B 6 5 17 Note) When using the negative common specifications, use valves for negative common.

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

Refer to Semi-standard on page 562 for details. 16 SOL.B 18 17 14 16 15 SOL.A () () (+) (+) 12 Station 3 14 13 SOL.B Triangle mark indicator position 10 12 11 SOL.A () () (+) (+) 8 Station 4 9 10 SOL.B 6 8 7 SOL.A () () (+) (+) 19 Station 5 SOL.B 6 5 17 Note) When using the negative common specifications, use valves for negative common.

Round Type Hydraulic Cylinder

12 19 23.5 B 13 15 14 19.5 A 14.5 12.5 19.5 24 B 13.5 15.5 14.5 20 B 7.5 9.5 8.5 14 B 10.5 12.5 11.5 17 B 7 9 8 13.5 20 25 32 40 Note) When setting an auto switch, be sure to check its operation before adjusting.

REA/REB

2 -Rc 1/4 L 0 -0.2 NA 33 14 Max.

•

F:M5.X O.8 I F:M6 x 1 D E t3 I D." ~ ' G 1J 2O 8 3 19 19 25 ' 45 14 3 3.5 24 15 1.7 I ZPT20~ 20 23 8 12 4 40 ZPT02U 2 2.6 1.2 ZPT04U ' 4 . .. a:.e 1.6 ZPT06U 6 7 08 '9 ' 12 ZPT2Sg . 25 28 I 14 3 .8 4 25 , 45 , ''24 '' . '5 : .

3 Port Solenoid Valve Metal Seal/Rubber Seal, Base Mounted Series VQZ100/200/300 21

VQZ115-M VQ110-L 4-14-41

IDG

For flow characteristics, refer to pages 14-19-37 to 14-19-38 for external dimensions, refer to pages 14-19-41, 43, 45, and 47. 14-19-35 32 Series IDG Standard Specifications/Unit (Type M, Type V) [Standard dew point: 60C] Model Standard dew point: 60C IDG75SM IDG100SM IDG60SM IDG60SV IDG75SV IDG100SV AFM40 AFD40 AR40 Micro mist separator Mist separator Component equipment Regulator (Type