PF-OMN0011_C

SI SI Ta ON-OFF Na ON 0 Ha -14No.PF-OMN0011CN-C M38 L(2 ) (ZS-26-B) (ZS-26-01) ZS-26-01 1 (ZS-26-B) 190 2,1/41/2 72 2, , -15No.PF-OMN0011CN-C , 1 DC() 2 N.C.

EXxx-OMU0020CN

Valve diagnostics 1 . 5-4 Valve diagnostics 1 Bit 0 Valve 0, 1 diagnostics 01() 1 Valve 2, 3 diagnostics 01() 2 Valve 4, 5 diagnostics 01() 3 Valve 6, 7 diagnostics 01() 4 Valve 8, 9 diagnostics 01() 5 Valve 10, 11 diagnostics 01() 6 Valve 12, 13 diagnostics 01() 7 Valve 14, 15 diagnostics 01() 5.1.1.4.

Vacuum System Peripherals:

R L B 01 1 Nil F G Rc 1 8 ... ...

Title not found

\u/ (6oomm) Lead wire length :12 inch (300mm) L: L type plug connector with lead wire H"rt#'" mhrin*n" : 12 inch | ll-l.r :12 inch (3oomm) "!

Process Pump

Mount with this surface up FLUID OUT Rc, NPT, G 1/8 84 72 60 41 7.5 45 2 x 4.5 Mounting hole Manual override pin 66 16 16 Foot (Option) 3 2 x M4 x 0.7 Female mounting threads Thread depth 6 12 Silencer: AN120-M5 (Option) 8 AIR SUP Rc, NPT, G 1/8 16 Lead wire length: Approx. 570 mm FLUID IN Rc, NPT, G 1/8 8 18 12 11 11 AIR EXH M5 x 0.8 Thread depth 8 Air Operated PB1013A 18 1.5 10 Mount with

ZR

Rc 1/8 P port (Air supply port) 2 2 1 Ejector Bracket B Bracket B 13-3-12 12 Series ZR Large Size Vacuum Module: Ejector System Vacuum Pressure Switch Unit/Pressure Switch for Vacuum: ZSE2-0R-15 Specifications Quick response: 10 mS Vacuum pressure switch part no.

Fieldbus system EtherNet/IP TM compatible SI Unit IO-Link Master Unit

Bit line Bit Details 7 6 5 4 3 2 1 0 Time base Multiplier Bit 0 to 5: Multiplier (0 to 1) Bit 6 to 7: time base (00, 01, 10) Calculation condition Time base Time base value Calculation Cycle time 00 0.1 ms Multiplier x Time base 0.4 ms to 6.3 ms 01 0.4 ms 6.4 ms + multiplier x Time base 6.4 ms to 31.6 ms 10 1.6 ms 32.0 ms + multiplier x Time base 32.0 ms to 132.8 ms -78No.EX-OMX1011 Data

Speed Controller with

25.5 28.9 30.2 33.4 34.5 38.6 39.4 41 51.6 52.6 12.7 9.1 15.4 8.8 3.3 5.5 11 13.7 12.7 13.7 17 18 17 18 21 21 22 17 10.5 12.6 3.3 5.5 10 12 4.3 7.8 14 17 22.8 4.3 8 19.3 22 25 12 20.5 4.3 8 25 28 33 14 26.2 Note) Reference dimensions Proper tightening torque for a lock nut is shown in the below table.

Secondary Batteries

and up) SUS304 (6 and 8) Aluminum (12 and up) SUS304 (6 and 8) Aluminum (12 and up) Material Piston Anodized (12 and up) Chromate (12 and up) Electroless Ni-plated (6 and 8) Chromate (12 and up) Treatment SUS304 SUS303, SUS304 Iron SUS304 SUS303 Iron Brass Electroless Ni-plated Brass Electroless Ni-plated Iron Material Air slide table MXQ Piston spacer Treatment Material Packing support

3 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported VQZ100/200/300

L 310.5 23 298 22 335.5 25 323 24 360.5 27 348 26 385.5 29 373 28 410.5 31 398 30 435.5 33 423 32 460.5 35 448 34 485.5 37 473 36 39 498 38 510.5 EXH port silencer Silencer is installd in the EXH port. 63 38 22 Dimensions 13 Silencer P/N Model VQZ100 VQZ200 VQZ300 AN110-01 AN110-01 AN200-02 AN200-02 AN110-01 2.10-17 Series VQZ Body Ported Option Inch Size One-touch Fittings and Optional Thread

ARM10/11

VE 3 56 SMC AXT100-DR-8 110.5 28 AXT100-DR-10 135.5 SMC SMC VY1 K K P P C C U U O O S S L L H H AXT100-DR-12 160.5 8 AXT100-DR-14 185.5 12 12 G 11.5 AXT100-DR-16 210.5 AXT100-DR-19 248 PPA AXT100-DR-21 273 AXT100-DR-23 298 AL 81 AXT100-DR-25 323 AXT100-DR-28 360.5 33.5 14 16 OUT IN OUT IN ARM11BC2-08 Handle position: Bottom L2 L2-10.5 L1=(28 x n)+36 52.5 18 28 39 28 12 12 5.3 3 5.5 SMC SMC

ARM10/11

VE 3 56 SMC AXT100-DR-8 110.5 28 AXT100-DR-10 135.5 SMC SMC VY1 K K P P C C U U O O S S L L H H AXT100-DR-12 160.5 8 AXT100-DR-14 185.5 12 12 G 11.5 AXT100-DR-16 210.5 AXT100-DR-19 248 PPA AXT100-DR-21 273 AXT100-DR-23 298 AL 81 AXT100-DR-25 323 AXT100-DR-28 360.5 33.5 14 16 OUT IN OUT IN ARM11BC2-08 Handle position: Bottom L2 L2-10.5 L1=(28 x n)+36 52.5 18 28 39 28 12 12 5.3 3 5.5 SMC SMC

V

U06 6 7 2.5 7 12 0.8 ZP08U U08 8 9 2.5 7 12 1 Part No Type G C B D E F Y ZP10U U10 10 12 4 13 7.7 12 3 ZP10D D10 10 12 4 13 10.7 15 6 ZP13U U13 13 15 4 13 7.7 12 3 ZP16D D16 16 18 4 13 11.7 16 7 H Y Part No Type A B C D E F G ZP16U U16 16 18 4 13 8.2 12.5 3.5 ZP25D D25 25 28 4 15 15.5 20 10 ZP06B B06 6 7 2.5 7 13 3.3 9.1 4 ZP20U U20 20 23 4 15 9.5 14 4 ZP40D D40 40 43 7 18 24.2 29 17 ZP08B

Compact Cylinder with Solenoid Valve/

Proper Mounting Position (Detection at Stroke End) and Mounting Height 32, 40, 50, 63 D-M9/D-M9W/D-A9 D-M9V/D-M9WV/D-A9V Hs B W A A A B (mm) D-A9V D-A9 D-M9 D-M9W D-M9V D-M9WV A B A B Bore size (mm) W Hs A B W A B Hs 32 40 50 63 12 [17] 9 1 12 [17] 9 29 8 [13] 5 3 (0.5) 8 [13] 5 27 16 11.5 1.5 16 11.5 32.5 12 7.5 5.5 (3) 12 7.5 30.5 14 <19> 14.5 4.5 14 <19> 14.5 42 10 <15> 10.5 8.5 (6)

VCS

Valve model Port size VCS21 VCW20-12-01A 1/8, 1/4 34 40 25 30 12.8 12.8 5 4.5 6 13 VCW30-12-02A 1/4, 3/8 42 52 30 40 19 19 6 5.5 7 19 VCS31 VCW30-12-04A Note 1) 1/2 48 56 36 44 23 23 6 5.5 7 23 VCW40-12-02A 1/4, 3/8 42 52 30 40 23 23 6 5.5 7 19 VCW30-12-04A Note 1) 1/2 VCS41 48 56 36 44 23 23 6 5.5 7 23 VCW40-12-06A 3/4 56 65 44 53 28.2 28.2 6 5.5 7 26 2 mounting screws (for mounting bracket

PSxx-OMM0006CN

N01 R1/8 (M5 ) NPT1/8 (M5 ) C3602() O HNBR 45 g 46 g -62No.PS-OMM0006CN-E (M8(3 )71 ) 01/N01 5 4 M5/C4/C6 M5 5 -63No.PS-OMM0006CN-E W1/WF1 4 ( ISO228-1) -64No.PS-OMM0006CN-E A 01/N01 W1/WF1 -65No.PS-OMM0006CN-E B W1/WF1 -66No.PS-OMM0006CN-E D 01/N01 W1/WF1 -67No.PS-OMM0006CN-E 01/N01 W1/WF1/M5/C4/C6 -68No.PS-OMM0006CN-E + 01/N01 W1/WF1/M5/C4/C6 -69No.PS-OMM0006CN-E

Compressed Air Preparation Filter

AM20 AM30 AM40 12 16 14 Inlet pressure 0.3 MPa Inlet pressure 0.3 MPa Inlet pressure 0.3 MPa 14 12 10 Inlet pressure 0.5 MPa 12 Inlet pressure 0.5 MPa 10 Inlet pressure 0.5 MPa 8 Pressure drop [kPa] Pressure drop [kPa] Pressure drop [kPa] 10 Max. flow capacity line 8 Max. flow capacity line Max. flow capacity line 8 6 6 6 4 4 4 2 2 Inlet pressure 0.7 MPa 2 Inlet pressure 0.7 MPa Inlet pressure

VXZ

PA 02 200 VAC 50/60 Hz 01 100 VAC 50/60 Hz 08 48 VAC 50/60 Hz 01 02 03 04 07 08 05 06 002 Applicable valve model No. 13 24 VAC 50/60 Hz VXZ22 VXZ23 03 110 VAC 50/60 Hz 23 440 VAC 50/60 Hz PAX 003 AC 04 220 VAC 50/60 Hz 51 6 VDC Coil combination code 05 24 VDC 53 48 VDC PB 06 12 VDC 55 100 VDC 56 110 VDC (Refer to the table below.) 07 240 VAC 50/60 Hz DC Note) The voltage codes

Series VCL

Valve model Port size VCL2 VCW20-12-01 1/8, 1/4 34 40 25 30 12.8 12.8 5 4.5 6 13 VCW30-12-02 1/4, 3/8 42 52 30 40 19 19 6 5.5 7 19 VCL3 VCW30-12-04 1/2 48 56 36 44 23 23 6 5.5 7 23 VCW40-12-02 1/4, 3/8 42 52 30 40 23 23 6 5.5 7 19 VCW30-12-04 VCL4 1/2 48 56 36 44 23 23 6 5.5 7 23 VCW40-12-06 3/4 56 65 44 53 28.2 28.2 6 5.5 7 26 Bracket material: Stainless steel 3 Series VCL Direct Operated

Series VCS

Valve model Port size VCS21 VCS20-12-01 1/8, 1/4 34 40 25 30 12.8 12.8 5 4.5 6 13 VCS30-12-02 1/4, 3/8 42 52 30 40 19 19 6 5.5 7 19 VCS31 VCS30-12-04 1/2 48 56 36 44 23 23 6 5.5 7 23 VCS40-12-02 1/4, 3/8 42 52 30 40 23 23 6 5.5 7 19 VCS30-12-04 VCS41 1/2 48 56 36 44 23 23 6 5.5 7 23 VCS40-12-06 3/4 56 65 44 53 28.2 28.2 6 5.5 7 26 Bracket material: Stainless steel 3 Series VCS Direct Operated